A chip burn-in test temperature uniformity device

CN224803177UActive Publication Date: 2026-09-25WUXI FUTURE SEMICON CO LTD
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Patent Information

Application Number
CN202522208076.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-20
Publication Date
2026-09-25
Estimated Expiration
2035-10-20

AI Technical Summary

Technical Problem

[0005]为了弥补以上不足,本实用新型提供了一种芯片老化测试温度均匀性装置,旨在改善了现有技术中芯片在测试过程中保持静置状态,加热元件产生的热量易在腔体内形成局部聚集,导致芯片靠近加热元件的一侧温度偏高、远离一侧温度偏低,形成明显温度梯度,而且芯片在箱体内部没对其限位,当热风较大时,还会导致芯片出现晃动,从而导致芯片检测不准确的问题

Benefits of technology

本实用新型中圆盘内侧齿轮啮合四组齿板,齿板连限位块和夹块,齿轮转动时能带动四组夹块同步伸缩,避免芯片受力不均被损伤,无需更换夹具即可适配不同尺寸芯片,且夹持结构轻便,而且与芯片接触面积小,对芯片测试干扰少。

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Abstract

The utility model relates to a chip field discloses a kind of chip burn-in test temperature uniformity device, including test box, the inside fixed mounting of test box is placed box, the both sides of the placed box are evenly provided with several groups of placing frame, the front side of the placing frame is fixedly installed with the inside of placed box and rear side and placed box, the inside fixed mounting of placed box has two groups of electric heating wire, the inside of placed box is provided with disc, the outside of disc is provided with the limiting assembly for chip and is limited, the inside of placing frame is provided with the rotating assembly for driving disc and rotates. In the utility model disc inside gear mesh four groups of toothed plate, toothed plate is connected with limiting block and clamping block, gear rotation can drive four groups of clamping block synchronous expansion and contraction, avoid chip and be damaged by uneven stress, without replacing fixture can be adapted to different size chip, and clamping structure is light, and with chip contact area is small, and chip test interference is less.
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Description

Technical Field

[0001] This utility model relates to the field of chip aging, and in particular to a device for chip aging test temperature uniformity. Background Technology

[0002] A chip, short for integrated circuit chip, refers to a miniature electronic device that integrates multiple electronic components onto a semiconductor substrate such as silicon wafer or gallium arsenide through processes such as photolithography and etching. It has a specific circuit function and its size is usually only a few square millimeters to a few square centimeters, but it can realize complex functions such as data processing, signal control, and storage. It is the core component of modern electronic devices.

[0003] Existing patent publication number: CN214473745U, discloses a chip aging test chamber, including a chamber body with a test cavity, a door rotatably mounted on the chamber body, and an air supply system and an air duct inside the chamber body. The air duct includes a heating cavity located above the top wall of the test cavity, an air supply duct located on one side of the test cavity, and a return air duct located on the other side of the test cavity. The heating cavity, the air supply duct, the test cavity, and the return air duct are sequentially connected. This utility model combines the air supply system and the air duct to form a circulation system. This circulation system ensures uniform temperature within the test cavity, guarantees a high uniformity index, and meets the temperature setting requirements, thus ensuring the chip aging test effect.

[0004] While the aforementioned patent can perform heating tests on chips, the chips remain stationary during the test, and the heat generated by the heating element tends to accumulate locally within the cavity. This results in a temperature gradient where the side of the chip closer to the heating element is hotter and the side further away is colder. Moreover, the lack of restraint on the chip inside the chamber means that it may shake when the hot air is strong, leading to inaccurate chip testing. Therefore, a chip aging test temperature uniformity device is proposed to solve the above problems. Utility Model Content

