A magnetic shielding structure for an electron beam exposure machine

Abstract

The utility model discloses a magnetic shielding structure for electron beam exposure machine, including support frame and magnetic shielding layer, electron beam exposure machine is fixed in the inside support frame, the magnetic shielding layer covers support frame outer surface, and magnetic shielding layer adopts high magnetic permeability material preparation obtains, to realize electron beam exposure machine and external magnetic field is isolated. The utility model has the characteristics of compact structure, convenient dismounting, reliability is high etc. depend on the low reluctance of high magnetic permeability material has the magnetic shunt function, through the magnetic shielding body structure is the magnetic field of electron beam exposure equipment installation site environment provides a low reluctance passway, makes the magnetic field of magnetic shielding structure internal space greatly reduce, realized the magnetic field shielding function of electron beam exposure machine.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor electron beam equipment technology, specifically to a magnetic shielding structure for an electron beam exposure machine. Background Technology

[0002] Electron beam lithography (EBRT) equipment is a fundamental tool for high-precision exposure of materials using a focused electron beam to fabricate micro- and nano-sized patterned structures. In the field of micro- and nano-fabrication technology, EBRT is a crucial process and one of the core technologies for achieving high-precision pattern fabrication. Because stray magnetic fields in the environment of the EBRT machine can affect the accuracy of the exposed pattern, a magnetic field shielding structure needs to be designed to reduce the impact of stray magnetic fields on the EBRT machine. Utility Model Content

[0003] The technical problem to be solved by this invention is to provide a magnetic shielding structure for electron beam exposure machines that is compact, easy to use and highly reliable, in order to address the shortcomings of existing technologies.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: A magnetic shielding structure for an electron beam exposure machine includes a support frame and a magnetic shielding layer. The electron beam exposure machine is fixed inside the support frame, and the magnetic shielding layer covers the outer surface of the support frame. The magnetic shielding layer is made of a high magnetic permeability material to isolate the electron beam exposure machine from external magnetic fields.

[0005] As a further improvement of this utility model, the contact surface between the support frame and the magnetic shielding layer is provided with a permalloy plate.

[0006] As a further improvement of this utility model, the magnetic shielding layer includes a skeleton, on which a plurality of solid magnetic shielding plates or a plurality of heat dissipation shielding plates with holes are provided. Both the magnetic shielding plates and the heat dissipation shielding plates are made of high magnetic permeability iron-nickel alloy.

[0007] As a further improvement of this utility model, the outer periphery of the skeleton is also provided with a plurality of anti-detachment screws, which are used to fix the magnetic shielding layer to the support frame.

[0008] As a further improvement of this utility model, the outer periphery of the skeleton is provided with multiple mounting interfaces, and the support frame is provided with hinge pins. The mounting interfaces are matched with the hinge pins to realize the magnetic shielding layer being mounted on the support frame.

[0009] As a further improvement of this utility model, the installation interface has a gourd-shaped structure that is larger at the top and smaller at the bottom.

[0010] As a further improvement of this utility model, the frame is provided with multiple handles.

[0011] As a further improvement of this utility model, the four vertices at the bottom of the support frame are provided with fixing components and feet to achieve the fixation of the magnetic shielding structure.

[0012] As a further improvement of this utility model, the bottom of the support frame is also provided with a fastener to connect and fix the support frame to the electron beam exposure machine.

