An independent embedded oxygen aperture device applied to sims

Abstract

The application relates to an independent inlay type oxygen aperture device applied to a SIMS, which comprises a support, a plurality of independent oxygen aperture sheets and a back plate, the support is provided with a plurality of independent sheet mounting areas, each independent oxygen aperture sheet is movably inlaid in one sheet mounting area, the center of each independent oxygen aperture sheet is provided with an oxygen aperture, and the oxygen apertures are different from each other; the back plate is arranged on the side, away from the support, of the independent oxygen aperture sheet, and the back plate and the support are detachably connected; the support is provided with first through holes at positions corresponding to the oxygen apertures, and the back plate is provided with second through holes at positions corresponding to the oxygen apertures. The application has the effects of reducing processing difficulty, reducing cost and improving replacement flexibility.

Description

Technical Field

[0001] This application relates to the technical field of secondary ion mass spectrometry, and in particular to a freestanding embedded oxygen aperture device for use in SIMS. Background Technology

[0002] Currently, secondary ion mass spectrometry (SIMS) is a technique that uses a primary ion beam to bombard the sample surface and detects the secondary ions generated during the bombardment to analyze the material's composition and structure. The oxygen aperture device is a key control component in the primary ion beam optical system. Its core function is to adjust the flux, beam spot shape, and intensity of the oxygen ion beam (O⁺ or O⁻) bombarding the sample surface by regulating the aperture size, thereby directly affecting the signal quality, analytical sensitivity, and surface reactivity of the sample surface during SIMS analysis.

[0003] In the existing SIMS 4500 system, the oxygen aperture device employs a structure where a single metal disk is fixed to a support. Multiple micron-sized pores of varying diameters are integrated and machined along a straight line or a specific circumference on the metal disk, with a common pore size sequence of 800-200-200-100-100-100-100-100μm. The oxygen aperture device is installed within the aperture assembly between the condenser lens and the sample chamber after the oxygen ion source beam exits, and works in conjunction with the ion gun, electromagnetic lens, and gas introduction system.

[0004] Regarding the aforementioned technologies, since all apertures are integrated onto a single metal disk, a processing error in any aperture will render the entire disk unusable, significantly increasing manufacturing costs. Furthermore, the actual usage frequency of each aperture is uneven; a few frequently used apertures are most prone to wear or damage due to prolonged direct bombardment by high-energy ion beams. Even if other less frequently used apertures remain intact, they must be replaced along with the damaged metal disk, resulting in material waste and increased costs. Utility Model Content

[0005] To reduce processing difficulty, lower costs, and improve replacement flexibility, this application provides an independently mounted oxygen aperture device for use in SIMS.

[0006] This application provides an independently mounted oxygen aperture device for use in SIMS, employing the following technical solution: An independently mounted oxygen aperture device for use in SIMS includes a support, multiple independent oxygen aperture plates, and a back plate. The support has multiple independent aperture plate mounting areas, and each independent oxygen aperture plate is movably mounted in one of the aperture plate mounting areas. Each independent oxygen aperture plate has an oxygen aperture at its center, and the oxygen apertures are all different. The back plate covers the side of the independent oxygen aperture plate away from the support, and the back plate is detachably connected to the support. The support has a first through hole at the position corresponding to the oxygen aperture, and the back plate has a second through hole at the position corresponding to the oxygen aperture.

[0007] By adopting the above technical solution, the existing integrated oxygen aperture design is transformed into a modular structure, achieving independence and replaceability of each oxygen aperture. During use, specific aperture plates can be flexibly selected according to analytical needs and uniformly clamped and fixed via a backplate. Through holes in the support and backplate ensure unobstructed primary ion beam channels, providing the structural foundation for core functions.

[0008] Preferably, the orifice mounting area is a circular groove, the independent oxygen orifice is embedded in the circular groove, and the number of orifice mounting areas is four, which are arranged at equal intervals along the length of the bracket.

[0009] By adopting the above technical solution, the circular groove provides precise positioning and stable support for the cylindrical independent oxygen aperture plates. The design of the four aperture plate mounting areas not only meets the configuration requirements of commonly used oxygen aperture diameters but also facilitates flexible switching of different oxygen aperture diameter combinations. Operators can quickly change or adjust the oxygen aperture diameter configuration scheme according to experimental needs. At the same time, the four equally spaced aperture plate mounting areas are rationally arranged, making the device structure compact and easy to integrate into existing SIMS optical path systems.

