A vacuum box for a particle beam device

Abstract

The utility model relates to vacuum box technical field discloses a vacuum box for particle beam equipment, including base, vacuum assembly and intelligent exhaust valve, the vacuum assembly includes vacuum box, the outer wall of vacuum box fixed connection in base, the inner wall fixed connection of vacuum box has chamber no.

Description

Technical Field

[0001] This utility model relates to the field of vacuum box technology, and in particular to a vacuum box for particle beam equipment. Background Technology

[0002] The vacuum chamber of a particle beam apparatus is a sealed container designed to maintain a high vacuum environment to ensure that the particle beam is not disturbed by gas molecules during transmission, thereby achieving precise control and focusing. Particle beam apparatuses require operation in a high vacuum environment, and as the core component of beam transmission, the sealing performance of the vacuum chamber directly affects the operating efficiency and stability of the equipment.

[0003] Traditional vacuum box connection structures often employ a single-layer sealing design, which is prone to aging, deformation, or sealing failure under long-term operation or high pressure differential environments, leading to gas leakage and affecting vacuum stability. At the same time, traditional flange connection methods rely on evenly distributed bolts to provide preload, and uneven distribution of preload can easily cause local deformation of the flange surface, resulting in beam channel eccentricity and affecting the transmission accuracy and stability of the particle beam. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a vacuum box for particle beam equipment, aiming to improve the stability of particle beam transmission.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vacuum box for a particle beam device, comprising a base, a vacuum assembly, and an exhaust valve. The vacuum assembly includes a vacuum box, which is fixedly connected to the outer wall of the base. The inner wall of the vacuum box is fixedly connected to a first chamber and a second chamber. An electromagnetic valve is fixedly connected to the outer wall of the first chamber. A sealing groove is formed in the inner wall of the first chamber, and a sealing ring is snapped into the inner wall of the sealing groove. An inlet and an outlet are fixedly connected to the outer wall of the vacuum box and communicate with the inner wall. A pipe is slidably connected to the inlet, and a pipe is slidably connected to the outlet. An exhaust assembly is provided on the inner wall of the base. The exhaust assembly includes a vacuum pump. An inlet pipe and an exhaust pipe are fixedly connected to the outer wall of the vacuum pump. A connecting assembly is provided on the outer wall of the inlet, and a quick-release assembly is provided on the inner wall of the base.

[0006] The above technical solution involves a vacuum chamber with two chambers. An electromagnetic valve controls the connection between the two chambers, creating a double seal to reduce gas leakage. Multiple seals are formed by the sealing groove on the inner wall of chamber one, the sealing ring one, the inlet and outlet pipes, and the connecting components: flange one and flange two, bolts and nuts, sealing groove two and sealing ring three, sealing ring two, and sealing gasket. A vacuum pump draws gas from both chambers through the inlet pipe and discharges it through the exhaust pipe. The vacuum level is adjusted by an intelligent exhaust valve. Then, the particle beam enters chamber one through the inlet. The mirror-polished inner wall of chamber one eliminates protrusions and enhances corrosion resistance. The beam passes through both chambers and exits through the outlet, improving the stability of equipment operation and beam transmission.

[0007] Preferably, the quick-release assembly includes a base cover, which is slidably connected to the outer wall of the base. A limiting groove is formed on the inner wall of the base cover. A button is slidably connected to the inner wall of the limiting groove. A connecting block is fixedly connected to one end of the button. A limiting rod is fixedly connected to the inner wall of the base cover. A spring is provided on one side of the connecting block. A groove block is fixedly connected to the outer wall of the connecting block. A locking block is slidably connected to the outer wall of the groove block.

[0008] The above technical solution works as follows: pressing the button slides along the limiting groove, causing the connecting block to slide along the limiting rod and press the spring, thereby causing the groove block to disengage from the locking block to unlock. When closing, pressing the button compresses the spring, and after closing the base cover with the base, releasing the button causes the spring to push the connecting block back to its original position through its rebound force, causing the groove block to lock onto the locking block. This improves the efficiency of disassembly and assembly, maintains the stability of the vacuum, and extends the life of the equipment.

