A bearing device and a focused ion beam machine

Abstract

The application provides a bearing device and a focused ion beam machine, and the bearing device comprises a support seat, a support column, a limiting mechanism, a mounting cylinder, an insertion cylinder, a locking part and a bearing table. The support column is fixed on the support seat, and the limiting mechanism is arranged on the support seat and close to the support column. The mounting cylinder comprises a bottom integrated inner and outer cylinders, the inner cylinder has a through hole in the middle, and an annular interlayer is formed between the inner and outer cylinders. The outer wall of the outer cylinder is provided with a plug-in part at the bottom, and the outer cylinder is provided with a vertical sliding groove. The inner cylinder is sleeved on the support column, and the plug-in part is inserted and locked with the limiting mechanism. The outer wall of the insertion cylinder is provided with a threaded column, which is inserted into the annular interlayer and can slide along the sliding groove. The locking part is provided with an internal thread hole and is screwed with the threaded column. The bearing table is mounted at the top end of the insertion cylinder. The application can improve the height adjustment and disassembly efficiency of the bearing table, reduce the intensity of the operator, adapt to the high efficiency demand of the focused ion beam machine, and provide support for improving the overall operation efficiency of the machine.

Description

Technical Field

[0001] This application relates to the field of focused ion beam equipment technology, and more specifically, to a support device and a focused ion beam equipment. Background Technology

[0002] In the overall operation system of a focused ion beam machine, the workpiece carrier is the key medium connecting the workpiece to be processed (such as a chip) with the precision systems such as ion beam generation, focusing, and scanning. Its structural rationality and ease of operation directly determine the accuracy, efficiency, and stability of subsequent processing and analysis operations. It is the core basic component that ensures the focused ion beam machine can achieve precision processing and analysis functions.

[0003] Currently, when positioning chips processed by focused ion beam (FIB) machines, existing technologies generally use carbon tape as a fixing medium to adhere and fix the chips to the carrier platform, ensuring the positional stability of the chips during processing. Simultaneously, the carrier platform and the machine's support column employ a threaded connection structure. Based on this threaded engagement, operators can manually rotate the carrier platform to adjust its height, thus meeting the workpiece height requirements in different processing scenarios. Furthermore, this threaded connection structure also provides a basis for assembling and disassembling the carrier platform; operators can continuously rotate the carrier platform to assemble or disassemble it from the support column.

[0004] However, the existing technology has a relatively large threaded section length between the support stage and the support column. This structural defect directly leads to many problems in actual operation: when adjusting the height of the support stage, the operator needs to rotate the stage continuously for a long time to reach the target height; similarly, when assembling or disassembling the support stage, continuous rotation is required to fully engage or disengage the threads. These operations not only make the height adjustment process cumbersome and inefficient, but also significantly increase the workload of the operators, making it difficult to meet the high-efficiency and automated processing and analysis requirements of focused ion beam (FIB) machines, thus restricting the overall operating efficiency of FIB machines to some extent. Utility Model Content

[0005] The purpose of this application is to provide a carrier device and a focused ion beam machine, which can improve the efficiency of carrier height adjustment and disassembly, reduce the intensity of operators, adapt to the high efficiency requirements of focused ion beam machines, and provide support for improving the overall operating efficiency of the machine.

[0006] Firstly, a supporting device is provided, including a support base, a support column, a limiting mechanism, a mounting cylinder, an insertion cylinder, a locking member, and a support platform. The support column is fixed to the support base, and the limiting mechanism is disposed on the support base and close to the support column. The mounting cylinder includes an inner cylinder and an outer cylinder integrally connected at their bottoms. A through hole is formed in the middle of the inner cylinder, and an annular sandwich is formed between the inner and outer cylinders. An insertion member is provided at the bottom of the outer wall of the outer cylinder, and a sliding groove extending vertically is provided on the outer cylinder. The inner cylinder is sleeved on the support column, and the insertion member is inserted and locked with the limiting mechanism. A threaded post is provided on the outer wall of the insertion cylinder, which is inserted into the annular sandwich between the inner and outer cylinders, and the threaded post extends out of the sliding groove and can slide along the sliding groove. The locking member is provided with an internal threaded hole, which is threadedly engaged with the threaded post to limit the sliding of the threaded post along the sliding groove. The support platform is installed at the top of the insertion cylinder and is used to support the workpiece to be processed.

