A sulfuric acid heater

Abstract

The utility model discloses a sulfuric acid heater, including shell and be located in the heating pipe of shell in, the heating pipe is hollow cylindrical structure, inside has the interlayer formation liquid cavity, and the periphery has with the liquid cavity intercommunication's liquid inlet and liquid outlet, and the inner wall of heating pipe is plated with inner heating film, and the outer wall is plated with outer heating film, and the both ends of inner heating film and outer heating film are connected with the wire respectively. In this way, the inner wall of heating pipe is equipped with heating film, under the condition of electrification, and inner heating film can convert electric energy into heat energy and form sustained heat source fast, make the sulfuric acid inside heating pipe can fast speed temperature rise. In addition, the outer wall of heating pipe also is plated with heating film and is independent heat source, improves total heating power, makes the sulfuric acid inside heating pipe can with faster speed temperature rise.

Description

Technical Field

[0001] This utility model relates to the field of sulfuric acid heating, specifically to a sulfuric acid heater. Background Technology

[0002] In the semiconductor manufacturing industry, the cleaning process is a crucial step in ensuring the performance, stability, and high yield of semiconductor devices. Sulfuric acid, as a strong acidic chemical reagent, plays a vital role in semiconductor cleaning due to its strong oxidizing, corrosive, and excellent solubility. Sulfuric acid can effectively remove metallic contaminants, organic residues, and oxide layers from wafer surfaces, and can also adjust the microstructure of the wafer surface in specific processes. Temperature has a significant impact on the cleaning effect of sulfuric acid; a suitable temperature can accelerate the chemical reaction rate, enhance cleaning efficiency, and ensure the uniformity of cleaning across the entire wafer surface and process stability. Therefore, heating of sulfuric acid is necessary in semiconductor cleaning processes. However, existing heating methods struggle to achieve the high precision required for temperature control in semiconductor manufacturing. Temperature fluctuations can lead to unstable sulfuric acid reactivity, resulting in inconsistent cleaning effects and potentially even wafer damage due to localized overheating. Utility Model Content

[0003] Based on this, and in response to the above technical solution, this utility model provides a sulfuric acid heater.

[0004] The objective of this utility model can be achieved through the following technical solutions:

[0005] A sulfuric acid heater includes a shell and a heating tube disposed inside the shell. The heating tube is a hollow cylindrical structure with a liquid cavity formed by a sandwich layer inside. The outer peripheral surface has an inlet and an outlet communicating with the liquid cavity. An inner heating film is coated on the inner wall of the heating tube, and an outer heating film is coated on the outer wall. Wires are respectively connected to the two ends of the inner heating film and the outer heating film.

[0006] Using the above technical solution, a heating film is coated on the inner wall of the heating tube. Under energized conditions, the inner heating film can quickly convert electrical energy into heat energy and form a continuous heat source, enabling the sulfuric acid inside the heating tube to heat up rapidly. In addition, a heating film is also coated on the outer wall of the heating tube as an independent heat source, increasing the total heating power and allowing the sulfuric acid inside the liquid chamber of the heating tube to heat up even faster.

[0007] In a specific embodiment of this utility model: the heating tube is a quartz heating tube.

[0008] In a specific embodiment of this invention, the inner wall of the liquid cavity has spiral-shaped guide grooves. This increases the fluidity of the liquid inside the cavity and prevents localized high temperatures.

[0009] In a specific embodiment of this utility model: the heating tube is covered with a heat insulation sleeve to protect the heating tube.

[0010] In a specific embodiment of this utility model: the heat insulation sleeve consists of two semi-cylindrical shapes fixed by bolts. This makes it easy to process and shape, allows for a better fit to the heating element, and facilitates installation.

[0011] In a specific embodiment of this utility model: the heat insulation sleeve is a mica heat insulation sleeve. Using a mica heat insulation sleeve not only has the advantages of aging resistance, corrosion resistance, and light weight, but also provides high-efficiency heat insulation, reducing heat loss.

[0012] In a specific embodiment of this utility model: the heat insulation sleeve is fitted with a heat insulation sleeve for isolating the heat from the heating tube.

[0013] In a specific embodiment of this utility model: the heat insulation sleeve consists of a shell and a filler located inside the shell.

[0014] In a specific embodiment of this utility model: the outer shell is fireproof cloth, and the filling material is glass fiber.

[0015] In a specific embodiment of this utility model: the two ends of the heat insulation sleeve have a connecting structure that connects the heat insulation sleeve into a ring and fits it onto the heat insulation sleeve.

[0016] In a specific embodiment of this utility model: the connecting structure is composed of high-temperature resistant Velcro located at both ends of the insulation sleeve. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings.

