A soft vacuum breaking device for a chip vacuum processing cavity

Abstract

The utility model discloses a kind of soft vacuum breaking devices of chip vacuum processing cavity. The soft vacuum breaking device includes: two flow guides, two air inlet pipes and internally hollow vacuum chamber;Flow guide includes rectangular flow guide body, and the air equalization cavity is formed in the hollow inside flow guide body and the air inlet hole of the upper wall center is equipped with intercommunication air equalization cavity, and the four walls of flow guide body are evenly distributed with several horizontal first directional air holes, and the first directional air hole is horizontally interconnected air equalization cavity and directional cavity, and the four side walls of flow guide body are integrally extended to form directional cavity vertically outward;Two flow guides are transversely symmetrically arranged and are screw-connected vacuum chamber upper wall, and the side wall plate and vacuum chamber upper wall form a circle of rectangular annular air outlet ring, and flow guide makes airflow slow down several times softly;Vacuum pressure gauge is installed in vacuum chamber upper wall and is interconnected vacuum chamber inner cavity.The utility model has the effect that soft airflow is gently controllable to break vacuum, and protect chip.

Description

Technical Field

[0001] This utility model relates to the field of ultra-clean vacuum operation of chips, and in particular to a gentle vacuum breaking device for chip vacuum processing chambers. Background Technology

[0002] Chips are high-precision products, and chip manufacturing involves high-cleanliness vacuum operations, such as vacuum testing or vacuum processing. After the chip has been tested or processed, the vacuum environment inside the cavity needs to be broken before materials can be removed and put back in. The current method of breaking the vacuum is to directly inject dry and clean gas that meets the requirements through a nozzle to break the vacuum. The drawback is that the high-speed airflow is prone to generating turbulence, which will blow away residual fine dust and particles in the cavity and fall onto the chip, which will seriously contaminate the chip, reduce chip performance, and even damage the chip's precision components, causing the chip to malfunction. Utility Model Content

[0003] To address one or more of the aforementioned problems, this invention provides a gentle vacuum breaking device for chip vacuum processing cavities.

[0004] According to one aspect of the present invention, a gentle vacuum breaking device for a chip vacuum processing cavity includes: two flow guide fixtures, two air inlet pipes, and an internally hollow vacuum chamber.

[0005] The flow guiding fixture includes a rectangular flow guiding body. The flow guiding body has a hollow interior forming an equalization chamber, and an air inlet hole connected to the equalization chamber is provided in the center of the upper wall. Several horizontal first directional air holes are evenly distributed on the two longitudinal walls of the flow guiding body, and several horizontal first directional air holes are evenly distributed on the two transverse walls. The first directional air holes are horizontally connected to the equalization chamber and the directional chamber. The four side walls of the flow guiding body extend vertically outward to form a rectangular ring-shaped horizontal plate. A side wall plate extends vertically upward on the outer edge of the horizontal ring plate. The height of the side wall plate is slightly lower than the height of the upper wall of the flow guiding body. The side wall plate, the horizontal ring plate, and the flow guiding body surround and form a directional chamber. The first directional air holes are higher than the horizontal ring plate, and the volume of the directional chamber is larger than that of the equalization chamber.

[0006] Two flow guide fixtures are arranged symmetrically in the transverse direction and threadedly connected to the upper wall of the vacuum chamber. A rectangular annular outlet is formed between the side wall plate and the upper wall of the vacuum chamber. The height of the outlet is slightly larger than the diameter of the first deflection port. The inlet port enters the large-volume equalization chamber, which makes the airflow slow down gently at first. The first deflection port guides the gentle airflow into the larger-volume deflection chamber. The deceleration effect of the first vertical deflection port and the deceleration effect of the deflection chamber are superimposed, which makes the airflow slow down gently at second time. Through the second vertical deflection of the outlet annular port, the gas gently enters the top of the vacuum chamber.