[0005] To overcome the above shortcomings, this utility model provides a chip aging test temperature uniformity device, which aims to improve the existing technology where the chip is kept in a static state during the test, and the heat generated by the heating element is prone to local accumulation in the cavity, resulting in a higher temperature on the side of the chip closer to the heating element and a lower temperature on the side farther away, forming an obvious temperature gradient. Moreover, the chip is not restrained inside the chamber, and when the hot air is strong, it will also cause the chip to shake, thus leading to inaccurate chip detection.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A chip aging test temperature uniformity device includes a test box, a placement box fixedly installed inside the test box, several sets of placement frames arranged on both sides of the placement box, the front and rear sides of the placement frames fixedly installed inside the placement box, two sets of electric heating wires fixedly installed inside the placement box, a disk arranged inside the placement box, a limiting component for chip positioning arranged on the outer side of the disk, a rotating component for driving the disk to rotate arranged inside the placement frames, two sets of temperature sensors fixedly installed inside the test box, and displays fixedly installed on both sides of the front of the test box, with the output terminals of the temperature sensors and the input terminals of the displays electrically connected. As a further description of the above technical solution: The limiting component includes clamping blocks. Each set of discs has four clamping blocks on its outer side. A limiting block is fixedly installed on the inner side of the clamping blocks. The inner side of the limiting block extends through to the inner end of the disc and is slidably installed with the disc. A gear is movably installed on the inner end of the disc. Each set of discs has four sets of toothed plates on its inner side. The toothed plates mesh with the gears. The outer side of the toothed plates is fixedly installed with the inner side of the limiting blocks. As a further description of the above technical solution: An electric push rod is fixedly installed on the inner side of the disk, and a connecting block is fixedly installed on the telescopic end of the electric push rod. One side of the connecting block and one side of one set of toothed plates are fixedly installed. As a further description of the above technical solution: The rotating assembly includes several sets of rotating rods. The inner ends of the rotating rods are rotatably mounted to the inner wall of the placement frame. A worm gear is fixedly mounted on the surface of the rotating rod. A motor is fixedly mounted inside the placement frame. A worm is fixedly mounted on the output end of the motor. The worm meshes with the worm gear. The bottom of the worm is movably mounted to the inner wall of one set of placement frames. The outer end of the rotating rod penetrates into the interior of the placement frame and is fixedly mounted to the inner end of the disc. The rotating rod is movably mounted to a gear. As a further description of the above technical solution: A protective cover is fixedly installed on the outer side of the disc, a slider is fixedly installed on the left side of the toothed plate, and a groove is provided on the inner wall of the protective cover. The slider and the groove are slidably installed. As a further description of the above technical solution: The test box is provided with cover plates on both sides, and the four corners on the left side of the cover plates are detachably installed to the test box by bolts. As a further description of the above technical solution: The test box has two sets of guide tubes fixedly installed inside, and the guide tubes are located on both sides of the box.

[0007] This utility model has the following beneficial effects: In this invention, the inner gear of the disc meshes with four sets of toothed plates. The toothed plates are connected to limiting blocks and clamping blocks. When the gear rotates, it can drive the four sets of clamping blocks to extend and retract synchronously, avoiding uneven force on the chip and damage. It can adapt to chips of different sizes without changing the clamps. The clamping structure is lightweight and has a small contact area with the chip, resulting in less interference to chip testing.

[0008] In this invention, the motor inside the frame drives the worm gear to rotate, which in turn drives multiple sets of worm wheels to rotate synchronously. The rotation of the worm wheels causes the rotating rod to rotate and the disc to rotate at a uniform speed, ensuring that the chip is heated evenly. The worm gear has self-locking properties, so the disc will not rotate due to inertia after the motor stops, thus improving operational safety. Attached Figure Description

[0009] Figure 1 This is a front view of the test box of this utility model; Figure 2 This is a cross-sectional view of the test box of this utility model; Figure 3 This is a cross-sectional view of the protective cover of this utility model; Figure 4 This is a left-side view of the disc of this utility model; Figure 5 This utility model Figure 4 Enlarged structural diagram at point A in the middle; Figure 6 This utility model Figure 2 Enlarged structural diagram at point B in the middle.

[0010] Legend: 1. Test box; 2. Placement box; 3. Placement frame; 4. Electric heating wire; 5. Disc; 6. Limiting assembly; 61. Clamping block; 62. Limiting block; 63. Gear; 64. Tooth plate; 65. Electric push rod; 66. Connecting block; 7. Rotating assembly; 71. Rotating rod; 72. Worm gear; 73. Motor; 74. Worm; 8. Temperature sensor; 9. Display; 10. Protective cover; 11. Slider; 12. Slide groove; 13. Cover plate; 14. Guide tube. Detailed Implementation

[0011] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0012] Reference Figure 1-6This utility model provides an embodiment of a chip aging test temperature uniformity device, comprising a test box 1, a placement box 2 fixedly installed inside the test box 1, several sets of placement frames 3 arranged on both sides of the placement box 2, the front and rear sides of the placement frames 3 fixedly installed inside the placement box 2, two sets of electric heating wires 4 fixedly installed inside the placement box 2, a disc 5 arranged inside the placement box 2, a limiting component 6 for chip positioning arranged on the outer side of the disc 5, a rotating component 7 for driving the disc 5 to rotate inside the placement frames 3, two sets of temperature sensors 8 fixedly installed inside the test box 1, and displays 9 fixedly installed on both sides of the front of the test box 1. The output end of the temperature sensor 8 and the input end of the display 9 are electrically connected. The rotating component 7 drives the disc 5 to rotate, which, together with the electric heating wires 4 inside the placement box 2, allows the chip to be heated more uniformly. The temperature sensor 8 collects the temperature inside the test box 1 in real time, and the data is transmitted to the display 9 for viewing, reducing manual inspection errors. In addition, the multiple sets of placement frames 3 on both sides of the placement box 2 can fix multiple sets of discs 5 with chips at the same time, improving testing efficiency.

