Copper paste drying and curing device and photovoltaic cell production equipment

Abstract

The application relates to a copper paste drying and curing device and a photovoltaic cell production equipment, and belongs to the technical field of photovoltaic cell production. The copper paste drying and curing device comprises a shell and a heating assembly, wherein the shell has an accommodating space; the heating assembly comprises an image recognizer and an electron beam generator; the image recognizer is in communication connection with the electron beam generator; the image recognizer is used for recognizing a battery piece to be processed; and the electron beam generator is used for emitting an electron beam to the battery piece to be processed in the accommodating space, so as to dry and cure copper paste grid lines on the battery piece to be processed. The copper paste drying and curing device and the photovoltaic cell production equipment provided by the application at least solve the problems that the copper paste drying and curing cost is large and it is difficult to obtain the best performance in the related art.

Description

Technical Field

[0001] This application relates to the field of photovoltaic cell production technology, and in particular to a copper paste drying and curing device and photovoltaic cell production equipment. Background Technology

[0002] In current photovoltaic cell manufacturing processes, there is a growing trend to use lower-cost pastes instead of silver pastes for photovoltaic cell grid lines to improve product economic efficiency. Since copper paste requires drying and curing after printing to remove solvents and sinter copper particles at high temperatures to form a continuous conductive layer, this process is crucial to the performance and reliability of photovoltaic cells. Therefore, precise control of temperature distribution and time is necessary during the sintering process of copper paste to prevent copper oxidation.

[0003] In the photovoltaic cell production process of related technologies, commonly used heating devices include infrared lamp heating, electric heating rod heating, or hot nitrogen gas circulation heating. The main way to prevent copper oxidation is to introduce a large amount of nitrogen gas into the heating chamber.

[0004] However, the heating furnaces of the relevant technologies do not have a drying and curing design for copper paste. The heating rate is slow and it is difficult to achieve the optimal performance of copper paste curing. At the same time, the heating chamber of the heating furnace for photovoltaic cells is large. The method of heating the photovoltaic cells as a whole in the relevant technologies can easily damage the cells themselves. In addition, the large heating chamber will increase nitrogen consumption, which will increase production costs. Utility Model Content

[0005] Therefore, it is necessary to address the issues of high cost and difficulty in achieving optimal curing performance in copper paste drying and curing by providing a copper paste drying and curing device and photovoltaic cell production equipment that can quickly cure copper paste and improve its post-curing performance.

[0006] This application provides a copper paste drying and curing apparatus, which includes a housing and a heating component. The housing has a receiving space. The heating component includes an image recognizer and an electron beam generator. The image recognizer and the electron beam generator are communicatively connected. The image recognizer is used to identify the battery cell to be processed, and the electron beam generator is used to emit an electron beam to the battery cell to be processed in the receiving space to dry and cure the copper paste grid lines on the battery cell to be processed.

[0007] In some embodiments, the electron beam generator includes a gun body and a magnet body, wherein the gun body is used to emit an electron beam into a receiving space; the magnet body is disposed at the output end of the gun body and is used to generate a magnetic field and change the emission direction of the electron beam.

[0008] In some embodiments, the magnet part includes two first magnets and two second magnets arranged opposite to each other; the relative arrangement directions of the two first magnets, the relative arrangement directions of the two second magnets, and the direction of the electron beam exiting the gun body part intersect each other.

[0009] In some embodiments, the electron beam generator further includes an energy amplification section disposed on the gun body and positioned along the electron beam generation path.

[0010] In some embodiments, the energy amplification section includes an electron lens, and the electron beam emitted by the gun body is focused after passing through the electron lens so that the focal diameter of the electron beam is less than 0.1 mm.

[0011] In some embodiments, the copper paste drying and curing apparatus further includes a positioning worktable, which is disposed within the accommodating space and is used to provide support and positioning for the battery cells to be processed.

