Wafer carrier fixing device

Abstract

The utility model discloses a kind of wafer support fixing device, comprising: bottom plate, bottom plate defines first direction, second direction perpendicular to first direction and third direction perpendicular to first direction and second direction;Positioning batten, fixed on bottom plate, positioning batten includes multiple carding parts of increasing width in first direction in turn, and positioning step is formed between adjacent two carding parts;Movable clamping block, slidably set on bottom plate, movable clamping block is oppositely arranged along first direction with positioning batten, and multiple limiting portions are equipped on movable clamping block;Among them, carding part is used to cooperate with the card slot of corresponding wafer support bottom first end, to limit wafer support in first direction and second direction, limiting portion is used to cooperate with the edge portion of this wafer support bottom second end, to limit wafer support in first direction and third direction.The wafer support fixing device described above can identify multiple sizes of wafer support.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a wafer support fixing device. Background Technology

[0002] In semiconductor processing, wafers need to be transported to different devices. During transport, the wafers are placed in wafer holders, and then placed in the devices along with the wafer holders. The devices then directly remove the wafers from the wafer holders. However, existing wafer holder fixing devices typically only accommodate wafer holders of a single size, resulting in a narrow range of applications and limitations in practical use. Utility Model Content

[0003] Therefore, it is necessary to address the problem of poor adaptability of existing wafer scaffold fixing devices by providing a fixing device that can adapt to wafer scaffolds of various sizes, thereby improving the versatility and practical value of the device.

[0004] A wafer support holder fixing device, wherein the wafer support holder has a slot at a first end and an edge portion at a second end, comprising:

[0005] A base plate, the base plate defining a first direction, a second direction perpendicular to the first direction, and a third direction perpendicular to both the first and second directions;

[0006] A positioning plate is fixed on the base plate. The positioning plate includes a plurality of snap-in portions whose width increases sequentially along the first direction, and a positioning step is formed between two adjacent snap-in portions.

[0007] A movable locking block is slidably disposed on the base plate. The movable locking block is arranged opposite to the positioning locking plate along the first direction. The movable locking block is provided with multiple limiting parts.

[0008] The insert portion is used to engage with the slot at the bottom first end of the corresponding wafer holder to limit the wafer holder in the first direction and the second direction. The limiting portion is used to engage with the edge portion at the bottom second end of the wafer holder to limit the wafer holder in the first direction and the third direction.

[0009] In one embodiment, the positioning plate includes a first locking portion, a second locking portion, a third locking portion, a fourth locking portion, and a fifth locking portion arranged sequentially along a first direction. A first positioning step is formed between the first locking portion and the second locking portion, a second positioning step is formed between the second locking portion and the third locking portion, a third positioning step is formed between the third locking portion and the fourth locking portion, and a fourth positioning step is formed between the fourth locking portion and the fifth locking portion.

[0010] In one embodiment, both the second and third insert portions include a side surface and an end face facing the movable card block. The corner of the side surface and the end face of both the second and third insert portions is provided with a first limiting groove. The first limiting groove is used to cooperate with a limiting pin extending along the first direction on the end face of the bottom first end of the corresponding wafer holder to limit the wafer holder in the third direction.

[0011] In one embodiment, the end face of the five-card insertion part facing the movable card block is provided with a second limiting groove. The second limiting groove is used to cooperate with a limiting pin extending along the first direction on the end face of the bottom first end of the corresponding wafer holder to limit the wafer holder in the second direction.

[0012] In one embodiment, the movable block includes a first limiting part, a second limiting part, a third limiting part, a fourth limiting part, and a fifth limiting part; wherein the first limiting part, the second limiting part, and the third limiting part are used to cooperate with the edge of the corresponding wafer holder to limit the wafer holder in the third direction; the fourth limiting part and the fifth limiting part are used to cooperate with the edge of the corresponding wafer holder to limit the wafer holder in the second direction.

[0013] In one embodiment, the active card block includes a main body;

[0014] The main body extends along the first direction and is provided with two first jaws, two second jaws and two third jaws;

[0015] The movable card block has an end face facing the positioning card plate;

[0016] in:

[0017] The first limiting portion is formed between the two first claws and the end face;

[0018] The two second claws are respectively disposed on the outside of the two first claws, and the two second claws form the second limiting part between the end face;

[0019] The two third jaws are respectively disposed above the two second jaws, and the two third jaws form the third limiting portion between the end face and the end face.

