Baking apparatus

Abstract

The utility model relates to the technical field of semiconductor, disclose a kind of baking equipment. Wherein baking equipment includes metal box and oven, metal box includes the clamping wall of interval arrangement along first direction, multiple clamping slots are arranged on clamping wall along second direction, two clamping slots of two clamping walls form a clamping site, one clamping site can be set one wafer;Carry platform is arranged in oven, and it is set between the preset angle of horizontal plane, metal box can be placed in carry platform, and carry platform can be time wafer orientation clamping site along the end of second direction abuts. The utility model discloses baking equipment, can improve the reliability of wafer interval, guarantee baking yield.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a baking device. Background Technology

[0002] In the semiconductor technology field, photoresist is typically cured in an oven during the semiconductor packaging process. The wafer is first transferred to a high-temperature resistant metal container, which is then placed on a stage within the oven. During the baking process, the oven is continuously evacuated and nitrogen is introduced to reduce the oxygen content within the chamber. Once the oxygen content reaches the target level, the heating wires activate, raising the oven temperature to the target value, at which point the photoresist on the wafer slowly cures.

[0003] In existing technology, to facilitate wafer loading and unloading from the metal cassette, the width of the slots on the metal cassette for placing the wafers is slightly larger than the thickness of the wafer. When the wafer is inside the metal cassette, it can wobble along the width of the slots. Furthermore, the continuous introduction and extraction of nitrogen gas during operation exacerbates this wobble. Simultaneously, the photoresist is adhesive, and adjacent wafers have a certain probability of sticking together, becoming difficult to separate even after curing. Separating the wafers results in damage to the photoresist on the surface, affecting yield.

[0004] Therefore, there is an urgent need for a baking device to solve the above problems. Utility Model Content

[0005] Based on the above, the purpose of this utility model is to provide a baking device that can improve the reliability of the inter-wafer spacing and ensure baking yield.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] Baking equipment, including:

[0008] The metal box includes snap-fit ​​walls spaced apart along a first direction, and multiple snap-fit ​​slots are provided on the snap-fit ​​walls along a second direction. Two snap-fit ​​slots opposite to two snap-fit ​​walls form a snap-fit ​​position, and a wafer can be disposed in one snap-fit ​​position.

[0009] An oven is provided inside, with a stage set at a preset angle to the horizontal plane. A metal box can be placed on the stage, and the stage allows the wafer to abut against one end of the mounting point along the second direction.

[0010] As a preferred embodiment of the baking equipment, the oven includes a housing, the platform is disposed in the housing, and the oven further includes an adjustment component for adjusting the size of the preset angle.

[0011] As a preferred embodiment of the baking equipment, the adjustment assembly includes an adjustment platform and adjustment holes spaced apart along a vertical direction. The adjustment holes are located in the housing, one of the adjustment platforms is placed inside the adjustment hole, and the platform can be placed on the adjustment platform.

[0012] As a preferred embodiment of the baking equipment, the adjustment component includes a sliding end and a guide end extending in a vertical direction. One of the sliding end and the guide end is disposed in the housing and the other is disposed in the platform. The sliding end can slide along the guide end and lock relative to the sliding end.

[0013] As a preferred embodiment of the baking equipment, the platform is provided with a stop block on the side lower than the horizontal plane, and the metal box can abut against the stop block.

[0014] As a preferred embodiment of the baking equipment, the platform is further provided with two spaced-apart limiting blocks, the distance between the two limiting blocks being adapted to the width of the metal box along the first direction.

[0015] As a preferred embodiment of the baking equipment, the oven includes a box body and a door disposed on one side of the box body, the platform is disposed inside the box body, and the side of the platform closer to the door is higher than the side farther away from the door.

[0016] As a preferred embodiment of the baking equipment, the side of the platform away from the oven door is rotatably connected to the oven body, while the height of the side closer to the oven door is adjustable.

[0017] As a preferred embodiment of the baking equipment, the metal box is further provided with a connecting arm that extends along the second direction, and the two snap-fit ​​walls are respectively connected to the two ends of the connecting arm along the second direction.

