Regulating device for a semiconductor heating assembly

Abstract

The application relates to an adjusting device for a semiconductor heating assembly. The adjusting device comprises a frame movably connected with a reflecting plate, the frame comprising a first side plate and a second side plate connected with each other, the first side plate extending along a first direction, and the second side plate extending along a second direction; a first adjusting assembly comprising a first driving assembly and a first guide rail assembly, the first driving assembly being arranged on the first side plate; and a second adjusting assembly comprising a second driving assembly and a second guide rail assembly, the second driving assembly being arranged on the second side plate; wherein the first driving assembly is used for cooperating with the second guide rail assembly to adjust the position of the reflecting plate in the second direction; and the second driving assembly is used for cooperating with the first guide rail assembly to adjust the position of the reflecting plate in the first direction. The adjusting device can stably adjust the reflecting plate to a theoretical position, so that the temperature field is uniformly distributed.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment, and more specifically to an adjustment device for a semiconductor heating assembly. Background Technology

[0002] Semiconductor equipment typically includes heating components for heating the wafer. As a type of semiconductor equipment, silicon epitaxy equipment has high requirements for the internal temperature and cleanliness of the cavity environment. Silicon epitaxy equipment generally uses halogen lamps as a heat source to irradiate and heat the wafer. Halogen lamps have the characteristic of radiating energy in a 360° direction. Theoretically, half of the radiated energy from a halogen lamp will be directed outwards from the cavity. This not only reduces the efficiency of the halogen lamp, but also poses safety risks such as overheating of irradiated components and burns to personnel due to outward irradiation. Therefore, in practical applications, a specially designed reflector is installed above the halogen lamp.

[0003] However, during the installation of halogen lamps and reflectors, due to machining and installation errors in structural components, the actual position of the reflector relative to the wafer will deviate from its theoretical position. This deviation will cause the distribution of halogen lamp irradiance on the wafer surface to deviate from the theoretical design, resulting in changes in the temperature field distribution on the wafer surface, and consequently affecting the process performance. Utility Model Content

[0004] This application addresses the aforementioned technical problems by providing an adjustment device for a semiconductor heating assembly, which can stably adjust the reflector to the theoretical position, thereby improving the distribution of the irradiance intensity of the heating element on the wafer and making the temperature field distribution on the wafer surface more uniform.

[0005] The technical solution adopted in this application to solve the above-mentioned technical problems is an adjustment device for a semiconductor heating assembly. The semiconductor heating assembly includes a heating element and a reflector. The heating element is fixedly connected to the reflector and includes: a frame movably connected to the reflector, including a first side plate and a second side plate connected to each other, the first side plate extending along a first direction and the second side plate extending along a second direction; a first adjustment assembly including a first driving assembly and a first guide rail assembly, the first driving assembly being disposed on the first side plate; and a second adjustment assembly including a second driving assembly and a second guide rail assembly, the second driving assembly being disposed on the second side plate; wherein, the first driving assembly is used to cooperate with the second guide rail assembly to adjust the position of the reflector in the second direction; the second driving assembly is used to cooperate with the first guide rail assembly to adjust the position of the reflector in the first direction.

[0006] In one embodiment of this application, the frame further includes a base plate, the base plate includes a hollow portion, the reflector is disposed in the hollow portion, and the upper surface of the base plate abuts against the second surface of the reflector, wherein when the first adjustment component or the second adjustment component adjusts the position of the reflector, the reflector can move relative to the base plate.

[0007] In one embodiment of this application, the first guide rail assembly includes a first guide rail and a first slider, the first guide rail extending along the first direction, and the first slider slidingly engaging with the first guide rail; the first drive assembly includes a first guide fixing seat and a first push rod, the first guide fixing seat being fixedly connected to the first slider, a first end of the first push rod passing through the first side plate, and a second end of the first push rod passing through the first guide fixing seat; the second guide rail assembly includes a second guide rail and a second slider, the second guide rail extending along the second direction, and the second slider slidingly engaging with the second guide rail; the second drive assembly includes a second guide fixing seat and a second push rod, the second guide fixing seat being fixedly connected to the second slider, a first end of the second push rod passing through the second side plate, and a second end of the second push rod passing through the second guide fixing seat; wherein, the first push rod is used to push the first guide fixing seat along the second direction; the second push rod is used to push the second guide fixing seat along the first direction.

[0008] In one embodiment of this application, the first push rod is a bidirectional helical screw, wherein the first end of the first push rod includes one of a left-hand thread or a right-hand thread, and the second end of the first push rod includes the other of a left-hand thread or a right-hand thread; and / or, the second push rod is a bidirectional helical screw, wherein the first end of the second push rod includes one of a left-hand thread or a right-hand thread, and the second end of the second push rod includes the other of a left-hand thread or a right-hand thread.