[0009] Preferably, the connecting assembly includes a flange plate one, which is fixedly connected to the outer wall of the inlet. A flange plate two is slidably connected to the outer wall of the flange plate one. A pipe one and a sealing ring three are fixedly connected to the inner wall of the flange plate two. A sealing groove two is formed on the inner wall of the flange plate one. A sealing ring two is fixedly connected to the outer wall of the flange plate one. Multiple holes are formed on the outer walls of both the flange plate one and the flange plate two. Multiple bolts are slidably connected to the inner walls of the holes. Nuts are threaded onto the outer walls of the bolts. A sealing gasket is fixedly connected to the outer wall of the sealing ring two.

[0010] The above technical solution involves fixing flange one to the inlet and flange two to pipe one, aligning the outer walls of the two flanges. Bolts are then passed through the holes in the two flanges and threaded into nuts to generate preload, ensuring a tight fit. Sealing groove two and sealing ring three are engaged, and sealing ring two and sealing gasket are engaged on the inner wall of pipe one. The preload is evenly distributed across multiple holes to prevent deformation, reduce leakage rate, and decrease coaxial deviation. The multi-layer sealing extends the replacement cycle of the sealing ring, reduces maintenance costs, and ensures stable beam transmission.

[0011] Preferably, the outer wall of the intake pipe is connected to the outer wall of chamber one and communicates with the inner wall, the outer wall of the exhaust pipe is fixedly connected to the inner wall of the base and communicates with the outer wall, the inlet is fixedly connected to the outer wall of chamber one and communicates with the inner wall, and the outer wall of the outlet is fixedly connected to the outer wall of chamber two and communicates with the inner wall.

[0012] The above technical solution involves: starting the vacuum pump to extract gas from chamber one through the inlet pipe, opening the solenoid valve to connect chamber one with chamber two, allowing the inlet pipe to simultaneously or independently extract gas from both chambers, and then exhausting the gas through the exhaust pipe to prevent gas backflow. The particle beam enters chamber one from the inlet, passes through the high vacuum of the two chambers, and is then discharged from the outlet to form a closed loop. Combined with the sealing structure, the vacuum level is stabilized, the beam transmission stability is improved, and the vacuum establishment time is shortened.

[0013] Preferably, the card block is fixedly connected to the inner wall of the base, and the slot block is slidably connected to the inner wall of the base cover.

[0014] The above technical solution utilizes a locking block on the inner wall of the base to provide a locking fulcrum for the slot block. Pressing the button causes the slot block to slide against the inner wall of the base cover, and under the force of the spring, the slot block engages or disengages from the locking block, achieving quick unlocking and locking, improving opening and closing efficiency, and facilitating maintenance and repair.

[0015] Preferably, the connecting block is slidably connected to the inner wall of the limiting groove, the button and the connecting block are slidably connected to the outer wall of the limiting rod, and the spring is sleeved on the outer wall of the limiting rod.

[0016] The above technical solution constrains the sliding trajectory of the button through the limiting groove and the limiting rod, providing a double-guided constraint path to prevent deviation. At the same time, the spring is compressed, and the limiting rod restricts the extension and retraction path of the spring, preventing the spring from bending or tangling, extending the spring's life, and ensuring the efficiency of vacuum pump maintenance and locking stability.

[0017] Preferably, the outer wall of the outlet is provided with a connecting assembly, and the flange is fixedly connected to the outer wall of the outlet.

[0018] Through the above technical solution: a connecting component is also provided on the outer wall of the outlet. Flange 1 is fixed at the outlet. When connecting pipe 2, flange 2 is aligned with flange 1. The threaded connection of bolts and nuts generates pre-tightening force. Sealing groove 2 is engaged with sealing ring 3, and sealing ring 2 and sealing gasket are engaged in pipe 2 to form multiple seals, prevent deformation, reduce coaxial deviation, reduce gas leakage rate, and improve equipment reliability.

[0019] Preferably, the second sealing ring and the sealing gasket are slidably connected to the inner wall of the first pipe, the third sealing ring is snapped into the inner wall of the second sealing groove, and the plurality of nuts are slidably connected to the outer wall of the second flange.

[0020] The above technical solution involves the sealing ring 2 and the sealing gasket sliding and engaging with the inner wall of the pipe to form the first seal. The sealing gasket compensates for installation errors and ensures a stable seal. The sealing ring 3 engages with the sealing groove 2 to form the second seal, reducing the gas leakage rate and maintaining a stable vacuum state. Multiple nuts slide in the annular groove on the outer wall of the flange 2 to ensure uniform bolt tightening force and maintain a stable seal.

