Test equipment

Abstract

The application relates to a test device. The test device comprises a mounting base, a test table and a damping assembly. The test table is arranged on one side of the mounting base and used for carrying a sample to be tested. The damping assembly is arranged between the mounting base and the test table. The damping assembly comprises a plurality of air spring members and a plurality of horizontal adjusting valves. The air spring members are arranged around the outer periphery of the test table and are respectively connected to the mounting base and the test table. The horizontal adjusting valves are arranged at intervals with the air spring members. Each valve body is connected to at least one air spring member. When the balancing valve rotates relative to the valve body, the gas flows between the valve body and the air spring member, thereby adjusting the horizontal state of the test table. The test device is provided with the damping assembly to damp the test table, and the sample to be tested arranged on the test table has good stability.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, specifically to a testing device. Background Technology

[0002] In the field of semiconductor testing technology, to ensure the testing accuracy of the samples, the platform supporting the samples typically requires vibration isolation and damping treatment. This ensures the samples are stably placed on the platform, guaranteeing the testing accuracy of the equipment. Therefore, how to dampen the vibration of the platform supporting the samples is a technical problem that urgently needs to be solved. Utility Model Content

[0003] In view of this, this application provides a testing device in which a shock-absorbing component is provided to dampen the test platform, and the sample to be tested has good stability when placed on the test platform.

[0004] This application provides a testing device, comprising: a mounting base, a testing platform, and a vibration damping assembly. The testing platform is disposed on one side of the mounting base and is used to support the sample to be tested. The vibration damping assembly is disposed between the mounting base and the testing platform. The vibration damping assembly includes multiple air springs and multiple leveling valves. The multiple air springs are arranged around the outer periphery of the testing platform and are respectively connected to the mounting base and the testing platform. The multiple leveling valves are spaced apart from the multiple air springs. Each leveling valve includes a valve body and a balance valve. The valve body is mounted on the mounting base, and the balance valve is rotatably connected to the valve body and abuts against the testing platform. Each valve body is connected to at least one air spring. When the balance valve rotates relative to the valve body, gas flows between the valve body and the air springs, thereby adjusting the level of the testing platform.

[0005] Furthermore, the test bench has a central area and multiple peripheral areas, the multiple peripheral areas being arranged around the outer periphery of the central area, and each of the air spring components being arranged close to the peripheral area of ​​the test bench; the centers of the multiple horizontal regulating valves are not on the same straight line.

[0006] Furthermore, the testing equipment also includes an air intake device, which is connected to multiple horizontal regulating valves to provide compressed gas to the horizontal regulating valves; the valve body has a chamber inside, and when the balance valve rotates relative to the valve body, the chamber can be connected to or disconnected from the air intake device, thereby controlling the on / off connection between the air intake device and the horizontal regulating valve.

[0007] Furthermore, the air spring component includes a first connecting portion, an air bladder portion, and a second connecting portion connected together. The side of the first connecting portion opposite to the air bladder portion is connected to the mounting base, and the side of the second connecting portion opposite to the air bladder portion is connected to the test bench. Each valve body is connected to at least one air bladder portion. The height of the air bladder portion is adjustable along the arrangement direction of the first connecting portion and the second connecting portion.

[0008] Furthermore, the air spring also includes a vent that connects the air bladder and the valve body, allowing gas to flow from the air bladder to the valve body, or from the valve body to the air bladder.

[0009] Furthermore, the end face of the balance valve that abuts against the test bench is an arc surface.

[0010] Furthermore, the testing equipment also includes a support assembly connected to the mounting base. The support assembly includes multiple support columns, each of which is positioned close to one of the air spring components. The air spring component is in a non-inflated state, and when the air spring component is in a non-inflated state, the multiple support columns are used to support the testing platform.

[0011] Furthermore, the air spring also has an inflated state. When the air spring is inflated, it has a first height h1; when the air spring is not inflated, it has a second height h2. The height of the support column is h3, which satisfies the relationship: h2 < h3 < h1.

[0012] Furthermore, the support column includes connected steel blocks and shock absorbers, the steel blocks are mounted on the mounting base, and the shock absorbers are located on the side of the steel blocks away from the mounting base.

