A detachable partition plate device for a quartz boat facilitating cleaning

Abstract

The utility model discloses a quartz boat detachable partition board device convenient to wash, including boat body, the inside intermittent of boat body is provided with fixed bracket, and the both ends of fixed bracket extend to the outside of boat body and are installed with adjusting bolt through U type frame, and the one end of adjusting bolt extends to the inside of U type frame and is connected with adjusting plate, and the both ends of adjusting plate are provided with positioning rod no.

Description

Technical Field

[0001] This utility model relates to the field of quartz boat partition technology, specifically a detachable quartz boat partition device that is easy to clean. Background Technology

[0002] Quartz boats, as core tools in semiconductor, photovoltaic, and other fields for carrying precision workpieces such as wafers and silicon wafers, have their separator plate structure design directly affecting the cleanliness and stability of the workpiece manufacturing process. However, existing separator plate devices for quartz boats have many shortcomings:

[0003] Traditional quartz boats often have partitions that are integrally formed with the boat body or are connected by fixed welding or bolt fastening. The gaps between the partitions and the boat body are prone to leaving behind film deposition residues, chemical reagents and other contaminants. Due to structural limitations, cleaning tools cannot penetrate the gaps to clean them thoroughly, resulting in contaminant residues that seriously affect the product yield of subsequent high-temperature diffusion, film deposition and other processes.

[0004] Traditional devices lack flexible adjustment structures for partitions of different thicknesses or quartz boats of different specifications. They usually require custom-made quartz boats or partitions, which not only increases production costs but also increases inventory management pressure, resulting in a serious lack of versatility.

[0005] Traditional structures are either cumbersome to install or lack stability after being fixed. Under high temperature environments or equipment vibration, the partition plates are prone to displacement and shaking, causing the wafers, silicon wafers and other workpieces they support to shift, which damages the uniformity and precision of the process. Utility Model Content

[0006] The purpose of this invention is to provide a detachable partition plate device for a quartz boat that is easy to clean, so as to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a detachable partition plate device for easy cleaning of a quartz boat, comprising a boat body, wherein a fixed bracket is intermittently provided inside the boat body, both ends of the fixed bracket extend to the outside of the boat body and are fitted with adjusting bolts through a U-shaped frame, and one end of the adjusting bolt extends to the inside of the U-shaped frame and is connected to an adjusting plate, wherein positioning rod two and positioning rod one are respectively provided at the upper and lower ends of the adjusting plate;

[0008] The boat body on one side of the fixed bracket is equipped with a movable bracket. The movable bracket and the fixed bracket form an insertion groove. Both ends of the movable bracket extend to the outside of the boat body and are equipped with support blocks. Limit bolts are provided on the outside of the support blocks.

[0009] The insertion slot is provided with a partition plate inside, and a truss is provided on the top of the partition plate. Guide slots are provided at both ends of one side of the truss. Limiting hole 2 and limiting hole 1 are respectively provided at the upper and lower ends of the guide slot.

[0010] Preferably, the inner walls of both the fixed bracket and the movable bracket are uniformly covered with quartz fiber cushioning pads.

[0011] Preferably, the inner wall of the support block is provided with a sliding groove, the outer wall of the boat body on one side of the sliding groove is provided with a guide rail, and one end of the guide rail is provided with a stop block.

[0012] Preferably, both ends of the bottom of the truss are provided with slots, and the width of the slots matches the thickness of the sidewall of the hull.

[0013] Preferably, the movable bracket has guide grooves at both ends facing the fixed bracket, and the truss has guide blocks at both ends that match the guide grooves.

[0014] Preferably, the inner wall of the guide groove is provided with a wear-resistant pad, and the diameter of the second limiting hole is larger than the diameter of the first limiting hole, the diameter of the second positioning rod is larger than the diameter of the first positioning rod, and the top ends of both the second positioning rod and the first positioning rod are provided with ball bearings.

[0015] Preferably, a return spring is provided between the second positioning rod and the first positioning rod and the support block, and the fixed bracket is provided with holes for the second positioning rod and the first positioning rod to pass through.

[0016] This invention provides a detachable partition plate device for a quartz boat that is easy to clean, and compared with the prior art, it has the following significant advantages:

[0017] 1. This device, by setting up an insertion groove formed by a movable bracket and a fixed bracket, allows the partition plate to be quickly disassembled and installed. Under the action of the guide groove and guide block, the movable bracket can move flexibly inside the boat body, thereby conveniently adjusting the width of the insertion groove to adapt to partition plates of different thicknesses. This simplifies the disassembly and installation steps of the partition plate during the cleaning process and significantly improves the cleaning efficiency.

[0018] 2. The truss at both ends of the top of the partition plate is equipped with guide grooves, and the interior is equipped with limit hole 2 and limit hole 1, which cooperate with the corresponding positioning rod 2 and positioning rod 1 on the adjustment plate inside the U-shaped frame. When the partition plate is fully inserted, the positioning rod and the limit hole are precisely engaged to firmly fix the position of the partition plate, preventing the partition plate from shifting in high temperature or vibration environment and ensuring the stability of the partition plate.

