An ATE test apparatus

CN224803174UActive Publication Date: 2026-09-25ZHONGSHAN CHENGJUN TECH CO LTD
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Patent Information

Application Number
CN202522153530.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-11
Publication Date
2026-09-25
Estimated Expiration
2035-10-11

AI Technical Summary

Technical Problem

[0003]传统ATE测试头在进行芯片测试时,通常依赖人工操作完成探针与芯片的对接与校正,存在定位精度低、操作效率差、重复性不佳等问题,尤其在大批量、多通道高速信号测试场景下,手动调整难以满足高精度与高一致性的要求

Benefits of technology

本实用新型通过设置顶升机构实现面板的自动升降,避免了传统人工操作带来的定位误差和效率低下问题。斜块与滑块的配合结构使得升降过程平稳、精确,有效保障探针块与测试品的可靠接触。多探针块与多放置槽的设计支持并行测试,大幅提升测试量,提高测试效率。位置传感器实时监控探针块与待测试品的接触状态,提高了测试精度与自动化水平。

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Abstract

The utility model provides an ATE testing arrangement, including the case, the height direction symmetry of two ends of case top is installed with the support plate, the support plate top is connected with the panel of sliding, a plurality of probe blocks are placed on the panel, the test board of fixed connection with support plate is installed on the panel top, a plurality of be used for placing the test product's placing groove that cooperates with probe block is opened to the test board, the jacking mechanism that is connected with support plate is still installed to the case top, the jacking mechanism is used for propelling to test board direction with panel to make probe block and test product contact, the jacking mechanism in the utility model realizes the accurate lifting of panel through the cooperation of inclined block and sliding block, to realize the contact of probe block on the panel and the test product in the placing groove on the test board and complete the test.
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Description

Technical Field

[0001] This utility model belongs to the technical field of semiconductor testing, and in particular relates to an ATE testing device. Background Technology

[0002] In the field of integrated circuit testing, ATE (Automatic Test Equipment) is a key device used to verify the electrical performance, signal integrity, timing, and functionality of digital chips.

[0003] Traditional ATE test heads typically rely on manual operation to dock and calibrate probes with chips during chip testing. This results in problems such as low positioning accuracy, poor operational efficiency, and poor repeatability. Especially in scenarios involving large-volume, multi-channel, high-speed signal testing, manual adjustments are difficult to meet the requirements of high precision and high consistency. Utility Model Content

[0004] The main objective of this invention is to provide an ATE testing device to address the shortcomings of existing technologies.

[0005] To achieve the above objectives, the present invention provides the following technical solution: An ATE testing device includes a chassis. Support plates are symmetrically mounted on both ends of the top of the chassis in the height direction. A panel is slidably connected above the support plates. Several probe blocks are placed on the panel. A test plate is fixedly connected to the support plates above the panel. The test plate has several placement slots for placing test samples that cooperate with the probe blocks. A lifting mechanism connected to the support plates is also installed on the top of the chassis. The lifting mechanism is used to push the panel towards the test plate so that the probe blocks contact the test samples.

[0006] Preferably, the lifting mechanism includes a servo motor, a lead screw, a guide rail, a first slider, an inclined block, a slide rail, a second slider, and a connecting block. The lead screw is connected to the output shaft of the servo motor, the guide rail is connected to the inside of the servo motor, and the end of the guide rail is connected to the end of the lead screw. The first slider is slidably connected to the guide rail, the inclined block is fixedly connected to the first slider, the slide rail is fixed on the inclined block, the second slider is slidably connected to the slide rail, the bottom of the connecting block is fixedly connected to the second slider, and the top of the connecting block is fixedly connected to the bottom of the panel.

[0007] Preferably, the support plate has a groove, the servo motor is installed in the groove, and the direction in which the first slider slides along the guide rail is perpendicular to the height direction of the support plate.

[0008] Preferably, the inclined side of the inclined block forms an angle with the direction in which the first slider slides along the guide rail.