[0007] Two horizontally symmetrical air inlet pipes are installed on the upper wall of the vacuum chamber and connected to the air inlet port;

[0008] The vacuum pressure gauge is installed on the upper wall of the vacuum chamber and is connected to the inner cavity of the vacuum chamber.

[0009] In some embodiments, the flow guide fixture has vertical through holes at its four corners, and the vacuum chamber has vertical threaded blind holes. The vertical threaded component passes through the vertical through holes and is threaded into the vertical threaded blind holes.

[0010] In some implementations, an integral sealing gasket is also provided between the upper wall of the flow guide body and the vacuum chamber.

[0011] In some embodiments, the lower end of the vacuum chamber is also provided with two shallow positioning grooves that cooperate with the sealing gasket, and the upper wall of the sealing gasket is adhesively bonded to the shallow positioning groove.

[0012] In some embodiments, the flow guide fixture is made of any one of aluminum alloy, nylon, and polytetrafluoroethylene.

[0013] In some embodiments, the flow guide fixture is machined, and the flow guide body is formed by machining a rectangular air equalization cavity inward from one end, and then welding an end cap or injection molding an end cap.

[0014] Alternatively, the flow guide fixture may be integrally cast or integrally injection molded.

[0015] In some embodiments, the height of the air outlet ring is 3-5 mm, and the diameter of the first deflecting air hole is 1-3 mm.

[0016] In some embodiments, the inner end of the air inlet pipe is connected to the upper end of the air inlet connector and the outer end is connected to the blower. The middle of the air inlet connector is fixedly connected inside the vertical hole of the vacuum chamber. The air inlet hole is threaded or welded to the lower end of the air inlet connector, and vacuum adhesive is applied to each threaded connection.

[0017] In some embodiments, the two longitudinal wall rectangular arrays of the flow guide body are distributed with a number of horizontally lateral first directional air holes, and the two transverse wall rectangular arrays are distributed with a number of horizontally longitudinal first directional air holes.

[0018] In some implementations, the device can be applied to any of the high-cleanliness vacuum operation scenarios, including chip vacuum inspection, chip vacuum testing, and optical coating. Attached Figure Description

[0019] Figure 1 This is a three-dimensional schematic diagram of a gentle vacuum breaking device for a chip vacuum processing cavity according to one embodiment of the present invention;

[0020] Figure 2 for Figure 1 A cross-sectional schematic diagram of the gentle vacuum breaking device shown (I);

[0021] Figure 3 for Figure 2Schematic cross-sectional view of the gentle vacuum breaking device shown (II);

[0022] Figure 4 for Figure 3 A partially enlarged schematic diagram of the gentle vacuum breaking device shown;

[0023] Figure 5 for Figure 1 The diagram shows the connection between the flow guiding fixture and the vacuum chamber.

[0024] Flow guiding fixture 1, flow guiding body 10, air equalization chamber 100, air inlet 101, first deflection air inlet 102, horizontal ring plate 11, side wall plate 12, deflection chamber 13, air outlet ring 14, vertical through hole 15, vertical threaded part 16.

[0025] Intake pipe 2;

[0026] Vacuum chamber 3, vertical hole 30, vertical thread blind hole 31, positioning shallow groove 32;

[0027] Vacuum pressure gauge 4, vacuum block 41;

[0028] Sealing gasket 5;

[0029] 6. Air inlet connector; 7. Vacuum connector; 8. Blower; 9. Vacuum pump. Detailed Implementation

[0030] The present invention will now be described in further detail with reference to the accompanying drawings. It should be noted that the terms "front," "rear," "left," "right," "up," and "down" used in the following description refer to the directions in the accompanying drawings, while the terms "inner" and "outer" refer to the directions toward or away from the geometric center of a specific component, respectively.