[0013] Furthermore, the testing equipment also includes a locking component, which is sequentially inserted through the test platform and the support column to fix the relative positions of the test platform and the mounting base.

[0014] In this application, the vibration damping component is disposed between the mounting base and the test platform to dampen the vibration of the test platform, thereby allowing the sample to be tested to be stably supported on the test platform, facilitating the testing equipment to test the sample. Specifically, multiple horizontal adjustment valves and multiple air springs are spaced apart between the mounting base and the test platform. The balance valve of the horizontal adjustment valve always abuts against the test platform. When the test platform vibrates or tilts, the balance valve rotates relative to the valve body, allowing gas to flow between the valve body and the air spring, thereby adjusting the height of the air spring and further adjusting the horizontal state of the test platform. During this process, the vibration of the test platform can also be absorbed, ensuring that the sample to be tested is stably placed on the test platform. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the implementation will be briefly introduced below. Obviously, the drawings described below are some implementations of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a partial structural schematic diagram of a test device according to an embodiment of this application; Figure 2 This is an exploded structural diagram of a test device according to an embodiment of this application; Figure 3 This is a schematic diagram of the structure of a horizontal regulating valve according to an embodiment of this application; Figure 4 This is an exploded structural diagram of a test device according to another embodiment of this application; Figure 5 This is a schematic diagram of the air circuit connection of a test device according to an embodiment of this application; Figure 6 This is a schematic diagram of the structure of an air spring component according to an embodiment of this application; Figure 7 for Figure 2 Enlarged view of the dashed box in C.

[0017] Explanation of reference numerals in the attached figures: 100-Test equipment, 110-Mounting base, 120-Test bench, 130-Shock absorption assembly, 131-Air spring component, 1311-First connecting part, 1312-Airbag part, 1313-Second connecting part, 1314-Ventilation port, 132-Level regulating valve, 1321-Valve body, 1322-Balance valve, 140-Intake device, 150-Support assembly, 151-Support column, 1511-Steel block component, 1512-Shock absorption component, 160-Locking component. Detailed Implementation

[0018] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0019] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses.

[0020] In this document, references to "embodiment" or "implementation" mean that a particular feature, structure, or characteristic described in connection with an embodiment or implementation may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0021] In the field of semiconductor testing technology, to ensure the testing accuracy of the samples, the platform supporting the samples typically requires vibration isolation and damping treatment. This ensures the samples are stably placed on the platform, guaranteeing the testing accuracy of the equipment. Therefore, how to dampen the vibration of the platform supporting the samples is a technical problem that urgently needs to be solved.

[0022] Please see Figures 1 to 3This application provides a testing device 100, which includes: a mounting base 110, a testing platform 120, and a shock absorption assembly 130. The testing platform 120 is disposed on one side of the mounting base 110 and is used to support the sample to be tested. The shock absorption assembly 130 is disposed between the mounting base 110 and the testing platform 120. The shock absorption assembly 130 includes a plurality of air springs 131 and a plurality of level adjustment valves 132. The plurality of air springs 131 are arranged around the outer periphery of the testing platform 120 and are respectively connected to the mounting base 110 and the testing platform 120. The plurality of level adjustment valves... The leveling valve 132 is spaced apart from multiple air springs 131. The leveling valve 132 includes a valve body 1321 and a balance valve 1322. The valve body 1321 is mounted on the mounting base 110. The balance valve 1322 is rotatably connected to the valve body 1321 and abuts against the test bench 120. Each valve body 1321 is connected to at least one air spring 131. When the balance valve 1322 rotates relative to the valve body 1321, gas flows between the valve body 1321 and the air spring 131, thereby adjusting the level of the test bench 120.

[0023] Optionally, in some embodiments, the testing device 100 is a laser repair machine, used for testing and repairing the sample to be tested. In other embodiments, the testing device 100 is a wafer inspection device, used for inspecting the sample to be tested.

[0024] Optionally, the sample to be tested includes one of a wafer or a chip.

[0025] Understandably, in the terminology of this application, "multiple" means two or more, and can be, but is not limited to, two, three, four or five, etc.