[0009] Preferably, the panel has slots at its four corners, and the test plate has fixing holes at its four corners that are coaxial with the slots. Each support plate has fixing rods installed at both ends of its top. Each fixing rod passes through the coaxial slots and fixing holes and is fixedly connected to the fixing holes by fixing screws to fix the test plate to the support plate.

[0010] Preferably, the diameter of the slot is larger than the diameter of the fixing rod.

[0011] Preferably, adjustment holes are provided at the four corners of the panel, the adjustment holes are located beside the slot, and guide rods are installed at both ends of the top of the support plate. The guide rods slide with the adjustment holes to provide guidance for the panel to move along the direction of the test plate.

[0012] Preferably, a sensor is mounted on the support plate, and the sensor extends through the panel and the test plate.

[0013] Compared with the prior art, the present invention will have at least the following beneficial effects: This invention achieves automatic panel raising and lowering through a lifting mechanism, avoiding the positioning errors and inefficiencies associated with traditional manual operation. The cooperative structure of the inclined block and slider ensures a smooth and precise lifting process, effectively guaranteeing reliable contact between the probe block and the test sample. The design with multiple probe blocks and multiple placement slots supports parallel testing, significantly increasing the test volume and improving testing efficiency. A position sensor monitors the contact status between the probe block and the test sample in real time, enhancing testing accuracy and automation. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are merely exemplary embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort, wherein: Figure 1 This is a schematic diagram of the structure of an ATE testing device according to the present invention; Figure 2 This is a top view of an ATE testing device according to the present invention; Figure 3 This is a partial structural schematic diagram of an ATE testing device according to the present invention; Figure 4 for Figure 3 Enlarged view of point A in the image; Figure 5 for Figure 3 Side sectional view; Figure 6 for Figure 3 Rear view; Figure 7 This is a schematic diagram of the lifting mechanism of an ATE testing device according to the present invention.

[0015] The reference numerals in the figures include: 1. Chassis; 2. Support plate; 3. Panel; 4. Probe block; 5. Test board; 6. Placement slot; 7. Servo motor; 8. Lead screw; 9. Guide rail; 10. First slider; 11. Inclined block; 12. Slide rail; 13. Second slider; 14. Connecting block; 15. Groove; 16. Slot hole; 17. Fixing hole; 18. Fixing rod; 19. Adjustment hole; 20. Guide rod; 21. Sensor. Detailed Implementation

[0016] The technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are merely exemplary embodiments of this utility model, and not the only embodiments.

[0017] like Figures 1 to 7 As shown, an ATE testing device includes a chassis 1. Support plates 2 are symmetrically mounted on both ends of the top of the chassis 1 in the height direction. A panel 3 is slidably connected above the support plates 2. Several probe blocks 4 are placed on the panel 3. A test plate 5, which is fixedly connected to the support plates 2, is mounted above the panel 3. Several placement slots 6, which cooperate with the probe blocks 4, are provided on the test plate 5 for placing test samples. A lifting mechanism connected to the support plates 2 is also installed on the top of the chassis 1. The lifting mechanism is used to push the panel 3 towards the test plate 5 so that the probe blocks 4 contact the test samples. It can be understood that each support plate 2 is connected to a lifting mechanism, which is used to improve the lifting efficiency of the panel 3 and ensure that the panel 3 remains balanced when lifted, thereby improving the contact accuracy between the probe blocks 4 and the test samples.

[0018] During testing, the ATE product to be tested is placed in the placement slot 6, and the lifting mechanism pushes the panel 3 toward the test plate 5 so that the probe block 4 contacts the ATE product to be tested and the test is completed. It should be noted that there are several probe blocks 4 on the panel 3 and several placement slots 6 on the test plate 5, that is, the ATE testing device of this embodiment can test multiple ATE products at the same time.

[0019] Understandably, once the ATE product testing is complete, the lifting mechanism will return to its original position, restoring panel 3 to its original position.