[0031] Figures 1 to 5 The diagram schematically illustrates a gentle vacuum breaking device for a chip vacuum processing cavity according to one embodiment of the present invention. As shown, the gentle vacuum breaking device for a chip vacuum processing cavity is characterized by comprising: two flow guide fixtures 1, two air inlet pipes 2, and an internally hollow vacuum chamber 3;

[0032] The flow guiding fixture 1 includes a rectangular flow guiding body 10. The flow guiding body 10 has a hollow interior forming an air equalization cavity 100, and an air inlet 101 communicating with the air equalization cavity 100 is provided at the center of its upper wall. A plurality of horizontally oriented first deflection air holes 102 are evenly distributed on the two longitudinal walls of the flow guiding body 10, and a plurality of horizontally longitudinally oriented first deflection air holes 102 are evenly distributed on the two transverse walls. Further, a plurality of horizontally oriented first deflection air holes 102 are distributed in a rectangular array on the two longitudinal walls of the flow guiding body 10, and a plurality of horizontally longitudinally oriented first deflection air holes 102 are distributed in a rectangular array on the two transverse walls. The first directional air hole 102 is horizontally connected to the equalization cavity 100 and the directional cavity 13. The four side walls of the flow guide body 10 extend vertically outward to form a rectangular ring-shaped horizontal plate 11. The outer edge of the horizontal plate 11 extends vertically upward to form a side wall plate 12. The height of the side wall plate 12 is slightly lower than the height of the upper wall of the flow guide body 10. The side wall plate 12, the horizontal plate 11 and the flow guide body 10 surround and form the directional cavity 13. The first directional air hole 102 is higher than the horizontal plate 11. The volume of the directional cavity 13 is larger than that of the equalization cavity 100.

[0033] Two flow guide fixtures 1 are arranged laterally symmetrically and threadedly connected to the upper wall of the vacuum chamber 3. A rectangular annular outlet 14 is formed between the side wall plate 12 and the upper wall of the vacuum chamber 3. The height of the outlet 14 is slightly larger than the diameter of the first deflection port 102. The inlet port 101 enters the large-volume equalization chamber 100, which makes the airflow slow down gently at first. The first deflection port 102 guides the gentle airflow into the larger-volume deflection chamber 13. The deceleration effect of the first vertical deflection port 102 and the deceleration effect of the deflection chamber 13 are superimposed, which makes the airflow slow down gently at second time. Through the second vertical deflection of the outlet 14, a third-stage deceleration is achieved, so that the gas enters the top of the vacuum chamber 3 gently.

[0034] Two horizontally symmetrical air inlet pipes 2 are installed on the upper wall of the vacuum chamber 3 and connected to the air inlet port 101;

[0035] Vacuum pressure gauge 4 is installed on the upper wall of vacuum chamber 3 and is connected to the inner cavity of vacuum chamber 3.

[0036] This gentle vacuum breaking device for a chip vacuum processing cavity uses a flow guide fixture 1 to reduce the airflow speed, and it has multiple speed reductions to ultimately form a gentle airflow side-blowing vacuum in the vacuum cavity. Its beneficial effects are: First, the device can slowly and gently break the vacuum through multi-stage gentle airflow without generating turbulence or dust, solving the chip contamination problem and ensuring the high precision of the chip and the product yield; Second, the device uses three-stage speed reduction, and combined with a vacuum pressure gauge 4, the airflow is smooth and controllable, and the vacuum breaking is precise and controllable.

[0037] Furthermore, the flow guiding fixture 1 has vertical through holes 15 at its four corners, and the vacuum chamber 3 has vertical threaded blind holes 31. A vertical threaded component 16 passes through the vertical through holes 15 and is threaded into the vertical threaded blind holes 31. Preferably, the vertical through holes 15 are stepped through holes, and the vertical threaded component 16 is an internal hexagonal screw with the screw cap located inside the stepped through hole. The advantages are: this design facilitates installation and fabrication, while ensuring a tight connection between the flow guiding fixture 1 and the vacuum chamber 3 and guaranteeing the high sealing performance of the vacuum chamber 3.