[0020] In one embodiment, the active card block further includes two fourth claws;

[0021] The two fourth claws are respectively disposed on both sides of the main body and extend along the first direction toward the positioning plate.

[0022] The two fourth claws respectively form grooves between the two sides of the main body, and the grooves constitute the fourth limiting part;

[0023] The outer surfaces of the two fourth claws constitute the fifth limiting part.

[0024] In one embodiment, a guide mechanism is provided between the movable card blocks to guide the sliding of the movable card blocks.

[0025] In one embodiment, a magnetic attraction component is provided between the active card blocks.

[0026] In one embodiment, the magnetic attraction assembly includes multiple magnetic components and multiple iron plates, the multiple magnetic components being fixed to the base plate and the multiple iron plates being fixed to the movable card block.

[0027] The aforementioned wafer scaffold fixing device includes a base plate, a positioning plate, and a movable locking block. In use, the movable locking block is first slid away from the positioning plate along the first direction X. Then, the wafer scaffold's slot is aligned with the corresponding sized insertion part, allowing the slot and insertion part to engage. Next, the movable locking block is slid to an appropriate position, causing its limiting part to engage with the edge of the wafer scaffold, thereby fixing the wafer scaffold. This wafer scaffold fixing device can recognize wafer scaffolds of various sizes. Attached Figure Description

[0028] Figure 1 This is a perspective view of a wafer support fixing device in one embodiment of the present invention;

[0029] Figure 2 for Figure 1 A perspective view of the wafer support fixing device shown, including the hidden positioning plate and movable locking block;

[0030] Figure 3 for Figure 1 A perspective view of the positioning plate of the wafer support fixture shown in the figure;

[0031] Figure 4 for Figure 1 A perspective view of the movable latch of the wafer support fixing device shown in the figure;

[0032] Figure 5 for Figure 1 A bottom view of the movable latch block of the wafer support fixture shown in the diagram;

[0033] Figure 6 for Figure 1 The diagram shows the fit between the wafer support fixture and the 2-inch wafer support.

[0034] Figure 7 for Figure 1 The diagram shows the fit between the wafer support fixture and the 3-inch wafer support.

[0035] Figure 8 for Figure 1 The diagram shows the fit between the wafer support fixture and the 4-inch wafer support.

[0036] Figure 9 for Figure 1 The diagram shows the fit between the wafer support fixture and the 6-inch wafer support.

[0037] Figure 10 for Figure 1 The diagram shows the fit between the wafer support fixture and the 8-inch wafer support.

[0038] Explanation of reference numerals in the attached figures:

[0039] 100. Wafer support

[0040] 101. Card slot

[0041] 102. Edge

[0042] 103. Limit pin

[0043] 10. Base plate

[0044] X, First Direction

[0045] Y, Second Direction

[0046] Z, Third-party direction

[0047] 20. Positioning plate

[0048] 21. First card entry

[0049] 22. Second card entry section

[0050] 221. Side view

[0051] 222. End face

[0052] 223. First limiting groove

[0053] 23. Third Card Entry

[0054] 231. Side view

[0055] 232. End face

[0056] 233. First limiting groove

[0057] 24. Fourth Card Entry

[0058] 25. Fifth Card Entry Section

[0059] 251. Second limiting groove

[0060] 26. First positioning step

[0061] 27. Second positioning step

[0062] 28. Third positioning step

[0063] 29. Fourth positioning step

[0064] 30. Activity Card Blocks

[0065] 31. Main body

[0066] 311. First claw

[0067] 312. Second claw

[0068] 313. Third claw

[0069] 314. End face

[0070] 315. Fourth claw

[0071] 316. Groove

[0072] 41. Guide pin;

[0073] 42. Guide groove

[0074] 51. Magnetic components

[0075] 52. Iron plate. Detailed Implementation

[0076] To make the above-mentioned objectives, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model are described clearly and completely below with reference to the accompanying drawings. Obviously, the specific details described below are only a part of the embodiments of this utility model, and this utility model can be implemented in many other embodiments different from those described herein. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0077] In this document, when an element is referred to as being "fixed to" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The directional terms such as "front," "back," "up," and "down" are defined based on the location of the components in the accompanying drawings and their relative positions, and are merely for clarity and convenience in expressing the technical solution. It should be understood that the use of these directional terms should not limit the scope of protection claimed by this utility model.