[0013] Compared with the prior art, the advantages of this utility model are: This invention relates to a magnetic shielding structure for an electron beam exposure machine. By fixing the electron beam exposure machine inside a support frame, a magnetic shielding layer made of high magnetic permeability material is placed on the outer surface of the support frame. Relying on the low magnetic reluctance of the high magnetic permeability material, the magnetic shielding structure provides a low magnetic reluctance path for the magnetic field of the installation environment of the electron beam exposure equipment. This greatly reduces the magnetic field inside the magnetic shielding structure, thus achieving the magnetic field shielding function of the electron beam exposure machine and significantly reducing the impact of stray magnetic fields on the pattern accuracy of the electron beam exposure process. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural principle diagram of the magnetic shielding structure used in an electron beam exposure machine in a specific embodiment of the present invention; Figure 2 This is a schematic diagram of the exploded structure principle of the magnetic shielding structure used in an electron beam exposure machine in a specific embodiment of this utility model; Figure 3 This is a schematic diagram of the structural principle of the fastener in a specific embodiment of this utility model; Figure 4 This is a schematic diagram illustrating the structural principle of the fixing component in a specific embodiment of this utility model; Figure 5 This is a schematic diagram of the partial structural principle of the supporting frame in a specific embodiment of the present utility model; Figure 6 This is one of the schematic diagrams illustrating the structural principle of the shielding layer in a specific embodiment of this utility model; Figure 7 This is the second schematic diagram of the structural principle of the shielding layer in a specific embodiment of this utility model; Figure 8 This is a schematic diagram of the initial state of the shielding layer installed on the support frame in a specific embodiment of this utility model; Figure 9 This is a schematic diagram showing the state of the shielding layer connected to the support frame in a specific embodiment of this utility model; Figure 10This is a schematic diagram showing the shielding layer being attached and fixed to the support frame in a specific embodiment of this utility model; Legend: 1. Support frame; 2. Magnetic shielding layer; 21. +X shielding plate; 22. -X shielding plate; 23. +Y shielding plate; 24. -Y shielding plate; 25. +Z shielding plate; 26. Skeleton; 27. Anti-loosening screw; 28. Magnetic shielding plate; 29. ​​Mounting interface; 210. Heat dissipation shielding plate; 3. Fasteners; 31. Horizontal connecting plate; 32. Vertical connecting plate; 33. Reinforcing rib plate; 4. Fixing components; 41. Fixing plate; 42. Adjusting bolt; 43. Fastening screw; 5. Anchor; 6. Permalloy plate; 7. Handle; 8. Hinge pin. Detailed Implementation

[0015] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0016] In the description of this utility model, it should be understood that the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0017] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "multiple" means two or more, unless otherwise explicitly specified.

[0018] Example like Figure 1 and Figure 2As shown, the magnetic shielding structure for an electron beam exposure machine of this utility model includes a support frame 1 and a magnetic shielding layer 2. The support frame 1 is mainly formed by welding and splicing crossbeams and longitudinal beams, and can be disassembled into individual crossbeams and longitudinal beams for easy on-site assembly and disassembly. The electron beam exposure machine is fixed inside the support frame 1, and the magnetic shielding layer 2 covers the outer surface of the support frame 1. The magnetic shielding layer 2 is made of a high magnetic permeability material to isolate the electron beam exposure machine from the external magnetic field. Specifically, the magnetic shielding layer 2 includes a +X shielding plate 21, a -X shielding plate 22, a +Y shielding plate 23, a -Y shielding plate 24, and a +Z shielding plate 25 covering the outer periphery of the support frame 1. Each magnetic shielding plate is detachable. The magnetic shielding plates of different sizes and specifications in each direction are designed with weight in mind, taking into account the different lifting heights during manual installation, with the weight decreasing towards the top.

[0019] In this embodiment, by fixing the electron beam exposure machine inside the support frame 1, a magnetic shielding layer 2 made of high magnetic permeability material is covered on the outer surface of the support frame 1. Relying on the low magnetic reluctance of the high magnetic permeability material, it acts as a magnetic shunt. Through the magnetic shielding structure, a low magnetic reluctance path is provided for the magnetic field of the installation site of the electron beam exposure equipment, which greatly reduces the magnetic field inside the magnetic shielding structure. This realizes the magnetic field shielding function of the electron beam exposure machine and significantly reduces the impact of stray magnetic fields on the pattern accuracy of the electron beam exposure process.

[0020] like Figure 5 As shown, a permalloy plate 6 is glued to the mating surface of the support frame 1 and the magnetic shielding layer 2 to minimize gaps on the mating surfaces of the magnetic shielding layer 2 and the crossbeams and longitudinal beams of the support frame 1, thereby ensuring magnetic shielding performance.

