Sheet carrier

Abstract

The present disclosure relates to the field of photovoltaic and semiconductor technology, and particularly relates to a sheet carrier, which solves the problem of poor carrying mode of the sheet carrier in the related art, leading to poor film coating quality. The sheet carrier comprises a cavity, the cavity has a containing cavity and two openings oppositely arranged along a first horizontal direction, the openings are communicated with the containing cavity, and the sheet material is in and out of the containing cavity through the openings. When the containing cavity contains multiple pieces of sheet material stacked, the two openings expose the first and second cross sections of the sheet material, so that the passivation gas flows to the first and second cross sections through the two openings respectively, improving the film coating uniformity and thus improving the film coating quality.

Description

Technical Field

[0001] This disclosure relates to the fields of photovoltaic and semiconductor technology, and more specifically to a sheet carrier. Background Technology

[0002] Currently, in the photovoltaic and semiconductor industries, silicon wafers are typically cut into two or more pieces to improve the conversion efficiency of products made from silicon wafers, thereby reducing costs and increasing efficiency. After the silicon wafers are cut, cross-sections are created. To ensure the conversion efficiency of the products, the industry typically uses atomic layer deposition (ALD) technology to passivate the cross-sections of the silicon wafers, forming a thin film on the cross-sections.

[0003] Currently, silicon wafers are typically placed in carriers during passivation processes. However, the carriers in these technologies often have poor support methods for silicon wafers with two cross-sections, resulting in poor coating quality. For example, when holding silicon wafers in a carrier, the wafers are placed vertically within the carrier, with the two cross-sections usually facing each other vertically. To expose the bottom cross-section of the wafer, a support is usually placed at the bottom of the carrier to support the wafer. The cross-section in contact with the support is blocked and cannot be passivated, resulting in poor coating uniformity and poor coating quality. Utility Model Content

[0004] In view of this, the present disclosure provides a sheet carrier that solves the problem of poor coating quality caused by the poor bearing capacity of sheet materials in related technologies.

[0005] In a first aspect, embodiments of this disclosure provide a sheet carrier for a passivation process of a sheet material having a first cross-section and a second cross-section parallel to the thickness direction of the sheet material and disposed opposite to each other; wherein the sheet carrier includes: a cavity having a receiving cavity and two openings disposed opposite to each other along a first horizontal direction, wherein the openings communicate with the receiving cavity and are configured to allow the sheet material to enter and exit the receiving cavity, the receiving cavity being configured to accommodate multiple sheets of the sheet material stacked in a vertical direction; wherein the two openings are used to expose the first cross-section and the second cross-section when the receiving cavity accommodates the multiple sheets of the sheet material stacked in the receiving cavity, so that passivating gas contacts the first cross-section and the second cross-section.

[0006] In some embodiments, the sheet carrier further includes: a support member configured to support at least one of the cavities, the support member having at least two first through holes; wherein, when the support member supports one of the cavities, the two first through holes are respectively located on both sides of the cavity in the first horizontal direction and are respectively close to the two openings; wherein, excess passivation gas at each of the openings can be extracted from the cavity through the corresponding first through hole.

[0007] In some embodiments, the support member has a plurality of first through holes, which are arranged in multiple columns and rows along a first horizontal direction and a second horizontal direction, wherein the second horizontal direction intersects the first horizontal direction; wherein, when the support member supports a plurality of cavities, the plurality of cavities are arranged in multiple columns and rows along the first horizontal direction and the second horizontal direction; wherein, at least one first through hole is provided between two cavities in each row and adjacent columns, and at least one first through hole is provided on the side of the outermost cavity in each row away from the cavity in the adjacent column; wherein, excess passivation gas between two cavities in each row and adjacent columns can be extracted through the first through hole between two cavities in the adjacent column.

[0008] In some embodiments, the sheet carrier further includes: a support member disposed at the bottom of the receiving cavity and configured to support the sheet material so that a gap is formed between the bottom of the receiving cavity and the sheet material; a support member configured to support at least one of the cavities, the support member having at least one second through hole; wherein the bottom of the receiving cavity has a third through hole, and when the support member supports the cavity, the third through hole communicates with the second through hole in a vertical direction; wherein excess passivating gas at the two openings of the cavity can flow through the gap to the third through hole and the second through hole, so that excess passivating gas can be extracted from the cavity.