[0007] In one feasible embodiment, the connector includes a transversely extending plate and a vertically extending insert plate connected to the tail end of the extending plate, the insert plate having an outwardly facing groove; the limiting mechanism includes a fixing block and a spring pin; the fixing block is mounted on a support base and includes a first vertical groove and a second transverse groove, the first end of the second groove penetrating into the first groove, and the second end of the second groove located within the fixing block; the spring pin is disposed in the second groove and includes a first end and a second end, the first end facing the first groove, and the second end extending from the second end of the second groove to the outside of the fixing block; wherein, after the insert cylinder is inserted into the annular interlayer between the inner and outer cylinders, the insert plate of the connector is inserted into the first groove, and when the groove on the plate is aligned with the second groove, the first end of the spring pin is inserted into the groove.

[0008] In one feasible embodiment, the spring pin includes a head end, a pull rod, a handle, and a first spring; the head end is slidably mounted in the second slot, the handle is located outside the fixing block corresponding to the second end of the second slot, the head end and the handle are connected by the pull rod, and the first spring is sleeved on the pull rod and located between the head end and the second end of the second slot; wherein, after the insert cylinder is inserted into the annular interlayer between the inner and outer cylinders, the insert plate of the connector is inserted into the first slot, and when the groove on the plate is aligned with the second slot, the head end of the spring pin is inserted into the groove.

[0009] In one feasible embodiment, a second spring is disposed near the bottom of the first slot, and the top of the second spring is connected to a top plate.

[0010] In one feasible solution, the bottom of the insert plate is provided with a first arc surface near the second slot, and the head end of the spring pin is provided with a second arc surface on the upper side near the first slot.

[0011] In one feasible solution, there are two or more limiting mechanisms, which are evenly distributed around the circumference of the support column; the bottom of the outer wall of the outer cylinder is provided with multiple plug-in parts that are the same number and distribution as the limiting mechanisms.

[0012] In one feasible solution, the outer wall of the outer cylinder is provided with scale lines along the sliding groove for indicating height.

[0013] In one feasible embodiment, a slide table and a track are also included, with the slide table slidably mounted on the track and a support mounted on the slide table.

[0014] Secondly, a focused ion beam apparatus is also provided, including a base and the aforementioned support device, the support device being mounted on the base.

[0015] Compared with the prior art, the beneficial effects of this application include at least the following: The bearing device of this application abandons the traditional long threaded rotation adjustment mode and adopts a sliding fit structure of the mounting cylinder and the insertion cylinder. After the mounting cylinder is fitted with a support column through the inner cylinder, it is locked by the insertion part of the outer cylinder and the limiting mechanism, thus achieving convenient fixed positioning first. Then, the insertion cylinder is inserted into the annular interlayer of the mounting cylinder, and the threaded column on its outer wall can slide directly up and down along the vertical sliding groove of the outer cylinder, driving the bearing platform at the top to quickly adjust the height without rotation. Only the locking part and the threaded column are used to lock the position at the end, completely avoiding the operation of continuous rotation for a long time and solving the problem of cumbersome height adjustment. Furthermore, the plug-in assembly replaces the long thread engagement / disengagement. During installation, the mounting cylinder is first inserted into the support column and locked with the plug connector, then the insertion cylinder is inserted and the fastener is locked. There is no long thread operation. During disassembly, the locking device is loosened to remove the insertion cylinder, and the mounting cylinder can be removed by releasing the plug connector lock. This greatly shortens the disassembly and assembly time and solves the problem of low disassembly and assembly efficiency. At the same time, the operation is simplified, eliminating the repetitive work of continuously rotating the support platform. Only simple steps such as sliding to adjust the height, plugging and unplugging assembly, and locking / unlocking fasteners need to be completed, reducing physical exertion and solving the problem of high workload for operators.

[0016] When the technical solution of this application is applied to a focused ion beam machine, the efficiency of height adjustment is improved, the efficiency of disassembly and assembly is optimized, the number of operation steps is reduced, the dependence on the operator's proficiency is reduced, and it is better matched with the high-efficiency processing and switching rhythm of the focused ion beam machine, thus providing support for improving the overall operating efficiency of the machine. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a structural diagram of a support device shown in an embodiment of this application.

[0019] Figure 2 for Figure 1 Axial cross-sectional view of the load-bearing device.

[0020] Figure 3 for Figure 2 A magnified view of a portion of point A in the middle.

[0021] Figure 4 This is a structural diagram of a support device including a slide rail, as shown in an embodiment of this application.

