A probe station

Abstract

The utility model discloses a kind of probe station, including microscope assembly, control box and probe clamping device, the microscope assembly, probe clamping device are all with control box communication;The microscope assembly includes control unit, electric drive device and microscope body, the electric drive device receives the instruction of the control unit and drives the microscope body moves;The control box stores the movement parameter of the microscope body, the probe clamping device clamps probe body, probe clamping device controls the probe body corresponding movement according to the movement parameter of the microscope body stored by the control box.The electric drive device is used to drive the movement of the microscope body, replacing manual operation, reducing the work intensity of manual operation, transferring the space of manual control microscope body to relatively safe space, improving work efficiency and operation safety.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor testing technology, and in particular relates to a probe station. Background Technology

[0002] In the field of microelectronics testing, manual probe stations are crucial equipment for chip characterization in laboratories. When performing multi-point testing, operators must frequently move the microscope manually to locate and observe different contact points, a tedious and inefficient process. Furthermore, manual operation greatly increases the risk of accidentally touching the probe during movement, causing probe wobble and height changes, which can lead to scratches on valuable samples or pads on the wafer, resulting in irreversible damage. This is particularly serious for advanced chips employing CUP (Circuit Under Pad) structures, as the probe can easily pierce their extremely thin dielectric layer, leading to circuit failure.

[0003] While fully automated probe stations can solve the above problems, they require custom-designed probe cards for specific chips, which are costly and have a production cycle of several weeks. This cannot meet the laboratory's need for low-cost, rapid testing of unique or small-batch samples. Therefore, most laboratories are still forced to rely on manual probe stations, with most of their energy spent on repetitive operations such as microscope spot finding and manual alignment during the testing process. The actual time spent on electrical testing is extremely low, affecting the efficiency of research and development and verification.

[0004] To address the aforementioned issues, there is an urgent need for a probe station to improve testing efficiency. Utility Model Content

[0005] The purpose of this invention is to solve all or part of the above-mentioned problems by providing a probe stage that changes the manual rotating arm structure of a microscope and uses an electric drive to replace manual operation, thereby reducing the workload of manual operation and improving work efficiency and operational safety. Through the controller, the probe can be synchronized with the microscope to move synchronously, quickly locate the probe placement position, and achieve the purpose of rapid probe position adjustment.

[0006] This invention provides a probe station, including a microscope assembly, a control box, and a probe clamping device. Both the microscope assembly and the probe clamping device communicate with the control box. The microscope assembly includes a control unit, an electric drive device, and a microscope body. The electric drive device receives commands from the control unit and drives the microscope body to move. The control box stores the movement parameters of the microscope body. The probe clamping device clamps the probe body and controls the corresponding movement of the probe body according to the movement parameters stored in the control box. This improves testing efficiency and accuracy, reduces the risk of sample damage due to human error, and provides an automated solution for small-batch, rapid-response testing in laboratories.

[0007] The electric drive device includes independent X-axis and Y-axis drive mechanisms. The Y-axis drive mechanism is mounted on the X-axis drive mechanism, and the microscope body is mounted on the Y-axis drive mechanism. This enables high-precision movement of the microscope body in a two-dimensional plane, ensuring positioning accuracy and stability.

[0008] The X-direction drive mechanism includes an X-direction power source and an X-direction moving module. The Y-direction drive mechanism is mounted on the X-direction moving module. The X-direction power source provides power to drive the X-direction moving module, which in turn drives the Y-direction drive mechanism to move along the X direction. The X-direction power source, in conjunction with the X-direction moving module, drives the Y-direction drive mechanism to move stably.

[0009] The Y-axis driving mechanism includes a Y-axis power source and a Y-axis moving module. The microscope body is mounted on the Y-axis moving module. The Y-axis power source provides power to drive the Y-axis moving module, causing the microscope body to move along the Y-axis. The Y-axis power source, in conjunction with the Y-axis moving module, drives the microscope body to move stably. The control unit integrates a direction selection module and a distance adjustment module. The direction selection module is used to switch signals and change the movement direction of the microscope body. The distance adjustment module is used to adjust the movement distance of the microscope body in the selected direction. This allows for rapid selection of the movement direction and precise positioning, reducing operational complexity.

