A mold substrate positioning aid for a nanoimprint apparatus

Abstract

The utility model discloses a mould base sheet positioning auxiliary device for nanoimprint equipment relates to the field of auxiliary positioning, including the linear module of installation on the lower die holder and fixed on the storage shell of upper die holder, the linear module includes the sliding block, fixed with the axle rod on the sliding block, the telescopic section is rotationally connected on the axle rod, the telescopic section includes the eccentric hole of moving pipe with and the adjusting rod of sliding in the moving pipe, the adjusting rod is elastically connected with the moving pipe, the eccentric hole is adapted with the axle rod, one end of adjusting rod is fixed with the positioning assembly, the positioning assembly includes two vertical setting positioning rods, solve the problem that the mould base sheet is placed position not enough accurate leads to the incomplete transfer and adds the Topas film when the problem of the mould base sheet of the deviation adjustment is taken off.

Description

Technical Field

[0001] This utility model relates to the field of auxiliary positioning, and in particular to an auxiliary device for positioning mold substrates in nanoimprinting equipment. Background Technology

[0002] Nanoimprinting technology, as a novel micro-nano processing technology, uses imprinting adhesive to transfer micro-nano structures on a mold onto the material to be processed. To ensure that the structure on the mold can be accurately transferred to the target material, the position of the mold on the tray must first be guaranteed to be precise.

[0003] Desktop nanoimprinters, as miniaturized and portable devices, have shown significant advantages in the field of micro-nano fabrication, especially suitable for R&D prototype making, experimental testing and teaching scenarios. In the UV imprinting process, Topas foil is used as a template. First, the operator puts in the silicon wafer master and then adds the Topas film. In order to maximize the clarity of the hot-pressed Topas film, a blank silicon wafer is usually added on the back.

[0004] During this operation, if the mold substrate is not placed precisely, misalignment will result in unfilled areas on the target substrate surface, leading to incomplete pattern transfer. This defect directly affects product yield and increases production costs due to repeated processing. Furthermore, the lack of necessary positioning assistance when adding Topas film causes misalignment and adhesion to the master film during lamination, resulting in repeated adjustments that significantly increase operation time and may also deviate from the already positioned master film. Utility Model Content

[0005] The purpose of this invention is to provide a mold substrate positioning auxiliary device for nanoimprinting equipment to solve the problems of incomplete transfer caused by insufficient placement of the mold substrate and mold substrate misalignment during the adjustment of placement offset when adding Topas film.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a linear module mounted on a lower mold base and a storage shell fixed on an upper mold base. The linear module includes a slider, a shaft fixed on the slider, and a telescopic joint rotatably connected to the shaft. The telescopic joint includes a moving tube with an eccentric hole and an adjusting rod slidably inserted into the moving tube. The adjusting rod is elastically connected to the moving tube, the eccentric hole is adapted to the shaft, and a positioning component is fixed to one end of the adjusting rod. The positioning component includes two vertically arranged positioning rods.

[0007] As a further description of the above technical solution: the linear module also includes a guide rail, a pointer is fixed on the shaft, and multiple corresponding size slots are provided on the guide rail along the sliding direction of the slider, with the pointer corresponding to the corresponding size slot.

[0008] As a further description of the above technical solution: the moving tube is symmetrically provided with strip-shaped holes, and the end of the adjusting rod away from the positioning component is fixed with a limiting rod that slides along the strip-shaped holes. The adjusting rod and the moving tube are elastically connected by a spring.

[0009] As a further description of the above technical solution: the adjusting rod is connected to the two positioning rods via a Y-rod.

[0010] As a further description of the above technical solution: the linear module is arranged along the diagonal direction of the lower mold base.

[0011] As a further description of the above technical solution: the slider has a T-shaped structure, and a rubber pad is fixed on the upper surface of the horizontal part of the slider.

[0012] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0013] 1. This application uses a slider to drive a positioning rod, which enables quick matching of substrates with different outer diameters and ensures concentricity with the vacuum cavity, improving the flexibility of adaptation. The positioning rod assists in the bonding of the mold substrate and the edge of the film, quickly achieving concentric placement, reducing manual adjustment steps, and improving work efficiency.

[0014] 2. This application uses a positioning component and telescopic joint to allow the device to be rotated counterclockwise and stored in a storage shell. The depth design prevents interference with the vacuum chamber imprinting process, while ensuring the cleanliness and reusability of the equipment. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the linear module, telescopic joint, and positioning component of this utility model;

[0016] Figure 2 This is a schematic diagram of the storage shell structure of this utility model;

[0017] Figure 3 This is an exploded view of the linear module and telescopic joint of this utility model;

[0018] Figure 4 This is a schematic diagram of the slider structure of this utility model;

[0019] Figure 5 This is a schematic diagram of the movable tube structure of this utility model;

[0020] Figure 6 This is a schematic diagram of the positioning state of the mold substrate according to the present invention.