[0026] Understandably, in the terminology of this application, "at least one" means one or more.

[0027] In this embodiment, the shock-absorbing component 130 is disposed between the mounting base 110 and the test platform 120 to dampen the test platform 120, thereby allowing the sample to be tested to be stably supported on the test platform 120, facilitating the testing of the sample by the testing equipment 100. Specifically, multiple horizontal adjustment valves 132 and multiple air springs 131 are spaced apart between the mounting base 110 and the test platform 120. The balance valve 1322 of the horizontal adjustment valve 132 always abuts against the test platform 120. When the test platform 120 vibrates or tilts, the balance valve 1322 rotates relative to the valve body 1321, allowing gas to flow between the valve body 1321 and the air spring 131, thereby adjusting the height of the air spring 131 and further adjusting the horizontal state of the test platform 120. During this process, the vibration of the test platform 120 can also be absorbed, so that the sample to be tested can be stably placed on the test platform 120.

[0028] More specifically, if the area of ​​the test platform 120 supported by the balance valve 1322 is tilted towards the mounting base 110, the balance valve 1322 rotates relative to the valve body 1321 towards the mounting base 110, so that gas flows from the valve body 1321 to the air spring 131, the amount of gas in the air spring 131 increases, so that the height of the air spring 131 increases, thereby driving the area of ​​the test platform 120 supported by the balance valve 1322 to move away from the mounting base 110, thereby adjusting the horizontal state of the test platform 120. Conversely, if the area of ​​the test platform 120 supported by the balance valve 1322 is tilted away from the mounting base 110, the balance valve 1322 rotates relative to the valve body 1321 away from the mounting base 110, so that gas flows from the air spring 131 to the valve body 1321, the amount of gas in the air spring 131 decreases, so that the height of the air spring 131 decreases, thereby driving the area of ​​the test platform 120 supported by the balance valve 1322 to move closer to the mounting base 110, thereby adjusting the horizontal state of the test platform 120.

[0029] Understandably, the height of the air spring 131 is the longitudinal height of the air spring 131 along the arrangement direction of the test bench 120 and the mounting base 110.

[0030] Optionally, the testing device 100 further includes a microscope mechanism (not shown in the figure), which is located on the side of the test stage 120 away from the mounting base 110 for observing the sample to be tested.

[0031] Optionally, the testing equipment 100 further includes a testing mechanism (not shown), which is located on the side of the testing stage 120 opposite to the mounting base 110. The testing mechanism includes one of a probe, a metal deposition head, and a laser repair component. When the testing equipment 100 is a laser repair machine, the testing mechanism consists of a metal deposition head and a laser repair component. The sample to be tested is examined using the microscope mechanism to determine the circuitry of the sample. The metal deposition head is used to deposit metal onto the sample to connect disconnected circuits. The laser repair component is used to break short-circuited circuits. When the testing equipment 100 is a wafer inspection device, the testing mechanism is a probe to test the electrical performance of the sample.

[0032] Understandably, the testing equipment 100 is a precision device. When the testing mechanism tests the sample to be tested, the shock absorption component 130 can perform shock absorption on the testing platform 120 so that the sample to be tested is stably placed on the testing platform 120, thereby helping to ensure the accuracy of the testing mechanism in testing the sample to be tested.

[0033] Optionally, in one specific embodiment, the test platform 120 is a marble platform, which has good thermal stability and rigidity, so that when the sample to be tested is supported on the test platform 120, the test platform 120 can provide stable support for the sample to be tested.

[0034] Please see also Figure 4 In some embodiments, the test bench 120 has an intermediate region (e.g., Figure 4 (as shown in region A) and multiple surrounding regions (such as...) Figure 4 As shown in area B), the plurality of peripheral areas are arranged around the outer periphery of the central area, and each of the air spring components 131 is arranged near the peripheral area of ​​the test bench 120; the centers of the plurality of horizontal regulating valves 132 are not on the same straight line.