[0009] In some embodiments, the support member has a plurality of second through holes, which are arranged in multiple columns and rows along the first horizontal direction and the second horizontal direction, wherein the second horizontal direction intersects the first horizontal direction; wherein, when the support member supports a plurality of cavities, the plurality of cavities are arranged in multiple columns and rows along the first horizontal direction and the second horizontal direction, and the plurality of third through holes correspond one-to-one with the plurality of second through holes.

[0010] In some embodiments, the cavity includes: a bottom plate connected to the support member and having the third through hole; a top plate disposed opposite to the bottom plate in a vertical direction; and two side plates disposed opposite to each other and respectively connected to the bottom plate and the top plate to enclose and form the receiving cavity and the opening.

[0011] In some embodiments, the third through hole extends from one end of the base plate near one of the side plates to one end of the base plate near the other side plate; and / or, the number of the supports is multiple, and the multiple supports are symmetrically arranged on both sides of the third through hole in the first horizontal direction.

[0012] In some embodiments, the sheet carrier further includes: a first pad, separately disposed from the cavity, capable of being placed in the receiving cavity, and configured to support the sheet material; wherein, when the first pad and the sheet material are located in the receiving cavity, the lower surface of the first pad contacts the support member, and the lower surface of the lowermost sheet material contacts the upper surface of the first pad; and / or, a second pad, separately disposed from the cavity, capable of being placed in the receiving cavity; wherein, when the second pad and the sheet material are located in the receiving cavity, the lower surface of the second pad contacts the uppermost sheet material.

[0013] In some embodiments, the top surface of the cavity has a threaded portion, and the sheet carrier further includes a clamping member threadedly connected to the threaded portion and configured to press down on the stacked sheets of the sheet material.

[0014] In some embodiments, the bottom of the cavity has a positioning hole; wherein, the sheet carrier further includes: a positioning member disposed on the support member, capable of being inserted into the positioning hole in a vertical direction to position the cavity.

[0015] When the sheet carrier provided in this embodiment holds the sheet material, the sheet material is placed horizontally, and the first and second cross-sections of the sheet material face the two openings of the cavity of the sheet carrier, so that the two cross-sections of the sheet material are fully exposed. The passivating gas flows from the two openings of the cavity to the first and second cross-sections, respectively, to passivate the first and second cross-sections, thereby improving the coating uniformity and thus improving the coating quality. Attached Figure Description

[0016] Figure 1 The image shown is a side view of a sheet carrier and sheet material provided in an embodiment of this disclosure.

[0017] Figure 2 The diagram shown is a structural schematic of a cavity and support provided in an embodiment of this disclosure.

[0018] Figure 3 The image shown is a top view of a sheet carrier provided in an embodiment of this disclosure.

[0019] Figure 4 The image shown is a top view of a sheet carrier provided in another embodiment of this disclosure.

[0020] Figure 5 The image shown is a cross-sectional view of a sheet carrier and sheet material provided in an embodiment of this disclosure.

[0021] Figure 6 The image shown is a side view of a sheet material and sheet carrier provided in an embodiment of this disclosure, with the support removed.

[0022] Figure 7 The image shown is a side view of a sheet carrier provided in an embodiment of this disclosure.

[0023] Figure label: 10. Sheet carrier; 100. Cavity; 1001. Receiving cavity; 1002. Opening; 1003. Gap; 1004. Third through hole; 1005. Screw connection; 1006. Positioning hole; 110. Base plate; 120. Top plate; 130. Side plate; 200. Support; 201. First through hole; 202. Second through hole; 300. Support; 400. First pad; 500. Second pad; 600. Clamping element; 700. Positioning element; X1. First horizontal direction; X2. Second horizontal direction; 2. Sheet material; 21. First cross-section; 22. Second cross-section. Detailed Implementation

[0024] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0025] Figure 1 The image shown is a side view of a sheet carrier and sheet material provided in an embodiment of this disclosure. Figure 2 The diagram shown is a structural schematic of a cavity and support member provided in an embodiment of this disclosure. Figure 1 and Figure 2As shown, the sheet carrier 10 is used in the passivation process of sheet material 2. The sheet material 2 has a first cross-section 21 and a second cross-section 22 parallel to the thickness direction of the sheet material 2 and disposed opposite to each other. The sheet carrier 10 includes a cavity 100, which has a receiving cavity 1001 and an opening 1002 disposed opposite to each other along a first horizontal direction X1. The opening 1002 communicates with the receiving cavity 1001 and is configured to allow the sheet material 2 to enter and exit the receiving cavity 1001. The receiving cavity 1001 is configured to receive multiple sheets of sheet material 2 stacked in a vertical direction. The two openings 1002 are used to expose the first cross-section 21 and the second cross-section 22 of the sheet material 2 when the receiving cavity 1001 contains the multiple sheets of sheet material 2 stacked in the vertical direction, so that the passivating gas contacts the first cross-section 21 and the second cross-section 22 and passivates the first cross-section 21 and the second cross-section 22, thereby improving the coating uniformity and thus improving the coating quality.