[0012] In some embodiments, the copper paste drying and curing apparatus further includes a temperature monitoring device disposed within the accommodating space.

[0013] In some embodiments, the temperature monitoring device includes an infrared sensor.

[0014] In some embodiments, the copper paste drying and curing apparatus further includes a vacuum device, which is connected to the containment space and is used to extract gas from the containment space.

[0015] This application also provides a photovoltaic cell production equipment, which includes a copper paste drying and curing device as provided in any of the foregoing embodiments.

[0016] The copper paste drying and curing apparatus and photovoltaic cell production equipment provided in the embodiments of this application have at least the following beneficial effects:

[0017] By setting up a heating component that includes an image recognizer and an electron beam generator connected by communication, the image recognizer identifies the shape of the copper paste grid lines on the cell to be processed, and the electron beam generator emits an electron beam according to the shape of the copper paste grid lines. Through elastic or inelastic scattering between the electron beam and the copper paste, the copper paste is dried and cured. This allows for targeted drying and curing of the copper paste, eliminating the impact of heating on the non-copper paste coated parts of the cell, improving the efficiency of copper paste drying and curing, and enhancing the overall reliability of the cell.

[0018] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the following are specific embodiments of this application. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the planar structure of a copper paste drying and curing apparatus provided in an embodiment of this application;

[0021] Figure 2 In a copper paste drying and curing apparatus provided in an embodiment of this application.

[0022] Explanation of reference numerals in the attached drawings: 100, copper paste drying and curing device; 10, outer shell; 20, heating component; 21, image recognition device; 22, electron beam generator; 221, gun body; 222, magnet body; 2221, first magnet; 2222, second magnet; 23, energy amplification unit; 30, positioning worktable; 40, temperature monitoring device; 50, vacuum device; 101, accommodating space; 200, battery cell to be processed; 300, controller. Detailed Implementation

[0023] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0024] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0025] Furthermore, where the term "and / or" appears, "and / or" merely describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship. Where the terms "first" and "second" appear, these terms are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" can explicitly or implicitly include at least one of those features. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0026] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0027] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0028] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0029] Please refer to the following: Figure 1 and Figure 2This application provides a copper paste drying and curing apparatus 100, which includes a housing 10 and a heating component 20. The housing 10 has a receiving space 101. The heating component 20 includes an image recognizer 21 and an electron beam generator 22. The image recognizer 21 is communicatively connected to the electron beam generator 22. The image recognizer 21 is used to identify the battery cell 200 to be processed. The electron beam generator 22 is used to emit an electron beam (not labeled) to the battery cell 200 to be processed in the receiving space 101 to dry and cure the copper paste grid lines on the battery cell 200.

[0030] The copper paste drying and curing device 100 is one of the key pieces of equipment in the photovoltaic cell manufacturing process. It is mainly used to dry and cure the copper grid line paste printed on the cell to be processed 200, so as to use the cheaper copper instead of silver as the grid line forming material of the photovoltaic cell, which can greatly reduce the cost of raw materials.

[0031] It should be noted that after the copper paste is printed, it needs to be dried and cured on the cell to be processed 200 to remove the solvent in the paste and allow the copper particles to sinter at high temperature to form a continuous conductive layer structure. However, related technologies usually use methods such as infrared lamp heating, electric heating rod heating or hot nitrogen circulation heating to dry and cure the copper paste. Such heating methods are not specifically designed for copper paste and are prone to damage to the non-grid structure of the cell to be processed 200 during the heating process, thereby affecting the performance of the photovoltaic cell.

[0032] The housing 10 has a receiving space 101, meaning that the housing 10 is a sealed structure used to provide a stable and sealed working environment for the drying and curing of copper paste. The receiving space 101 can be used to accommodate the battery cell 200 to be processed and other components in the copper paste drying and curing device 100.

