Angle and position adjustable micro-probe card

Abstract

The utility model discloses an angle and position adjustable micro probe seat, including with external horizontal reference surface magnetic attraction link's magnetic attraction base, the mounting seat is located on the magnetic attraction base, and the mounting seat has the oblique block rotatable through the pivot in, the differential head sets up on the mounting seat, and the telescopic end of differential head passes through the mounting seat and links to each other with the oblique block, the spring is located below the pivot, and one end of spring links to each other with the mounting seat, and the other end links to each other with the oblique block, the universal connecting piece rotatable setting in the front end of oblique block, the probe follows the universal connecting piece rotatable setting in the front end of oblique block, the utility model discloses through magnetic attraction base realizes the fast horizontal positioning, through the differential head and spring collaborative control oblique block pitch angle realizes the probe in Z direction angle adjustment, and the universal connecting piece horizontal rotation has realized the probe horizontal rotation adjustment, and the universal connecting piece installs in different adjustment hole, to change the position of probe after extension adjustment range, is suitable for narrow detection space.

Description

Technical Field

[0001] This utility model belongs to the technical field of precision instrument positioning devices, and in particular relates to a miniature probe holder with adjustable angle and position. Background Technology

[0002] In fields such as semiconductor testing and micro-device characterization, probe holders are used for precise positioning and contact with the object under test. Their adjustability and stability directly affect the accuracy of measurement results. Traditional probe holders mostly use mechanical threads or slider structures to achieve single-axis translation or fixed-angle tilting, which limits the degree of freedom of adjustment and makes it difficult to meet the multi-pose alignment requirements in the testing of complex curved surfaces or micro-areas. In addition, these devices have a loose structure and large size, making them difficult to integrate into modern compact testing platforms or vacuum chambers.

[0003] Therefore, there is an urgent need for a compact, flexible, and highly stable miniature probe holder to support high-precision positioning with multiple degrees of freedom and adapt to increasingly miniaturized and demanding testing environments. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art by providing a miniature probe holder with adjustable angle and position, which is small in size, compact in structure, and can adjust the position of the probe with multiple degrees of freedom.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is: a miniature probe holder with adjustable angle and position, comprising:

[0006] The magnetic base is magnetically connected to an external horizontal reference surface.

[0007] A mounting base is provided on the magnetic base, and the mounting base has an inclined block that can be rotated via a pivot.

[0008] A micrometer head is mounted on the mounting base, and the telescopic end of the micrometer head passes through the mounting base and is connected to the tilting block;

[0009] A spring is located below the rotating shaft, with one end connected to the mounting base and the other end connected to the tilting block. When the micrometer head is rotated in the forward direction, the micrometer head drives the tilting block to move forward, and the tilting block rotates clockwise around the rotating shaft, while the spring is compressed. When the micrometer head is rotated in the reverse direction, the elastic force of the spring drives the tilting block to rotate counterclockwise around the rotating shaft.

[0010] The universal connector is rotatably mounted at the front end of the inclined block;

[0011] The probe is rotatably mounted at the front end of the tilting block, following the universal connector.

[0012] Furthermore, the tilt angle of the inclined block rotating about the axis is 0-32°.

[0013] Furthermore, the probe is disposed inside the probe rod by a retaining spring; the probe rod is locked inside the limiting cavity of the base; the base is connected to the lower surface of the universal connector to fix the probe rod.

[0014] Furthermore, the front end of the tilting block is provided with two adjustment holes, and the universal connector is rotatably installed in either adjustment hole via a rotating bolt.

[0015] Furthermore, the micrometer head is vertically mounted on the mounting base by fasteners.

[0016] Furthermore, the mounting base has a U-shaped groove, and the tilting block is disposed within the U-shaped groove.