[0018] As a preferred embodiment of the baking equipment, the oven is provided with two or more platforms spaced apart along the vertical direction, and each platform is set at a preset angle to the horizontal plane; the oven is also provided with a baking device and a gas filling and releasing device.

[0019] The beneficial effects of this utility model are as follows:

[0020] This invention utilizes a metal box to support multiple wafers. Specifically, the metal box has snap-fit ​​walls spaced apart along a first direction, and each snap-fit ​​wall has multiple snap-fit ​​slots spaced apart along a second direction. Wafers can be placed in corresponding snap-fit ​​slots on two opposite snap-fit ​​walls. Simultaneously, the baking equipment also includes an oven with a stage on which the metal box can be placed. Since the stage is set at a preset angle to the horizontal plane, the metal box is placed in an inclined state within the oven. The inclination direction is the angle between the second direction and the horizontal plane, ensuring that each wafer, when inside the oven, abuts against the lower end of the snap-fit ​​slot along the second direction. It is understandable that the tilt of the metal box placed inside the oven creates a preset angle between the wafer plane and the vertical plane. At this angle, a component of the wafer's gravity will cause the wafer to abut against the lower end of the latching groove along the second direction. Therefore, when gas is continuously introduced or extracted from the oven, the wafer will not sway along the second direction due to the airflow. In other words, the airflow has little impact on the wafer spacing, thereby improving the consistency of the spacing between adjacent wafers, effectively reducing die sticking, and improving the wafer baking yield. Moreover, the structure is simple and the cost is lower. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0022] Figure 1 This is a top view of the metal box and wafer of the baking equipment provided in a specific embodiment of this utility model;

[0023] Figure 2 This is a side view of the metal box and wafer of the baking equipment provided in a specific embodiment of this utility model;

[0024] Figure 3 This is a side view schematic diagram of the baking equipment provided in a specific embodiment of this utility model;

[0025] Figure 4 This is a top view schematic diagram of the baking equipment provided in a specific embodiment of this utility model.

[0026] In the picture:

[0027] 1. Wafer;

[0028] 100. Metal box; 110. Snap-fit ​​wall; 111. Snap-fit ​​slot; 120. Connecting arm;

[0029] 200. Oven; 210. Platform; 211. Stop block; 212. Limit block; 220. Chamber body; 230. Adjustment assembly; 231. Adjustment table; 232. Adjustment hole; 240. Chamber door. Detailed Implementation

[0030] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0031] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0032] Unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components or interactions between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0035] like Figures 1-4 As shown, this embodiment provides a baking apparatus, which includes a metal box 100 and an oven 200. The metal box 100 includes snap-fit ​​walls 110 spaced apart along a first direction. Multiple snap-fit ​​grooves 111 are provided on the snap-fit ​​walls 110 along a second direction. Two snap-fit ​​grooves 111 opposite to two snap-fit ​​walls 110 form a snap-fit ​​position. A wafer 1 can be placed in a snap-fit ​​position. A stage 210 is provided in the oven 200. The stage 210 is set at a preset angle with the horizontal plane. The metal box 100 can be placed on the stage 210. The stage 210 can make the wafer 1 abut against one end of the snap-fit ​​position along the second direction.

[0036] The metal box 100 is used to support multiple wafers 1. Specifically, the metal box 100 is provided with snap-fit ​​walls 110 spaced apart along a first direction, and the snap-fit ​​walls 110 are provided with multiple snap-fit ​​slots 111 spaced apart along a second direction. The wafers 1 can be placed in the corresponding snap-fit ​​slots 111 on two opposite snap-fit ​​walls 110. At the same time, the baking equipment is also provided with an oven 200 with a stage 210. The metal box 100 can be placed on the stage 210. Since the stage 210 is set with a preset angle to the horizontal plane, the metal box 100 is placed in an inclined state in the oven 200. The inclination direction is the direction in which the second direction is angled to the horizontal plane, so as to ensure that when the wafers 1 are in the oven 200, they can all abut against the lower end of the snap-fit ​​slots 111 of the corresponding snap-fit ​​positions along the second direction. It is understandable that the tilting direction of the metal box 100 placed in the oven 200 causes the plane of the wafer 1 placed in the metal box 100 to have a preset angle with the vertical plane. At this time, part of the gravity of the wafer 1 will cause the wafer 1 to abut against the lower end of the snap-fit ​​groove 111 along the second direction. Therefore, when gas is continuously introduced or extracted into the oven 200, the wafer 1 will not shake along the second direction due to the airflow. That is, the airflow has little effect on the spacing of the wafer 1, thereby improving the consistency of the spacing between adjacent wafers 1, effectively reducing the sticking phenomenon, improving the baking yield of the wafer 1; and the structure is simple and the cost is lower.