[0022] In the diagram: 1. Support base; 2. Support column; 3. Limiting mechanism; 31. Fixing block; 311. First slot; 312. Second slot; 313. Second spring; 314. Top plate; 32. Spring pin; 321. Head end; 322. Pull rod; 323. Handle; 324. First spring; 4. Mounting cylinder; 41. Inner cylinder; 42. Outer cylinder; 421. Sliding groove; 422. Scale line; 43. Connector; 431. Protruding plate; 432. Insert plate; 433. Groove; 401. Through hole; 402. Annular interlayer; S1. First arc surface; S2. Second arc surface; 5. Insert cylinder; 51. Threaded column; 6. Locking element; 7. Support platform; 8. Slide table; 9. Track. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0025] like Figure 1-3 As shown, this application provides an embodiment of a bearing device, which includes a support base 1, a support column 2, a limiting mechanism 3, a mounting cylinder 4, an insertion cylinder 5, a locking element 6, and a bearing platform 7.

[0026] The support column 2 is fixed on the support base 1, and the limiting mechanism 3 is set on the support base 1 and close to the support column 2. The mounting cylinder 4 includes an inner cylinder 41 and an outer cylinder 42 that are connected as one piece at the bottom. A through hole 401 is formed in the middle of the inner cylinder 41, and an annular sandwich 402 is formed between the inner cylinder 41 and the outer cylinder 42. A connector 43 is provided at the bottom of the outer wall of the outer cylinder 42, and a sliding groove 421 extending vertically is provided on the outer cylinder 42. The inner cylinder 41 is sleeved on the support column 2, and the connector 43 is inserted and locked with the limiting mechanism 3.

[0027] A threaded post 51 is provided on the outer wall of the insertion cylinder 5, which is inserted into the annular interlayer 402 between the inner cylinder 41 and the outer cylinder 42, and the threaded post 51 extends out of the sliding groove 421 and can slide along the sliding groove 421. The locking member 6 is provided with an internal threaded hole, which is threadedly engaged with the threaded post 51 to restrict the sliding of the threaded post 51 along the sliding groove 421. The support platform 7 is installed at the top of the insertion cylinder 5 and is used to support the workpiece to be processed (e.g., a wafer).

[0028] It should be noted that the threaded post 51 and the wall of the outer cylinder 42 can be connected by detachable fasteners. In this case, the insert cylinder 5 can be inserted into the annular interlayer 402 first, and then the installation of the threaded post 51 and the outer cylinder 42 can be completed. Alternatively, the threaded post 51 and the wall of the outer cylinder 42 can be directly welded. In this case, the top of the sliding groove 421 needs to be set as an open shape so that the threaded post 51 can enter the sliding groove 421.

[0029] The bearing device in this embodiment abandons the traditional long-threaded rotation adjustment mode and adopts a sliding fit structure of the mounting cylinder 4 and the insertion cylinder 5. After the support column 2 is sleeved on the inner cylinder 41, the mounting cylinder 4 is locked with the limiting mechanism 3 by the insertion part 43 of the outer cylinder 42, thus achieving convenient fixed positioning. Then, the insertion cylinder 5 is inserted into the annular interlayer 402 of the mounting cylinder 4. The threaded column 51 on its outer wall can slide directly up and down along the vertical sliding groove 421 of the outer cylinder 42, which drives the bearing platform 7 at the top to quickly adjust the height without rotation. Only the locking part 6 and the threaded column 51 are used to lock the position at the end, completely avoiding the operation of continuous rotation for a long time and solving the problem of cumbersome height adjustment. Furthermore, the plug-in assembly replaces the long thread engagement / disengagement. During installation, the mounting cylinder 4 is first inserted into the support column 2 and locked by the plug-in connector 43. Then, the insertion cylinder 5 is inserted and the fastener is locked. There is no long thread operation. During disassembly, the locking piece 6 is loosened to remove the insertion cylinder 5, and the mounting cylinder 4 can be removed by releasing the lock of the plug-in connector 43. This greatly shortens the disassembly and assembly time and solves the problem of low disassembly and assembly efficiency. At the same time, the operation is simplified, eliminating the repetitive work of continuously rotating the support platform. Only simple steps such as sliding to adjust the height, plugging and unplugging assembly, and locking / unlocking fasteners need to be completed, reducing physical exertion and solving the problem of high workload for operators.

[0030] Specifically, when the technical solution of this application is applied to a focused ion beam machine, the efficiency of height adjustment is improved, the efficiency of disassembly and assembly is optimized, the number of operation steps is reduced, the dependence on the operator's proficiency is reduced, and it is better matched with the high-efficiency processing and switching rhythm of the focused ion beam machine, thus providing support for improving the overall operating efficiency of the machine.