[0013] Reference Figure 1-6 The limiting component 6 includes clamping blocks 61. Each set of discs 5 has four clamping blocks 61 on its outer side. A limiting block 62 is fixedly installed on the inner side of the clamping blocks 61. The inner side of the limiting block 62 extends through to the inner end of the disc 5 and is slidably installed with the disc 5. A gear 63 is movably installed on the inner end of the disc 5. Each set of discs 5 has four sets of toothed plates 64 on its inner side. The toothed plates 64 mesh with the gears 63. The outer side of the toothed plates 64 is fixedly installed with the inner side of the limiting blocks 62. The inner side of the disc 5... Gear 63 meshes with four sets of toothed plates 64. The toothed plates 64 are connected to a limiting block 62 and a clamping block 61. When gear 63 rotates, it drives the four sets of clamping blocks 61 to extend and retract synchronously, preventing uneven force on the chip and thus avoiding damage. It can adapt to chips of different sizes without changing the clamps, and the clamping structure is lightweight. Furthermore, the small contact area with the chip minimizes interference during chip testing. An electric push rod 65 is fixedly installed on the inner side of the disc 5. A connecting block 66 is fixedly installed at the telescopic end of the electric push rod 65. One side of the disc 6 and one side of one set of toothed plates 64 are fixedly installed. The electric push rod 65 inside the disc 5 is connected to a set of toothed plates 64 through the connecting block 66. When the electric push rod 65 extends and retracts, it can drive the gear 63 and the remaining toothed plates 64 to move, so that the clamping block 61 can automatically clamp the chip and reduce the error of manual adjustment. A protective cover 10 is fixedly installed on the outside of the disc 5. A slider 11 is fixedly installed on the left side of the toothed plate 64. A groove 12 is opened on the inner wall of the protective cover 10. The slider 11 and the groove 12 are slidably installed. The protective cover 10 on the outside of the disc 5 can block dust and impurities from entering the area of ​​the toothed plate 64 and the gear 63, avoid transmission jamming, and extend the life of the limiting component 6. The slider 11 on the left side of the toothed plate 64 slides in the groove 12 on the inner wall of the protective cover 10, which can guide the toothed plate 64 to move smoothly, prevent the toothed plate 64 from disengaging from the gear 63, and also enhance the integrity of the toothed plate 64 and the protective cover 10, reducing the error when clamping the chip.

[0014] Reference Figure 1-6 The rotating assembly 7 includes several sets of rotating rods 71. The inner ends of the rotating rods 71 ​​are rotatably mounted to the inner wall of the placement frame 3. Worm gears 72 are fixedly mounted on the surface of the rotating rods 71. A motor 73 is fixedly mounted inside the placement frame 3. A worm 74 is fixedly mounted on the output end of the motor 73. The worm 74 meshes with the worm gears 72. The bottom of the worm 74 is movably mounted to the inner wall of one of the placement frames 3. The outer end of the rotating rods 71 ​​penetrates into the interior of the placement frame 3 and is fixedly mounted to the inner end of the disc 5. The rotating rods 71 ​​and gears 63 are movably mounted. Inside the placement frame 3, the motor 73 drives the worm 74 to rotate. The worm 74 drives multiple sets of worm gears 72 to rotate synchronously. The rotation of the worm gears 72 drives the rotating rods 71 ​​to rotate and the disc 5 to rotate at a uniform speed, ensuring uniform heating of the chip. The worm gears 72 and worm 74 have self-locking properties, so the disc 5 will not rotate due to inertia after the motor 73 stops, facilitating lifting operations. For safety, both sides of the test box 1 are equipped with cover plates 13. The four corners on the left side of the cover plate 13 are detachably installed to the test box 1 by bolts. The cover plates 13 on both sides of the test box 1 are fixed by bolts. The cover plates 13 can be removed by unscrewing the bolts, which is convenient for the inspection or replacement of the internal components of the test box 1. After removing the cover plate 13, different sizes of discs 5 or limiting components 6 can be replaced to adapt to the testing of various chips. When the cover plate 13 is closed, it has good sealing performance, which can reduce the heat loss inside the test box 1 and avoid the external environment from interfering with the test temperature. Two sets of guide tubes 14 are fixedly installed inside the test box 1. The guide tubes 14 are located on both sides of the placement box 2. The guide tubes 14 on both sides of the placement box 2 inside the test box 1 can guide the hot airflow generated by the electric heating wire 4 to flow along the guide tubes 14 towards the chip direction, avoiding local airflow turbulence that causes uneven temperature. The rotation of the disc 5 further improves the temperature uniformity inside the box.