[0021] This utility model has the following beneficial effects: 1. In this utility model, the electromagnetic valve controls the opening and closing of the isolation plate to form an independent sealed double barrier between chamber one and chamber two, achieving double sealing and reducing the risk of leakage; the particle beam enters chamber one through the inlet, and its mirror-polished inner wall can eliminate protrusions, avoid the formation of corrosion points by beam bombardment, and enhance corrosion resistance; the vacuum pump draws gas from the two chambers through the inlet pipe and discharges it through the exhaust pipe, and the exhaust valve monitors and adjusts the vacuum degree in the chamber in real time to balance the gas permeation and pumping speed, so as to maintain the vacuum degree stably and improve the stability of equipment operation and beam transmission.

[0022] 2. In this utility model, flange plate one and flange plate two are locked by the threaded connection of bolts and nuts, so that sealing groove two and sealing ring three are engaged, and sealing ring two and sealing gasket are engaged on the inner wall of pipe one, so as to achieve coaxial alignment of the interface and fit of the sealing surface, forming multiple gas barriers to prevent gas leakage; at the same time, the bolt preload is dispersed and evenly distributed in each hole to ensure the deformation of the flange plate, achieve zero eccentricity of the beam channel, and ensure the stability of particle beam transmission.

[0023] 3. In this utility model, pressing the button slides inside the base cover, pushing the connecting block to slide on the limit rod and compressing the spring. At the same time, it drives the slot block to slide on the inner wall of the base cover and disengage from the locking block, thereby unlocking and quickly opening the base cover. When closing, pressing the button drives the connecting block to compress the spring. Then, after rotating the base cover to close it, releasing the button pushes the connecting block back to its original position under the action of the spring's rebound force, causing the slot block to slide and engage with the locking block, achieving a quick locking function. Through the quick-release assembly, the maintenance and repair time of the vacuum pump can be shortened, efficiency can be improved, the equipment can maintain a stable vacuum state, and the service life of the equipment can be extended. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural diagram of a vacuum box for a particle beam device proposed in this utility model; Figure 2 This is a rear view of a vacuum box for a particle beam device proposed in this utility model. Figure 3 This is an internal structural diagram of a vacuum box for a particle beam device proposed in this utility model; Figure 4This is a diagram showing the unfolded structure of a vacuum chamber for a particle beam device proposed in this utility model. Figure 5 This utility model provides a structural diagram of a connection assembly for a vacuum box in a particle beam device. Figure 6 This is a structural diagram of a connection component for a vacuum box in a particle beam device, as proposed in this utility model. Figure 7 This is an unfolded structural diagram of the base of a vacuum box for a particle beam device proposed in this utility model; Figure 8 This invention presents a structural diagram of a quick-release assembly for a vacuum chamber used in particle beam equipment.

[0025] Legend: 1. Base; 2. Vacuum assembly; 201. Vacuum box; 202. Chamber 1; 203. Chamber 2; 204. Solenoid valve; 205. Sealing groove 1; 206. Sealing ring 1; 207. Inlet; 208. Pipe 1; 209. Outlet; 210. Pipe 2; 3. Exhaust valve; 4. Exhaust assembly; 401. Vacuum pump; 402. Inlet pipe; 403. Exhaust pipe; 5. Connecting assembly; 50 1. Flange plate one; 502. Flange plate two; 503. Sealing groove two; 504. Sealing ring two; 505. Sealing ring three; 506. Hole; 507. Bolt; 508. Nut; 509. Sealing gasket; 6. Quick release assembly; 601. Base cover; 602. Button; 603. Connecting block; 604. Limit rod; 605. Spring; 606. Limit groove; 607. Groove block; 608. Locking block. Detailed Implementation

