Probe clamping and positioning device and probe station

Abstract

The utility model discloses a kind of probe clamping positioning device and probe platform, including clamping mechanism and positioning mechanism, clamping mechanism is installed in the lower side of positioning mechanism, for clamping blade probe;Positioning mechanism includes rotating assembly and radial positioning assembly, rotating assembly is installed above radial positioning assembly, rotating assembly includes rotation control unit, main shaft and angle digital display unit, rotation control unit controls main shaft and drives clamping mechanism to rotate, and simultaneously drives angle digital display unit to rotate, display rotation angle, angle positioning is carried out;Radial positioning assembly controls clamping mechanism radial movement, radial positioning assembly includes displacement digital display unit, displacement digital display unit is installed in the side of clamping mechanism by linear displacement unit, display radial movement distance, radial positioning is carried out. Through the synergic effect of rotating assembly and radial positioning assembly, in combination with angle digital display unit and displacement digital display unit, realize the two-way accurate adjustment of probe angle and radial position, improve work efficiency.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor testing technology, and in particular relates to a probe clamping and positioning device and a probe station. Background Technology

[0002] When validating multi-project wafers (MPWs) or performing repeatability tests on samples, laboratories commonly use manual probe stations due to cost and feasibility considerations. However, this method is inefficient: the testing process requires frequent manual adjustments to the probe position, and the limited stage area prevents pre-positioning or parallel testing of multiple probes. When operating a manual probe station, the probe must be lifted before moving it to prevent scratching the sample. During this time, the probe may move out of the field of view due to changes in microscope focal length. When moving to the next probe point, it is difficult to control the probe's actual position. Each time the probe is pressed down at a new probe point, its position must be readjusted to align it near the target point. Since validation tasks are often time-sensitive, samples exposed to air for extended periods are prone to oxidation or contamination, increasing the risk of failure. As non-production facilities, laboratories often test unique or small-batch samples, requiring even faster testing cycles. While automated probe stations and customized probe cards can improve efficiency, they are costly and have long production cycles, failing to meet the laboratory's need for low-cost, rapid response. When relying on a manual probe station, the main effort is spent finding the target point under the microscope and manually controlling the position and movement of the probe station, resulting in a very low percentage of actual effective testing time.

[0003] To address the aforementioned issues, there is an urgent need for a probe clamping and positioning device to improve the efficiency of probe card manufacturing and overall testing. Utility Model Content

[0004] The purpose of this invention is to solve all or part of the aforementioned problems by providing a probe holder and positioning device. Through the coordinated action of a rotating component and a radial positioning component, combined with an angle digital display unit and a displacement digital display unit, precise adjustment of the probe's angle and radial position is achieved. By combining the positioning method of relative displacement after initial zero-point positioning with feedback of rotation angle and radial displacement data from the angle and displacement digital display units, adjustment errors are reduced, and the operation process is simplified. The repeated initial positioning of the probe is avoided, improving work efficiency.

[0005] This invention provides a probe holder and positioning device, comprising a clamping mechanism and a positioning mechanism. The clamping mechanism is mounted below the positioning mechanism and is used to clamp a blade-type probe. The positioning mechanism includes a rotating component and a radial positioning component. The rotating component is mounted above the radial positioning component and includes a rotation control unit, a main shaft, and an angle digital display unit. The rotation control unit controls the main shaft to rotate the clamping mechanism and simultaneously rotates the angle digital display unit to display the rotation angle for angle positioning. The radial positioning component controls the radial movement of the clamping mechanism and includes a displacement digital display unit mounted on one side of the clamping mechanism via a linear displacement unit to display the radial movement distance for radial positioning. Through the synergistic effect of the rotating component and the radial positioning component, combined with the angle and displacement digital display units, precise adjustment of the probe angle and radial position is achieved, improving work efficiency.

[0006] A mounting bracket is installed on the main shaft, and the angle digital display unit is fixedly mounted on the mounting bracket, rotating synchronously with the main shaft. Synchronous rotation of the angle digital display unit with the main shaft avoids transmission errors and ensures the accuracy of the angle display.

[0007] The main shaft is equipped with a resistance bushing. This reduces the shaking or vibration of the main shaft during rotation, lowers mechanical wear, ensures a smooth and accurate probe positioning process, and extends the service life of the main shaft and related rotating components.

[0008] The rotation control unit uses an adjustment knob for manual control of the rotation angle. It can operate stably in various working environments and is suitable for situations requiring frequent fine adjustments.

[0009] The rotation control unit is driven by a motor and automatically controls the rotation angle. This achieves high-resolution angle control, ensuring the accuracy and repeatability of rotational positioning.

[0010] It also includes a fixing bracket, which is mounted on the main body shaft to fix the main body shaft and adjust the initial height. The fixing bracket provides stable support, and by setting the initial height of the probe through the bracket, subsequent fine-tuning time is reduced, improving operational efficiency.