[0018] Figure 1 This is a schematic diagram of the structure of a sulfuric acid heater according to this utility model;

[0019] Figure 2 This is an exploded view of the heater of this utility model;

[0020] Figure 3 This is a cross-sectional view of the heating tube of this utility model. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figure 1 , Figure 2and Figure 3 As shown, this utility model is a sulfuric acid heater, including a shell 10, an insulation sleeve 20, a heat insulation sleeve 30, and a heating tube 40. The heating tube 40 is a quartz heating tube with a hollow cylindrical structure and an internal interlayer forming a liquid cavity 400. An inlet 401 and an outlet 402 communicating with the liquid cavity 400 are provided on the outer circumferential surface of the heating tube 40. Through holes 403 are provided on the shell 10, the insulation sleeve 20, and the heat insulation sleeve 30 at positions corresponding to the inlet 401 and the outlet 402.

[0023] Figure 3 As shown, in this embodiment, a spiral guide groove 404 is provided on the inner wall of the liquid cavity 400. This increases the fluidity of the liquid inside the liquid cavity and avoids localized high temperatures.

[0024] In this embodiment, an inner heating film 41 is coated on the inner wall of the heating tube 40. Wires are connected to both ends of the inner heating film 41. Thus, the inner wall of the heating tube is coated with a heating film, which, under energized conditions, can rapidly convert electrical energy into heat energy and form a continuous heat source, causing the sulfuric acid in the liquid cavity to heat up quickly.

[0025] In this embodiment, an external heating film 42 is deposited on the outer wall of the heating tube 40. Wires are connected to both ends of the external heating film 42. Thus, the heating film deposited on the outer wall of the heating tube acts as an independent heat source, thereby increasing the total heating power and allowing the sulfuric acid inside the heating tube to heat up more quickly. Here, the inner and outer heating films are metal oxides formed by vacuum deposition or sputtering deposition processes, adhering to the inner and outer walls of the heating tube.

[0026] In this embodiment, the heat insulation sleeve 30 is fitted onto the heating tube 40 to protect the heating tube 40.

[0027] In this embodiment, the heat insulation sleeve 30 consists of two semi-cylindrical shapes 301 fixed by bolts. This structure is easy to process and form, can better fit the heating tube, and is convenient to install.

[0028] In this embodiment, the heat insulation sleeve 30 is a mica heat insulation sleeve. Using a mica heat insulation sleeve not only has the advantages of being resistant to aging and corrosion, and lightweight, but also provides high-efficiency heat insulation, reducing heat loss.

[0029] In this embodiment, the insulation sleeve 20 is fitted onto the heat insulation sleeve 30 to isolate the heat generated by the heating tube.

[0030] In this embodiment, the insulation sleeve 20 consists of a sleeve shell and a filler material located inside the sleeve shell. The sleeve shell is made of fire-resistant cloth. The filler material is made of fiberglass.

[0031] In this embodiment, the insulation sleeve 20 has connecting structures at both ends that connect the insulation sleeves into a ring shape and fit onto the heat insulation sleeve 30. These connecting structures consist of high-temperature resistant Velcro fasteners located at both ends of the insulation sleeve 20. This facilitates easy assembly and disassembly.

[0032] The outer casing 10 is located outside the heating tube 40, serving to support and protect the heating tube 40. The outer casing 10 has a rectangular structure formed by multiple side plates 101. The outer casing is made of PTFE material. PTFE material is not only highly resistant to high and low temperatures, but also corrosion-resistant.

[0033] The above description provides a detailed account of one embodiment of the present invention. However, this description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the patent coverage of the present invention.

Claims

1. A sulfuric acid heater, comprising a housing and a heating tube disposed within the housing, characterized in that, The heating tube is a hollow cylindrical structure with a liquid cavity formed by a sandwich layer inside. The outer circumference has an inlet and an outlet that communicate with the liquid cavity. The inner wall of the heating tube is coated with an inner heating film, and the outer wall is coated with an outer heating film. Wires are connected to the two ends of the inner and outer heating films, respectively.

2. The sulfuric acid heater according to claim 1, characterized in that, The heating element is a quartz heating element.

3. The sulfuric acid heater according to claim 1, characterized in that, The inner wall of the liquid cavity has spiral guide grooves.

4. The sulfuric acid heater according to claim 1, characterized in that, The heating tube is covered with a heat insulation sleeve to protect it.

5. The sulfuric acid heater according to claim 4, characterized in that, The heat insulation sleeve consists of two semi-cylinders fixed together by bolts.

6. The sulfuric acid heater according to claim 4, characterized in that, The heat insulation sleeve is a mica heat insulation sleeve.

7. The sulfuric acid heater according to claim 4, characterized in that, The heat insulation sleeve is fitted with an insulating sleeve to isolate the heat generated by the heating tube.

8. The sulfuric acid heater according to claim 7, characterized in that, The insulation sleeve consists of a shell and a filler inside the shell. The shell is fireproof cloth, and the filler is fiberglass.

9. The sulfuric acid heater according to claim 7, characterized in that, The two ends of the insulation sleeve have a connecting structure that connects the insulation sleeve into a ring shape and fits onto the heat insulation sleeve.

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