[0026] The technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0027] Reference Figure 1 , Figure 3 and Figure 4This utility model provides an embodiment of a vacuum box for a particle beam device, comprising a base 1, a vacuum assembly 2, and an exhaust valve 3. The vacuum assembly 2 includes a vacuum box 201, which is fixedly connected to the outer wall of the base 1. A first chamber 202 and a second chamber 203 are fixedly connected to the inner wall of the vacuum box 201. An electromagnetic valve 204 is fixedly connected to the outer wall of the first chamber 202. A sealing groove 205 is formed on the inner wall of the first chamber 202, and a valve is engaged with the inner wall of the sealing groove 205. A sealing ring 206 is provided. An inlet 207 and an outlet 209 are fixedly connected to the outer wall of the vacuum box 201 and communicate with the inner wall. A pipe 208 is slidably connected to the inlet 207 and a pipe 210 is slidably connected to the outlet 209. An exhaust assembly 4 is provided on the inner wall of the base 1. The exhaust assembly 4 includes a vacuum pump 401. An air inlet pipe 402 and an exhaust pipe 403 are fixedly connected to the outer wall of the vacuum pump 401. A connecting assembly 5 is provided on the outer wall of the inlet 207 and a quick-release assembly 6 is provided on the inner wall of the base 1. Specifically, the vacuum box 201 contains two chambers: chamber one 202 and chamber two 203. The two chambers are connected by a solenoid valve 204, or can form independent sealed spaces to achieve double sealing, thereby reducing the risk of leakage. The sealing groove one 205 on the inner wall of chamber one 202 engages with the sealing ring one 206 to form the first sealing barrier. The inlet 207 is connected to pipe one 208 via connecting assembly 5. Flange one 501 and flange two 502 are locked together by bolts 507 and nuts 508. Simultaneously, the sealing groove two 503 engages with the sealing ring three 505, and the sealing ring two 504 and sealing gasket 509 engage with the inner wall of pipe one 208, forming... A double seal is formed; the vacuum pump 401 of the exhaust assembly 4 is started to draw gas from chamber 1 202 and chamber 2 203 through the inlet pipe 402 and discharge it through the exhaust pipe 403. The internal vacuum degree is monitored and adjusted in real time by the intelligent exhaust valve 3; then the particle beam enters chamber 1 202 from the inlet 207. The inner wall of chamber 1 202 is designed with mirror polishing to eliminate protrusions, avoid the formation of corrosion points by beam bombardment, and enhance corrosion resistance; after passing through chamber 1 202 and chamber 2 203, the beam is discharged from the outlet 209. The outlet 209 and the second pipe 210 are also connected by the connecting assembly 5 to achieve multi-layer sealing to improve the stability of equipment operation and beam transmission.

[0028] Reference Figure 1 , Figure 7 and Figure 8 The quick-release assembly 6 includes a base cover 601, which is slidably connected to the outer wall of the base 1. A limit groove 606 is formed on the inner wall of the base cover 601. A button 602 is slidably connected to the inner wall of the limit groove 606. A connecting block 603 is fixedly connected to one end of the button 602. A limit rod 604 is fixedly connected to the inner wall of the base cover 601. A spring 605 is provided on one side of the connecting block 603. A groove block 607 is fixedly connected to the outer wall of the connecting block 603. A locking block 608 is slidably connected to the outer wall of the groove block 607. Specifically, the base cover 601 slides against the outer wall of the base 1 for initial positioning. Multiple buttons 602 are slidably connected to the inner wall of the base cover 601. Pressing a button 602 causes it to slide within a limiting groove 606. When a button 602 slides, it pushes a connecting block 603 to slide against the outer wall of the limiting rod 604 and the inner wall of the limiting groove 606, compressing the spring 605. Simultaneously, the connecting block 603 drives a slotted block 607 to slide against the inner wall of the base cover 601, causing the slotted block 607 to disengage from the locking block 608, thus unlocking the base cover 601. The locking of 01 and base 1 enables quick opening; when closing, pressing button 602 causes connecting block 603 to compress spring 605, then rotating base cover 601 to the locked position, releasing button 602 pushes connecting block 603 back to its original position under the rebound force of spring 605, thereby causing slot block 607 to engage with locking block 608, completing quick locking; improving disassembly and assembly efficiency, shortening the maintenance and repair time of vacuum pump 401, improving efficiency, ensuring stable vacuum state of equipment, and extending equipment service life.