[0021] like Figure 6 and Figure 7 As shown, the magnetic shielding layer 2 includes a frame 26, which is formed by bending aluminum alloy sheet, possessing a certain rigidity. This frame increases the rigidity of the magnetic shielding plate and provides a connecting structural surface for the magnetic shielding plate. Furthermore, the frame 26 is provided with multiple solid magnetic shielding plates 28 or multiple perforated heat dissipation shielding plates 210. Both the magnetic shielding plates 28 and the heat dissipation shielding plates 210 are made of a high-permeability iron-nickel alloy. Figure 2 As shown, the +X shielding plate 21 and the -X shielding plate 22 are located on the left and right sides of the support frame 1, respectively. Both the +X shielding plate 21 and the -X shielding plate 22 are composed of a frame 26 consisting of a magnetic shielding plate 28 and a heat dissipation shielding plate 210. The frame 26 of the +Y shielding plate 23 and the -Y shielding plate 24 is mainly equipped with the magnetic shielding plate 28, and the frame 26 of the +Z shielding plate 25 is mainly equipped with the heat dissipation shielding plate 210. This satisfies both the overall magnetic shielding requirements of the magnetic shielding structure and the heat dissipation requirements of the electron beam exposure machine.

[0022] The materials that can be used for the magnetic shielding plate 28 and the heat dissipation shielding plate 210 include steel, industrial pure iron, silicon steel, and high magnetic permeability iron-nickel alloy (permalloy). In this embodiment, a high magnetic permeability iron-nickel alloy sheet is used. After machining, it is annealed and then subjected to heat treatment without any further machining. Because permalloy is particularly sensitive to mechanical stress, it must be protected from impact during transportation and installation.

[0023] like Figure 6 and Figure 7 As shown, the outer periphery of the skeleton 26 is also provided with a number of anti-detachment screws 27, which are used to connect and fix the magnetic shielding layer 2 to the support frame 1.

[0024] Furthermore, the outer periphery of the frame 26 is provided with multiple mounting interfaces 29, and the support frame 1 is provided with hinge pins 8. The mounting interfaces 29 are matched with the hinge pins 8 to realize the magnetic shielding layer 2 being hung on the support frame 1. In this embodiment, the mounting interface 29 has a gourd-shaped structure that is larger at the top and smaller at the bottom. When the magnetic shielding plate is combined with the support frame 1, the quick-hanging method can eliminate the need for multiple people to cooperate and reduce the time spent on manual lifting. Only one person is needed to complete the independent installation.

[0025] In this embodiment, the frame 26 is provided with multiple handles 7 for easy handling. To improve the ease of disassembly and assembly of the magnetic shielding layer 2, the spacing between two handles 7 should be designed to ensure comfortable shoulder opening. When the equipment requires maintenance, the magnetic shielding plate at the maintenance location can be easily and freely removed, freeing up maintenance space and facilitating equipment maintenance.

[0026] like Figure 4 As shown, fixing components 4 and feet 5 are provided at the four vertices of the bottom of the support frame 1 to fix the magnetic shielding structure. The fixing components 4 specifically include a fixing plate 41, adjusting bolts 42 and fastening screws 43. The two sides of the fixing plate 41 are connected and fixed to the crossbeam at the bottom of the support frame 1 by fastening screws 43. The adjusting bolts 42 and feet 5 are located in the middle of the fixing plate 41 to provide leveling support and prevent the support frame 1 from overturning.

[0027] like Figure 3 As shown, symmetrical fasteners 3 are also provided on both sides of the bottom of the support frame 1 to connect and fix the support frame 1 to the electron beam exposure machine. The fasteners 3 specifically include a horizontal connecting plate 31, a vertical connecting plate 32, and a reinforcing rib plate 33. The horizontal connecting plate 31 and the vertical connecting plate 32 are integrally formed as an L-shaped connector. The horizontal connecting plate 31 is connected and fixed to the crossbeam at the bottom of the support frame 1, and the vertical connecting plate 32 is used to connect the electron beam exposure machine. The reinforcing rib plate 33 connects the horizontal connecting plate 31 and the vertical connecting plate 32 respectively to enhance the structural strength of the fasteners 3 and improve the stability of the connection between the support frame 1 and the electron beam exposure machine.