[0009] In one embodiment of this application, the first guide fixing seat includes a first horizontal portion and a first vertical portion, the first horizontal portion is fixedly connected to the first slider, and the second end of the first push rod passes through the first vertical portion, wherein there is a gap between the first vertical portion and the first guide rail assembly; and / or, the second guide fixing seat includes a second horizontal portion and a second vertical portion, the second horizontal portion is fixedly connected to the second slider, and the second end of the second push rod passes through the second vertical portion, wherein there is a gap between the second vertical portion and the second guide rail assembly.

[0010] In one embodiment of this application, it further includes: at least one first guide member, the first end of the first guide member passing through the first side plate, the second end of the first guide member passing through the first guide fixing seat, and the first guide member being parallel to the first push rod; and / or, at least one second guide member, the first end of the second guide member passing through the second side plate, the second end of the second guide member passing through the second guide fixing seat, and the second guide member being parallel to the second push rod.

[0011] In one embodiment of this application, the frame further includes a third side plate disposed opposite to the first side plate, the third side plate extending along the first direction; the first guide rail assembly further includes a third guide rail and a third slider, the third guide rail extending along the first direction, the third slider slidingly engaging with the third guide rail, the third guide rail and the third slider being close to the third side plate.

[0012] In one embodiment of this application, the reflector includes a first side and a second side, the first side extending along a first direction and the second side extending along a second direction, wherein the first guide rail assembly is fixed to the reflector and close to the first side, and the second guide rail assembly is fixed to the reflector and close to the second side.

[0013] In one embodiment of this application, the second surface of the reflector includes a first contact area that contacts the upper surface of the base plate, and the upper surface of the base plate includes a second contact area that contacts the second surface of the reflector. Both the first contact area and the second contact area include a polytetrafluoroethylene coating.

[0014] In one embodiment of this application, at least one locking component is further included. The locking component includes a pressure plate and a locking member. The pressure plate is disposed on the first surface of the reflector. The locking member is sequentially disposed through the pressure plate, the reflector, and the base plate. The locking member is used to fix the reflector and the base plate together.

[0015] According to the adjustment device of this application, the first driving assembly can drive the reflector to move in the second direction to adjust the position of the reflector in the second direction; the second driving assembly can drive the reflector to move in the first direction to adjust the position of the reflector in the first direction. During the adjustment process, the first and second guide rail assemblies enable the reflector to move relative to the frame and also provide guidance for the movement of the reflector. Furthermore, the cooperation of the two sets of guide rail assemblies ensures the reflector remains stable during adjustment. Therefore, using the adjustment device of this application, the reflector can be stably adjusted to the theoretical position, eliminating the problem of the reflector deviating from the theoretical position of the wafer due to structural component processing errors and installation errors. This is beneficial for improving the distribution of the heating element's irradiation intensity on the wafer and making the temperature field distribution on the wafer surface more uniform. Attached Figure Description

[0016] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings, wherein:

[0017] Figure 1 This is a schematic diagram of a heating assembly that includes a reflector and a halogen lamp;

[0018] Figure 2 This is a schematic diagram used to illustrate the shift in the position of the reflector;

[0019] Figure 3 This is a top view schematic diagram of an adjustment device for a semiconductor heating assembly according to an embodiment of this application;

[0020] Figure 4 This is a top view of the frame in an adjustment device according to an embodiment of this application;

[0021] Figure 5 yes Figure 4 A left-view diagram;

[0022] Figure 6 It is along Figure 3 A partial sectional view of the AA line cutting in the diagram;

[0023] Figure 7 yes Figure 3 A partial cross-sectional view along the CC line. Detailed Implementation

[0024] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the specific embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0025] Many specific details are set forth in the following description in order to provide a full understanding of this application. However, this application may also be implemented in other ways different from those described herein, and therefore this application is not limited to the specific embodiments disclosed below.

[0026] As indicated in this application and claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" are not specifically singular and may include plural forms. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of explicitly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements.

[0027] In the description of this application, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is usually based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this application; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0028] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, these terms have no special meaning and therefore should not be construed as limiting the scope of protection of this application. In addition, although the terminology used in this application is selected from commonly known and used terms, some terms mentioned in this application's specification may have been chosen by the applicant according to his or her judgment, and their detailed meanings are explained in the relevant sections of this description. Moreover, this application should be understood not only through the actual terms used, but also through the meaning implied by each term.

[0029] Hereinafter, embodiments of this application will be described based on the accompanying drawings. However, the embodiments shown below are examples of adjustment devices for semiconductor heating components used to embody the technical concept of this application, and the adjustment devices for semiconductor heating components in this application are not specifically defined as follows. Furthermore, in order to facilitate understanding of the scope of the claims, the components shown in the "Claims" and "Utility Model Content" columns are assigned numbers corresponding to the components shown in the embodiments. However, the components shown in the claims are not intended to be specific to the components of the embodiments. In particular, the dimensions, materials, shapes, and relative arrangements of the constituent components described in the embodiments are not intended to limit the scope of this application unless specifically stated otherwise, but are merely illustrative examples.