[0037] Furthermore, the metal box 100 is also provided with a connecting arm 120, which extends along the second direction. Two snap-fit ​​walls 110 are respectively connected to the two ends of the connecting arm 120 along the first direction. By providing the connecting arm 120 to connect the two snap-fit ​​walls 110, the snap-fit ​​position can more reliably support the wafer 1. It is worth noting that when the metal box 100 is placed on the stage 210, the connecting arm 120 is fitted against the stage 210, with one end of the two snap-fit ​​arms higher than the other, and perpendicular to the stage 210. In addition, the metal box 100 is made of a high-temperature resistant material to ensure the stability of its physicochemical properties during the baking process, so as to avoid adverse effects on the support and baking of the wafer 1. In addition, the metal box 100 can not only be used to bake the wafer 1 in conjunction with the oven 200, but also to store and transport the wafer 1 in daily life. In this case, the metal box 100 can be placed horizontally, that is, both the first and second directions extend along the horizontal plane.

[0038] For example, the preset angle is set to 5°-15°. If the preset angle is too small, the wafer 1 will have an insufficient tilt angle, and there will still be a risk of being affected by airflow. If the preset angle is too large, the stability of the metal box 100 will be reduced, and the difficulty of picking up and placing the metal box 100 will be increased. Optionally, the preset angle is set to 10°, which can ensure that the airflow does not affect the spacing of the wafer 1 and cause die sticking, and can also ensure the stability of the metal box 100 on the stage 210, while not causing too much difficulty in picking up and placing the metal box 100.

[0039] In this embodiment, the oven 200 includes a housing 220, a platform 210 disposed within the housing 220, and an adjustment component 230. The adjustment component 230 allows for adjustment of a preset angle to adapt to different usage scenarios and increase the versatility of the baking equipment. Optionally, the adjustment component 230 can adjust the preset angle between 0 and 15°. It can be understood that when the preset angle is 0°, i.e., the platform 210 is placed horizontally, it can be used in special baking scenarios or when the baking equipment is not in operation.

[0040] Furthermore, the oven 200 includes a chamber body 220 and a door 240 disposed on one side of the chamber body 220. By providing a door 240 on one side of the chamber body 220, it serves two purposes: firstly, it cooperates with the chamber body 220 to form a closed baking space; secondly, it facilitates the placement and removal of the metal box 100. The side of the platform 210 near the door 240 is higher than the side away from the door 240. That is, the metal box 100 placed on the platform 210 has a lower inner side and a higher outer side, which prevents the metal box 100 from sliding out of the door 240. Moreover, when the operator tries to prevent the metal box 100 from sliding out, the metal box 100 can slide towards the inside of the chamber body 220 under gravity, requiring less effort.

[0041] Preferably, a stop block 211 is provided on the side of the platform 210 that is lower than the horizontal plane. That is, the stop block 211 is provided on the side of the platform 210 away from the box door 240. When the metal box 100 is placed on the platform 210, the metal box 100 can abut against the stop block 211. The stop block 211 can restrict the front and rear position of the metal box 100 on the platform 210, prevent the metal box 100 from sliding towards the rear wall of the box 220 due to its own weight, and reduce the risk of collision between the metal box 100 and the rear wall of the box 220.