[0033] The heating assembly 20 includes an image recognizer 21 and an electron beam generator 22, and the image recognizer 21 is communicatively connected to the electron beam generator 22. The image recognizer 21 is used to identify the shape of the copper paste grid lines on the cell to be processed 200 by image recognition, and converts the image information into a communication signal and transmits it to the electron beam generator 22. The electron beam generator 22 generates a high-energy electron beam along the trajectory of the copper paste grid lines according to the received communication signal, so as to achieve the effect of heating, drying and curing the copper paste grid lines.

[0034] In this way, when an electron beam (with energy typically between 10 keV and 100 keV) strikes the oxide layer (Cu₂O or CuO), energy is transferred and heat is generated through either elastic or inelastic scattering. In the case of elastic scattering, collisions between electrons and atomic nuclei induce lattice vibrations, causing a thermal effect in the copper paste and reaching its curing temperature. In this case, the heating temperature of the copper paste can be controlled by adjusting the energy of the electron beam, which is beneficial for controlling the heating location (electron beam emission direction) and the heating temperature (controlling the electron beam energy). In the case of inelastic scattering, electrons interact with extranuclear electrons, leading to ionization or excitation, which in turn ejects oxygen from the copper oxide (Cu₂O or CuO). 2- or Cu + Electrons are released and form defects (such as oxygen vacancies). The released electrons may be captured, forming reducing active sites (such as Cu). 0 ).

[0035] Furthermore, the electron beam can generate localized instantaneous heating in the irradiated copper paste area, causing the electron beam energy to be deposited on the surface of the nanoparticles (penetration depth approximately 1 μm to 10 μm). This leads to the thermal decomposition of the oxide layer in the copper paste, where copper ions are reduced to metallic copper by thermionic electrons. The high-energy electrons in the electron beam can also directly provide the electrons required for reduction, thus achieving the following two chemical reduction reaction pathways: Cu₂O + 2e⁻ - →2Cu+O 2- CuO + 2e - →Cu+O 2- Among them, the generated O 2- It may desorb in the form of O2; at the same time, carbon contaminants (such as solvents, dispersants and other organic binders) contained in copper paste can also be reduced, and active carbon species (such as CH) generated by electron beam pyrolysis of organic matter can be generated.

[0036] In these embodiments of the present application, the communication connection between the image recognizer 21 and the electron beam generator 22 can be achieved by wireless communication (WIFI, Bluetooth, 5G, 4G, etc.) or wired communication.

[0037] The outer casing 10 can be a separate drying and curing space, that is, the outer casing 10 is a detachable structure. After the battery cell 200 to be processed is placed into the receiving space 101, the outer casing 10 is sealed and subsequent drying and curing operations for the copper paste are performed. Alternatively, in some embodiments, the outer casing 10 can also be connected to the outer casing of other mechanisms (paste coating mechanism) so that the battery cell 200 to be processed can be transferred between adjacent processes by conveyor belts or other conveying devices. In this case, the outer casing 10 remains connected to and sealed to the outer casing of other mechanisms.

[0038] According to the copper paste drying and curing apparatus 100 provided in the embodiments of this application, by setting the heating component 20 including an image recognition device 21 and an electron beam generator 22 connected in communication, the image recognition device 21 identifies the shape of the copper paste grid lines on the battery cell 200 to be processed, and the electron beam generator 22 emits an electron beam according to the shape of the copper paste grid lines. Through elastic scattering or inelastic scattering between the electron beam and the copper paste, the copper paste is dried and cured. The copper paste can be dried and cured in a targeted manner, eliminating the influence of the heating process on the non-copper paste coated parts of the battery cell, improving the efficiency of copper paste drying and curing, and improving the overall reliability of the battery cell.

[0039] In some embodiments, the electron beam generator 22 includes a gun body 221 and a magnet 222, wherein the gun body 221 is used to emit an electron beam into the receiving space 101; the magnet 222 is disposed at the output end of the gun body 221 and is used to generate a magnetic field and change the emission direction of the electron beam.