[0030] However, the dimensions or positional relationships of the components shown in the accompanying drawings are sometimes exaggerated for clarity. Therefore, in the following description, detailed descriptions of the same names and symbols representing the same or homogeneous components are appropriately omitted. Furthermore, the elements constituting this application may be multiple elements composed of the same components, thus allowing one component to function as multiple elements; conversely, multiple components may share the function of one component. Additionally, the content described in some embodiments and implementations can be applied to other embodiments and implementations. Furthermore, in this specification, "upper" is not limited to the case of being formed in contact with an upper surface, but also includes the case of being formed separately on top, and also includes the meaning of an intermediate layer between layers.

[0031] Figure 1 This is a schematic diagram of a heating assembly including a reflector and a halogen lamp, with a wafer W also shown. Figure 1 As shown, multiple halogen lamps 110 and a reflector 120 are disposed above the wafer W. The reflector 120 is disposed above the halogen lamps 110. The lower surface of the reflector 120 is designed with multiple recesses 121, each recess 121 corresponding to one halogen lamp 110. The curvature of the recesses 121 matches the curvature of the halogen lamp tubes 110. The reflector 120 is used to reflect the outward irradiation of the halogen lamps 110 onto the wafer surface, such as... Figure 1 As shown by the dashed arrow in the diagram. By designing the structure of the recessed portion 121, the efficiency of the halogen lamp can be increased, and the irradiance intensity can be uniformly distributed on the wafer surface to meet the requirements of process heating.

[0032] It should be noted that a heating element, such as a set of halogen lamps, can also be disposed below the wafer W. In one embodiment, the halogen lamps mentioned above are all elongated tubes. The two sets of halogen lamps located on the upper side and the lower side of the wafer W are arranged perpendicularly to each other. Therefore, the design of the recess 121 can also take into account the heat irradiation of the halogen lamps below the wafer W.

[0033] Figure 2 This is a schematic diagram used to illustrate the shift in the position of the reflector. Figure 2 The perspective is from above. For example... Figure 2 As shown, when the reflector 120 is in its theoretical position, the wafer W is at position P0 relative to the reflector 120. At this position, the reflector 120 and the halogen lamp 110 work together to effectively improve the distribution of irradiance intensity on the surface of the wafer W. When the reflector 120 is in a non-theoretical, actual position, for example, as... Figure 2As shown: When wafer W is at position P1 relative to reflector 120, the position of wafer W has shifted relative to P0. At this time, the irradiation from halogen lamp 110 cannot be reflected to the predetermined position on the wafer in the pre-designed manner, resulting in the irradiation intensity on the wafer surface not achieving the predetermined effect. (Reference) Figure 1 As shown, it should be noted that the reflector 120 and the halogen lamp 110 are fixedly connected. When the reflector 120 moves, the halogen lamp 110 also moves synchronously. This application does not limit the specific connection method between the reflector 120 and the halogen lamp 110.

[0034] Figure 3 This is a top view schematic diagram of an adjustment device for a semiconductor heating assembly according to an embodiment of this application. The adjustment device is used for a semiconductor heating assembly, which includes a heating element and a reflector, the heating element and the reflector being fixedly connected. Here, the heating element and the reflector can be respectively... Figure 1 The halogen lamp 110 and reflector 120 shown are not limited thereto. In the heating assembly used in the regulating device of this application, the heating element can also be other types of heating elements, and the structure of the reflector is not limited to these. Figure 1 As shown. Therefore, in Figure 3 In the middle, the reflector 301 adopts the same as Figure 1 The reflectors in the model have different markings (120).

[0035] like Figure 3 As shown, the adjustment device in this embodiment includes a frame 310, a first adjustment component, and a second adjustment component. The frame 310 is movably connected to the reflector 301. The frame 310 includes a first side plate 311 and a second side plate 312 connected to each other. The first side plate 311 extends along a first direction D1, and the second side plate 312 extends along a second direction D2. The first adjustment component includes a first drive component 321 and a first guide rail component 322, with the first drive component 321 disposed on the first side plate 311. The second adjustment component includes a second drive component 331 and a second guide rail component 332, with the second drive component 331 disposed on the second side plate 312. The first drive component 321 cooperates with the second guide rail component 332 to adjust the position of the reflector 301 in the second direction D2; the second drive component 331 cooperates with the first guide rail component 322 to adjust the position of the reflector 301 in the first direction D1.