[0031] It should be noted that the insertion and locking of the connector 43 and the limiting mechanism 3 can take various forms. In some embodiments, such as Figure 3 As shown, the connector 43 may include a transversely extending plate 431 and a vertically extending insert plate 432 connected to the tail end of the extending plate 431. The insert plate 432 has an outwardly facing groove 433. The limiting mechanism 3 includes a fixing block 31 and a spring pin 32. The fixing block 31 is mounted on the support base 1 and includes a first vertical slot 311 and a second transverse slot 312. The first end of the second slot 312 passes through the first slot 311, and the second end of the second slot 312 is located inside the fixing block 31. The spring pin 32 is disposed in the second slot 312 and includes a first end and a second end. The first end faces the first slot 311, and the second end extends from the second end of the second slot 312 to the outside of the fixing block 31.

[0032] When the insertion cylinder 5 is inserted into the annular interlayer 402 between the inner cylinder 41 and the outer cylinder 42, the insertion plate 432 of the insertion connector 43 is inserted into the first slot 311. When the groove 433 on the insertion plate 432 is aligned with the second slot 312, the first end of the spring pin 32 is inserted into the groove 433 to achieve quick installation and fixation of the installation cylinder 4.

[0033] In some embodiments, such as Figure 3 As shown, the spring pin 32 may include a head end 321, a pull rod 322, a handle 323, and a first spring 324. The head end 321 is slidably installed in the second slot 312. The handle 323 is located outside the fixing block 31 corresponding to the second end of the second slot 312. The head end 321 and the handle 323 are connected by the pull rod 322. The first spring 324 is sleeved on the pull rod 322 and is located between the head end 321 and the second end of the second slot 312. Specifically, after the insertion cylinder 5 is inserted into the annular interlayer 402 between the inner cylinder 41 and the outer cylinder 42, the insertion plate 432 of the insertion member 43 is inserted into the first slot 311. When the groove 433 on the insertion plate 432 is aligned with the second slot 312, the head end 321 of the spring pin 32 is inserted into the groove 433.

[0034] By pulling the lever 322, the head end 321 can be fully positioned within the second slot 312, allowing the insert plate 432 to move freely into and out of the first slot 311. When the lever 322 is released, the spring force of the first spring 324 causes the spring pin 32 to tend to move into the first slot 311, allowing the head end 321 to be inserted into the groove 433 and locked in place.

[0035] In some embodiments, such as Figure 3 As shown, a second spring 313 can be installed near the bottom of the first slot 311, and a top plate 314 is connected to the top of the second spring 313. When the head end 321 is withdrawn from the groove 433, the locking mechanism 3 on the plug 43 is released. Under the elastic force of the second spring 313, the top plate 314 is lifted. The top plate 314 can lift the plug plate 432 and make the groove 433 higher than the second slot 312, thus avoiding relocking caused by the plug plate 432 falling below the second slot 312 after the worker releases the handle, thereby achieving more convenient disassembly.

[0036] In some embodiments, such as Figure 3 As shown, a first arc surface S1 can be provided on the bottom of the insert plate 432 near the second slot 312, and a second arc surface S2 can be provided on the upper side of the head end 321 of the spring pin 32 near the end of the first slot 311. Thus, when the insert plate 432 of the connector 43 is inserted into the first slot 311 and moves downward, the bottom of the insert plate 432 presses against the head end 321 under the cooperation of the first arc surface S1 and the second arc surface S2, so that the head end 321 automatically retracts into the second slot 312. When the groove 433 descends to the same height as the second slot 312, the head end 321 automatically inserts into the groove 433 under the elastic force of the first spring 324 to form a lock.

[0037] In some embodiments, the number of limiting mechanisms 3 may be greater than or equal to two (not shown in the figure), and they are evenly distributed around the circumference of the support column 2; the bottom of the outer wall of the outer cylinder 42 is provided with a plurality of plug-in parts 43 that are the same number and distribution as the limiting mechanisms 3.

[0038] In some embodiments, such as Figure 1 As shown, the outer wall of the outer cylinder 42 can be provided with scale lines 422 for marking the height along the sliding groove 421.

[0039] In some embodiments, such as Figure 4 As shown, the supporting device may also include a slide table 8 and a track 9. The slide table 8 is slidably mounted on the track 9, and the support seat 1 is mounted on the slide table 8 to adjust the position of the support seat 1 in the plane.