[0078] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0079] Reference Figures 1 to 5 This utility model provides a wafer support holder fixing device for fixing wafer supports 100 of different sizes. The bottom of the wafer support holder 100 has a slot 101 at the first end and an edge portion 102 at the second end. The fixing device mainly includes three parts: a base plate 10, a positioning plate 20, and a movable locking block 30.

[0080] The base plate 10 serves as the foundation support platform for the entire fixing device, and it defines three mutually perpendicular directions: a first direction X, a second direction Y perpendicular to the first direction X, and a third direction Z (which can be understood as the height direction) perpendicular to both the first direction X and the second direction Y. The base plate 10 can be made of aluminum alloy to ensure sufficient strength and light weight. Of course, other suitable materials such as stainless steel and engineering plastics can also be used.

[0081] The positioning plate 20 is fixed to the base plate 10 by bolts, or by other fixing methods such as welding or riveting. The positioning plate 20 includes multiple snap-fit ​​portions arranged sequentially along the first direction X. The width of these snap-fit ​​portions gradually increases along the first direction X to accommodate the slots 101 of wafer holders of different sizes. The positioning steps formed between adjacent snap-fit ​​portions can prevent the wafer holder 100 from shifting in the first direction X and the second direction Y.

[0082] The movable locking block 30 is slidably mounted on the base plate 10 and is arranged opposite to the positioning locking plate 20 along the first direction X. The movable locking block 30 is provided with multiple limiting parts, which cooperate with the edge 102 of the second end of the bottom of the wafer holder 100 to limit the wafer holder 100 in the first direction X and the third direction Z.

[0083] The working principle of this embodiment is as follows: First, the movable locking block 30 is slid away from the positioning plate 20 along the first direction X. Then, the slot 101 of the wafer holder 100 is aligned with the corresponding size insertion part, so that the slot 101 engages with the insertion part. Next, the movable locking block 30 is slid to an appropriate position, so that its limiting part engages with the edge part 102 of the wafer holder 100, thereby fixing the wafer holder 100.

[0084] The technical advantage of this embodiment is that:

[0085] 1. By cooperating with the insertion part and the slot, and with cooperating with the limiting part and the edge part, the wafer support is limited in three directions, resulting in good fixation.

[0086] 2. It adopts a movable card block design, which is convenient to operate and has strong applicability;

[0087] 3. One device can be used for wafer scaffolds of various sizes, reducing production costs.

[0088] In one embodiment, the positioning plate 20 specifically includes a first latching portion 21, a second latching portion 22, a third latching portion 23, a fourth latching portion 24, and a fifth latching portion 25 arranged sequentially along a first direction X. The widths of these five latching portions increase sequentially to accommodate wafer carriers of different sizes, such as 2 inches, 3 inches, 4 inches, 6 inches, and 8 inches (see...). Figures 6 to 10 ).

[0089] The adjacent card slots form a stepped positioning step, specifically including: a first positioning step 26 between the first card slot 21 and the second card slot 22; a second positioning step 27 between the second card slot 22 and the third card slot 23; a third positioning step 28 between the third card slot 23 and the fourth card slot 24; and a fourth positioning step 29 between the fourth card slot 24 and the fifth card slot 25.

[0090] In another embodiment, the structures of the second latching portion 22 and the third latching portion 23 are optimized. The second latching portion 22 includes a side surface 221 and an end face 222 facing the movable latching block 30, and the third latching portion 23 correspondingly includes a side surface 231 and an end face 222 facing the movable latching block 30. First limiting grooves 223 and 233 are respectively provided at the corners of the side surfaces and end faces of the second latching portion 22 and the third latching portion 23. The specific dimensions of these first limiting grooves can be adjusted according to the dimensions of the upper limit pins of the wafer carrier. The first limiting grooves 223 and 233 are used to cooperate with the limiting pin 103 extending along the first direction X on the end face of the first end of the bottom of the wafer carrier 100. After the limiting pin 103 is inserted into the first limiting groove 223 or 233, it can effectively prevent the wafer carrier 100 from shifting in the third direction Z.