[0036] According to the adjustment device of this application, the first drive assembly 321 can drive the reflector 301 to move in the second direction D2 to adjust the position of the reflector 301 in the second direction D2; the second drive assembly 331 can drive the reflector 301 to move in the first direction D1 to adjust the position of the reflector 301 in the first direction D1. During the adjustment process, the first guide rail assembly 322 and the second guide rail assembly 332 enable the reflector 301 to move relative to the frame 310 and also provide guidance for the movement of the reflector 301. In addition, since two sets of guide rail assemblies are provided to cooperate with each other, the reflector 301 can remain stable during the adjustment process. When it is found that the actual position of the reflector 301 deviates from the theoretical position, the position of the reflector 301 can be adjusted by adjusting the first drive assembly 321 and / or the second drive assembly 331 to reduce or eliminate the deviation.

[0037] In some embodiments, the first guide rail assembly 322 and the second guide rail assembly 332 are both disposed on the first surface 301a of the reflector 301, such as Figure 3 As shown, this allows for the adjustment of the position of the reflector 301 on its extended plane.

[0038] In other embodiments, the first guide rail assembly 322 and the second guide rail assembly 332 can be respectively disposed on two opposite surfaces of the reflector 301 (such as the first surface 301a and the second surface 301b), which can also realize the adjustment of the reflector 301.

[0039] In some embodiments, the reflector 301 is placed horizontally, that is, its first surface 301a is parallel to the horizontal plane. Therefore, the function of the adjustment device of this application can be described as adjusting the horizontal position of the reflector 301.

[0040] The adjustment device of this application will be described in detail below with reference to the accompanying drawings.

[0041] Figure 4 This is a top view schematic diagram of the frame in an adjustment device according to an embodiment of this application. For example... Figure 3 As shown, the reflector 301 is generally rectangular; therefore, combined with... Figure 3 and Figure 4 The frame 310 is also rectangular in shape, which matches the shape of the reflector 301. The first side plate 311 and the second side plate 312 are connected to each other and perpendicular to each other, that is, the first direction D1 is perpendicular to the second direction D2.

[0042] It should be understood that in other embodiments, the first direction D1 and the second direction D2 may also be two directions that are at a certain angle but not perpendicular, in order to adapt to the shape of the reflector 301 or for other purposes.

[0043] Figure 5 yes Figure 4A left-side view diagram. Figure 6 It is along Figure 3 A partial sectional view of the AA line cutting in the diagram. (See attached diagram.) Figures 4 to 6 As shown, in some embodiments, the frame 310 further includes a base plate 314, which includes a cutout portion 3141. The reflective area of ​​the reflector 301 corresponds to the cutout portion 3141, and the upper surface 314a of the base plate 314 abuts against the second surface 301b of the reflector 301. When the first adjustment component or the second adjustment component adjusts the position of the reflector 301, the reflector 301 can move relative to the base plate 314.

[0044] In these embodiments, the base plate 314 is disposed below the first side plate 311 and the second side plate 312, forming the bottom of the frame 310. The cutout portion 3141 is equivalent to removing a piece from the middle of a complete original flat plate, the remaining part of which is the base plate 314 of the frame 310.

[0045] like Figure 6 As shown, in some embodiments, the reflector 301 includes a reflector body 3011 and a protrusion 3012. The protrusion 3012 protrudes relative to the reflector body 3011. On the side facing the first side plate 311, the protrusion 3012 protrudes outward relative to the reflector body 3011 along a second direction D2; on the side facing the second side plate 312, the protrusion 3012 protrudes outward relative to the reflector body 3011 along a first direction. The protrusion 3012 shown in the figure extends continuously along the edge of the reflector body 3011. It should be understood that in other embodiments, the protrusion 3012 may not extend continuously along the edge of the reflector body 3011, i.e., the protrusion 3012 may only protrude outward at a portion of the edge of the reflector body 3011. The thickness of the protrusion 3012 is less than the thickness of the reflector body 3011. Figure 4 As shown, the reflector body 3011 is located in the space where the hollowed-out portion 3141 is, and the heating element is disposed below the reflector body 3011. Figure 3 As shown, in some embodiments, the reflector 301 includes a first side 302 and a second side 303. The protrusion 3012 can be located on the first side 302 and the second side 303, thereby allowing the reflector 301 to overlap the base plate 314. It can be understood that, in order to make the reflector 301 more securely overlap the base plate 314, the third side 304 and the fourth side 305 of the reflector 301 can also be provided with protrusions 3012. The presence of protrusions 3012 on all four sides of the reflector 301 ensures that the reflector 301 is securely overlapped on the base plate 314.

[0046] According to the above embodiments, for example, when the first adjusting component adjusts the position of the reflector 301, the first driving component 321 drives the reflector 301 to move along the second direction D2, and the reflector 301 moves relative to the base plate 314. Figure 6 As shown, the second surface 301b of the reflector 301 slides on the upper surface 314a of the base plate 314, and friction occurs between the second surface 301b and the upper surface 314a. It should be noted that the second surface 301b is the surface of the protrusion 3012 opposite to the first surface 301a.