[0035] In this embodiment, each air spring 131 is positioned near the periphery of the test platform 120 to support it. When the test platform 120 tilts due to vibration, the leveling valve 132 cooperates with the air spring 131 to adjust the height of the air spring 131, thereby adjusting the level of the test platform 120 and mitigating vibration, allowing the sample to be tested to be stably placed on the test platform 120. Furthermore, the centers of the multiple leveling valves 132 are not on the same straight line; in other words, the multiple leveling valves 132 are staggered, so that each leveling valve 132 can connect to different air springs 131 to regulate the height of air springs 131 located in different peripheral areas, thereby adjusting the level of the test platform 120.

[0036] Optionally, in one specific embodiment, the test platform 120 has a quadrilateral surface, and the number of peripheral areas is four. The four peripheral areas are respectively located near the four corners of the quadrilateral. The number of air springs 131 is four, and the four air springs 131 are respectively located in the four peripheral areas, so as to facilitate the adjustment of the horizontal state of the test platform 120.

[0037] Optionally, in one embodiment, the number of the leveling valves 132 is three, with the centers of the three leveling valves 132 respectively located at the three vertices of a triangle to facilitate connection to the multiple air springs 131. Furthermore, the location of the three leveling valves 132 at the three vertices of the triangle facilitates rapid adjustment of the height of the connected air springs 131, thereby improving the efficiency of adjusting the level of the test bench 120.

[0038] Please see also Figure 5 In some embodiments, the test device 100 further includes an air intake device 140, which is connected to a plurality of the horizontal regulating valves 132 to provide compressed gas to the horizontal regulating valves 132; the valve body 1321 has a chamber inside, and when the balance valve 1322 rotates relative to the valve body 1321, the chamber can be connected to or disconnected from the air intake device 140, thereby controlling the on / off connection between the air intake device 140 and the horizontal regulating valves 132.

[0039] In the test equipment 100 provided in this embodiment, the air intake device 140 is connected to a plurality of horizontal regulating valves 132 to simultaneously supply compressed gas to the horizontal regulating valves 132. When the balance valve 1322 rotates relative to the valve body 1321, the chamber is connected to or disconnected from the air intake device 140 to control the on / off connection between the air intake device 140 and the horizontal regulating valves 132, thereby allowing gas to flow between the valve body 1321 and the air spring 131. Specifically, when the balance valve 1322 moves relative to the valve body 1321 toward the mounting base 110, the chamber communicates with the air intake device 140, allowing the air intake device 140 to communicate with the chamber and allowing the gas in the chamber to flow to the air spring 131, thereby increasing the amount of gas in the air spring 131 and increasing the height of the air spring 131. This causes the area of ​​the test platform 120 supported by the balance valve 1322 to move away from the mounting base 110, thereby adjusting the horizontal state of the test platform 120. When the balance valve 1322 moves away from the mounting base 110 relative to the valve body 1321, the chamber is disconnected from the air intake device 140, causing the air intake device 140 to disconnect from the level adjustment valve 132. The air intake device 140 cannot supply gas to the air spring 131. If there is too much gas in the air spring 131, the gas flows from the air spring 131 to the chamber and then to the outside, thereby reducing the amount of gas in the air spring 131 and reducing its height. This causes the area of ​​the test platform 120 supported by the balance valve 1322 to move closer to the mounting base 110, thereby adjusting the level of the test platform 120.

[0040] Understandably, when the chamber is connected to the air intake device 140, the chamber is not connected to the outside; when the chamber is disconnected from the air intake device 140, the chamber is connected to the outside.

[0041] Please see also Figure 6 In some embodiments, the air spring 131 includes a first connecting portion 1311, an air bladder portion 1312, and a second connecting portion 1313 connected together. The side of the first connecting portion 1311 opposite to the air bladder portion 1312 is connected to the mounting base 110, and the side of the second connecting portion 1313 opposite to the air bladder portion 1312 is connected to the test bench 120. Each valve body 1321 communicates with at least one air bladder portion 1312. The height of the air bladder portion 1312 is adjustable along the arrangement direction of the first connecting portion 1311 and the second connecting portion 1313.

[0042] Understandably, the first connecting part 1311, the airbag part 1312 and the second connecting part 1313 are arranged sequentially along the arrangement direction of the mounting base 110 and the test platform 120.