[0020] like Figure 7As shown, the lifting mechanism includes a servo motor 7, a lead screw 8, a guide rail 9, a first slider 10, an inclined block 11, a slide rail 12, a second slider 13, and a connecting block 14. The lead screw 8 is connected to the output shaft of the servo motor 7. The guide rail 9 is connected to the inside of the servo motor 7, and the end of the guide rail 9 is connected to the end of the lead screw 8. The first slider 10 is slidably connected to the guide rail 9. The inclined block 11 is fixedly connected to the first slider 10 so that the inclined block 11 moves back and forth along the guide rail 9 together with the first slider 10. The slide rail 12 is fixed on the inclined block 11. The second slider 13 is slidably connected to the slide rail 12. The bottom of the connecting block 14 is fixedly connected to the second slider 13, and the top of the connecting block 14 is fixedly connected to the bottom of the panel 3.

[0021] Understandably, the connecting block 14 always remains in contact with the panel 3, and the connecting block 14 is fixedly connected to the second slider 13. The second slider 13 is slidably connected to the slide rail 12. Therefore, when the inclined block 11 moves back and forth along the guide rail 9 together with the first slider 10, the second slider 13 moves back and forth along the slide rail 12 on the inclined side of the inclined block 11, thereby driving the connecting block 14, which is fixedly connected to the second slider 13, to move up and down, and thereby pushing the panel 3, which is fixedly connected to the connecting block 14, to move up and down, thereby pushing the panel 3 towards the test plate 5, so as to achieve contact between the probe block 4 and the test sample in the placement slot 6 and complete the ATE test. The inclined side of the inclined block 11 forms an angle with the direction in which the first slider 10 slides along the guide rail 9.

[0022] The working principle of the lifting mechanism in this embodiment: Start the servo motor 7, which drives the lead screw 8 connected to the servo motor 7 to rotate, and drives the guide rail 9 to move. This causes the first slider 10 to slide along the guide rail 9, and then the inclined block 11 to slide along the guide rail 9 along with the first slider 10. As the inclined block 11 moves, the second slider 13 slides along the slide rail 12 on the inclined side of the inclined block 11. The connecting block 14 moves upward, and the panel 3, which is fixedly connected to the connecting block 14, moves upward. The probe block 4 contacts the test sample in the placement slot 6. The servo motor 7 stops working. After the ATE test is completed, flip the servo motor 7, and the lead screw 8 rotates in the opposite direction, causing the inclined block 11 to slide in the opposite direction along the guide rail 9 along with the first slider 10. The second slider 13 slides in the opposite direction along the inclined side of the slide rail 12. The connecting block 14 moves downward, and the panel 3, which is fixedly connected to the connecting block 14, moves downward. The probe block 4 disengages from the test sample, and the tested product can be removed from the placement slot 6.

[0023] This embodiment achieves automatic raising and lowering of panel 3 by setting up a lifting mechanism, avoiding the positioning errors and inefficiencies caused by traditional manual operation. The cooperative structure of the inclined block 11 and the slider makes the raising and lowering process smooth and precise, effectively ensuring reliable contact between probe block 4 and test sample.

[0024] The support plate 2 has a groove 15, and the servo motor 7 is installed in the groove 15. The first slider 10 slides along the guide rail 9 in a direction perpendicular to the height direction of the support plate 2. This arrangement can save the space occupied by the servo motor 7 on the chassis 1.

[0025] The panel 3 has slots 16 at its four corners, and the test plate 5 has fixing holes 17 at its four corners that are coaxial with the slots 16. Each support plate 2 has a fixing rod 18 installed at both ends of its top. Each fixing rod 18 passes through the coaxial slots 16 and fixing holes 17 and is fixedly connected to the fixing holes 17 by fixing screws so that the test plate 5 is fixedly connected to the support plate 2. This arrangement can ensure that the test plate 5 can be fixed on the support plate 2 and located above the panel 3.

[0026] The diameter of the slot 16 is larger than the diameter of the fixing rod 18. This ensures that the fixing rod 18 can pass smoothly through the slot 16 without causing damage to the panel 3, and avoids damage to the panel 3 due to the friction generated by the contact between the fixing rod 18 and the panel 3.