[0047] In some embodiments, the second surface 301b of the reflector 301 includes a first contact area that contacts the upper surface 314a of the base plate 314, and the upper surface 314a of the base plate 314 includes a second contact area that contacts the second surface 301b of the reflector 301. Both the first and second contact areas are coated with polytetrafluoroethylene (PTFE). The PTFE coating has a low coefficient of friction, which facilitates low-resistance sliding of the reflector 301 on the base plate 314.

[0048] In some embodiments, a pad is provided in the first contact area and / or the second contact area, and the surface of the pad is coated with polytetrafluoroethylene. In this way, the pad can be easily replaced after it is damaged due to long-term use, thereby extending the service life of the reflector 301 and the adjustment device.

[0049] In other embodiments, if the frame 310 does not include the base plate 314, grooves can be provided in the first side plate 311 and the second side plate 312 so that the protrusion 3012 of the reflector 301 overlaps in the groove, which can also achieve a stable connection between the reflector 301 and the frame 310.

[0050] In some embodiments, such as Figure 3 As shown, the frame 310 also includes a third side plate 313. The third side plate 313 is fixedly connected to the second side plate 312 and to the base plate 314. The third side plate 313 is disposed opposite to the first side plate 311 and is parallel to the first side plate 311, both extending along the first direction D1. In these embodiments, if the frame 310 does not include the base plate 314, the protrusion 3012 at the third side edge 304 of the reflector 301 can also overlap the groove in the third side plate 313.

[0051] Similarly, the surface of the groove may also include a polytetrafluoroethylene coating to enable the reflector 301 to slide with low resistance in the groove.

[0052] In some embodiments, combined with Figure 3 and Figure 6As shown, the first guide rail assembly 322 includes a first guide rail 3221 and a first slider 3222. The first guide rail 3221 is fixedly disposed on the first surface 301a of the reflector 301 and extends along the first direction D1. The first slider 3222 is slidably engaged with the first guide rail 3221. The first drive assembly 321 includes a first guide fixing seat 3211 and a first push rod 3212. The first guide fixing seat 3211 is fixedly connected to the first slider 3222. The first end 3212a of the first push rod 3212 passes through the first side plate 311, and the second end 3212b of the first push rod 3212 passes through the first guide fixing seat 3211.

[0053] It should be noted that the structure of the second guide rail assembly 332 is similar to that of the first guide rail assembly 322, and the structure of the second drive assembly 331 is similar to that of the first drive assembly 321. Figure 6 It can also be used to indicate along Figure 3 A partial sectional view of the BB wire cutting process is shown in the diagram, with relevant labels indicated in parentheses. (Reference) Figure 6 As shown, the second guide rail assembly 332 includes a second guide rail 3321 and a second slider 3322. The second guide rail 3321 is fixedly disposed on the first surface 301a of the reflector 301 and extends along the second direction D2. The second slider 3322 is slidably engaged with the second guide rail 3321. The second drive assembly 331 includes a second guide fixing seat 3311 and a second push rod 3312. The second guide fixing seat 3311 is fixedly connected to the second slider 3322. The first end 3312a of the second push rod 3312 passes through the second side plate 312, and the second end 3312b of the second push rod 3312 passes through the second guide fixing seat 3311.

[0054] According to the first drive assembly 321, the first guide rail assembly 322, the second drive assembly 331, and the second guide rail assembly 332, the first push rod 3212 is used to push the first guide fixing seat 3211 along the second direction D2 so that the second slider 3322 slides along the second guide rail 3321; the second push rod 3312 is used to push the second guide fixing seat 3311 along the first direction D1 so that the first slider 3222 slides along the first guide rail 3221.

[0055] Through the cooperation of the first driving component 321, the first guide rail component 322, the second driving component 331, and the second guide rail component 332, the position of the reflector 301 in the first direction D1 and the second direction D2 is stably adjusted.

[0056] In some embodiments, the first push rod 3212 is a bidirectional helical screw, wherein the first end 3212a of the first push rod 3212 includes one of a left-hand thread or a right-hand thread, and the second end 3212b of the first push rod 3212 includes the other of a left-hand thread or a right-hand thread. Figure 6 As shown, the first push rod 3212 has external threads at both ends and a smooth rod section in the middle. Taking the first end 3212a of the first push rod 3212 as an example, which includes a right-hand thread, the right-hand thread has a certain length L starting from the first end 3212a. In this example, the second end 3212b of the first push rod 3212 includes a left-hand thread, and the length of the left-hand thread is also L. Correspondingly, the first side plate 311 has a threaded hole, the internal thread of which is a right-hand thread, which mates with the right-hand thread of the first end 3212a of the first push rod 3212; the first guide fixing seat 3211 has a threaded hole, the internal thread of which is a left-hand thread, which mates with the left-hand thread of the second end 3212b of the first push rod 3212.