[0028] In this embodiment, the magnetic shielding structure is made anti-overturning and anti-slip by two fixing methods: fixing component 4 to the ground and fixing component 3 to the support frame 1 and electron beam exposure machine. When necessary, people can step on and climb the support frame, similar to scaffolding.

[0029] In this embodiment, the assembly process of the magnetic shielding structure includes: Step S1: Connect the crossbeams and longitudinal beams with screws to form a frame-type support frame 1.

[0030] Step S2: Fix the fixing component 4 to the ground by adjusting the bolt 42.

[0031] Step S3: Fix the fastener 3 to the electron beam exposure machine with screws.

[0032] Step S4: First, lift the magnetic shielding plate to the height where the mounting interface 29 is aligned with the hinge pin 8 of the support frame 1, such as... Figure 8 As shown; then move the magnetic shielding plate until the hinge pin 8 passes through the large "gourd"-shaped hole of the mounting interface 29, and then move the magnetic shielding plate downward until the small "gourd"-shaped hole of the mounting interface 29 locks the hinge pin 8, as shown. Figure 9 As shown; finally, it is attached to the support frame 1, as... Figure 10 As shown.

[0033] Step S5: Lock the magnetic shielding plate to the support frame 1 using the anti-loosening screws 27 on the magnetic shielding plate to complete the installation of the support frame 1 and the magnetic shielding plate.

[0034] The above description is merely a preferred embodiment of this utility model. The protection scope of this utility model is not limited to the above embodiments. All technical solutions falling within the scope of this utility model's concept are protected. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A magnetic shielding structure for an electron beam exposure machine, characterized in that, The device includes a support frame (1) and a magnetic shielding layer (2). The electron beam exposure machine is fixed inside the support frame (1). The magnetic shielding layer (2) covers the outer surface of the support frame (1). The magnetic shielding layer (2) is made of a high magnetic permeability material to isolate the electron beam exposure machine from the external magnetic field.

2. The magnetic shielding structure for an electron beam exposure machine according to claim 1, characterized in that, The support frame (1) and the magnetic shielding layer (2) are fitted with a permalloy plate (6).

3. The magnetic shielding structure for an electron beam exposure machine according to claim 2, characterized in that, The magnetic shielding layer (2) includes a skeleton (26), on which a plurality of solid magnetic shielding plates (28) or a plurality of heat dissipation shielding plates (210) with holes are provided. The magnetic shielding plates (28) and the heat dissipation shielding plates (210) are both made of high magnetic permeability iron-nickel alloy.

4. The magnetic shielding structure for an electron beam exposure machine according to claim 3, characterized in that, The outer periphery of the skeleton (26) is also provided with a plurality of anti-detachment screws (27), which are used to connect and fix the magnetic shielding layer (2) to the support frame (1).

5. The magnetic shielding structure for an electron beam exposure machine according to claim 3, characterized in that, The skeleton (26) is also provided with multiple mounting interfaces (29) on its outer periphery. The support frame (1) is provided with hinge pins (8). The mounting interfaces (29) are matched with the hinge pins (8) to realize the magnetic shielding layer (2) being mounted on the support frame (1).

6. The magnetic shielding structure for an electron beam exposure machine according to claim 5, characterized in that, The installation interface (29) has a gourd-shaped structure that is larger at the top and smaller at the bottom.

7. The magnetic shielding structure for an electron beam exposure machine according to claim 3, characterized in that, The frame (26) is provided with multiple handles (7).

8. The magnetic shielding structure for an electron beam exposure machine according to any one of claims 1 to 7, characterized in that, The support frame (1) is provided with fixing components (4) and feet (5) at the four vertices at the bottom to fix the magnetic shielding structure.

9. The magnetic shielding structure for an electron beam lithography machine according to any one of claims 1 to 7, characterized in that, The bottom of the support frame (1) is also provided with a fastener (3) to connect and fix the support frame (1) to the electron beam exposure machine.

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