[0042] Optionally, the stage 210 is also provided with two spaced-apart limiting blocks 212, the distance between the two limiting blocks 212 being adapted to the width of the metal box 100 along the first direction. That is, the two limiting blocks 212 can be used to limit the position of the metal box 100 in the left and right directions when it is placed on the stage 210. By setting the limiting blocks 212, the risk of collision between the metal box 100 and the left and right side walls of the housing 220 can be reduced; at the same time, it is also beneficial to ensure the uniform heating of the wafer 1 inside the metal box 100; in addition, it can also prevent the operator from hitting the side wall of the housing 220 when placing the metal box 100, thus ensuring the safety of the operator.

[0043] For example, the stop block 211 and the limit block 212 limit the position of the metal box 100 in the box 220, while ensuring that the position of the metal box 100 in the oven 200 remains fixed. This can prevent uneven heating of the wafer 1 due to position changes during the baking process, thereby ensuring the efficiency of photoresist curing and reducing the possibility of yield loss.

[0044] In this embodiment, the side of the platform 210 furthest from the door 240 is rotatably connected to the housing 220, while the side closest to the door 240 is height-adjustable. This design facilitates adjustment by operators, allows the platform 210 to achieve a preset angle with a small adjustment distance, and also simplifies the structure and reduces costs. Specifically, the adjustment component 230 is located on the side wall of the housing 220 near the door 240, and adjustment components 230 are provided on both sides of the housing 220 near the door 240, resulting in more even force distribution on the platform 210 and more reliable support from the adjustment components 230.

[0045] It is worth noting that the connection between the side of the platform 210 away from the door 240 and the box body 220 can be achieved by directly rotating it using a hinge. Alternatively, a support platform can be provided on the rear wall of the box body 220, and the platform 210 can rest on the support platform. When the height of the side of the platform 210 near the door 240 changes, the platform 210 can also rotate relative to the door 240, and the structure is simpler, making it easier to disassemble and replace.

[0046] As an optional solution for the baking equipment, the adjustment assembly 230 includes an adjustment platform 231 and adjustment holes 232 spaced vertically, with the adjustment holes 232 located in the housing 220. The operator only needs to place the adjustment platform 231 into one of the adjustment holes 232, and then place the end of the platform 210 near the door 240 onto the adjustment platform 231 to adjust the preset angle of the platform 210. This method is simple in structure, convenient, and reliable in adjustment. Alternatively, the adjustment platform 231 can be configured as an adjustment column connected to the platform 210. The platform 210 can be adjusted by cooperating with different adjustment holes 232, resulting in fewer parts and simpler adjustment operations.

[0047] Optionally, the adjustment component 230 can also be configured in other ways. For example, the adjustment component 230 may include a sliding end and a guide end extending vertically. One of the sliding end and the guide end may be located in the housing 220, and the other may be located in the platform 210. By sliding the sliding end along the guide end and locking it relative to the sliding end, the preset angle of the platform 210 can be adjusted and locked. It is understood that compared to the adjustment method of the adjustment hole 232, the adjustment method of the sliding end and the guide end can achieve stepless adjustment, continuous adjustment without interruption, adapt to personalized needs, and smooth and precise operation. The sliding end and the guide end can be set as a sliding rail and a slider that slide against each other, or they can also be set as a cylinder or electric push rod. The preset angle of the platform 210 can be adjusted by the extension and retraction of the cylinder or push rod.

[0048] In other embodiments, the adjustment component 230 may further include a cam rotatably mounted on the housing 220, with the outer contour of the cam abutting against the platform 210. When the cam rotates, it drives the platform 210 to perform adjustment. Alternatively, the adjustment component 230 may include a lead screw and a nut. The lead screw is rotatably mounted on the housing 220, and the nut is fixedly mounted on the platform 210 and threadedly connected to the lead screw. Similarly, adjustment is achieved when the lead screw rotates. Furthermore, the rotation of the cam and lead screw can be achieved manually or electrically. Those skilled in the art can choose any of the above-described configurations of the adjustment component 230, or other structures that can achieve a preset angle adjustment of the platform 210, without specific limitations here.