[0038] Furthermore, an integral sealing gasket 5 is provided between the upper wall of the guide body 10 and the vacuum chamber 3. Preferably, the lower end of the vacuum chamber 3 is also provided with two positioning shallow grooves 32 that cooperate with the sealing gasket 5, and the upper wall of the sealing gasket 5 is adhesively bonded to the positioning shallow grooves 32. The beneficial effect is that this arrangement further improves the sealing performance of the vacuum chamber 3.

[0039] Furthermore, the flow guiding fixture 1 can be made of any one of aluminum alloy, nylon, and polytetrafluoroethylene. Preferably, the flow guiding fixture 1 is machined, and the flow guiding body 10 is formed by machining a rectangular air-equalizing cavity 100 along one end inward, and then welding an end cap or performing a secondary injection molding to form the end cap; or the flow guiding fixture 1 can be integrally cast or integrally injection molded. The advantages are: this design facilitates processing and manufacturing, and the flow guiding fixture 1 has high precision.

[0040] Preferably, the height of the air outlet ring 14 is 3-5mm, and the diameter of the first deflecting air hole 102 is 1-3mm.

[0041] Furthermore, the inner end of the air inlet pipe 2 is connected to the upper end of the air inlet connector 6, and the outer end is connected to the blower 8. The middle of the air inlet connector 6 is fixedly connected inside the vertical hole 30 of the vacuum chamber 3. The air inlet hole 101 is threaded or welded to the lower end of the air inlet connector 6, and vacuum adhesive is applied to each threaded connection. Its beneficial effect is that this arrangement easily forms good vacuum sealing performance.

[0042] Furthermore, a vacuum connector 7 is threaded to the center of the upper wall of the vacuum chamber 3, and the connection point is coated with vacuum adhesive. The vacuum connector 7 is connected to the vacuum pump 9 through a vacuum pipeline.

[0043] The vacuum block 41 of the vacuum pressure gauge 4 is threadedly connected to the edge of the detection through-hole of the vacuum chamber 3. The vacuum pressure gauge 40 is connected to one side of the vacuum block, and its sensitive end extends into the right-angle connecting hole of the vacuum block. The lower end of the right-angle connecting hole is connected to the detection through-hole. The annular groove at the lower end of the right-angle connecting hole is interference-fitted with an O-ring, which seals the connection interface between the vacuum block and the detection through-hole. The beneficial effect is that this setup easily achieves good vacuum sealing performance and accurately measures and controls the vacuum level.

[0044] The blower 8, vacuum pressure gauge 4, and vacuum pump 9 are all electrically connected to the electronic control module. The electronic control module controls the operating speed of the blower 8 and vacuum pump 9 based on the vacuum level collected by the vacuum pressure gauge 4.

[0045] Furthermore, this device can be applied to any high-cleanliness vacuum operation scenario, including chip vacuum inspection, chip vacuum testing, and optical coating. Its advantage lies in its wide range of applications.