[0011] The fixed support includes a fixed bushing and a bracket, which are fixedly connected to the fixed bushing. A base is provided at the bottom of the bracket, and the fixed bushing is mounted on the main shaft. The initial height can be adjusted by adjusting its position on the main shaft. The rigid connection between the bracket and the fixed bushing, combined with the bottom base, enhances overall stability; it allows for flexible adjustment of the probe's initial height, adapting to the needs of different test samples and improving the equipment's applicability.

[0012] The clamping mechanism includes a clamping drive and a replaceable clamping assembly. The clamping drive drives the replaceable clamping assembly to perform clamping. The clamping assembly can be configured as any one of a single-pin clamping block, a multi-pin clamping block, or a probe card clamping block. Different clamping assemblies can be replaced according to actual needs to ensure accurate clamping and assist probe welding.

[0013] The blade-type probe includes a blade-type housing and a probe, the probe being detachably installed in the blade-type housing. This allows for testing with the detachable probe, reducing equipment downtime.

[0014] A probe station is also provided, employing the aforementioned probe clamping and positioning device, and further including a probe holder. The probe holder has a welding area with a probe groove. The probe clamping and positioning device clamps a blade-type probe and positions it within the probe groove, assisting in the welding and fixing of the blade-type probe. The probe clamping and positioning device accurately guides the blade-type probe into the probe groove, improving operational efficiency.

[0015] Compared with existing technologies, the advantages of this invention are: through the synergistic effect of the rotating component and the radial positioning component, combined with the angle digital display unit and the displacement digital display unit, precise adjustment of the probe angle and radial position can be achieved; combined with the positioning method of relative displacement after initial positioning, the digital display unit provides real-time feedback of rotation angle and displacement data, reducing manual adjustment errors and simplifying the operation process. It avoids the step of repeatedly initial positioning the probe, improving work efficiency; and it can be adjusted manually or automatically to adapt to different operating environments. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the specific embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a first-view structural schematic diagram of the probe clamping and positioning device provided by this utility model.

[0018] Figure 2 This is a second-view structural diagram of the probe clamping and positioning device provided by this utility model.

[0019] Figure 3 This is a third-view structural diagram of the probe clamping and positioning device provided by this utility model.

[0020] Figure 4 This is a fourth-view structural diagram of the probe clamping and positioning device provided by this utility model.

[0021] Figure descriptions: 1-Clamping mechanism, 11-Clamping drive, 12-Replaceable clamping assembly, 2-Positioning mechanism, 21-Rotation assembly, 211-Rotation control unit, 212-Main shaft, 213-Angle digital display unit, 214-Fixed frame, 22-Radial positioning assembly, 221-Displacement digital display unit, 222-Linear displacement unit, 3-Fixed bracket, 31-Fixed bushing, 32-Bracket. Detailed Implementation

[0022] The technical solutions in specific embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0023] Example 1 The following describes a probe clamping and positioning device provided in this embodiment, such as... Figure 1 As shown, the device includes a clamping mechanism 1 and a positioning mechanism 2. The clamping mechanism 1 is mounted below the positioning mechanism 2 and is used to clamp the blade probe. The positioning mechanism 2 includes a rotating component 21 and a radial positioning component 22. The rotating component 21 is mounted above the radial positioning component 22 and includes a rotation control unit 211, a main shaft 212, and an angle digital display unit 213. The rotation control unit 211 controls the main shaft 212 to rotate the clamping mechanism 1 and simultaneously rotates the angle digital display unit 213 to display the rotation angle for angle positioning. The radial positioning component 22 controls the radial movement of the clamping mechanism 1. The radial positioning component 22 includes a displacement digital display unit 221, which is mounted on one side of the clamping mechanism 1 via a linear displacement unit 222 to display the radial movement distance for radial positioning. In this embodiment, the linear displacement unit 222 uses a linear guide rail. Through the synergistic effect of the rotating component and the radial positioning component, combined with the angle digital display unit and the displacement digital display unit, precise adjustment of the probe angle and radial position is achieved, improving work efficiency.

[0024] A mounting bracket 214 is installed on the main shaft 212, and the angle digital display unit 213 is fixedly installed on the mounting bracket 214 and rotates synchronously with the main shaft 212, so that the angle digital display unit 213 can accurately display the rotation angle; a resistance bushing is provided inside the main shaft 212 to ensure that the probe positioning process is stable and accurate.

[0025] The rotation control unit 211 uses an adjustment knob to manually control the rotation angle, or it can be driven by a motor to automatically control the rotation angle, adapting to different operating environments.

[0026] It also includes a fixed bracket 3, which is mounted on the main shaft 212, fixing the main shaft 212 and adjusting the initial height. The fixed bracket 3 includes a fixed bushing 31 and a bracket 32, which are fixedly connected to the fixed bushing 31. The bottom of the bracket 32 ​​is provided with a base, and the fixed bushing 31 is located on the main shaft 212. The initial height is adjusted by adjusting its position on the main shaft 212. This flexible adjustment of the probe's initial height adapts to the needs of different test samples and improves the applicability of the equipment.