[0043] Understandably, the height of the airbag portion 1312 is adjustable along the arrangement direction of the first connecting portion 1311 and the second connecting portion 1313. This means that the height of the airbag portion 1312 can be changed by adjusting the amount of gas inside the airbag portion 1312.

[0044] In this embodiment, the first connecting part 1311 is connected to the mounting base 110 on the side away from the airbag part 1312, and the second connecting part 1313 is connected to the test platform 120 on the side away from the airbag part 1312. When the height of the airbag part 1312 is adjustable, the airbag part 1312 will drive the second connecting part 1313 to move towards or away from the first connecting part 1311, so that the area of ​​the test platform 120 connected to the second connecting part 1313 moves towards or away from the mounting base 110, thereby adjusting the horizontal state of the test platform 120.

[0045] In some embodiments, the air spring 131 further includes a vent 1314, which connects the airbag portion 1312 and the valve body 1321, so that gas can flow from the airbag portion 1312 to the valve body 1321, or gas can flow from the valve body 1321 to the airbag portion 1312.

[0046] In this embodiment, the air vent 1314 of the air spring 131 is a two-way valve. When the area of ​​the test platform 120 connected to the air spring 131 is tilted toward the mounting base 110, gas flows from the valve body 1321 to the air bladder 1312, thereby increasing the height of the air bladder 1312 and causing the area of ​​the test platform 120 connected to the second connecting part 1313 to move away from the mounting base 110, thus adjusting the horizontal state of the test platform 120. Similarly, when the area of ​​the test bench 120 connected to the air spring 131 moves away from the mounting base 110, gas flows from the air bladder 1312 to the chamber of the valve body 1321, and then through the valve body 1321 to the outside. This reduces the gas level inside the air spring 131, thereby lowering the height of the air bladder 1312 and causing the area of ​​the test bench 120 connected to the second connection 1313 to move closer to the mounting base 110, thus adjusting the horizontal state of the test bench 120. The vent 1314 of the air spring 131 allows gas to flow freely in both directions, which facilitates rapid adjustment of the internal air pressure according to the load of the air spring 131, thereby enabling rapid vibration damping of the test bench 120 and improving the performance of the vibration damping assembly 130.

[0047] In some embodiments, the end face of the balance valve 1322 that abuts against the test bench 120 is an arc surface.

[0048] In this embodiment, the end face of the balance valve 1322 abutting against the test platform 120 is an arc surface, so that the contact area between the balance valve 1322 and the test platform 120 is small. When the test platform 120 tilts due to vibration, the balance valve 1322 can sensitively detect the vibration and rotate relative to the valve body 1321, which is conducive to quickly adjusting the flow of gas between the valve body 1321 and the air spring 131, so as to achieve rapid vibration reduction of the test platform 120, which is beneficial to improving the efficiency and accuracy of the test equipment 100 in testing the sample to be tested, and improving the performance of the test equipment 100.

[0049] Please see also Figure 7 In some embodiments, the test device 100 further includes a support assembly 150 connected to the mounting base 110. The support assembly 150 includes a plurality of support columns 151, each of which is disposed near an air spring member 131. The air spring member 131 is in a non-inflated state. When the air spring member 131 is in a non-inflated state, the plurality of support columns 151 are used to support the test platform 120.

[0050] Understandably, the air spring 131 also has an inflated state. During the operation of the testing equipment 100, the air spring 131 is in an inflated state; during the handling process or when the testing equipment 100 is not in operation, the air spring 131 is in an uninflated state.

[0051] In this embodiment, the testing device 100 further includes the support assembly 150, which includes a plurality of support columns 151. When the testing device 100 is in the process of being transported or in a non-working state, the air spring 131 is in a non-inflated state. The plurality of support columns 151 are used to support the testing platform 120. In other words, the testing platform 120 is supported by the support columns 151 to avoid the air spring 131 bearing the testing platform 120 for a long time, thus preventing the air spring 131 from being worn out quickly. In addition, during the transport of the testing device 100, if the testing platform 120 is directly supported by the plurality of air springs 131, the swing amplitude of the air springs 131 will be too large, which will cause the testing platform 120 to shake significantly, potentially causing the devices mounted on the testing platform 120 to shake and be damaged. In this embodiment, the test platform 120 is supported by the support column 151. Compared with the method of connecting the test platform 120 to the mounting base 110, the shaking amplitude of the test platform 120 can be reduced, thereby avoiding the device set on the test platform 120 from shaking and being damaged, which is beneficial to extending the service life of the test equipment 100.