[0046] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. A gentle vacuum breaking device for a chip vacuum processing cavity, characterized in that, Includes: two flow guide fixtures (1), two air inlet pipes (2), and an internally hollow vacuum chamber (3); The flow guiding fixture (1) includes a rectangular flow guiding body (10). The flow guiding body (10) has a hollow interior forming an equalization chamber (100), and an air inlet (101) communicating with the equalization chamber (100) is provided at the center of the upper wall. Several horizontal first-direction air holes (102) are evenly distributed on the two longitudinal walls of the flow guiding body (10), and several horizontal first-direction air holes (102) are evenly distributed on the two transverse walls. The first-direction air holes (102) horizontally communicate with the equalization chamber (100) and the direction-changing chamber (13). (10) has four side walls that extend vertically outward to form a rectangular ring-shaped horizontal ring plate (11). The outer edge of the horizontal ring plate (11) extends vertically upward to form a side wall plate (12). The height of the side wall plate (12) is slightly lower than the height of the upper wall of the guide body (10). The side wall plate (12), the horizontal ring plate (11), and the guide body (10) surround and form a reversing cavity (13). The first reversing air hole (102) is higher than the horizontal ring plate (11). The volume of the reversing cavity (13) is larger than that of the equalizing cavity (100). Two flow guide fixtures (1) are arranged laterally symmetrically and threadedly connected to the upper wall of the vacuum chamber (3). A rectangular annular outlet (14) is formed between the side wall plate (12) and the upper wall of the vacuum chamber (3). The height of the outlet (14) is slightly larger than the diameter of the first deflection port (102). The inlet (101) enters the large volume equalization chamber (100), which makes the airflow slow down gently at first. The first deflection port (102) guides the gentle airflow into the larger volume deflection chamber (13). The deceleration effect of the first vertical deflection port (102) and the deceleration effect of the deflection chamber (13) are superimposed, which makes the airflow slow down gently at second time. Through the second vertical deflection of the outlet (14), the gas gently enters the top of the vacuum chamber (3). Two transversely symmetrical air inlet pipes (2) are installed on the upper wall of the vacuum chamber (3) and connected to the air inlet port (101); The vacuum pressure gauge (4) is installed on the upper wall of the vacuum chamber (3) and is connected to the inner cavity of the vacuum chamber (3).

2. The gentle vacuum breaking device according to claim 1, characterized in that, The flow guide fixture (1) has vertical through holes (15) at its four corners, and the vacuum chamber (3) has vertical threaded blind holes (31). The vertical threaded part (16) passes through the vertical through holes (15) and is threaded to the vertical threaded blind holes (31).

3. The gentle vacuum breaking device according to claim 1, characterized in that, An integral sealing gasket (5) is also provided between the upper wall of the flow guide body (10) and the vacuum chamber (3).

4. The gentle vacuum breaking device according to claim 3, characterized in that, The lower end of the vacuum chamber (3) is also provided with two shallow positioning grooves (32) that cooperate with the sealing gasket (5), and the upper wall of the sealing gasket (5) is glued to the shallow positioning grooves (32).

5. The gentle vacuum breaking device according to claim 1, characterized in that, The flow guide fixture (1) is made of any one of aluminum alloy, nylon and polytetrafluoroethylene.

6. The gentle vacuum breaking device according to claim 5, characterized in that, The flow guide fixture (1) is machined, and the flow guide body (10) is formed by machining a rectangular air equalization cavity (100) from one end inward, and then welding the end cap or injection molding the end cap. Alternatively, the flow guide fixture (1) may be integrally cast or integrally injection molded.

7. The gentle vacuum breaking device according to claim 1, characterized in that, The height of the air outlet ring (14) is 3-5mm, and the diameter of the first deflecting air hole (102) is 1-3mm.

8. The gentle vacuum breaking device according to claim 1, characterized in that, The inner end of the air inlet pipe (2) is connected to the upper end of the air inlet connector (6) and the outer end is connected to the blower (8). The middle of the air inlet connector (6) is fixedly connected in the vertical hole (30) of the vacuum chamber (3). The air inlet hole (101) is threaded or welded to the lower end of the air inlet connector (6). Vacuum adhesive is applied to each threaded connection.

9. The gentle vacuum breaking device according to claim 1, characterized in that, The flow guide body (10) has two longitudinal wall rectangular arrays with several horizontal first directional air holes (102) distributed in the two transverse wall rectangular arrays, and two transverse wall rectangular arrays with several horizontal first directional air holes (102) distributed in the two longitudinal walls.

10. The gentle vacuum breaking device according to any one of claims 1 to 9, characterized in that, This device can be applied to any high-cleanliness vacuum operation scenario, including chip vacuum inspection, chip vacuum testing, and optical coating.

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