[0091] See Figure 6 , 7 When securing wafer caddies of 3 inches or smaller, the operator first identifies the wafer caddy's dimensions and then aligns the locating pin 103 of the wafer caddy with the corresponding first locating slot. For example, for a 2-inch wafer caddy, its locating pin should be aligned with the first locating slot 223 on the second mounting portion 22; for a 3-inch wafer caddy, it should be aligned with the first locating slot 233 on the third mounting portion 23. Technical benefits: 1. The cooperation of the locating pin and locating slot achieves precise positioning of the wafer caddy in the Z direction; 2. The locating slot at the corner ensures positioning accuracy without affecting the overall strength of the mounting portion; 3. The operation is simple and intuitive, allowing for quick wafer caddy clamping.

[0092] In one embodiment, a second limiting groove 251 is provided on the end face of the fifth insert portion 25 facing the movable insert block 30. The second limiting groove 251 is also used to cooperate with the limiting pin 103 extending along the first direction X on the end face of the bottom first end of the wafer holder 100, but its main function is to limit the wafer holder 100 in the second direction Y. Specifically, the second limiting groove 251 is a through shape extending along the Z-axis direction.

[0093] See Figure 9 When installing a 6-inch wafer support, its limiting pin 103 is inserted into the second limiting groove 251. In conjunction with the overall structure of the fourth insert part 24, the large-size wafer support is positioned in the first and second directions, while the third direction is positioned by the weight of the wafer support itself.

[0094] See Figure 10 When installing an 8-inch wafer support, the first and second directions of the large-size wafer support are positioned by the fifth insert 25, while the third direction is positioned by the weight of the wafer support itself.

[0095] Reference Figure 4 and Figure 5 This embodiment focuses on the structural design of the limiting part on the movable block 30. The movable block 30 includes a first limiting part, a second limiting part, a third limiting part, a fourth limiting part, and a fifth limiting part, and these limiting parts have different functions and roles.

[0096] The first, second, and third limiting portions are mainly used to cooperate with the edge portion 102 of the corresponding wafer carrier 100 to limit the wafer carrier in the third direction Z. The fourth and fifth limiting portions are mainly used to cooperate with the edge portion 102 of the wafer carrier 100 to limit the wafer carrier in the second direction Y. These two limiting portions adopt a symmetrical design to ensure the centered positioning of the wafer carrier in the Y direction.

[0097] Specifically, the movable locking block 30 includes a main body 31, on which multiple locking claw structures with different functions are provided. The main body 31 extends along the first direction X and is provided with: two first locking claws 311, two second locking claws 312, and two third locking claws 313. The movable locking block 30 has an end face 314 facing the positioning locking plate 20. The end face 314 cooperates with each locking claw to form different limiting structures: the two first locking claws 311 form a first limiting portion between themselves and the end face 314; the two second locking claws 312 are respectively disposed outside the two first locking claws 311 and form a second limiting portion between themselves and the end face 314; the two third locking claws 313 are respectively disposed above the two second locking claws 312 and form a third limiting portion between themselves and the end face 314.

[0098] The fourth claw structure of the movable locking block 30 is further described. The movable locking block 30 also includes two fourth claws 315, which have the following characteristics: they are respectively disposed on both sides of the main body 31; they extend along the first direction X toward the positioning plate 20; and they form a groove 316 between themselves and the two sides of the main body 31.

[0099] Working principle:

[0100] When the edge of the wafer support is embedded in the groove 316, initial positioning in the Y direction can be achieved, while the outer surface of the fourth claw 315 provides additional limiting function, forming a dual protection mechanism.

[0101] A guide mechanism is disposed between the base plate 10 and the movable block 30 to ensure the smooth sliding of the movable block 30. The guide mechanism includes a guide pin 41 fixed to the base plate extending in a third direction and a guide groove 42 disposed on the movable block extending in a first direction. The guide pin 41 is located in the guide groove 42 to ensure the smoothness and accuracy of the movement of the movable block 30.

[0102] The magnetic attraction assembly includes multiple magnetic components 51 and multiple iron plates 52 to provide appropriate magnetic attraction force. The magnetic components 51 are neodymium iron boron permanent magnets and are fixedly mounted on the base plate 10. They can be installed using pre-embedded mounting or screw fixing. The iron plates 52 are made of soft magnetic alloy material and are fixedly mounted on the movable locking block 30. The area of ​​the iron plates should be 15-20% larger than the area of ​​the magnetic components to ensure good magnetic attraction.