[0057] In some embodiments, assuming the thickness of the first side plate 311 is d, the thickness of the first guide fixing seat 3211 is also d, and the first push rod 3212 has a target adjustment stroke, then there is a relationship between d, L, and the target adjustment stroke: (d + L - 2 * pitch) * 2 ≥ target adjustment stroke. The overall length of the first push rod 3212 is related to d and L. If the overall length is too short, the adjustment function will be difficult to achieve due to insufficient stroke; if the overall length is too long, it will occupy too much space. Therefore, the target adjustment stroke can be set according to actual needs, and then d and L can be set according to the above relationship and the target adjustment stroke to make the length of the first push rod 3212 appropriate.

[0058] In some embodiments, the second push rod 3312 is a bidirectional helical screw, wherein the first end 3312a of the second push rod 3312 includes either a left-hand thread or a right-hand thread, and the second end 3312b of the second push rod 3312 includes either a left-hand thread or a right-hand thread. The second push rod 3312 has a similar structure to the first push rod 3212, and will not be described in detail again.

[0059] In some embodiments, such as Figure 6 As shown, the first guide fixing seat 3211 includes a first horizontal part 3211a and a first vertical part 3211b. The first horizontal part 3211a is fixedly connected to the first slider 3222. The second end 3212b of the first push rod 3212 passes through the first vertical part 3211b. There is a gap E1 between the first vertical part 3211b and the first guide rail assembly 322.

[0060] According to the above embodiment, the cross-section of the first guide fixing seat 3211 is as follows: Figure 6The inverted L-shape is shown. There is a gap E1 between the first vertical part 3211b and the first guide rail assembly 322, which provides space for the first push rod 3212, so that the second end 3212b of the first push rod 3212 can extend outward from the threaded hole on the first vertical part 3211b by a certain length, thereby increasing the stroke range of the first push rod 3212.

[0061] In some embodiments, such as Figure 6 As shown, the second guide fixing seat 3311 includes a second horizontal portion 3311a and a second vertical portion 3311b. The second horizontal portion 3311a is fixedly connected to the second slider 3322, and the second end 3312b of the second push rod 3312 passes through the second vertical portion 3311b. A gap E2 exists between the second vertical portion 3311b and the second guide rail assembly 332. The arrangement of the second guide fixing seat 3311 is similar to that of the first guide fixing seat 3211, and will not be described again.

[0062] In some embodiments, such as Figure 3 As shown, the adjusting device further includes at least one first guide 341 and / or at least one second guide 342. Figure 3 In the illustrated embodiment, the adjusting device includes two first guide members 341 and two second guide members 342. The first end of each first guide member 341 passes through a first side plate 311, and the second end of each first guide member 341 passes through a first guide fixing seat 3211. The first guide member 341 is parallel to the first push rod 3212. The first end of each second guide member 342 passes through a second side plate 312, and the second end of each second guide member 342 passes through a second guide fixing seat 3311. The second guide member 342 is parallel to the second push rod 3312.

[0063] In some embodiments, both the first guide 341 and the second guide 342 can be guide pins. By providing the first guide 341, the first push rod 3212 is limited and guided, ensuring smooth adjustment of the first push rod 3212, thereby allowing the reflector 301 to move smoothly along the second direction D2. Similarly, the second guide 342 provides limitation and guidance for the second push rod 3312, ensuring smooth adjustment of the second push rod 3312, thereby allowing the reflector 301 to move smoothly along the first direction D1.

[0064] As mentioned above, refer to Figure 3As shown, in some embodiments, the frame 310 further includes a third side plate 313, which is disposed opposite to the first side plate 311 and extends along the first direction D1. The first guide rail assembly 322 also includes a third guide rail and a third slider (not shown). The third guide rail extends along the first direction D1, and the third slider slides in cooperation with the third guide rail. The third guide rail and the third slider are close to the third side plate 313. It can be understood that the third guide rail is similar to the first guide rail 3221, and the third slider is similar to the first slider 3222. By adding a set of guide rails and sliders, when the second drive assembly 331 drives the reflector 301 to move along the first direction D1, the first slider 3222 and the third slider move simultaneously on the first guide rail 3221 and the third guide rail, respectively, further ensuring the smooth movement of the reflector 301.

[0065] Furthermore, refer to Figure 3 As shown, in some embodiments, the adjusting device further includes at least one third guide 343. Figure 3 In the illustrated embodiment, the adjustment device includes two third guide members 343. One end of the third guide member 343 can pass through the third side plate 313, and the other end of the third guide member 343 can pass through the third guide fixing seat. (It should be understood that in order to realize the guiding function of the third guide member 343, one end of the third guide member 343 needs to pass through the frame, and the other end needs to be connected to the reflector. Therefore, similar to the arrangement of the first guide member 341 and the second guide member 342, in order to facilitate the connection of the third guide member 343 to the reflector 301, the adjustment device can be equipped with a third guide fixing seat. The structure of the third guide fixing seat is similar to the structure of the first guide fixing seat 3211 and the second guide fixing seat 3311, and the third guide fixing seat is fixed to the third slider.) The third guide member 343 can be a guide pin, which is parallel to the first guide member 341. The function of the third guide member 343 is the same as that of the first guide member 341, and will not be described again here.