[0027] The clamping mechanism 1 includes a clamping drive 11 and a replaceable clamping assembly 12. The clamping control unit 11 drives the replaceable clamping assembly 12 to perform clamping. The clamping assembly 12 can be configured as a single-pin clamping block, a multi-pin clamping block, or a probe card clamping block. It can be selected and replaced according to actual needs. In this embodiment, a single-pin clamping block is used, which includes two clamping arms arranged opposite to each other. The clamping drive 11 controls the two clamping arms to open and close to clamp the probe and assist in probe welding.

[0028] The blade probe includes a blade housing and a probe, which is detachably mounted in the blade housing. This allows for testing with detachable probes, reducing equipment downtime.

[0029] Example 2 This embodiment provides a probe station that employs the probe clamping and positioning device described in Embodiment 1. It also includes a probe card with a welding area and a probe slot. The probe clamping and positioning device clamps a blade-type probe and positions it within the probe slot, assisting in the welding and fixing of the blade-type probe. By integrating a high-precision clamping and positioning device with a probe card featuring a probe slot, rapid and accurate welding positioning of the blade-type probe is achieved. It is compatible with both manual and automatic adjustments, improving production efficiency and reducing operational difficulty.

[0030] The working process of this utility model is as follows: The device is moved to the center area of ​​the probe card probe area. The clamping drive 11 controls the first clamping arm 12 and the second clamping arm 13 to clamp the blade probe. The blade probe is selected at any point for welding, and the initial position is used as the zero point reference position. The angle digital display unit 213 and the displacement digital display unit 221 are zeroed to complete the zero point calibration. The angle and radial distance of the next welding position are determined. The clamping mechanism 1 is moved by the rotating component 21 and the radial positioning component 22. The rotation angle and radial displacement data are fed back by the angle digital display unit 213 and the displacement digital display unit 221. The position is located at the coordinate point and locked. The probe angle is determined. The probe welding area is fixed with solder. The above process is repeated to complete the welding of the required probe.

[0031] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A probe clamping and positioning device, characterized in that, The device includes a clamping mechanism (1) and a positioning mechanism (2). The clamping mechanism (1) is installed on the lower side of the positioning mechanism (2) and is used to clamp the blade probe. The positioning mechanism (2) includes a rotating component (21) and a radial positioning component (22). The rotating component (21) is installed above the radial positioning component (22). The rotating component (21) includes a rotation control unit (211), a main shaft (212), and an angle display unit (213). The rotation control unit (211) controls the main shaft (212) to drive the clamping mechanism (1) to rotate and simultaneously drives the angle display unit (213) to rotate, displaying the rotation angle and performing angle positioning. The radial positioning component (22) controls the clamping mechanism (1) to move radially. The radial positioning component (22) includes a displacement display unit (221). The displacement display unit (221) is installed on one side of the clamping mechanism (1) through a linear displacement unit (222) to display the radial movement distance and perform radial positioning.

2. The probe clamping and positioning device according to claim 1, characterized in that, A fixing frame (214) is installed on the main shaft (212), and the angle digital display unit (213) is fixedly installed on the fixing frame (214) and rotates synchronously with the main shaft (212).

3. The probe clamping and positioning device according to claim 1, characterized in that, The main shaft (212) is equipped with a resistance sleeve.

4. The probe clamping and positioning device according to claim 1, characterized in that, The rotation control unit (211) uses an adjustment knob to manually control the rotation angle.

5. The probe clamping and positioning device according to claim 1, characterized in that, The rotation control unit (211) is driven by a motor and automatically controls the rotation angle.

6. The probe clamping and positioning device according to claim 1, characterized in that, It also includes a fixed bracket (3), which is installed on the main shaft (212) to fix the main shaft (212) and adjust the initial height.

7. The probe clamping and positioning device according to claim 6, characterized in that, The fixed bracket (3) includes a fixed bushing (31) and a bracket (32). The bracket (32) is fixedly connected to the fixed bushing (31). The bottom of the bracket (32) is provided with a base. The fixed bushing (31) is located on the main shaft (212). The initial height is adjusted by adjusting the position on the main shaft (212).

8. The probe clamping and positioning device according to claim 1, characterized in that, The clamping mechanism (1) includes a clamping drive (11) and a replaceable clamping assembly (12). The clamping drive (11) drives the replaceable clamping assembly (12) to perform clamping. The replaceable clamping assembly (12) can be configured as any one of a single-pin clamping block, a multi-pin clamping block, or a probe card clamping block.

9. The probe clamping and positioning device according to claim 1, characterized in that, The blade probe includes a blade housing and a probe, the probe being detachably mounted in the blade housing.

10. A probe station, characterized in that, The probe clamping and positioning device according to any one of claims 1-9 further includes a probe card, the probe card is provided with a welding area, the welding area is provided with a probe groove, the probe clamping and positioning device clamps the blade probe and positions the probe into the probe groove, thereby assisting in completing the welding and fixing of the blade probe.

Images