[0029] Reference Figure 2 , Figure 5 and Figure 6 The connecting assembly 5 includes a flange 501, which is fixedly connected to the outer wall of the inlet 207. A flange 502 is slidably connected to the outer wall of the flange 501. A pipe 208 and a sealing ring 505 are fixedly connected to the inner wall of the flange 502. A sealing groove 503 is provided on the inner wall of the flange 501. A sealing ring 504 is fixedly connected to the outer wall of the flange 501. Multiple holes 506 are provided on the outer walls of both the flange 501 and the flange 502. Multiple bolts 507 are slidably connected to the inner wall of the holes 506. Nuts 508 are threadedly connected to the outer wall of the bolts 507. A sealing gasket 509 is fixedly connected to the outer wall of the sealing ring 504. Specifically, flange 501 is fixed to inlet 207, and flange 502 is fixed to pipe 208. Initial alignment is achieved through the outer walls of flanges 501 and 502. During assembly, multiple holes 506 are made in the outer walls of both flanges 501 and 502, allowing bolts 507 to pass through these holes and be threaded onto nuts 508. This generates preload, ensuring a tight fit between the two flanges, thus sealing the inner wall of flange 501. The sealing ring 505 of the second groove 503 and the flange 502 are engaged to form the first seal. The sealing ring 504 and the gasket 509 on the outer wall of the flange 501 are engaged in the pipe 208 to form the second axial seal. Multiple holes 506 are evenly distributed through bolts 507 and nuts 508 to disperse the preload, avoid local deformation of the flange, reduce the gas leakage rate, reduce the coaxial deviation of the beam channel, and extend the replacement cycle of the sealing rings, reduce maintenance costs, and ensure stable transmission of the particle beam.

[0030] Reference Figure 1 , Figure 2 and Figure 3 The outer wall of the intake pipe 402 is connected to the outer wall of chamber 1 202 and communicates with the inner wall. The outer wall of the exhaust pipe 403 is fixedly connected to the inner wall of the base 1 and communicates with the outer wall. The inlet 207 is fixedly connected to the outer wall of chamber 1 202 and communicates with the inner wall. The outer wall of the outlet 209 is fixedly connected to the outer wall of chamber 2 203 and communicates with the inner wall. Specifically, vacuum pump 401 is started, allowing it to directly extract gas from chamber 1 202 via inlet pipe 402. Simultaneously, solenoid valve 204 is opened to connect chamber 1 202 with chamber 2 203, enabling inlet pipe 402 to simultaneously or independently extract gas from both chambers. The extracted gas is then directly discharged via exhaust pipe 403, preventing gas backflow into the chambers. The particle beam enters chamber 1 202 through inlet 207, is transmitted through the high vacuum environment of chamber 1 202, and then exits through the high vacuum environment of chamber 2 203 via outlet 209, forming a closed-loop process. Combined with the sealing structure of vacuum component 2, this stabilizes the vacuum levels of the two chambers, improves the stability of particle beam transmission, and shortens vacuum build-up time.

[0031] Reference Figure 8 The card block 608 is fixedly connected to the inner wall of the base 1, and the slot block 607 is slidably connected to the inner wall of the base cover 601. Specifically, the locking block 608 is fixed to the inner wall of the base 1, providing a fulcrum for the locking of the slot block 607. By pressing the button 602, the slot block 607 slides on the inner wall of the base cover 601 and engages with the locking block 608, thus achieving quick locking and unlocking.

[0032] Reference Figure 7 and Figure 8 The connecting block 603 is slidably connected to the inner wall of the limiting groove 606, the button 602 and the connecting block 603 are slidably connected to the outer wall of the limiting rod 604, and the spring 605 is sleeved on the outer wall of the limiting rod 604. Specifically, pressing button 602 causes connecting block 603 to slide along the outer wall of limiting rod 604 within limiting groove 606. Through the cooperation of limiting rod 604 and limiting groove 606, a double guiding constraint is formed, limiting the sliding path of connecting block 603 and ensuring that connecting block 603 always slides on the same horizontal line, reducing deviation. At the same time, it compresses spring 605, causing spring 605 to extend and retract within limiting groove 606. The limiting rod 604 cooperates to limit the extension and retraction path of spring 605, preventing spring 605 from bending to the side, extending the service life of spring 605, ensuring quick operation and locking stability during maintenance of vacuum pump 401, and indirectly maintaining the reliable vacuum state of the equipment.