[0026] In addition, excess passivation gas is extracted from the top or bottom of the cavity 100, reducing the non-section-by-section coating phenomenon of the sheet material 2 and improving the coating quality.

[0027] In addition, the passivation gas flows along the first horizontal direction X1 from the two openings 1002 to multiple first sections 21 and multiple second sections 22 respectively, so as to passivate multiple first sections 21 and multiple second sections 22 simultaneously. The coating efficiency is high, and the uniformity of the distribution of passivation gas at the openings 1002 is further improved, which further improves the coating uniformity. Figure 1 The straight arrow shown in the figure points in the direction of the passivating gas flow.

[0028] In addition, the excess passivation gas is extracted from the cavity 100, which can also prevent the excess passivation gas from reacting chemically with the process gas of the next process, and the reaction products from adhering to the sheet material 2 and contaminating the sheet material 2.

[0029] Exemplarily, a vacuum device is provided above the cavity 100, with its suction port near the opening 1002, to remove excess passivating gas from above the cavity 100. Exemplarily, a vacuum device is provided below the cavity 100, with its suction port near the opening 1002, to remove excess passivating gas from below the cavity 100. Exemplarily, the vacuum device can be a vacuum pump, blower, etc.

[0030] For example, the sheet material 2 can be a silicon wafer, a solar panel, a glass substrate, etc.

[0031] For example, the cross-sectional shape of the cavity 100 can be rectangular, parallelogram, or other polygonal or irregular shapes. For example, the cross-sectional shape of the opening 1002 can be rectangular, trapezoidal, or other polygonal or irregular shapes.

[0032] In some embodiments, such as Figure 3 As shown, the sheet carrier 10 also includes a support member 200, which is configured to support at least one cavity 100. The support member 200 has at least two first through holes 201. When the support member 200 supports one cavity 100, the two first through holes 201 are located on both sides of the cavity 100 in the first horizontal direction X1, and are respectively close to two openings 1002. Excess passivation gas at each opening 1002 can be extracted from the cavity 100 through the corresponding first through hole 201. The extraction method is simple and reliable.

[0033] For example, the support member 200 supports a cavity 100, and the air extraction device is located below the support member 200. The air extraction port of the air extraction device is close to the opening 1002 so that the air extraction device can extract excess passivation gas in the cavity 100 through the corresponding first through hole 201.

[0034] For example, the shape of the first through hole 201 can be rectangular, trapezoidal, polygonal or other irregular shape.

[0035] In some embodiments, such as Figure 4 and Figure 5 As shown, the support member 200 has a plurality of first through holes 201, which are arranged in multiple columns and rows along a first horizontal direction X1 and a second horizontal direction X2, and the second horizontal direction X2 intersects with the first horizontal direction X1.

[0036] When the support member 200 supports multiple cavities 100, the multiple cavities 100 are arranged in multiple columns and rows along a first horizontal direction X1 and a second horizontal direction X2. At least one first through hole 201 is provided between two cavities 100 in each row and adjacent columns. At least one first through hole 201 is also provided on the side of the outermost cavity 100 in each row that is away from the cavities 100 in adjacent columns. Excess passivating gas between two cavities 100 in each row can be extracted through the first through hole 201 between the two cavities 100 in adjacent columns.

[0037] Multiple cavities 100 are supported by a support member 200 to facilitate the simultaneous passivation of multiple sheet materials 2 within the cavities 100, thereby further improving production capacity. Simultaneously, multiple first through holes 201 are provided on the support member 200 to cooperate with the multiple cavities 100, so that excess passivation gas within each cavity 100 can be promptly extracted through the corresponding first through hole 201.