[0040] The gun body 221 is the core component of the electron beam generator 22, used to excite and emit a high-energy electron beam; that is, the gun body 221 is used to emit an electron beam into the accommodating space 101. In these embodiments of this application, the gun body 221 can be an electron gun, in which case the electron beam is generated by the electron gun and electrons can be released by methods such as high-temperature tungsten filaments or field emission. It is understood that electrons are accelerated in a high-voltage electric field to form a high-speed electron beam.

[0041] The magnet part 222 is a direction control component in the electron beam generator 22, which can change the emission direction of the electron beam through the magnetic field it generates. That is, the magnet part 222 is provided at the output end of the gun body part 221 and is used to generate a magnetic field and change the emission direction of the electron beam.

[0042] The magnet part 222 is located at the output end of the gun body part 221. This means that the magnetic field generated by the magnet part 222 is located on the output path of the electron beam emitting gun body part 221. By changing its own magnetic field, the emission direction of the electron beam is changed, thereby enabling the electron beam to move accurately along the shape of the copper paste grid lines, so as to achieve drying and curing of the copper paste grid lines.

[0043] The magnet part 222 can be configured such that it is connected to the outer casing 10 and the magnetic field generated by the magnet part 222 acts on the output end of the gun body part 221; or, in some embodiments, the magnet part 222 can be directly connected to the output end of the gun body part 221.

[0044] In some embodiments, the magnet section 222 includes two first magnets 2221 and two second magnets 2222 arranged opposite to each other; the relative arrangement directions of the two first magnets 2221, the relative arrangement directions of the two second magnets 2222, and the direction of the electron beam exiting the gun body section intersect each other.

[0045] The two first magnets 2221 and the two second magnets 2222 together form a bidirectional scanning structure, that is, a magnetic field can be generated between the two first magnets 2221 and between the two second magnets 2222, so as to control the offset of the electron beam in the relative setting direction of the two first magnets 2221 and the relative setting direction of the two second magnets 2222, respectively.

[0046] Among them, at least one of the two first magnets 2221 is an electromagnet, and at least one of the two second magnets 2222 is an electromagnet, so that the magnetic field can be adjusted in both directions, which is beneficial to the precise control of the deflection of the electron beam in the emission direction.

[0047] In these embodiments of the present application, both first magnets 2221 and both second magnets 2222 may be electromagnets.

[0048] In some embodiments, the electron beam generator 22 further includes an energy amplification section 23, which is disposed on the gun body section 221 and is used to be disposed on the electron beam generation path.

[0049] The function of the energy amplification section 23 is to further increase the energy of the electron beam so that the electron beam can obtain a higher energy density.

[0050] The energy amplification section 23 is disposed on the gun body section 221 and is used to be disposed on the electron beam generation path. This means that the energy amplification section 23 is connected to the gun body section 221 to improve the structural stability between the energy amplification section 23 and the gun body section 221, thereby improving the stability of energy density enhancement.

[0051] For example, in some embodiments, the energy amplification section 23 may be disposed inside the gun body section 221 to increase the energy density of the electron beam before it is emitted from the output end of the gun body section 221; or, in some embodiments, the energy amplification section 23 may be connected to the output end of the gun body section 221 so that the electron beam can obtain an increase in energy density at the first moment after being emitted from the output end of the gun body section 221.

[0052] In these embodiments of this application, the energy amplification section 23 can, but is not limited to, improve the energy density of the electron beam by optimizing the focusing, acceleration, or confinement process of the electron beam. When the energy amplification section 23 is an acceleration structure, it can be configured as a radio frequency acceleration cavity, a photocathode radio frequency gun, a traveling wave tube, or a standing wave tube, etc., to accelerate the electrons in the electron beam. When the energy amplification section 23 is a focusing structure, it can be configured as a solenoid magnetic field or a beam compressor, etc. Alternatively, in some embodiments, the energy amplification section 23 can also be a vacuum cavity, a beam guide, etc., disposed in the gun body section 221, to improve the energy density of the electron beam by reducing energy loss during electron generation, so as to meet the drying and curing requirements of the copper paste.