[0103] Technical benefits: 1. Provides appropriate positioning force; 2. Prevents accidental movement of the moving block; 3. Easy to operate and long service life.

[0104] The embodiments described above are merely examples of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A wafer support holder fixing device, wherein the wafer support holder has a slot at a first end at its bottom and an edge portion at a second end, characterized in that, include: A base plate, the base plate defining a first direction, a second direction perpendicular to the first direction, and a third direction perpendicular to both the first and second directions; A positioning plate is fixed on the base plate. The positioning plate includes a plurality of snap-in portions whose width increases sequentially along the first direction, and a positioning step is formed between two adjacent snap-in portions. A movable locking block is slidably disposed on the base plate. The movable locking block is arranged opposite to the positioning locking plate along the first direction. The movable locking block is provided with multiple limiting parts. The insert portion is used to engage with the slot at the bottom first end of the corresponding wafer holder to limit the wafer holder in the first direction and the second direction. The limiting portion is used to engage with the edge portion at the bottom second end of the wafer holder to limit the wafer holder in the first direction and the third direction.

2. The wafer support fixing device according to claim 1, characterized in that, The positioning plate includes a first locking part, a second locking part, a third locking part, a fourth locking part, and a fifth locking part arranged sequentially along a first direction. A first positioning step is formed between the first locking part and the second locking part, a second positioning step is formed between the second locking part and the third locking part, a third positioning step is formed between the third locking part and the fourth locking part, and a fourth positioning step is formed between the fourth locking part and the fifth locking part.

3. The wafer support fixing device according to claim 2, characterized in that, Both the second and third insert portions include a side surface and an end face facing the movable card block. The corner of the side surface and the end face of both the second and third insert portions is provided with a first limiting groove. The first limiting groove is used to cooperate with a limiting pin extending along the first direction on the end face of the bottom first end of the corresponding wafer holder to limit the wafer holder in the third direction.

4. The wafer support fixing device according to claim 2, characterized in that, The end face of the five-card entry part facing the movable card block is provided with a second limiting groove. The second limiting groove is used to cooperate with the limiting pin extending along the first direction on the end face of the bottom first end of the corresponding wafer holder to limit the wafer holder in the second direction.

5. The wafer support fixing device according to claim 2, characterized in that, The movable block includes a first limiting part, a second limiting part, a third limiting part, a fourth limiting part, and a fifth limiting part; wherein, the first limiting part, the second limiting part, and the third limiting part are used to cooperate with the edge part of the corresponding wafer holder to limit the wafer holder in the third direction; the fourth limiting part and the fifth limiting part are used to cooperate with the edge part of the corresponding wafer holder to limit the wafer holder in the second direction.

6. The wafer support fixing device according to claim 5, characterized in that, The active card block includes a main body; The main body extends along the first direction and is provided with two first jaws, two second jaws and two third jaws; The movable card block has an end face facing the positioning card plate; in: The first limiting portion is formed between the two first claws and the end face; The two second claws are respectively disposed on the outside of the two first claws, and the two second claws form the second limiting part between the end face; The two third jaws are respectively disposed above the two second jaws, and the two third jaws form the third limiting portion between the end face and the end face.

7. The wafer support fixing device according to claim 6, characterized in that, The active card block also includes two fourth card claws; The two fourth claws are respectively disposed on both sides of the main body and extend along the first direction toward the positioning plate. The two fourth claws respectively form grooves between the two sides of the main body, and the grooves constitute the fourth limiting part; The outer surfaces of the two fourth claws constitute the fifth limiting part.

8. The wafer support fixing device according to any one of claims 1 to 7, characterized in that, A guide mechanism is provided between the movable card blocks to guide the sliding of the movable card blocks.

9. The wafer support fixing device according to any one of claims 1 to 7, characterized in that, A magnetic attraction component is provided between the active card blocks.

10. The wafer support fixing device according to claim 9, characterized in that, The magnetic suction assembly includes multiple magnetic components and multiple iron plates. The multiple magnetic components are fixed to the base plate, and the multiple iron plates are fixed to the movable card block.

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