[0010] The direction selection module includes a switch with multiple switching positions, each corresponding to either the X-axis or the Y-axis direction selection. This provides a direct and reliable direction switching method, reduces the risk of misoperation, and achieves fast and stable control.

[0011] The distance adjustment module is a hand crank; rotating the hand crank adjusts the movement distance of the microscope body in the selected direction. This improves control precision and enables high-precision positioning.

[0012] The probe clamping device includes a clamping mechanism and a positioning mechanism. The clamping mechanism is mounted below the positioning mechanism and is used to clamp the probe. The positioning mechanism drives the clamping mechanism to move. This allows for multi-degree-of-freedom alignment adjustment of the probe, improving operational efficiency and convenience.

[0013] The positioning mechanism includes a motor that communicates with the control box. The control box controls the motor to drive the positioning mechanism to move based on stored movement parameters. This automatic control system uses pre-stored microscope body movement parameters to reproduce the microscope's trajectory, automatically driving the motor to position the probe and improving positioning accuracy and efficiency.

[0014] The positioning mechanism includes a rotating component and a slide rail. The slide rail is installed on the lower side of the rotating component, and the clamping mechanism is slidably installed on the slide rail to achieve precise positioning of the clamping mechanism.

[0015] Compared with the prior art, the beneficial effects of this utility model are: the use of an electric drive device to drive the microscope body to move, replacing manual operation, reducing the workload of manual operation, transferring the space of manually controlling the microscope body to a relatively safe space, improving work efficiency and operational safety; the use of a control box for branch control allows the probe to move synchronously with the microscope body, quickly positioning the probe placement position, and achieving the purpose of rapid probe position adjustment. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the specific embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A schematic diagram of the probe station structure provided by this utility model.

[0018] Figure 2 This is a schematic diagram of the probe clamping device provided by this utility model. Detailed Implementation

[0019] The technical solutions in specific embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0020] Example 1

[0021] This embodiment provides a probe station, such as Figure 1As shown, the system includes a microscope assembly 1, a control box 2, and a probe clamping device 3. Both the microscope assembly 1 and the probe clamping device 3 communicate with the control box 2. The microscope assembly 1 includes a control unit 11, an electric drive device 12, and a microscope body 13. The electric drive device 12 receives commands from the control unit 11 and drives the microscope body 13 to move. The control box 2 stores the movement parameters of the microscope body 13. The probe clamping device 3 clamps the probe body and controls the corresponding movement of the probe body according to the movement parameters stored in the control box 2. Using a remote electric drive to replace manual movement of the microscope body 13 improves work efficiency and operational safety.

[0022] The electric drive device 12 includes two independent X-axis drive mechanisms 121 and Y-axis drive mechanisms 122. The Y-axis drive mechanism 122 is mounted on the X-axis drive mechanism 121, and the microscope body 13 is mounted on the Y-axis drive mechanism 122. The X-axis drive mechanism 121 includes an X-axis power source and an X-axis movement module. The Y-axis drive mechanism 122 is disposed on the X-axis movement module. The X-axis power source provides power to drive the X-axis movement module, causing the Y-axis drive mechanism 122 to move along the X-direction. The Y-axis drive mechanism 122 includes a Y-axis power source and a Y-axis movement module. The microscope body 13 is disposed on the Y-axis movement module. The Y-axis power source provides power to drive the Y-axis movement module, causing the microscope body 13 to move along the Y-direction. This achieves high-precision movement of the microscope body in a two-dimensional plane, ensuring movement accuracy and stability.