[0017] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0018] This utility model features a miniature probe holder with adjustable angle and position. It achieves rapid horizontal positioning through a magnetic base, adjusts the probe's Z-axis angle by controlling the tilting block's pitch angle through a micrometer head and spring, and allows for horizontal rotation adjustment of the probe by a universal connector. The universal connector can be installed in different adjustment holes to change the probe's front and rear positions, expanding the adjustment range. The overall structure is compact, with a volume of only 80×50×50mm, making it suitable for confined testing spaces and multi-probe integration applications, and offering good adaptability. Attached Figure Description

[0019] The technical solution of this utility model will be further described below with reference to the accompanying drawings:

[0020] Figure 1 This is a three-dimensional structural diagram of an embodiment of the present utility model;

[0021] Figure 2 This is an exploded view of one embodiment of the present invention with the probe omitted;

[0022] Figure 3 This is an exploded view of the tilting block and probe in this utility model;

[0023] The components include: magnetic base 1, mounting base 2, rotating shaft 3, tilting block 4, micrometer head 5, spring 6, universal connector 7, probe 8, probe rod 9, base 10, adjustment hole 40, rotating bolt 41, and fastener 50. Detailed Implementation

[0024] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0025] This invention provides a miniature probe holder with adjustable angle and position to solve the problems of limited adjustment freedom and large size of existing probe holders.

[0026] For ease of understanding, the specific processes in the embodiments of this application are described below. Please refer to [link / reference]. Figure 1 and Figure 3 An angle- and position-adjustable miniature probe holder in this embodiment includes a magnetic base 1, a mounting base 2, a rotating shaft 3, an inclined block 4, a microhead 5, a spring 6, a universal connector 7, and a probe 8. The miniature probe holder in this embodiment has a length, width, and height of 80×50×50mm and is compact in size.

[0027] The magnetic base 1 is magnetically connected to the external horizontal reference surface. The horizontal position of the probe 8 can be easily moved and fixed through the magnetic base 1. Because the overall structure of this miniature probe base is small and the magnetic force of the magnetic base 1 is strong, it can be easily moved manually.

[0028] The mounting base 2 is mounted on the magnetic base 1. The mounting base 2 has a U-shaped groove. The tilting block 4 is rotatably set in the U-shaped groove through the rotating shaft 3. This makes the overall structure more compact and adaptable to narrow spaces.

[0029] The micrometer head 5 is vertically mounted on the left side of the mounting base 2 by a fastener 50. In this embodiment, the fastener 50 is a screw, and the telescopic end of the micrometer head 5 passes through the mounting base 2 and is connected to the tilting block 4. Here, the micrometer head 5 and the mounting base 2 are vertically arranged, so that the micrometer head 5 can effectively drive the tilting block 4 to move forward.

[0030] Furthermore, spring 6 is mounted on mounting base 2 on the same side as micrometer head 5 and located below the rotating shaft. One end of spring 6 is connected to the mounting base, and the other end is connected to the tilting block. During operation, rotating micrometer head 5 forward causes tilting block 4 to move forward. Due to the presence of rotating shaft 3, tilting block 4 rotates clockwise around rotating shaft 3, while spring 6 is compressed. When rotating micrometer head 5 forward, the elastic force of spring 6 causes tilting block 4 to rotate counterclockwise around rotating shaft 3. Thus, by adjusting the coordinated operation of micrometer head 5, rotating shaft 3, and spring 6, tilting block 4 can be rotated around rotating shaft 3 in the Z direction to adjust the angle between 0-32°, meeting different working conditions.

[0031] See Figure 3 The universal connector 7 is L-shaped and has two adjustment holes 40 at the front end of the tilting block 4. The universal connector 7 can be rotatably installed in any one of the adjustment holes 40 by means of a rotating bolt 41. This universal connector 7 can not only rotate horizontally around the upper end of the tilting block 4 around the rotating bolt, but also adjust the position of the probe 8 in one step by installing the universal connector 7 in different adjustment holes 40, with a high degree of freedom in adjustment.