[0053] In some embodiments, the energy amplification section 23 includes an electron lens (not labeled), and the electron beam emitted by the gun body section 221 is focused after passing through the electron lens so that the focal diameter of the electron beam is less than 0.1 mm.

[0054] Compared to other configurations of the energy amplification section 23, the electronic lens is simpler and easier to implement, and it can use the electronic lens to adjust the size of the electron beam focus point by means of current, so that the focal diameter of the electron beam hitting the battery cell is less than 0.1 mm.

[0055] In some embodiments, the copper paste drying and curing apparatus 100 further includes a positioning worktable 30, which is disposed within the accommodating space 101 and is used to provide support and positioning for the battery cell 200 to be processed.

[0056] The positioning worktable 30 is used to improve the stability of the battery cell 200 to be processed in the receiving space 101, so as to reduce the risk of movement or deflection of the battery cell 200 to be processed in the receiving space 101. Exemplarily, in these embodiments of this application, the positioning worktable 30 may be provided with a groove structure that matches the shape of the battery cell 200 to be processed, so that when the battery cell 200 to be processed is placed into the receiving space, the battery cell 200 to be processed can be positioned by the groove structure on the positioning worktable 30; or, in some embodiments, the positioning worktable 30 may also be provided with positioning posts, positioning buckles and other structures, so as to provide good positioning for the installation of the battery cell 200 to be processed.

[0057] The positioning worktable 30 is disposed within the accommodating space 101. As described above, in some embodiments, the positioning worktable 30 may also be a conveying device between adjacent process components. For example, the positioning worktable 30 may be a conveyor belt disposed between the copper paste coating process and the copper paste drying and curing process. In this case, the two ends of the positioning worktable 30 are respectively disposed between the shell of the copper paste coating process component and the outer shell 10. Since the shell of the copper paste coating process component and the outer shell 10 maintain a sealed environment together, that is, the space of the two is an integrated space structure, it can also be said that the positioning worktable 30 is still disposed within the accommodating space 101.

[0058] In some embodiments, the copper paste drying and curing apparatus 100 further includes a temperature monitoring device 40, which is disposed within the accommodating space 101.

[0059] A temperature monitoring device 40 is installed within the accommodating space 101 to monitor temperature changes in the accommodating space 101 in real time. In these embodiments of this application, the temperature monitoring device 40 can be configured to maintain a communication connection with the heating component 20, thereby enabling feedback adjustment of the drying and curing temperature. For example, when the temperature monitoring device 40 detects a low temperature in the accommodating space 101, it may affect the drying and curing effect of the copper paste. In this case, the power of the heating component 20 can be adjusted based on the feedback result of the temperature monitoring device 40 to improve the drying and curing effect of the heating component 20. Correspondingly, when the temperature monitoring device 40 detects a high temperature in the accommodating space 101, the power of the heating component 20 can also be adjusted through feedback adjustment to improve the reliability of the copper paste drying and curing device 100.

[0060] In some embodiments of this application, the copper paste drying and curing apparatus 100 may also include a controller 300, wherein the communication connection between the image recognizer 21 and the heating component 20, and the connection between the temperature monitoring device 40 and the heating component 20, can all be achieved through the controller 300. Exemplarily, in some embodiments, the gun body 221, the image recognizer 21, the temperature monitoring device 40, and the positioning worktable 30 may all be connected to the controller 300 to improve the automation level of the copper paste grid drying and curing process. That is, when the positioning worktable 30 senses that the battery cell 200 to be processed is installed in place, it can send a communication signal to the controller 300, which then sends working instructions to the gun body 221, the image recognizer 21, and the temperature monitoring device 40, respectively.