[0015] Working principle: First, the cover plate 13 is removed using bolts. Then, the chip to be tested is placed between the clamping blocks 61 on the outside of the disk 5. According to the chip size, the electric push rod 65 on the inside of the disk 5 is activated. The electric push rod 65 drives a set of toothed plates 64 to move through the connecting block 66. The toothed plates 64 mesh with the gears 63, driving the other three sets of toothed plates 64 to move synchronously. This, in turn, drives the four sets of clamping blocks 61 to approach and clamp the chip through the limit block 62 until the chip is fixed and secure. Finally, the cover plate 13 is closed, and the test parameters are preset. The cover plate 13 is reset and the bolts are tightened to ensure the test box 1 is sealed. The heating element 4 is then energized, and the motor 73 is started simultaneously. The motor 73 drives the worm gear 74 at the output end to rotate. The worm gear 74 meshes with the worm wheel 72 inside the placement frame 3, causing the rotating rod 71 and the disc 5 to rotate synchronously and uniformly. The hot airflow generated by the heating element 4 flows directionally towards the chip under the guidance of the guide tubes 14 on both sides of the placement box 2. The operator can view the temperature data inside the test box 1 collected by the temperature sensor 8 in real time through the display 9 on the front of the test box 1 to ensure that the temperature is stable within the preset range. If any abnormality occurs, the heating parameters are adjusted in time.

[0016] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A chip aging test temperature uniformity device, comprising a test box (1), characterized in that: The test box (1) has a placement box (2) fixedly installed inside. Several sets of placement frames (3) are provided on both sides of the placement box (2). The front and rear sides of the placement frames (3) are fixedly installed inside the placement box (2). Two sets of electric heating wires (4) are fixedly installed inside the placement box (2). A disc (5) is provided inside the placement box (2). A limiting component (6) for chip positioning is provided on the outside of the disc (5). A rotating component (7) for driving the disc (5) to rotate is provided inside the placement frame (3). Two sets of temperature sensors (8) are fixedly installed inside the test box (1). A display (9) is fixedly installed on both sides of the front of the test box (1). The output end of the temperature sensor (8) is electrically connected to the input end of the display (9).

2. The chip aging test temperature uniformity device according to claim 1, characterized in that: The limiting component (6) includes clamping blocks (61). Each set of discs (5) has four sets of clamping blocks (61) on its outer side. A limiting block (62) is fixedly installed on the inner side of the clamping block (61). The inner side of the limiting block (62) extends through to the inner end of the disc (5) and slides with the disc (5). A gear (63) is movably installed on the inner end of the disc (5). Each set of discs (5) has four sets of toothed plates (64) on its inner side. The toothed plates (64) mesh with the gears (63). The outer side of the toothed plates (64) and the inner side of the limiting block (62) are fixedly installed.

3. The chip aging test temperature uniformity device according to claim 2, characterized in that: An electric push rod (65) is fixedly installed on the inner side of the disc (5). A connecting block (66) is fixedly installed on the telescopic end of the electric push rod (65). One side of the connecting block (66) and one side of one set of toothed plates (64) are fixedly installed.

4. The chip aging test temperature uniformity device according to claim 2, characterized in that: The rotating assembly (7) includes several sets of rotating rods (71). The inner end of the rotating rod (71) is rotatably mounted to the inner wall of the placement frame (3). A worm gear (72) is fixedly mounted on the surface of the rotating rod (71). A motor (73) is fixedly mounted inside the placement frame (3). A worm (74) is fixedly mounted on the output end of the motor (73). The worm (74) meshes with the worm gear (72). The bottom of the worm (74) is movably mounted to the inner wall of one of the placement frames (3). The outer end of the rotating rod (71) penetrates into the interior of the placement frame (3) and is fixedly mounted to the inner end of the disc (5). The rotating rod (71) and the gear (63) are movably mounted.

5. The chip aging test temperature uniformity device according to claim 2, characterized in that: A protective cover (10) is fixedly installed on the outer side of the disc (5), and a slider (11) is fixedly installed on the left side of the toothed plate (64). A groove (12) is opened on the inner wall of the protective cover (10), and the slider (11) and the groove (12) are slidably installed.

6. The chip aging test temperature uniformity device according to claim 1, characterized in that: The test box (1) is provided with cover plates (13) on both sides. The four corners on the left side of the cover plates (13) are detachably installed with the test box (1) by bolts.

7. The chip aging test temperature uniformity device according to claim 1, characterized in that: The test box (1) is fixedly installed with two sets of guide tubes (14), which are located on both sides of the placement box (2).

Citation Information

Patent Citations

  • Chip aging test box

    CN214473745U