[0033] Reference Figure 1 , Figure 3 and Figure 4 The outer wall of outlet 209 is provided with a connecting assembly 5, and flange 501 is fixedly connected to the outer wall of outlet 209; Specifically, the outer wall of outlet 209 is also equipped with a connecting component 5, which is fixed to outlet 209 by flange 501. When connecting external pipe 210, flange 502 at the end of pipe 210 is first aligned with flange 501. Bolt 507 passes through the holes 506 of the two flanges and the nuts 508 are tightened. The resulting preload causes the sealing groove 503 on the inner wall of flange 501 to engage with the sealing ring 505 on flange 502 to form the first seal. At the same time, the outer wall of flange 501... The sealing ring 504 and the sealing gasket 509 are snapped into the pipe 210 to form a second seal. Multiple evenly distributed holes 506 ensure uniform distribution of preload, reduce the probability of flange deformation, and avoid coaxiality deviation between outlet 209 and pipe 210. The multi-layer sealing structure reduces the gas leakage rate. At the same time, the elastic compensation function of the sealing gasket 509 adapts to installation errors, maintains stable sealing performance, reduces low scattering of particle beams, and improves the reliability of the equipment by facilitating temperature transfer from outlet 209 to pipe 210.

[0034] Reference Figure 5 and Figure 6 The sealing ring 504 and the sealing gasket 509 are slidably connected to the inner wall of the pipe 208, the sealing ring 505 is snapped into the inner wall of the sealing groove 503, and multiple nuts 508 are slidably connected to the outer wall of the flange 502. Specifically, when flange 1 501 and flange 2 502 are connected by bolts 507 and nuts 508, sealing ring 2 504 and sealing gasket 509 slide and engage with the inner wall of pipe 1 208 to form a sealing barrier. At the same time, sealing ring 3 505 engages with sealing groove 2 503 to form a second sealing barrier. Multiple nuts 508 slide in the annular groove on the outer wall of flange 2 502 to ensure uniform force distribution during bolt tightening, thereby maintaining stable sealing performance.

[0035] Working principle: In use, this utility model first connects the inlet 207 and the pipe 208 together via the connecting component 5. A flange 501 is fixed to the outer wall of the inlet 207, and a flange 502 is fixed to the outer wall of the pipe 208. Both flanges 501 and 502 have multiple holes 506 on their outer walls. The inlet 207 and pipe 208 are locked together by the threaded connection of bolts 507 and nuts 508. Simultaneously, the sealing groove 503 on the inner wall of flange 501 interacts with the sealing ring 3 on the outer wall of flange 502. 505 are snapped together, and a sealing gasket 509 is fixed on the outer wall of the sealing ring 504. The sealing ring 504 and the sealing gasket 509 will snap onto the inner wall of the pipe 208 and the flange 502. Through multi-layer sealing, the interface of the flange 501 and the flange 502 is aligned to ensure that the beam channel is coaxial. Tightening the connection structure makes the sealing surface fit together, forming multiple gas barriers to prevent gas leakage. The preload of the bolt 507 is distributed and evenly distributed in each hole 506 to ensure the deformation of the flange, realize zero eccentricity of the beam channel, and ensure the stability of particle beam transmission. In the dual-vacuum-chamber design, the main chamber and the secondary chamber are controlled by the opening and closing of the isolation plate through the electromagnetic valve 204, making the two chambers an independent sealed structure, forming a double barrier, further reducing the risk of leakage and improving stability; the particle beam enters the chamber 1 202 through the inlet 207. The inner wall of the chamber 1 202 is mirror-polished to eliminate protrusions or depressions, avoid local corrosion points caused by particle beam bombardment, and enhance corrosion resistance; the vacuum pump 401 is started to extract the internal gas, and the gas in the chamber 1 202 and the chamber 2 203 is sucked out through the inlet pipe 402 and then discharged through the exhaust pipe 403. The exhaust valve 3 monitors the internal vacuum level in real time and adjusts it to balance the trace gas infiltration and the pumping speed, and maintain the stability of the vacuum level; By pressing button 602, the button slides into the base cover 601, pushing the connecting block 603 to slide and compress the spring 605. This causes the connecting block 603 and button 602 to slide on the outer wall of the limit rod 604, simultaneously causing the slot block 607 to slide on the inner wall of the base cover 601, disengaging from the locking block 608. This unlocks the slot block 607 and the locking block 608, allowing the base cover 601 to open quickly. When closing, pressing button 602 causes the connecting block 603 to slide and compress the limit rod 604. Then, rotating the base cover 601 to close it with the base 1, and releasing the base cover 601, the rebound force of the limit rod 604 pushes the connecting block 603 back to its original position. This causes the slot block 607 to slide and engage with the locking block 608, achieving a quick locking function. The quick-release assembly 6 improves the efficiency of vacuum pump 401 maintenance and repair, ensuring the equipment remains in a vacuum state.