[0052] Understandably, when the air spring component 131 is damaged, the plurality of support columns 151 can replace the function of the jack to support the test platform 120, making it easier for staff to repair or replace the air spring component 131.

[0053] In some embodiments, the air spring 131 also has an inflated state. When the air spring 131 is in the inflated state, the air spring 131 has a first height h1; when the air spring 131 is in the non-inflated state, the air spring 131 has a second height h2, and the height of the support column 151 is h3, thus satisfying the relationship: h2 < h3 < h1.

[0054] Understandably, when the air spring 131 is in an inflated state, the second height of the air spring 131 is the height of the air spring 131 in its natural state. When the first connecting portion 1311 and the second connecting portion 1313 of the air spring 131 are respectively connected to the mounting base 110 and the test platform 120, the air bladder portion 1312 is in a stretched state, and the air spring 131 does not provide support for the test platform 120.

[0055] In this embodiment, when the air spring 131 is inflated, its first height is higher than the height of the support column 151. The test platform 120 is then supported on the air spring 131, preventing it from contacting the support column 151. The height of the air spring 131 is adjustable, allowing for leveling of the test platform 120 and providing vibration damping, ensuring the sample to be tested is stably placed on it. When the air spring 131 is deflated, its second height is less than the height of the support column 151. In this case, the test platform 120 rests on the support column 151, preventing the air spring 131 from bearing the load for extended periods and accelerating its wear, while also facilitating maintenance of the testing equipment 100.

[0056] In some embodiments, the support column 151 includes a connected steel block 1511 and a shock absorber 1512. The steel block 1511 is mounted on the mounting base 110, and the shock absorber 1512 is disposed on the side of the steel block 1511 away from the mounting base 110.

[0057] Optionally, the shock absorber 1512 is selected from silicone parts and rubber parts.

[0058] In this embodiment, the support column 151 includes a connected steel block 1511 and a shock absorber 1512, and the steel block 1511 is mounted on the mounting base 110. The steel block 1511 provides rigid support for the test platform 120 so that the test platform 120 is stably set on one side of the support column 151. Furthermore, the shock absorber 1512 is closer to the test platform 120 than the steel block 1511. During the handling of the test equipment 100, the shock absorber 1512 is located between the steel block 1511 and the test platform 120, which can avoid a hard connection between the steel block 1511 and the test platform 120, thereby preventing the steel block 1511 and the test platform 120 from colliding with each other and damaging the test platform 120. It can also dampen the vibration of the test platform 120, so as to prevent the devices mounted on the test platform 120 from being damaged during handling, which is beneficial to extending the service life of the test equipment 100.

[0059] Understandably, if the steel block 1511 and the test platform 120 are connected, during the transportation of the testing equipment 100, the steel block 1511 and the test platform 120 are prone to mutual pulling and collision. Furthermore, the test platform 120 has poor ductility and is brittle, making it easily damaged. The shock absorber 1512, disposed between the steel block 1511 and the test platform 120, can absorb the vibration of the steel block 1511 and the test platform 120, reducing the amplitude of mutual pulling and collision between them.

[0060] In some embodiments, the testing device 100 further includes a locking member 160, which is sequentially disposed on the testing platform 120 and the support column 151 to fix the relative position of the testing platform 120 and the mounting base 110.

[0061] Understandably, during the operation of the testing equipment 100, the locking member 160 is separated from the testing platform 120, the air spring member 131 is in an inflated state, and the testing platform 120 is supported by the air spring member 131; during the handling process or when the testing equipment 100 is not in operation, the air spring member 131 is in an inflated state, and the locking member 160 is sequentially inserted through the testing platform 120 and the support column 151.