[0038] For example, such as Figure 4 and Figure 5As shown, a first through hole 201 is provided between two cavities 100 in each row and adjacent columns. The first through hole 201 extends from one side of the opening 1002 to the other side of the opening 1002 in order to maximize the size of the first through hole 201 and further improve the air extraction efficiency. Figure 5 The straight arrow shown in the figure points in the direction of the passivating gas flow.

[0039] In some embodiments, such as Figure 2 , Figure 5 and Figure 6 As shown, the sheet carrier 10 also includes a support member 300, which is disposed at the bottom of the receiving cavity 1001 and configured to support the sheet material 2, thereby forming a gap 1003 between the bottom of the receiving cavity 1001 and the sheet material 2. The support member 200 has at least one second through hole 202, and the bottom of the receiving cavity 1001 has a third through hole 1004. When the support member 200 supports the cavity 100, the third through hole 1004 communicates vertically with the second through hole 202. Excess passivating gas at the two openings 1002 of the cavity 100 can flow through the gap 1003 to the third through hole 1004 and the second through hole 202, allowing the excess passivating gas to be extracted from the cavity 100. The extraction method is simple and reliable.

[0040] For example, the support member 200 supports a cavity 100, and the suction device is located below the support member 200. The suction port of the suction device is close to the second through hole 202 so that excess passivation gas in the cavity 100 can be extracted through the gap 1003, the third through hole 1004 and the second through hole 202.

[0041] In some embodiments, such as Figure 4 and Figure 5 As shown, the support member 200 has a plurality of second through holes 202, which are arranged in multiple columns and rows along a first horizontal direction X1 and a second horizontal direction X2. When the support member 200 supports a plurality of cavities 100, the plurality of cavities 100 are arranged in multiple columns and rows along the first horizontal direction X1 and the second horizontal direction X2, and a plurality of third through holes 1004 correspond one-to-one with the plurality of second through holes 202.

[0042] Multiple second through holes 202 are provided on the support member 200 to cooperate with the third through holes 1004 of multiple cavities 100, so that excess passivation gas in each cavity 100 can be extracted in a timely manner through the corresponding gap 1003, the third through hole 1004 and the second through hole 202.

[0043] For example, the support member 200 has a first through hole 201 and a second through hole 202, the sheet carrier 10 includes a support member 300, and the bottom of the receiving cavity 1001 has a third through hole 1004 so that excess passivation gas in the cavity 100 can be extracted through the first through hole 201, and through the gap 1003, the third through hole 1004 and the second through hole 202, thereby further improving the extraction efficiency.

[0044] In some embodiments, such as Figure 2 and Figure 6 As shown, the cavity 100 includes a bottom plate 110, a top plate 120, and two side plates 130. The bottom plate 110 is connected to the support member 300 and has a third through hole 1004. The top plate 120 is vertically opposite to the bottom plate 110. The two side plates 130 are opposite to each other and are respectively connected to the bottom plate 110 and the top plate 120 to enclose and form a receiving cavity 1001 and an opening 1002.

[0045] The cavity 100 has a simple structure, is easy to manufacture, and has a low cost.

[0046] In some embodiments, such as Figure 2 As shown, the third through hole 1004 extends from one end of the base plate 110 near one side plate 130 to the other end of the base plate 110 near the other side plate 130, so as to maximize the size of the third through hole 1004 and further improve the air extraction efficiency.

[0047] In some embodiments, such as Figure 2 and Figure 5 As shown, there are multiple support members 300, which are symmetrically arranged on both sides of the third through hole 1004 in the first horizontal direction X1, thereby improving the stability of the support members 300 in supporting the sheet material 2.

[0048] For example, the support member 300 is a columnar structure. While ensuring that the support member 300 stably supports the sheet material 2, the contact area between the support member 300 and the sheet material 2 is minimized as much as possible to reduce the contamination of the sheet material 2.

[0049] For example, the support member 300 is in line contact or point contact with the sheet material 2, which further reduces the contact area between the support member 300 and the sheet material 2, and further reduces the contamination caused to the sheet material 2.

[0050] In some embodiments, such as Figure 5 and Figure 6As shown, the sheet carrier 10 also includes a first pad 400, which is separately disposed from the cavity 100 and can be placed in the receiving cavity 1001 to support the sheet material 2. When the first pad 400 and the sheet material 2 are located in the receiving cavity 1001, the lower surface of the first pad 400 contacts the support member 300, and the lower surface of the bottommost sheet material 2 contacts the upper surface of the first pad 400.

