A glue supply device for a glue developing machine

Abstract

The utility model discloses a kind of glue feeding devices of gluing developing machine, including gluing developing machine main body and glue storage barrel, the outer wall of gluing developing machine main body is equipped with display screen, the top of gluing developing machine main body is fixedly connected with gluing cabin, the outer wall of gluing developing machine main body is provided with glue feeding mechanism, the outer wall of gluing developing machine main body is fixedly connected with connecting block, the inside of gluing developing machine main body is fixedly connected with fixed pipeline and is penetrated, by rotating the screw rod of one of two, screw rod rotation can drive the movement of stopper in the inside of thin connecting pipeline, stopper moves downward into the inside of thick connecting pipeline, disconnect the stoppage of thin connecting pipeline, glue inside the glue storage barrel at this time enters thin connecting pipeline, by conveying pipeline enters the inside of fixed pipeline, after the use of glue inside one place glue storage barrel ends, re-plugging this place, open another, and then realize the effect of sustainable glue feeding.

Description

Technical Field

[0001] This utility model relates to the field of coating and developing machine technology, specifically to a coating and developing machine adhesive supply device. Background Technology

[0002] A photolithography coating and developing machine is a piece of equipment used in photolithography processes to manufacture semiconductor devices, integrated circuits, and other micro / nano structures. It is used to precisely control the coating process and ensure high precision and efficiency in semiconductor manufacturing and micro / nano fabrication.

[0003] Traditional coating and developing machines typically have only one glue supply device during operation. This means that after the internal glue is used up, the entire machine needs to be shut down and a new glue supply device needs to be added before it can be restarted, making the overall operation quite inconvenient. Utility Model Content

[0004] The purpose of this invention is to provide a glue supply device for a glue coating and developing machine to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a glue supply device for a glue coating and developing machine, comprising a glue coating and developing machine body and a glue storage tank, wherein a display screen is installed on the outer wall of the glue coating and developing machine body, a glue coating chamber is fixedly connected to the top of the glue coating and developing machine body, a glue supply mechanism is provided on the outer wall of the glue coating and developing machine body, and a connecting block is fixedly connected to the outer wall of the glue coating and developing machine body.

[0006] As a further preferred embodiment of this technical solution, the main body of the coating and developing machine is internally connected to a fixed pipe, and two connecting blocks are provided. The outer walls of the two connecting blocks are fixedly connected to a glue bucket placement frame.

[0007] As a further preferred embodiment of this technical solution, the top of the glue bucket placement frame is provided with a feed inlet, the bottom of the feed inlet is fixedly connected to a thin connecting pipe, and the bottom of the thin connecting pipe is fixedly connected to a thick connecting pipe.

[0008] As a further preferred embodiment of this technical solution, a conveying pipe is fixedly connected to the outer wall of the fixed pipe, and a lead screw is rotatably connected to the bottom of the conveying pipe, with a plug threadedly connected to the outer wall of the lead screw.

[0009] As a further preferred embodiment of this technical solution, the glue bucket placement frame is provided with a fixing mechanism inside, and fixing rods are fixedly connected to both the left and right sides of the inner wall of the glue bucket placement frame.

[0010] As a further preferred embodiment of this technical solution, the fixed rod has an internal movable cavity, the inner wall of the movable cavity is slidably connected to a limiting plate, one side of the limiting plate is fixedly connected to a spring, and the other side of the limiting plate is fixedly connected to a moving rod.

[0011] As a further preferred embodiment of this technical solution, the end of the spring away from the limiting plate is fixedly connected to the inner wall of the movable cavity, and the end of the moving rod away from the limiting plate is fixedly connected to an arc-shaped clamping plate.

[0012] This utility model provides a glue supply device for a glue coating and developing machine, which has the following beneficial effects: (1) By rotating one of the two lead screws, the rotation of the lead screw can drive the block to move inside the thin connecting pipe. The block moves downward and enters the thick connecting pipe, escaping the blockage of the thin connecting pipe. At this time, the glue inside the glue storage tank enters the thin connecting pipe and enters the fixed pipe through the delivery pipe. After the glue in one glue storage tank is used up, that place is resealed and the other place is opened, thereby achieving the effect of continuous glue supply.

[0013] (2) In this utility model, the storage bucket squeezes the arc-shaped clamping plates on both sides. The arc-shaped clamping plates are squeezed and the moving rod moves. The moving rod moves the limiting plate inside the active cavity. During the movement, the limiting plate squeezes the spring. The spring is squeezed and applies a reverse support force to the limiting plate by its own elasticity, thereby driving the arc-shaped clamping plate to clamp and fix the storage bucket. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall three-dimensional appearance structure of this utility model; Figure 2 This is a schematic cross-sectional view of the overall structure of this utility model; Figure 3 This is a schematic diagram of the adhesive supply mechanism of this utility model; Figure 4 This is a schematic diagram of the fixing mechanism of this utility model.

[0015] In the diagram: 1. Main body of the coating and developing machine; 2. Display screen; 3. Coating hopper; 4. Glue storage tank; 5. Glue supply mechanism; 51. Connecting block; 52. Fixed pipe; 53. Glue tank placement frame; 54. Feed inlet; 55. Thin connecting pipe; 56. Coarse connecting pipe; 57. Conveying pipe; 58. Block; 59. Lead screw; 6. Fixing mechanism; 61. Fixed rod; 62. Movable cavity; 63. Spring; 64. Limiting plate; 65. Moving rod; 66. Arc-shaped clamping plate. Detailed Implementation

[0016] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0017] This utility model provides a technical solution: such as Figures 1 to 4 As shown, in this embodiment, a glue supply device for a glue coating and developing machine includes a glue coating and developing machine body 1 and a glue storage tank 4. A display screen 2 is installed on the outer wall of the glue coating and developing machine body 1. A glue coating chamber 3 is fixedly connected to the top of the glue coating and developing machine body 1. A glue supply mechanism 5 is provided on the outer wall of the glue coating and developing machine body 1. A connecting block 51 is fixedly connected to the outer wall of the glue coating and developing machine body 1.