[0021] Legend:

[0022] 10. Linear module; 11. Guide rail; 111. Corresponding dimension slot; 12. Slider; 121. Shaft; 13. Pointer; 14. Rubber pad;

[0023] 20. Expansion joint; 21. Moving tube; 211. Strip hole; 212. Eccentric hole; 22. Adjusting rod; 23. Limiting rod; 24. Spring;

[0024] 30. Positioning component; 31. Y-bar; 32. Positioning rod;

[0025] 40. Storage case. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] like Figure 1 - Figure 6 As shown, this utility model provides a mold substrate positioning auxiliary device for a nanoimprinting equipment, including a linear module 10 mounted on a lower mold base and a storage shell 40 fixed on an upper mold base. The linear module 10 includes a slider 12, a shaft 121 fixed on the slider 12, and a telescopic joint 20 rotatably connected to the shaft 121. The telescopic joint 20 includes a moving tube 21 with an eccentric hole 212 and an adjusting rod 22 slidably inserted into the moving tube 21. The adjusting rod 22 is elastically connected to the moving tube 21. After the positioning rod 32 has finished positioning... The adjusting rod 22 is compressed and stored in the moving tube 21 to avoid interference between the positioning rod 32 and the mold base when it rotates counterclockwise around the shaft 121. The eccentric hole 212 is adapted to the shaft 121. One end of the adjusting rod 22 is fixed with a positioning component 30. The positioning component 30 includes two vertically arranged positioning rods 32. When the lower end of the positioning rod 32 is placed in the vacuum cavity of the lower mold base, the adjusting rod 22 is fixed on the linear module 10 with the cooperation of the eccentric hole 212 and the shaft 121, thereby completing the positioning of the positioning rod 32.

[0028] Meanwhile, by adjusting the slider 12, it can be used to adjust the mold substrate with different outer diameters;

[0029] The storage shell 40 has an open structure on the side facing the lower mold base, and the opening size is larger than the outer dimensions of the positioning component 30, the telescopic joint 20 and the linear module 10. At the same time, the depth is greater than the height of the positioning rod 32. After the positioning component 30, the telescopic joint 20 and the linear module 10 are used, they rotate counterclockwise around the shaft 121 and correspond to the bottom of the storage shell 40, so as not to affect the normal imprinting of the vacuum cavity of the lower mold base, and at the same time, it is convenient to store the positioning component 30, the telescopic joint 20 and the linear module 10.

[0030] like Figure 1 , Figure 3 , Figure 4 As shown, the linear module 10 also includes a guide rail 11, which is fixed to the lower mold base by bolts. A pointer 13 is fixed on the shaft 121. The pointer 13 is L-shaped and one end slides against the guide rail 11. The guide rail 11 has multiple corresponding size slots 111 distributed along the sliding direction of the slider 12. The pointer 13 corresponds to the corresponding size slot 111. Each corresponding size slot 111 corresponds to the outer diameter of a mold base. The slider 12 drives the pointer 13 to slide. When the pointer 13 points to the corresponding size slot 111, it indicates the size of the mold base. The mold base and the vacuum cavity of the lower mold base are concentric.

[0031] like Figure 1 , Figure 3 , Figure 5 As shown, the adjusting rod 22 is slidably inserted into the moving tube 21, and the symmetrically opened strip hole 211 of the moving tube 21 is connected to the inside of the moving tube 21. The end of the adjusting rod 22 away from the positioning component 30 is fixed with a limiting rod 23 that slides along the strip hole 211. The adjusting rod 22 and the moving tube 21 are elastically connected by a spring 24. Under the elastic rebound of the spring 24, the adjusting rod 22 always abuts against the inner wall of the strip hole 211 away from the shaft 121.

[0032] It is worth noting that the spring 24 is always in an elastic compression state under normal conditions, and the elastic rebound force is always greater than the force between the mold base and the positioning rod 32. Therefore, when the mold base is pressed against the positioning rod 32, it can be ensured that the adjusting rod 22 will not retract into the moving tube 21.

[0033] The adjusting rod 22 is connected to the two positioning rods 32 via the Y rod 31. After the mold base is placed, the adjusting rod 22 is retracted into the moving tube 21 by pressing the positioning rod 32 with a finger under the action of the Y rod 31. Then, the moving tube 21 is flipped upward to disengage from the vacuum cavity of the lower mold base, thereby avoiding interference between the positioning rod 32 and the mold base during the flipping process.