[0010] Preferably, the first through hole is located at the bottom of the perforated plate mounting area, the first through hole penetrates the bracket, and the first through hole communicates with the oxygen aperture.

[0011] By adopting the above technical solution, the first through hole is directly connected to the oxygen aperture, together forming a channel for the primary ion beam to pass through the support, effectively avoiding the support structure from blocking the primary ion beam and ensuring the smooth passage of the primary ion beam.

[0012] Preferably, the upper surface of the bracket is provided with a square groove, and the back plate is installed in the square groove; the mounting areas of the perforated plates are all located at the bottom of the square groove.

[0013] By adopting the above technical solution, the square groove can pre-position the back plate, simplifying the assembly process; the integrated design accommodates the back plate and independent oxygen vent plates inside the bracket, significantly improving the compactness and structural stability of the entire device.

[0014] Preferably, the bottom surface of the square groove is provided with a first threaded hole at both ends, and the two ends of the back plate are provided with a third through hole corresponding to the position of the first threaded hole. The first threaded hole and the third through hole are fitted with bolts to realize the fastening connection between the back plate and the bracket.

[0015] By adopting the above technical solution, the bolt connection method can provide sufficient and uniform clamping force to the back plate, ensuring that the independent oxygen orifice remains stable in the working state; at the same time, this connection method is easy to disassemble and facilitates quick replacement of orifice with a specific orifice diameter.

[0016] Preferably, the diameter of the second through hole is smaller than the outer diameter of the independent oxygen pore plate; the first through hole, the second through hole, and the oxygen pore are connected.

[0017] By adopting the above technical solution, the diameter design of the second through-hole effectively presses against the independent oxygen aperture plate, preventing its displacement, while also ensuring that it is larger than the oxygen aperture, avoiding secondary obstruction of the ion beam. The first through-hole, the second through-hole, and the oxygen aperture are connected to form a complete primary ion beam path.

[0018] Preferably, the independent oxygen pore plate is made of any one of molybdenum, platinum, or platinum-iridium alloy materials.

[0019] By adopting the above technical solutions and selecting these high-hardness, ion sputtering-resistant metal materials, the service life of independent oxygen aperture plates under high-current ion beam bombardment can be significantly extended. At the same time, these materials have good economic efficiency and availability, which helps to control costs.

[0020] Preferably, both the bracket and the back plate are made of any one of the following materials: molybdenum, TZM alloy, stainless steel, nickel, tungsten, platinum, or platinum-iridium alloy.

[0021] By adopting the above technical solution, the support and the back plate have similar coefficients of thermal expansion, which can effectively prevent the device from deforming or loosening of the compression force due to thermal stress mismatch when the operating temperature changes, thereby ensuring the long-term alignment accuracy of the ion beam channel and the structural reliability of the entire device.

[0022] In summary, this application includes at least one of the following beneficial technical effects: 1. With the design of independent oxygen orifice plates, when a commonly used oxygen orifice is damaged, the corresponding independent oxygen orifice plate can be replaced individually without scrapping the entire device, which greatly reduces consumable costs and equipment downtime; 2. Users can flexibly select and quickly replace independent oxygen well plates with different oxygen pore sizes according to different analytical needs. The operation is simple and improves the utilization rate and analytical efficiency of SIMS. 3. Each independent oxygen orifice plate can be manufactured and inspected separately, avoiding the problem of overall scrapping caused by machining errors of a single orifice in traditional integrated oxygen orifice plates, and significantly improving the processing yield and production efficiency. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application; Figure 2 This is a cross-sectional view of the assembly position of the bracket, independent oxygen port plate and back plate in an embodiment of this application; Figure 3 This is a schematic diagram of the structure of the bracket in the embodiments of this application; Figure 4 This is a schematic diagram of the structure of the independent oxygen pore plate in the embodiments of this application; Figure 5 This is a schematic diagram of the structure of the back plate in an embodiment of this application.

[0024] Reference numerals: 1. Bracket; 11. Perforated plate mounting area; 12. First through hole; 13. Square groove; 14. First threaded hole; 2. Independent oxygen perforated plate; 21. Oxygen orifice diameter; 3. Back plate; 31. Second through hole; 32. Third through hole; 4. Bolt. Detailed Implementation

[0025] The following is in conjunction with the appendix Figure 1 -Appendix Figure 5 This application will be described in further detail.