[0040] This application also provides a focused ion beam machine, including a base and the aforementioned support device, the support device being mounted on the base. The support stage 7 of the support device is used to support the workpiece (wafer) and allows for convenient adjustment of the height of the support stage 7 to improve processing efficiency.

[0041] The above description is only a partial embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A supporting device, characterized in that, include: Support base (1); Support column (2) is fixed on the support base (1); A limiting mechanism (3) is provided on the support base (1) and close to the support column (2); The mounting cylinder (4) includes an inner cylinder (41) and an outer cylinder (42) connected at the bottom. The inner cylinder (41) has a through hole (401) in the middle, and an annular sandwich (402) is formed between the inner cylinder (41) and the outer cylinder (42). The bottom of the outer wall of the outer cylinder (42) is provided with a connector (43), and the outer cylinder (42) is provided with a sliding groove (421) extending vertically. The inner cylinder (41) is sleeved on the support column (2), and the connector (43) is inserted and locked with the limiting mechanism (3). An insertion cylinder (5) is provided with a threaded post (51) on its outer wall, which is inserted into the annular interlayer (402) between the inner cylinder (41) and the outer cylinder (42), and the threaded post (51) passes through the sliding groove (421) and can slide along the sliding groove (421); The locking element (6) is provided with an internal threaded hole that is threadedly engaged with the threaded post (51) to restrict the sliding of the threaded post (51) along the sliding groove (421); The support platform (7) is installed at the top of the insertion cylinder (5) and is used to support the workpiece to be processed.

2. The bearing device according to claim 1, characterized in that, The connector (43) includes a horizontally extending plate (431) and a vertically extending insert plate (432) connected to the tail end of the extending plate (431). The insert plate (432) has an outwardly facing groove (433). The limiting mechanism (3) includes a fixing block (31) and a spring pin (32); the fixing block (31) is installed on the support base (1), and includes a first slot (311) along the vertical direction and a second slot (312) along the horizontal direction, the first end of the second slot (312) penetrates into the first slot (311), and the second end of the second slot (312) is located in the fixing block (31); The spring pin (32) is disposed in the second slot (312), and includes a first end and a second end, with the first end facing the first slot (311) and the second end extending from the second end of the second slot (312) to the outside of the fixing block (31). When the insertion tube (5) is inserted into the annular interlayer (402) between the inner tube (41) and the outer tube (42), the insertion plate (432) of the insertion member (43) is inserted into the first slot (311), and when the groove (433) on the plate (432) is aligned with the second slot (312), the first end of the spring pin (32) is inserted into the groove (433).

3. The bearing device according to claim 2, characterized in that, The spring pin (32) includes a head end (321), a pull rod (322), a handle (323), and a first spring (324); the head end (321) is slidably installed in the second slot (312), the handle (323) is located outside the fixing block (31) corresponding to the second end of the second slot (312), the head end (321) and the handle (323) are connected through the pull rod (322), and the first spring (324) is sleeved on the pull rod (322) and located between the head end (321) and the second end of the second slot (312); When the insertion tube (5) is inserted into the annular interlayer (402) between the inner tube (41) and the outer tube (42), the insertion plate (432) of the insertion member (43) is inserted into the first slot (311), and when the groove (433) on the plate (432) is aligned with the second slot (312), the head end (321) of the spring pin (32) is inserted into the groove (433).

4. The bearing device according to claim 2, characterized in that, A second spring (313) is provided near the bottom of the first slot (311), and the top of the second spring (313) is connected to a top plate (314).

5. The bearing device according to claim 2, characterized in that, The bottom of the insert plate (432) is provided with a first arc surface (S1) near the second slot (312), and the upper side of the head end (321) of the spring pin (32) near the first slot (311) is provided with a second arc surface (S2).

6. The bearing device according to any one of claims 1-5, characterized in that, The number of the limiting mechanism (3) is greater than or equal to two, and they are evenly distributed around the circumference of the support column (2); The bottom of the outer wall of the outer cylinder (42) is provided with a plurality of plug-in parts (43) that are the same number and distributed as the limiting mechanism (3).

7. The bearing device according to claim 1, characterized in that, The outer wall of the outer cylinder (42) is provided with scale lines (422) for marking the height along the sliding groove (421).

8. The bearing device according to claim 1, characterized in that, It also includes a slide (8) and a track (9), wherein the slide (8) is slidably mounted on the track (9) and the support base (1) is mounted on the slide (8).

9. A focused ion beam apparatus, characterized in that, It includes a base and a support device as described in any one of claims 1-8, the support device being mounted on the base.

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