[0036] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A vacuum chamber for a particle beam device, comprising a base (1), a vacuum assembly (2), and a smart exhaust valve (3), characterized in that: The vacuum assembly (2) includes a vacuum box (201), which is fixedly connected to the outer wall of the base (1). A first chamber (202) and a second chamber (203) are fixedly connected to the inner wall of the vacuum box (201). An electromagnetic valve (204) is fixedly connected to the outer wall of the first chamber (202). A sealing groove (205) is formed on the inner wall of the first chamber (202), and a sealing ring (206) is fitted into the inner wall of the sealing groove (205). An inlet (206) is fixedly connected to the outer wall of the vacuum box (201). 7) and outlet (209) and communicate with the inner wall, the inlet (207) is slidably connected to pipe one (208), the outlet (209) is slidably connected to pipe two (210), the inner wall of the base (1) is provided with an exhaust assembly (4), the exhaust assembly (4) includes a vacuum pump (401), the outer wall of the vacuum pump (401) is fixedly connected to an air inlet pipe (402) and an exhaust pipe (403), the outer wall of the inlet (207) is provided with a connecting assembly (5), and the inner wall of the base (1) is provided with a quick-release assembly (6).

2. A vacuum box for a particle beam device according to claim 1, characterized in that: The quick-release assembly (6) includes a base cover (601), which is slidably connected to the outer wall of the base (1). A limit groove (606) is provided on the inner wall of the base cover (601). A button (602) is slidably connected to the inner wall of the limit groove (606). A connecting block (603) is fixedly connected to one end of the button (602). A limit rod (604) is fixedly connected to the inner wall of the base cover (601). A spring (605) is provided on one side of the connecting block (603). A groove block (607) is fixedly connected to the outer wall of the connecting block (603). A locking block (608) is slidably connected to the outer wall of the groove block (607).

3. A vacuum box for a particle beam device according to claim 1, characterized in that: The connecting assembly (5) includes a flange plate one (501), which is fixedly connected to the outer wall of the inlet (207). A flange plate two (502) is slidably connected to the outer wall of the flange plate one (501). A pipe one (208) and a sealing ring three (505) are fixedly connected to the inner wall of the flange plate two (502). A sealing groove two (503) is opened on the inner wall of the flange plate one (501). A sealing ring two (504) is fixedly connected to the outer wall of the flange plate one (501). Multiple holes (506) are opened on the outer walls of both the flange plate one (501) and the flange plate two (502). Multiple bolts (507) are slidably connected to the inner wall of the holes (506). A nut (508) is threaded on the outer wall of the bolt (507). A sealing gasket (509) is fixedly connected to the outer wall of the sealing ring two (504).

4. A vacuum box for a particle beam device according to claim 1, characterized in that: The outer wall of the intake pipe (402) is connected to the outer wall of chamber one (202) and communicates with the inner wall. The outer wall of the exhaust pipe (403) is fixedly connected to the inner wall of the base (1) and communicates with the outer wall. The inlet (207) is fixedly connected to the outer wall of chamber one (202) and communicates with the inner wall. The outer wall of the outlet (209) is fixedly connected to the outer wall of chamber two (203) and communicates with the inner wall.

5. A vacuum box for a particle beam device according to claim 2, characterized in that: The card block (608) is fixedly connected to the inner wall of the base (1), and the slot block (607) is slidably connected to the inner wall of the base cover (601).

6. A vacuum box for a particle beam device according to claim 2, characterized in that: The connecting block (603) is slidably connected to the inner wall of the limiting groove (606), the button (602) and the connecting block (603) are slidably connected to the outer wall of the limiting rod (604), and the spring (605) is sleeved on the outer wall of the limiting rod (604).

7. A vacuum box for a particle beam device according to claim 3, characterized in that: The outer wall of the outlet (209) is provided with a connecting assembly (5), and the flange plate (501) is fixedly connected to the outer wall of the outlet (209).

8. A vacuum box for a particle beam device according to claim 3, characterized in that: The sealing ring two (504) and the sealing gasket (509) are slidably connected to the inner wall of the pipe one (208), the sealing ring three (505) is snapped into the inner wall of the sealing groove two (503), and the plurality of nuts (508) are slidably connected to the outer wall of the flange two (502).

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