[0034] like Figure 6As shown, by setting the linear module 10 along the diagonal direction of the lower mold base, the maximum extension length of the telescopic joint 20 is ensured without changing the overall size of the nanoimprinter.

[0035] like Figure 4 As shown, the slider 12 has a T-shaped structure, and a rubber pad 14 is fixed on the upper surface of the horizontal part of the slider 12. When the slider 12 is adjusted and locked onto the guide rail 11 through the eccentric hole 212, the rubber pad 14 fixed on the upper surface of the horizontal part (that is, the lower horizontal part) of the slider 12 serves two purposes: first, to buffer, and second, to increase the friction coefficient between the slider 12 and the guide rail 11.

[0036] Working principle: Under normal conditions, the shaft 121 is close to the vacuum chamber of the lower module. At this time, the positioning rod 32 is away from the vacuum chamber, and the end of the positioning rod 32 away from the Y rod 31 is facing upward. At this time, the desktop nanoimprinter can be opened and closed normally.

[0037] When an imprinting operation is required, the moving tube 21 is pulled according to the size of the mold substrate. The moving tube 21 drives the shaft 121 through the eccentric hole 212, so that the slider 12 slides along the guide rail 11 and the pointer 13 points to the corresponding size groove 111 that corresponds to the size of the mold substrate.

[0038] Then the moving tube 21 is rotated 180 degrees clockwise around the shaft 121. During this process, the distance between the axis of the eccentric hole 212 and the guide rail 11 gradually increases. At this time, with the cooperation of the moving tube 21, the slider 12 and the guide rail 11, the moving tube 21 is pressed and fixed on the guide rail 11.

[0039] This allows the moving tube 21 to rest against the lower mold base. At this time, the positioning rod 32 is placed inside the vacuum chamber. The edge of the mold base is then attached to the two positioning rods 32 and lowered, which helps to place the mold base concentrically with the vacuum chamber.

[0040] Furthermore, when adding the film, the edge of the film is placed against the two positioning rods 32 to position the film.

[0041] After positioning is completed, the positioning rod 32 and the adjusting rod 22 are compressed into the moving tube 21, the spring 24 is compressed elastically, and the moving tube 21 is rotated 180 degrees counterclockwise around the shaft 121. Then the slider 12 is slid close to the position of the vacuum chamber.

[0042] Finally, closing the upper mold base and the lower mold base allows the positioning rod 32 and the telescopic joint 20 to be stored in the groove of the storage shell 40.

[0043] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A mold substrate positioning auxiliary device for nanoimprint equipment, characterized in that: The system includes a linear module (10) mounted on a lower mold base and a storage shell (40) fixed on an upper mold base. The linear module (10) includes a slider (12), a shaft (121) fixed on the slider (12), and a telescopic joint (20) rotatably connected to the shaft (121). The telescopic joint (20) includes a moving tube (21) with an eccentric hole (212) and an adjusting rod (22) slidably inserted in the moving tube (21). The adjusting rod (22) is elastically connected to the moving tube (21), and the eccentric hole (212) is adapted to the shaft (121). One end of the adjusting rod (22) is fixed with a positioning component (30), and the positioning component (30) includes two vertically arranged positioning rods (32).

2. The mold substrate positioning auxiliary device for nanoimprint equipment according to claim 1, characterized in that, The linear module (10) also includes a guide rail (11), a pointer (13) is fixed on the shaft (121), and a plurality of corresponding size slots (111) are opened on the guide rail (11) along the sliding direction of the slider (12), and the pointer (13) corresponds to the corresponding size slot (111).

3. The mold substrate positioning auxiliary device for a nanoimprinting equipment according to claim 1, characterized in that, The moving tube (21) has symmetrically opened strip-shaped holes (211), and the end of the adjusting rod (22) away from the positioning component (30) is fixed with a limiting rod (23) that slides along the strip-shaped hole (211). The adjusting rod (22) and the moving tube (21) are elastically connected by a spring (24).

4. The mold substrate positioning auxiliary device for a nanoimprinting equipment according to claim 1, characterized in that, The adjusting rod (22) is connected to the two positioning rods (32) via a Y-rod (31).

5. The mold substrate positioning auxiliary device for a nanoimprinting equipment according to claim 1, characterized in that, The linear module (10) is arranged along the diagonal direction of the lower mold base.

6. The mold substrate positioning auxiliary device for a nanoimprinting equipment according to claim 1, characterized in that, The slider (12) has a T-shaped structure, and a rubber pad (14) is fixed on the upper surface of the horizontal part of the slider (12).

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