[0026] This application discloses an independent embedded oxygen aperture device for use in SIMS.

[0027] Reference Figure 1 and Figure 2 A SIMS (Self-Inserted Oxygen Orifice 21) device includes a support 1, multiple independent oxygen orifice plates 2, and a back plate 3. The support 1 has multiple independent orifice plate mounting areas 11 on its surface, which are used for embedding the independent oxygen orifice plates 2. Each independent oxygen orifice plate 2 has an oxygen orifice 21 at its center, and the oxygen orifice 21 of each independent oxygen orifice plate 2 is different. The back plate 3 is covered on the side of the independent oxygen orifice plate 2 away from the support 1 to press and fix the independent oxygen orifice plate 2, and the back plate 3 and the support 1 are detachably connected.

[0028] The mounting area 11 on the bracket 1 is used to accurately position and support the independent oxygen aperture 2 of different specifications, and then the independent oxygen aperture 2 is uniformly pressed and fixed by the back plate 3; by calling different independent oxygen aperture 2, the flux of the primary ion beam can be controlled by using different oxygen aperture 21.

[0029] Reference Figure 3The orifice plate mounting area 11 is a circular groove, and the independent oxygen orifice plate 2 is embedded and installed in the circular groove. In this embodiment, four orifice plate mounting areas 11 are provided in the bracket 1, and the four orifice plate mounting areas 11 are arranged at equal intervals along the length direction of the bracket 1.

[0030] Reference Figure 2 and Figure 4 Each independent oxygen orifice plate 2 is a cylindrical orifice plate, and four independent oxygen orifice plates 2 are provided, corresponding one-to-one with the four orifice plate mounting areas 11. The outer diameter of the independent oxygen orifice plate 2 is adapted to the inner diameter of the orifice plate mounting area 11, which facilitates the removal and disassembly of the independent oxygen orifice plate 2. The bottom of each orifice plate mounting area 11 has a first through hole 12 penetrating the support 1. The first through hole 12 communicates with the oxygen orifice diameter 21 to avoid blocking the path of the primary ion beam.

[0031] In this embodiment, the material of the independent oxygen aperture plate 2 can be any of molybdenum, platinum, or platinum-iridium alloy. Compared with tantalum, which is used traditionally, the above materials, while meeting the requirements of high hardness and resistance to ion sputtering corrosion, have better economic benefits and a wider range of supply sources, which helps to control manufacturing costs and ensure a stable supply of key components.

[0032] Reference Figure 2 and Figure 3 The support 1 is a flat plate structure. The upper surface of the support 1 is provided with a square groove 13 for supporting the back plate 3 and realizing the pre-positioning of the back plate 3. The perforated plate mounting area 11 is located at the bottom of the square groove 13, and the first through hole 12 is located at the bottom of the perforated plate mounting area 11, so that the back plate 3 and the independent oxygen perforated plate 2 are integrated into the support 1, which improves the compactness of the device.

[0033] The bottom surface of the square groove 13 has a first threaded hole 14 through the bracket 1 at both ends. The back plate 3 has a third through hole 32 at both ends corresponding to the first threaded hole 14. The first threaded hole 14 and the third through hole 32 are fitted with bolts 4 to achieve a tight connection between the back plate 3 and the bracket 1. This connection method provides sufficient pressure to the independent oxygen orifice plate 2 and also facilitates the disassembly of the back plate 3 to replace the specific independent oxygen orifice plate 2.

[0034] In other embodiments, the orifice mounting area 11 can be directly disposed on the surface of the bracket 1, and the back plate 3 does not need to be pre-positioned, but is directly connected and pressed onto the side of the independent oxygen orifice 2 away from the bracket 1 by bolts 4.

[0035] Reference Figure 2 and Figure 5The backplate 3 has a flat plate structure, with one end being semi-circular and the other end being square. This contour design allows for sufficient operating space around the backplate 3 when it is installed on the bracket 1, facilitating its assembly and disassembly. Four second through holes 31 are provided on the backplate 3 corresponding to the four first through holes 12. The diameter of the second through holes 31 is slightly smaller than the outer diameter of the independent oxygen aperture plate 2 to ensure effective pressing of the independent oxygen aperture plate 2. The first through holes 12, second through holes 31, and oxygen aperture 21 are interconnected, together forming a complete primary ion beam path.