[0049] In this embodiment, two or more platforms 210 are arranged vertically at intervals inside the oven 200 to increase the space utilization within the oven 200 and improve the baking efficiency of the baking equipment. Furthermore, the two or more platforms 210 are arranged at a preset angle to the horizontal plane to ensure a more stable spacing between the wafers 1 to be baked. For example, the outer dimensions of the oven 200 are set to 500mm × 500mm × 1000mm, and the lengths of the stop block 211 and the limiting block 212 are both set to 230mm.

[0050] Specifically, the oven 200 is equipped with a baking device and a gas filling / venting device to perform the baking operation within the oven 200. The baking device consists of a heating wire, and the gas filling / venting device continuously introduces and extracts nitrogen gas into the oven 200 to reduce the oxygen content. When the oxygen content reaches a preset value, the heating wire activates to raise the temperature inside the oven 200 to the target value, at which point the photoresist on wafer 1 slowly solidifies. Because the stage 210 is tilted and equipped with a stop block 211 and a limiting block 212, the wafer 1 is heated more uniformly, reducing the risk of wafer sticking and thus resulting in a higher baking yield.

[0051] The above description is only a preferred embodiment of this utility model. For those skilled in the art, there will be changes in the specific implementation method and application scope based on the idea of ​​this utility model. The content of this specification should not be construed as a limitation of this utility model.

Claims

1. Baking equipment, characterized in that, include: The metal box (100) includes snap-fit ​​walls (110) spaced apart along a first direction. The snap-fit ​​walls (110) are provided with a plurality of snap-fit ​​slots (111) along a second direction. Two snap-fit ​​slots (111) opposite to two snap-fit ​​walls (110) form a snap-fit ​​position. A wafer (1) can be disposed in one snap-fit ​​position. An oven (200) is provided with a stage (210) inside. The stage (210) is set at a preset angle with the horizontal plane. The metal box (100) can be placed on the stage (210). The stage (210) can make the wafer (1) abut against one end of the latching position along the second direction.

2. The baking equipment according to claim 1, characterized in that, The oven (200) includes a box body (220), the platform (210) is disposed on the box body (220), and the oven (200) also includes an adjustment component (230) for adjusting the size of the preset angle.

3. The baking equipment according to claim 2, characterized in that, The adjustment assembly (230) includes an adjustment platform (231) and adjustment holes (232) spaced apart along the vertical direction. The adjustment holes (232) are located in the housing (220). One of the adjustment platforms (231) is placed in the adjustment hole (232). The platform (210) can be placed on the adjustment platform (231).

4. The baking equipment according to claim 2, characterized in that, The adjustment assembly (230) includes a sliding end and a guide end extending in a vertical direction. One of the sliding end and the guide end is disposed in the housing (220) and the other is disposed in the platform (210). The sliding end can slide along the guide end and lock relative to the sliding end.

5. The baking equipment according to claim 1, characterized in that, The platform (210) is provided with a stop block (211) on the side lower than the horizontal plane, and the metal box (100) can abut against the stop block (211).

6. The baking equipment according to claim 1, characterized in that, The platform (210) is also provided with two spaced-apart limiting blocks (212), the distance between the two limiting blocks (212) being adapted to the width of the metal box (100) along the first direction.

7. The baking equipment according to claim 1, characterized in that, The oven (200) includes a box body (220) and a door (240) disposed on one side of the box body (220). The platform (210) is disposed inside the box body (220), and the side of the platform (210) closer to the door (240) is higher than the side away from the door (240).

8. The baking apparatus according to claim 7, characterized in that, The platform (210) is rotatably connected to the box body (220) on the side away from the box door (240), and the height of the side closer to the box door (240) is adjustable.

9. The baking apparatus according to any one of claims 1-8, characterized in that, The metal box (100) is also provided with a connecting arm (120) that extends along the second direction, and the two snap-fit ​​walls (110) are respectively connected to the two ends of the connecting arm (120) along the second direction.

10. The baking apparatus according to any one of claims 1-8, characterized in that, The oven (200) is provided with two or more platforms (210) arranged at intervals along the vertical direction, and each platform (210) is arranged at a preset angle to the horizontal plane; the oven (200) is also provided with a baking device and a gas filling and releasing device.

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