[0032] See Figure 3 The probe 8 is set inside the probe rod 9 by a retaining spring, which prevents the probe 8 from falling out of the probe rod 9. The probe rod 9 is locked in the cylindrical limiting cavity of the base 10 by an interference fit, ensuring that the probe rod 9 does not wobble radially in the limiting cavity, and at the same time facilitating the disassembly and replacement of the probe rod 9. By replacing the probe inside the probe rod 9, it can be adapted to different models of probe rods, improving versatility and replacement convenience.

[0033] The base 10 is connected to the lower surface of the universal connector 7 to fix the probe rod 9 and the probe 8. Through the above structure, the probe 8 is rotatably disposed at the front end of the inclined block 4, following the universal connector 7.

[0034] In actual work:

[0035] First, place the magnetic base 1 on the workbench or the reference plane of the workpiece to be tested, and use magnetic force to achieve rapid adsorption and initial fixation to ensure that the probe base is in a stable state.

[0036] Next, by manually moving the magnetic base 1, the entire probe holder is coarsely adjusted so that the probe 8 is roughly aligned with the point to be measured. Since the magnetic base 1 has a strong magnetic holding force, it can maintain its position after release.

[0037] When it is necessary to adjust the tilt angle of probe 8 in the Z-axis direction, it can be achieved by turning the micrometer head 5. When rotating the micrometer head 5 clockwise, it pushes the tilt block 4 clockwise; when rotating the micrometer head 5 counterclockwise, it pushes the tilt block 4 counterclockwise, thereby adjusting the pitch angle of probe 8. The adjustment range can reach 0–32°.

[0038] When it is necessary to adjust the horizontal orientation or rotation angle of the probe, the rotating bolt 41 can be loosened, the universal connector 7 can be rotated to the desired position, and then tightened again. In addition, the universal connector 7 can also be installed in another adjustment hole 40 at the front end of the tilting block 4 to change the front and rear position of the probe 8 and expand the adjustment range.

[0039] In summary, users can flexibly and accurately position the probe in multiple degrees of freedom, such as horizontal movement, pitch adjustment, and horizontal rotation. It is easy to operate, has high adjustment accuracy, good stability, and a compact overall structure with small size. It is especially suitable for precision measurement applications in fields such as microelectronics testing, wafer inspection, and optoelectronic chip measurement.

[0040] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A miniature probe holder with adjustable angle and position, characterized in that, include: The magnetic base is magnetically connected to an external horizontal reference surface. A mounting base is provided on the magnetic base, and the mounting base has an inclined block that can be rotated via a pivot. A micrometer head is mounted on the mounting base, and the telescopic end of the micrometer head passes through the mounting base and is connected to the tilting block; A spring is located below the rotating shaft, with one end connected to the mounting base and the other end connected to the tilting block. When the micrometer head is rotated in the forward direction, the micrometer head drives the tilting block to move forward, and the tilting block rotates clockwise around the rotating shaft, while the spring is compressed. When the micrometer head is rotated in the reverse direction, the elastic force of the spring drives the tilting block to rotate counterclockwise around the rotating shaft. The universal connector is rotatably mounted at the front end of the inclined block; The probe is rotatably mounted at the front end of the tilting block, following the universal connector.

2. The micro probe holder with adjustable angle and position as described in claim 1, characterized in that: The tilt angle of the inclined block rotating around the axis (3) is 0-32°.

3. The micro probe holder with adjustable angle and position as described in claim 1, characterized in that: The probe is mounted inside the probe rod by a retaining spring; the probe rod is locked inside the limiting cavity of the base; the base is connected to the lower surface of the universal connector to fix the probe rod.

4. The micro probe holder with adjustable angle and position as described in claim 1, characterized in that: The tilting block has two adjustment holes at its front end, and the universal connector is rotatably mounted in either adjustment hole via a rotating bolt.

5. The micro probe holder with adjustable angle and position as described in claim 1, characterized in that: The micrometer head is vertically mounted on the mounting base by fasteners.

6. The micro probe holder with adjustable angle and position as described in claim 1, characterized in that: The mounting base has a U-shaped groove, and the tilting block is disposed in the U-shaped groove.

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