[0036] In this embodiment, the support 1 can be made of any one of molybdenum, TZM alloy, stainless steel, nickel, or tungsten. These materials possess characteristics such as high hardness, high temperature resistance, and resistance to ion sputtering, ensuring that the support 1 maintains structural stability and a long service life under ion beam bombardment. The backplate 3 is made of the same material as the support 1. This design ensures that the backplate 3 and the support 1 have similar coefficients of thermal expansion, preventing deformation or loosening of the device due to thermal stress mismatch under changing operating temperatures, thereby maintaining the long-term stability of the pressing force.

[0037] The implementation principle of this application embodiment is as follows: by designing the integrated oxygen aperture 21 as a modular device composed of a backplate 3, a support 1, and multiple independent oxygen aperture plates 2, the independence and replaceability of the oxygen aperture 21 are achieved. During the manufacturing process, even if a single oxygen aperture 21 is manufactured incorrectly, only the corresponding independent oxygen aperture plate 2 needs to be scrapped. In actual use, one or more independent oxygen aperture plates 2 for a specific oxygen aperture 21 can be flexibly selected according to specific needs. When a commonly used oxygen aperture 21 is damaged due to long-term bombardment by the ion beam, only the corresponding independent oxygen aperture plate 2 needs to be replaced, without scrapping the entire device. This not only significantly reduces consumable costs and equipment downtime, but also ensures the structural stability of the entire aperture device under thermal load and the precise alignment of the ion beam channel through the consistent material design of the backplate 3 and the support 1.

[0038] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A freestanding embedded oxygen aperture device for use in SIMS, characterized in that, The device includes a bracket (1), multiple independent oxygen orifice plates (2), and a back plate (3). The bracket (1) has multiple independent orifice plate mounting areas (11), and each independent oxygen orifice plate (2) is embedded in one of the orifice plate mounting areas (11). Each independent oxygen orifice plate (2) has an oxygen orifice diameter (21) at its center. The back plate (3) covers the side of the independent oxygen orifice plate (2) away from the bracket (1), and the back plate (3) is detachably connected to the bracket (1). The bracket (1) has a first through hole (12) at the position corresponding to the oxygen orifice diameter (21), and the back plate (3) has a second through hole (31) at the position corresponding to the oxygen orifice diameter (21).

2. The independently embedded oxygen aperture device for use in SIMS according to claim 1, characterized in that, The orifice mounting area (11) is a circular groove, and the independent oxygen orifice (2) is embedded in the orifice mounting area (11).

3. The independently embedded oxygen aperture device for SIMS according to claim 2, characterized in that, The first through hole (12) is located at the bottom of the perforated plate mounting area (11), the first through hole (12) penetrates the bracket (1), and the first through hole (12) communicates with the oxygen aperture (21).

4. The independently embedded oxygen aperture device for SIMS according to claim 3, characterized in that, The bracket (1) has a square groove (13) on its upper surface, and the back plate (3) is installed in the square groove (13); the hole plate mounting area (11) is located at the bottom of the square groove (13).

5. A freely embedded oxygen aperture device for use in SIMS according to claim 4, characterized in that, The bottom surface of the square groove (13) is provided with a first threaded hole (14) at both ends. The two ends of the back plate (3) are provided with a third through hole (32) corresponding to the position of the first threaded hole (14). The first threaded hole (14) and the third through hole (32) are fitted with bolts (4) to realize the fastening connection between the back plate (3) and the bracket (1).

6. The independently embedded oxygen aperture device for use in SIMS according to claim 1, characterized in that, The diameter of the second through hole (31) is smaller than the outer diameter of the independent oxygen pore plate (2); the first through hole (12), the second through hole (31) and the oxygen pore (21) are connected.

7. The independently embedded oxygen aperture device for use in SIMS according to claim 1, characterized in that, The independent oxygen pore plate (2) is made of any one of molybdenum, platinum, or platinum-iridium alloy materials.

8. The independently embedded oxygen aperture device for use in SIMS according to claim 1, characterized in that, Both the bracket (1) and the back plate (3) are made of any one of the following materials: molybdenum, TZM alloy, stainless steel, nickel, tungsten, platinum, or platinum-iridium alloy.

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