[0051] The first pad 400 supports the sheet material 2, preventing the bottom sheet material 2 from directly contacting the support 300 and causing contamination, thus further improving the coating quality.

[0052] For example, a gap 1003 is formed between the lower surface of the first pad 400 and the bottom of the receiving cavity 1001.

[0053] For example, the horizontal cross-sectional shape of the first pad 400 can be rectangular, circular, or other polygonal or irregular shapes.

[0054] In some embodiments, such as Figure 5 and Figure 6 As shown, the sheet carrier 10 also includes a second pad 500, which is separately disposed from the cavity 100 and can be placed in the receiving cavity 1001. When the second pad 500 and the sheet material 2 are located in the receiving cavity 1001, the lower surface of the second pad 500 is in contact with the upper surface of the uppermost sheet material 2.

[0055] By using the second pad 500 to cover the upper surface of the top sheet material 2, the upper surface of the top sheet material 2 is prevented from being exposed, further reducing the non-section wrapping phenomenon of the sheet material 2 and further improving the coating quality.

[0056] For example, the horizontal cross-sectional shape of the second pad 500 can be rectangular, circular, or other polygonal or irregular shapes.

[0057] In some embodiments, such as Figure 6 As shown, the top surface of the cavity 100 has a threaded portion 1005, and the sheet carrier 10 also includes a clamping member 600. The clamping member 600 is threadedly connected to the threaded portion 1005 and is configured to press down on multiple stacked sheet materials 2.

[0058] By using the clamping member 600 to press down multiple stacked sheet materials 2, the gap between adjacent sheet materials 2 is reduced, further reducing the non-section coating phenomenon of sheet materials 2 and further improving the coating quality.

[0059] For example, the clamping member 600 may be a screw, a spring post, etc. For example, the clamping member 600 of this application is a spring post, which can elastically abut against the sheet material 2, thereby preventing the clamping force of the clamping member 600 on the sheet material 2 from being too large and causing damage to the sheet material 2.

[0060] For example, when the second pad 500 covers the upper surface of the top sheet material 2, the clamping member 600 abuts against the upper surface of the second pad 500. By pressing the second pad 500 down with the clamping member 600, the multiple stacked sheet materials 2 are pressed downward, avoiding direct contact between the clamping member 600 and the top sheet material 2, which could lead to contamination or damage to the sheet material 2.

[0061] For example, there are multiple clamping members 600, and the multiple clamping members 600 abut against both sides of the second pad 500, which improves the stability of the clamping members 600 in clamping the sheet material 2.

[0062] In some embodiments, such as Figure 2 and Figure 7 As shown, the bottom of the cavity 100 has a positioning hole 1006, and the sheet carrier 10 also includes a positioning member 700, which is disposed on the support member 200. During the process of placing the cavity 100 on the support member 200, the positioning member 700 can be inserted into the positioning hole 1006 to position the cavity 100 so that the cavity 100 can be accurately placed at the corresponding position on the support member 200.

[0063] For example, the base plate 110 of the cavity 100 has a plurality of positioning holes 1006, and the support member 200 is provided with a plurality of positioning members 700, each of which corresponds one-to-one with a plurality of positioning holes 1006. During the process of placing the cavity 100 on the support member 200, the plurality of positioning members 700 are respectively inserted into their respective positioning holes 1006, further improving the accuracy of positioning the cavity 100.

[0064] For example, the positioning hole 1006 can be a through hole or a blind hole. For example, the positioning element 700 can be a positioning pin, positioning post, etc.

[0065] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0066] The terms "an embodiment" or "embodiment" used in this specification indicate that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments, whether explicitly described or not, is within the knowledge scope of those skilled in the art.

[0067] It should be understood that “on,” “above,” and “on top of” in this disclosure should be interpreted in the broadest manner, such that “on” means not only “directly on something” but also “on something” with an intermediate feature or layer therebetween, and that “above” or “on top of” means not only “on top of something” but also “on top of something” without an intermediate feature or layer therebetween (i.e., directly on something).

[0068] Furthermore, for ease of explanation, spatial relative terms such as "below," "below," "under," "above," and "above" may be used to describe the relationship of a component or feature relative to other components or features as shown in the figures. Spatial relative terms are intended to encompass different orientations of components in use or operation other than those shown in the figures. Devices may have other orientations (rotated 90 degrees or in other orientations), and the spatial relative descriptive terms used herein may be interpreted accordingly.