[0018] The main body 1 of the coating and developing machine is connected to a fixed pipe 52, and there are two connecting blocks 51. The outer walls of the two connecting blocks 51 are fixedly connected to a glue bucket placement frame 53.

[0019] The two glue bucket placement frames 53 can accommodate two glue storage buckets 4.

[0020] The top of the glue bucket placement frame 53 is provided with a feed inlet 54, the bottom of the feed inlet 54 is fixedly connected to a thin connecting pipe 55, and the bottom of the thin connecting pipe 55 is fixedly connected to a thick connecting pipe 56.

[0021] The inner diameter of the thin connecting pipe 55 is smaller than the diameter of the thick connecting pipe 56.

[0022] The outer wall of the fixed pipe 52 is penetrated and fixedly connected to the conveying pipe 57, the bottom end of the conveying pipe 57 is penetrated and rotatably connected to the lead screw 59, and the outer wall of the lead screw 59 is threadedly connected to the plug 58.

[0023] The lead screw 59, when rotated, can drive the block 58 to move vertically up and down.

[0024] The glue bucket placement frame 53 is equipped with a fixing mechanism 6 inside, and fixing rods 61 are fixedly connected to the left and right sides of the inner wall of the glue bucket placement frame 53.

[0025] The fixing mechanism 6 can fix the glue storage tank 4 that needs to be used.

[0026] The fixed rod 61 has a movable cavity 62 inside. The inner wall of the movable cavity 62 is slidably connected to a limiting plate 64. A spring 63 is fixedly connected to one side of the limiting plate 64, and a moving rod 65 is fixedly connected to the other side of the limiting plate 64.

[0027] The limiting plate 64 can restrict the movement trajectory of the moving rod 65.

[0028] The end of the spring 63 away from the limiting plate 64 is fixedly connected to the inner wall of the movable cavity 62, and the end of the moving rod 65 away from the limiting plate 64 is fixedly connected to the arc-shaped clamping plate 66.

[0029] The arc-shaped clamping plates 66 on both sides can clamp the glue storage tank 4.

[0030] This utility model provides a glue supply device for a glue coating and developing machine, the specific working principle of which is as follows: During use, when the glue storage tank 4 supplies glue to the interior of the coating and developing machine body 1, rotating one of the two lead screws 59 causes the plug 58 to move inside the thin connecting pipe 55. The plug 58 moves downwards into the thick connecting pipe 56, relieving its blockage of the thin connecting pipe 55. At this time, the glue inside the glue storage tank 4 enters the thin connecting pipe 55 and then enters the fixed pipe 52 through the conveying pipe 57. After the glue in one glue storage tank 4 is used up, that area is resealed. To achieve a continuous glue supply, the glue storage tank 4 is opened at one end and then opened at the other. When the glue storage tank 4 is installed, the glue storage tank 4 squeezes the arc-shaped clamping plates 66 on both sides. The arc-shaped clamping plates 66 are squeezed and drive the moving rod 65 to move. The moving rod 65 drives the limiting plate 64 to move inside the movable cavity 62. During the movement, the limiting plate 64 squeezes the spring 63. The spring 63 is squeezed and uses its own elasticity to apply a support force in the opposite direction to the limiting plate 64, thereby driving the arc-shaped clamping plate 66 to clamp and fix the glue storage tank 4.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A glue supply device for a coating and developing machine, comprising a coating and developing machine body (1) and a glue storage tank (4), characterized in that: The outer wall of the coating and developing machine body (1) is equipped with a display screen (2), the top of the coating and developing machine body (1) is fixedly connected to a coating chamber (3), the outer wall of the coating and developing machine body (1) is provided with a glue supply mechanism (5), and the outer wall of the coating and developing machine body (1) is fixedly connected to a connecting block (51). The main body (1) of the coating and developing machine is connected to a fixed pipe (52) through and fixedly connected. There are two connecting blocks (51), and the outer walls of the two connecting blocks (51) are fixedly connected to a glue bucket placement frame (53). The top of the glue bucket placement frame (53) is provided with a feed inlet (54), and a thin connecting pipe (55) is fixedly connected to the bottom of the feed inlet (54). A thick connecting pipe (56) is fixedly connected to the bottom of the thin connecting pipe (55). The outer wall of the fixed pipe (52) is connected to a conveying pipe (57), the bottom end of the conveying pipe (57) is connected to a lead screw (59), and the outer wall of the lead screw (59) is threaded with a plug (58). The glue bucket placement frame (53) is equipped with a fixing mechanism (6) inside, and fixing rods (61) are fixedly connected to the left and right sides of the inner wall of the glue bucket placement frame (53). The fixed rod (61) has an open movable cavity (62) inside. The inner wall of the movable cavity (62) is slidably connected to a limiting plate (64). A spring (63) is fixedly connected to one side of the limiting plate (64), and a moving rod (65) is fixedly connected to the other side of the limiting plate (64). The end of the spring (63) away from the limiting plate (64) is fixedly connected to the inner wall of the movable cavity (62), and the end of the moving rod (65) away from the limiting plate (64) is fixedly connected to the arc-shaped clamping plate (66).

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