[0062] In this embodiment, the locking member 160 is sequentially inserted through the test platform 120 and the support column 151 to fix the relative position of the test platform 120 and the support column 151. This prevents the test platform 120 from sliding relative to the support column 151 in the horizontal direction, improves the structural stability of the test platform 120 supported by the support column 151, and enhances the stability of the test equipment 100 during transportation.

[0063] In this application, the terms "embodiment" and "implementation" mean that a specific feature, structure, or characteristic described in connection with an embodiment can be included in at least one embodiment of this application. The appearance of these phrases in various locations throughout the specification does not necessarily refer to the same embodiment, nor are they independent or alternative embodiments mutually exclusive with other embodiments. Those skilled in the art will understand, explicitly and implicitly, that the embodiments described in this application can be combined with other embodiments. Furthermore, it should be understood that the features, structures, or characteristics described in the various embodiments of this application can be arbitrarily combined to form another embodiment that does not depart from the spirit and scope of the technical solution of this application, provided there is no contradiction between them.

[0064] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.

Claims

1. A testing device, characterized in that, The testing equipment includes: Mounting base; A test stand, disposed on one side of the mounting base, for supporting the sample to be tested; and A vibration damping assembly is disposed between the mounting base and the test bench. The vibration damping assembly includes multiple air springs and multiple leveling valves. The multiple air springs are arranged around the outer periphery of the test bench and are respectively connected to the mounting base and the test bench. The multiple leveling valves are spaced apart from the multiple air springs. Each leveling valve includes a valve body and a balance valve. The valve body is mounted on the mounting base, and the balance valve is rotatably connected to the valve body and abuts against the test bench. Each valve body is connected to at least one air spring. When the balance valve rotates relative to the valve body, gas flows between the valve body and the air spring, thereby adjusting the horizontal state of the test bench.

2. The testing equipment according to claim 1, characterized in that, The test stand has a central area and multiple peripheral areas, the multiple peripheral areas are arranged around the outer periphery of the central area, and each air spring is arranged close to the peripheral area of ​​the test stand; The centers of the multiple horizontal regulating valves are not on the same straight line.

3. The testing equipment according to claim 1, characterized in that, The testing equipment also includes an air intake device, which is connected to a plurality of the horizontal regulating valves to provide compressed gas to the horizontal regulating valves; The valve body has a chamber inside. When the balance valve rotates relative to the valve body, the chamber can be connected to or disconnected from the air intake device, thereby controlling the connection and disconnection between the air intake device and the horizontal regulating valve.

4. The testing equipment according to claim 1, characterized in that, The air spring component includes a first connecting part, an air bladder part, and a second connecting part connected together. The side of the first connecting part away from the air bladder part is connected to the mounting base, and the side of the second connecting part away from the air bladder part is connected to the test bench. Each valve body is connected to at least one air bladder part. The height of the airbag portion is adjustable along the arrangement direction of the first connecting portion and the second connecting portion.

5. The testing equipment according to claim 4, characterized in that, The air spring also includes a vent that connects the air bladder and the valve body, allowing gas to flow from the air bladder to the valve body, or from the valve body to the air bladder.

6. The testing equipment according to claim 1, characterized in that, The end face of the balance valve that abuts against the test bench is an arc surface.

7. The testing equipment according to any one of claims 1 to 6, characterized in that, The testing equipment also includes a support assembly connected to the mounting base. The support assembly includes multiple support columns, each of which is positioned close to one of the air spring components. The air spring component is in a non-inflated state. When the air spring component is in a non-inflated state, the multiple support columns are used to support the testing platform.

8. The testing equipment according to claim 7, characterized in that, The air spring also has an inflated state. When the air spring is inflated, it has a first height h1; when the air spring is not inflated, it has a second height h2. The height of the support column is h3, which satisfies the relationship: h2 < h3 < h1.

9. The testing equipment according to claim 7, characterized in that, The support column includes connected steel blocks and shock absorbers. The steel blocks are mounted on the mounting base, and the shock absorbers are located on the side of the steel blocks away from the mounting base.

10. The testing equipment according to claim 7, characterized in that, The testing equipment also includes a locking component, which is sequentially inserted through the test platform and the support column to fix the relative positions of the test platform and the mounting base.

Images