[0023] The control unit 11 integrates a direction selection module 111 and a distance adjustment module 112. The direction selection module 111 is used to switch signals to change the movement direction of the microscope body 13. The distance adjustment module 112 is used to adjust the movement distance of the microscope body 13 in the selected direction. The direction selection module 111 includes a switch with multiple switching positions, each corresponding to the X-axis or Y-axis direction selection. The distance adjustment module 112 is a hand crank, which is rotated to adjust the movement distance of the microscope body 13 in the selected direction. The control unit 11 allows for quick selection of the microscope body 13's movement direction and positioning, reducing operational complexity.

[0024] like Figure 2As shown, the probe clamping device 3 includes a clamping mechanism 31 and a positioning mechanism 32. The clamping mechanism 31 is mounted below the positioning mechanism 2 and is used to clamp the probe. The positioning mechanism 32 drives the clamping mechanism 31 to perform multi-dimensional movement and adjustment. The positioning mechanism 31 is driven by a motor, which communicates with the control box 2. The control box 2 controls the motor to drive the positioning mechanism 32 to move for positioning based on stored movement parameters. The positioning mechanism 32 can be manually controlled; the positioning mechanism 31 can also be manually controlled, and the movement of the positioning mechanism 32 can be manually adjusted according to the movement parameters stored in the control box 2. The positioning mechanism 32 includes a rotating component and a slide rail. The slide rail is mounted below the rotating component, and the clamping mechanism 31 is slidably mounted on the slide rail to achieve precise adjustment of the probe position and improve work efficiency.

[0025] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A probe station, characterized in that, It includes a microscope assembly (1), a control box (2) and a probe clamping device (3), and the microscope assembly (1) and the probe clamping device (3) are all in communication with the control box (2); The microscope assembly (1) includes a control unit (11), an electric drive device (12), and a microscope body (13). The electric drive device (12) receives instructions from the control unit (11) and drives the microscope body (13) to move. The control box (2) stores the movement parameters of the microscope body (13), the probe clamping device (3) clamps the probe body, and the probe clamping device (3) controls the corresponding movement of the probe body according to the movement parameters of the microscope body (13) stored in the control box (2).

2. The probe station according to claim 1, characterized in that, The electric drive device (12) includes an independent X-axis drive mechanism (121) and a Y-axis drive mechanism (122). The Y-axis drive mechanism (122) is mounted on the X-axis drive mechanism (121), and the microscope body (13) is mounted on the Y-axis drive mechanism (122).

3. The probe station according to claim 2, characterized in that, The X-direction drive mechanism (121) includes an X-direction power source and an X-direction moving module, and the Y-direction drive mechanism (122) is disposed on the X-direction moving module.

4. The probe station according to claim 2, characterized in that, The Y-axis drive mechanism (122) includes a Y-axis power source and a Y-axis moving module, and the microscope body (13) is disposed on the Y-axis moving module.

5. The probe station according to claim 1, characterized in that, The control unit (11) integrates a direction selection module (111) and a distance adjustment module (112). The direction selection module (111) is used to switch signals and change the moving direction of the microscope body (13); The distance adjustment module (112) is used to adjust the movement distance of the microscope body (13) in the selected direction.

6. The probe station according to claim 5, characterized in that, The direction selection module (111) includes a switching switch with multiple switching positions, each of which corresponds to the direction selection of the X-axis or Y-axis.

7. The probe station according to claim 5, characterized in that, The distance adjustment module (112) is a hand crank, which is rotated to adjust the movement distance of the microscope body (13) in the selected direction.

8. The probe station according to claim 1, characterized in that, The probe clamping device (3) includes a clamping mechanism (31) and a positioning mechanism (32). The clamping mechanism (31) is installed on the lower side of the positioning mechanism (32) and is used to clamp the blade probe. The positioning mechanism (32) drives the clamping mechanism (31) to move.

9. The probe station according to claim 8, characterized in that, The positioning mechanism (32) includes a motor that communicates with the control box (2). The control box (2) controls the motor to drive the positioning mechanism (32) to move according to the stored movement parameters.

10. The probe station according to claim 8, characterized in that, The positioning mechanism (32) includes a rotating component and a slide rail. The slide rail is mounted on the lower side of the rotating component, and the clamping mechanism (31) is slidably mounted on the slide rail.

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