[0061] In some embodiments, the temperature monitoring device 40 includes an infrared sensor (not labeled). Detecting the temperature within the accommodating space 101 using an infrared sensor facilitates temperature monitoring of the battery cell 200 to be processed and the copper paste grid lines disposed thereon, further improving the accuracy of temperature monitoring and enhancing the drying and curing effect of the copper paste grid lines.

[0062] In some embodiments, the copper paste drying and curing apparatus 100 further includes a vacuum device 50, which is connected to the containment space 101 and is used to extract gas from the containment space 101.

[0063] The vacuum pump 50 is connected to the receiving space 101 and is used to extract the gas in the receiving space 101 to the outside of the receiving space, so as to maintain a vacuum environment inside the receiving space 101. Exemplarily, in these embodiments of this application, the vacuum level of the outer casing 10 can be set to be maintained at 10. -3 Up to 10 -5 The copper paste is cured in a process called Pane to reduce the risk of oxidation from contact with air, thereby effectively improving the quality and performance of the copper paste.

[0064] It should be noted that in these embodiments of this application, the method of extracting air from the containing space 101 is used instead of the method of introducing nitrogen into the containing space in the related art, thereby reducing the risk of copper paste coming into contact with oxygen. This setting method can undoubtedly reduce the amount of nitrogen used and improve the economic efficiency of the copper paste drying and curing device 100. At the same time, since the electron beam can also drive the oxides in the copper paste to undergo a reduction reaction, the method of extracting air can continuously extract the generated oxygen during the copper paste drying and curing process, further improving the reliability of copper paste drying and curing.

[0065] This application also provides a photovoltaic cell production equipment, which includes a copper paste drying and curing device 100 as provided in any of the foregoing embodiments.

[0066] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0067] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A copper paste drying and curing device, characterized in that, include: The outer shell has a storage space; The heating assembly includes an image recognizer and an electron beam generator. The image recognizer is communicatively connected to the electron beam generator. The image recognizer is used to identify the battery cell to be processed, and the electron beam generator is used to emit an electron beam to the battery cell to be processed in the receiving space to dry and cure the copper paste grid lines on the battery cell to be processed.

2. The copper paste drying and curing apparatus according to claim 1, characterized in that, The electron beam generator includes: The gun body is used to emit an electron beam into the accommodating space; A magnet section is provided at the output end of the gun body section and is used to generate a magnetic field and change the emission direction of the electron beam.

3. The copper paste drying and curing apparatus according to claim 2, characterized in that, The magnet section includes two first magnets arranged opposite to each other and two second magnets arranged opposite to each other; The relative orientations of the two first magnets, the relative orientations of the two second magnets, and the direction in which the electron beam exits the gun body intersect each other.

4. The copper paste drying and curing apparatus according to claim 2, characterized in that, The electron beam generator also includes an energy amplification section, which is disposed on the gun body and positioned along the electron beam generation path.

5. The copper paste drying and curing apparatus according to claim 4, characterized in that, The energy amplification section includes an electronic lens, and the electron beam emitted by the gun body is focused after passing through the electronic lens so that the focal diameter of the electron beam is less than 0.1 mm.

6. The copper paste drying and curing apparatus according to any one of claims 1 to 5, characterized in that, The copper paste drying and curing device also includes a positioning worktable, which is set in the accommodating space and is used to provide support and positioning for the battery cells to be processed.

7. The copper paste drying and curing apparatus according to any one of claims 1 to 5, characterized in that, The copper paste drying and curing device also includes a temperature monitoring device, which is installed within the accommodating space.

8. The copper paste drying and curing apparatus according to claim 7, characterized in that, The temperature monitoring device includes an infrared sensor.

9. The copper paste drying and curing apparatus according to any one of claims 1 to 5, characterized in that, The copper paste drying and curing device also includes a vacuum device, which is connected to the containment space and is used to extract the gas in the containment space.

10. A photovoltaic cell production equipment, characterized in that, Includes the copper paste drying and curing apparatus as described in any one of claims 1 to 9.

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