[0027] Adjustment holes 19 are provided at the four corners of the panel 3. The adjustment holes 19 are located next to the slot 16. Guide rods 20 are installed at both ends of the top of the support plate 2. The guide rods 20 slide with the adjustment holes 19 to provide guidance for the panel 3 to move along the test plate 5.

[0028] A sensor 21 is installed on the support plate 2. The sensor 21 passes through the panel 3 and the test plate 5. The sensor 21 is a position sensor. Specifically, the position sensor 21 is installed on the inner side of both ends of the two support plates 2. It is used to sense the contact signal between the probe block 4 and the product to be tested in the placement slot 6. After the position sensor 21 contacts the signal, it can transmit the position signal to the controller, and the controller will send the signal command to the lifting mechanism to adjust the contact position between the probe block 4 and the product to be tested.

[0029] The above description is merely a preferred embodiment of this utility model. The protection scope of this utility model is not limited to the above embodiments. All technical solutions falling within the scope of this utility model's concept are protected. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should also be considered within the protection scope of this utility model.

Claims

1. An ATE testing apparatus, comprising a chassis (1), characterized in that, Support plates (2) are symmetrically installed at both ends of the top of the chassis (1) in the height direction. A panel (3) is slidably connected above the support plate (2). Several probe blocks (4) are placed on the panel (3). A test plate (5) is fixedly connected to the support plate (2) above the panel (3). Several placement slots (6) for placing test samples are opened on the test plate (5) to cooperate with the probe blocks (4). A lifting mechanism connected to the support plate (2) is also installed on the top of the chassis (1). The lifting mechanism is used to push the panel (3) towards the test plate (5) so that the probe blocks (4) contact the test samples.

2. The ATE testing apparatus according to claim 1, characterized in that, The lifting mechanism includes a servo motor (7), a lead screw (8), a guide rail (9), a first slider (10), an inclined block (11), a slide rail (12), a second slider (13), and a connecting block (14). The lead screw (8) is connected to the output shaft of the servo motor (7). The guide rail (9) is connected to the inside of the servo motor (7). The end of the guide rail (9) is connected to the end of the lead screw (8). The first slider (10) is slidably connected to the guide rail (9). The inclined block (11) is fixedly connected to the first slider (10). The slide rail (12) is fixed on the inclined block (11). The second slider (13) is slidably connected to the slide rail (12). The bottom of the connecting block (14) is fixedly connected to the second slider (13). The top of the connecting block (14) is fixedly connected to the bottom of the panel (3).

3. The ATE testing apparatus according to claim 2, characterized in that, The support plate (2) has a groove (15) inside, the servo motor (7) is installed in the groove (15), and the first slider (10) slides along the guide rail (9) in a direction perpendicular to the height direction of the support plate (2).

4. An ATE testing apparatus according to claim 3, characterized in that, The inclined side of the inclined block (11) forms an angle with the direction in which the first slider (10) slides along the guide rail (9).

5. An ATE testing apparatus according to claim 1, characterized in that, The panel (3) has slots (16) at its four corners, and the test plate (5) has fixing holes (17) at its four corners that are coaxial with the slots (16). Each support plate (2) has a fixing rod (18) installed at both ends of its top. Each fixing rod (18) passes through the coaxial slots (16) and fixing holes (17) and is fixedly connected to the fixing holes (17) by fixing screws so that the test plate (5) is fixedly connected to the support plate (2).

6. An ATE testing apparatus according to claim 5, characterized in that, The diameter of the slot (16) is larger than the diameter of the fixing rod (18).

7. An ATE testing apparatus according to claim 5, characterized in that, The panel (3) is provided with adjustment holes (19) at its four corners. The adjustment holes (19) are located on the side of the slot (16). The top two ends of the support plate (2) are equipped with guide rods (20). The guide rods (20) slide with the adjustment holes (19) to provide guidance for the panel (3) to move along the test plate (5).

8. An ATE testing apparatus according to claim 1, characterized in that, A sensor (21) is installed on the support plate (2), and the sensor (21) passes through the panel (3) and the test plate (5).