[0069] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0070] The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Any modifications or equivalent substitutions made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A sheet carrier, characterized in that, A passivation process applied to sheet materials, wherein the sheet material has a first cross-section and a second cross-section parallel to the thickness direction of the sheet material and disposed opposite to each other; wherein the sheet carrier includes: The cavity has a receiving cavity and two openings arranged opposite each other along a first horizontal direction, wherein the openings communicate with the receiving cavity and are configured to allow the sheet material to enter and exit the receiving cavity, and the receiving cavity is configured to accommodate multiple sheets of the sheet material stacked in a vertical direction; The two openings are used to expose the first and second cross-sections when the receiving cavity contains multiple stacked sheet materials, so that the passivating gas can contact the first and second cross-sections.

2. The sheet carrier according to claim 1, characterized in that, Also includes: A support member is configured to support at least one of the cavities, the support member having at least two first through holes; Wherein, when the support member supports one of the cavities, the two first through holes are respectively located on both sides of the cavity in the first horizontal direction, and are respectively close to the two openings; In this configuration, excess passivation gas at each opening can be extracted from the cavity via the corresponding first through-hole.

3. The sheet carrier according to claim 2, characterized in that, The support member has a plurality of first through holes, which are arranged in multiple columns and rows along the first horizontal direction and the second horizontal direction, wherein the second horizontal direction intersects with the first horizontal direction; Wherein, when the support member supports multiple cavities, the multiple cavities are arranged in multiple columns and rows along the first horizontal direction and the second horizontal direction; wherein, at least one first through hole is provided between two cavities in adjacent columns in each row, and at least one first through hole is provided on the side of the outermost cavity in each row away from the cavity in the adjacent column. The excess passivation gas between two cavities in each row can be extracted through the first through-hole between the two cavities in the adjacent column.

4. The sheet carrier according to claim 1, characterized in that, Also includes: A support member, disposed at the bottom of the receiving cavity, is configured to support the sheet material so that a gap is formed between the bottom of the receiving cavity and the sheet material; A support member is configured to support at least one of the cavities, the support member having at least one second through hole; The bottom of the receiving cavity has a third through hole, and when the support member supports the cavity, the third through hole is connected to the second through hole in the vertical direction; The excess passivating gas at the two openings of the cavity can flow through the gap to the third through hole and the second through hole, so that the excess passivating gas can be extracted from the cavity.

5. The sheet carrier according to claim 4, characterized in that, The support member has a plurality of second through holes, which are arranged in multiple columns and rows along the first horizontal direction and the second horizontal direction, wherein the second horizontal direction intersects with the first horizontal direction; In the case where the support member supports multiple cavities, the multiple cavities are arranged in multiple columns and rows along the first horizontal direction and the second horizontal direction, and the multiple third through holes correspond one-to-one with the multiple second through holes.

6. The sheet carrier according to claim 4, characterized in that, The cavity includes: The base plate is connected to the support member and has the third through hole; The top plate is vertically positioned opposite the bottom plate. Two side plates are arranged opposite each other and are respectively connected to the bottom plate and the top plate to enclose and form the receiving cavity and the opening.

7. The sheet carrier according to claim 6, characterized in that, The third through hole extends from one end of the base plate near one of the side plates to one end of the base plate near the other side plate; And / or, the number of the support members is multiple, and the multiple support members are symmetrically arranged on both sides of the third through hole in the first horizontal direction.

8. The sheet carrier according to claim 4, characterized in that, Also includes: A first pad, separate from the cavity, can be placed in the receiving cavity and is configured to support the sheet material; wherein, when the first pad and the sheet material are located in the receiving cavity, the lower surface of the first pad contacts the support member, and the lower surface of the bottommost sheet material contacts the upper surface of the first pad. And / or, The second pad is separately disposed from the cavity and can be placed in the receiving cavity; wherein, when the second pad and the sheet material are located in the receiving cavity, the lower surface of the second pad is in contact with the upper surface of the uppermost sheet material.

9. The sheet carrier according to any one of claims 1 to 8, characterized in that, The top surface of the cavity has a screw connection portion, and the sheet carrier further includes: A clamping member, threadedly connected to the screwed portion, is configured to press down on multiple stacked sheet materials.

10. The sheet carrier according to claim 2, characterized in that, The bottom of the cavity has a positioning hole; The sheet carrier further includes: A positioning element, disposed on the support element, can be inserted into the positioning hole in the vertical direction to position the cavity.

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