[0066] like Figure 3 As shown, the adjusting device of this application further includes at least one locking component 350. Figure 3 In the embodiment shown, the adjustment device includes four locking components 350, located at the four corners of the reflector 301. Figure 7 A cross-sectional schematic diagram including a locking component is shown. Figure 7 yes Figure 3 A partial sectional view along the CC line. (Reference) Figure 7As shown, the locking assembly 350 includes a pressure plate 351 and a locking member 352. The pressure plate 351 is disposed on the first surface 301a of the reflector plate 301, and the pressure plate 351 has a hole through which the locking member 352 passes. The reflector plate 301 has a clearance hole through which the locking member 352 can pass. The locking member 352 passes sequentially through the pressure plate 351 and the reflector plate 301 and is screwed onto the base plate 314. The locking member 352 is used to press and thus fix the reflector plate 301 and the base plate 314.

[0067] In some embodiments, the locking element 352 is a screw.

[0068] When using the adjustment device, after the position of the reflector 301 in the second direction D2 and the first direction D1 is adjusted by the first adjustment component and the second adjustment component, the reflector 301 and the base plate 314 can be locked by the locking component 350 to fix their relative positions, thereby fixing the reflector 301 in the adjusted position.

[0069] The following is an example of a specific adjustment process. In this example, the first push rod 3212 and the second push rod 3312 are specifically implemented as bidirectional helical screws. One or both ends of the bidirectional helical screw have internal hexagonal grooves for engaging with an internal hexagonal wrench, allowing the user to rotate the bidirectional helical screw by inserting the internal hexagonal wrench into the groove. The process is as follows:

[0070] Step S1: Release the pressure plate 351 to allow the reflector 301 to move freely along the first direction D1 and the second direction D2;

[0071] Step S2: Using an Allen wrench, rotate the second push rod 3312 to move the reflector 301 along the first direction D1 and place it in the theoretical position in the first direction D1; and / or, using an Allen wrench, rotate the first push rod 3212 to move the reflector 301 along the second direction D2 and place it in the theoretical position in the second direction D2.

[0072] Step S3: Use locking member 352 to lock pressure plate 351, so that reflector 301 is restricted to the theoretical position.

[0073] In step S2, the end of the double-ended helical screw has an internal hexagonal groove to facilitate engagement with an internal hexagonal wrench. An internal hexagonal wrench is a common and convenient tool. In other examples, other methods may be used to rotate the first push rod 3212 and the second push rod 3312.

[0074] In step S2, laser positioning can be used to determine whether the reflector 301 has reached its theoretical position. For example, a laser device can be installed on the reflector 301, capable of emitting several laser beams towards the plane of the wafer. (Reference) Figure 2When the reflector 301 is in an off-center position, several laser beams form several light spots L1 on the plane where the wafer W is located. By adjusting the reflector 301, the laser beams move together with the reflector 301 until the reflector 301 is moved to the theoretical position. At this time, the laser beams form several light spots L0 on the plane where the wafer W is located, indicating that the reflector 301 has moved to the theoretical position.

[0075] According to the adjustment device of this application, the reflector 301 can be stably adjusted to the theoretical position, which can eliminate the problem of the reflector 301 deviating from the theoretical position of the wafer due to the processing error and installation error of the structural components. This is beneficial to improve the distribution of the irradiation intensity of the heating element on the wafer and make the temperature field distribution on the wafer surface more uniform.

[0076] While the foregoing disclosure has discussed various embodiments that are currently considered useful, it should be understood that such details are for illustrative purposes only, and the appended claims are not limited to the disclosed embodiments. Rather, the claims are intended to cover all modifications and equivalent combinations that conform to the spirit and scope of the embodiments of this application. For example, although the system components described above can be implemented by hardware devices, they can also be implemented solely by software solutions, such as installing the described system on existing servers or mobile devices.

[0077] Similarly, it should be noted that, in order to simplify the description of the present application and thus aid in the understanding of one or more embodiments, the foregoing description of the embodiments of the present application sometimes combines multiple features into a single embodiment, drawing, or description thereof. However, this disclosure method does not imply that the subject matter of the present application requires more features than those mentioned in the claims. In fact, the embodiments contain fewer features than all the features of the single embodiments disclosed above.

[0078] In some embodiments, numbers describing the quantity of components and attributes are used. It should be understood that such numbers used in the description of embodiments are modified in some examples with the terms "approximately," "approximately," or "generally." Unless otherwise stated, "approximately," "approximately," or "generally" indicates that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may be changed depending on the characteristics required by individual embodiments. In some embodiments, numerical parameters should take into account specified significant digits and employ a general method of digit reservation. Although the numerical ranges and parameters used to confirm their breadth of scope in some embodiments of this application are approximate values, in specific embodiments, such values ​​are set as precisely as feasible.

Claims

1. An adjustment device for a semiconductor heating assembly, the semiconductor heating assembly comprising a heating element and a reflector, the heating element being fixedly connected to the reflector, characterized in that, include: The frame, movably connected to the reflector, includes a first side plate and a second side plate connected to each other, the first side plate extending along a first direction and the second side plate extending along a second direction; The first adjustment component includes a first drive component and a first guide rail component, wherein the first drive component is disposed on the first side plate; as well as The second adjustment component includes a second drive component and a second guide rail component, wherein the second drive component is disposed on the second side plate; The first driving component is used to cooperate with the second guide rail component to adjust the position of the reflector in the second direction; the second driving component is used to cooperate with the first guide rail component to adjust the position of the reflector in the first direction.

2. The adjusting device as described in claim 1, characterized in that, The frame further includes a base plate, which includes a hollow portion. The reflector is disposed in the hollow portion, and the upper surface of the base plate abuts against the second surface of the reflector. When the first adjustment component or the second adjustment component adjusts the position of the reflector, the reflector can move relative to the base plate.

3. The adjusting device as described in claim 1, characterized in that, The first guide rail assembly includes a first guide rail and a first slider, the first guide rail extends along the first direction, and the first slider slides in cooperation with the first guide rail; The first drive assembly includes a first guide fixing seat and a first push rod. The first guide fixing seat is fixedly connected to the first slider. The first end of the first push rod passes through the first side plate, and the second end of the first push rod passes through the first guide fixing seat. The second guide rail assembly includes a second guide rail and a second slider, the second guide rail extending along the second direction, and the second slider slidingly engaging with the second guide rail; The second drive assembly includes a second guide fixing seat and a second push rod. The second guide fixing seat is fixedly connected to the second slider. The first end of the second push rod passes through the second side plate, and the second end of the second push rod passes through the second guide fixing seat. Wherein, the first push rod is used to push the first guide fixing seat along the second direction; the second push rod is used to push the second guide fixing seat along the first direction.

4. The adjusting device as described in claim 3, characterized in that, The first push rod is a bidirectional helical screw, wherein the first end of the first push rod includes one of a left-hand thread or a right-hand thread, and the second end of the first push rod includes the other of a left-hand thread or a right-hand thread; And / or, the second push rod is a bidirectional helical screw, wherein the first end of the second push rod includes either a left-hand thread or a right-hand thread, and the second end of the second push rod includes either a left-hand thread or a right-hand thread.

5. The adjusting device as described in claim 3, characterized in that, The first guide fixing seat includes a first horizontal part and a first vertical part. The first horizontal part is fixedly connected to the first slider. The second end of the first push rod passes through the first vertical part. There is a gap between the first vertical part and the first guide rail assembly. And / or, the second guide fixing seat includes a second horizontal part and a second vertical part, the second horizontal part is fixedly connected to the second slider, and the second end of the second push rod passes through the second vertical part, wherein there is a gap between the second vertical part and the second guide rail assembly.

6. The adjusting device as described in claim 3, characterized in that, Also includes: At least one first guide member, the first end of the first guide member passing through the first side plate, the second end of the first guide member passing through the first guide fixing seat, and the first guide member being parallel to the first push rod; And / or, At least one second guide member, the first end of the second guide member passing through the second side plate, the second end of the second guide member passing through the second guide fixing seat, and the second guide member being parallel to the second push rod.

7. The adjusting device as described in claim 3, characterized in that, The frame also includes a third side plate, which is disposed opposite to the first side plate and extends along the first direction; The first guide rail assembly further includes a third guide rail and a third slider. The third guide rail extends along the first direction, and the third slider slides in cooperation with the third guide rail. The third guide rail and the third slider are close to the third side plate.

8. The adjusting device as described in claim 1, characterized in that, The reflector includes a first side and a second side, the first side extending along a first direction and the second side extending along a second direction, wherein the first guide rail assembly is fixed to the reflector and close to the first side, and the second guide rail assembly is fixed to the reflector and close to the second side.

9. The adjusting device as described in claim 2, characterized in that, The second surface of the reflector includes a first contact area that contacts the upper surface of the base plate, and the upper surface of the base plate includes a second contact area that contacts the second surface of the reflector. Both the first contact area and the second contact area include a polytetrafluoroethylene coating.

10. The adjusting device as described in claim 2, characterized in that, It also includes at least one locking component, which includes a pressure plate and a locking member. The pressure plate is disposed on the first side of the reflector, and the locking member is sequentially disposed through the pressure plate, the reflector, and the base plate. The locking member is used to fix the reflector and the base plate together.

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