[0019] 3. The guide groove design not only facilitates the insertion of the partition plate, but also reduces friction through the ball bearing design at the top of positioning rod two and positioning rod one, making the insertion and removal of the partition plate smoother. Attached Figure Description

[0020] Figure 1 This is a top view of the overall structure of this utility model;

[0021] Figure 2 This is a side view of the movable bracket structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the partition plate structure of this utility model;

[0023] Figure 4 This is a schematic diagram of the positioning rod structure of this utility model;

[0024] Figure 5 For the present utility model Figure 1 Enlarged structural diagram at point A in the middle;

[0025] In the diagram: 1. Hull; 2. Divider plate; 3. Fixed bracket; 4. Movable bracket; 5. Quartz fiber buffer pad; 6. Guide rail; 7. Limiting bolt; 8. Support block; 9. Slide groove; 10. Insertion groove; 11. Groove; 12. Wear-resistant pad; 13. Guide groove; 14. Truss; 15. Guide block; 16. Limiting hole two; 17. Limiting hole one; 18. Adjusting plate; 19. Adjusting bolt; 20. U-shaped frame; 21. Return spring; 22. Positioning rod two; 23. Positioning rod one; 24. Hole; 25. Ball bearing; 26. Guide groove. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0027] Please see Figure 1-5 One embodiment of this utility model is a detachable partition device for a quartz boat that is easy to clean. It includes a boat body 1, with fixed brackets 3 intermittently arranged inside the boat body 1. The two ends of the fixed brackets 3 extend to the outside of the boat body 1 and are equipped with adjusting bolts 19 through a U-shaped frame 20. One end of the adjusting bolts 19 extends to the inside of the U-shaped frame 20 and is connected to an adjusting plate 18. The upper and lower ends of the adjusting plate 18 are respectively provided with positioning rod 22 and positioning rod 23.

[0028] The boat body 1 on one side of the fixed bracket 3 is equipped with a movable bracket 4. The inner walls of both the fixed bracket 3 and the movable bracket 4 are evenly covered with quartz fiber cushioning pads 5.

[0029] The boat body 1 is rectangular in shape and made of high-purity quartz, which has good high-temperature resistance and corrosion resistance. Several fixed brackets 3 are intermittently arranged along the length of the boat body 1. These fixed brackets 3 are also made of quartz to ensure the overall high-temperature resistance of the device. The two ends of the fixed brackets 3 extend to the outer sides of the boat body 1 and are fitted with adjusting bolts 19 via U-shaped brackets 20.

[0030] One end of the adjusting bolt 19 extends to the inside of the U-shaped frame 20 and is connected to the adjusting plate 18. Positioning rod 22 and positioning rod 23 are respectively provided at the upper and lower ends of the adjusting plate 18. The function of positioning rod 22 and positioning rod 23 is to ensure that the adjusting plate 18 is fixed in position inside the boat hull 1, preventing displacement during use.

[0031] A movable bracket 4 is installed inside the boat body 1 on one side of the fixed bracket 3. The movable bracket 4 is also made of quartz. The inner walls of both the fixed bracket 3 and the movable bracket 4 are evenly covered with quartz fiber cushioning pads 5. The main function of the quartz fiber cushioning pads 5 is to protect the partition plate 2.

[0032] A slot 10 is formed between the movable bracket 4 and the fixed bracket 3. Both ends of the movable bracket 4 extend to the outside of the boat body 1 and are provided with support blocks 8. The inner wall of the support block 8 is provided with a sliding groove 9. The outer wall of the boat body 1 on one side of the sliding groove 9 is provided with a guide rail 6. One end of the guide rail 6 is provided with a stop block. The outer side of the support block 8 is provided with a limit bolt 7.

[0033] The movable bracket 4 can slide relative to the fixed bracket 3, thereby realizing the adjustment function of the insertion slot 10. Both ends of the movable bracket 4 extend to the outer side of the boat body 1, and a support block 8 is provided at each end.

[0034] Support block 8: Support block 8 is installed on the outer end of the movable bracket 4, and its inner wall is provided with a sliding groove 9. The support block 8 is preferably made of a wear-resistant and high-temperature resistant material.

[0035] Slide 9: Slide 9 is located on the inner wall of support block 8 and is used to cooperate with guide rail 6 to ensure the stability and guidance of movable bracket 4 during the sliding process.

[0036] Guide rail 6: Guide rail 6 is fixed to the outer wall of boat 1 and corresponds to slide groove 9. One end of guide rail 6 is provided with a stop to limit the maximum extension length of movable bracket 4.

[0037] Limiting bolt 7: The limiting bolt 7 is located on the outside of the support block 8 and is used to adjust and fix the position of the movable bracket 4. By tightening or loosening the limiting bolt 7, the telescopic length of the movable bracket 4 can be adjusted and it can be fixed in the required position.

[0038] The insertion slot 10 is provided with a partition plate 2 inside, and a truss 14 is provided on the top of the partition plate 2. Both ends of the bottom of the truss 14 are provided with slots 11, and the width of the slots 11 matches the thickness of the side wall of the boat hull 1.

[0039] The truss 14 has guide grooves 13 at both ends on one side, and the upper and lower ends of the guide grooves 13 are respectively provided with limit hole 2 16 and limit hole 17.

[0040] The movable bracket 4 has guide grooves 26 at both ends facing the fixed bracket 3, and the truss 14 has guide blocks 15 at both ends that match the guide grooves 26.

[0041] The insertion slot 10 is provided with a partition plate 2. The function of the partition plate 2 is to divide the interior of the insertion slot 10 into multiple independent spaces to facilitate the installation and fixation of different components.

[0042] A truss 14 is installed at the top of the partition plate 2. The main function of the truss 14 is to provide structural support and connection. Both ends of the bottom of the truss 14 are provided with slots 11, the width of which matches the thickness of the side wall of the boat hull 1. The purpose of this design is to ensure that the boat hull 1 can be smoothly inserted into the slots 11, and to keep the boat hull 1 stable in the insertion slot 10 through the limiting effect of the slots 11.

[0043] Guide grooves 13 are provided at both ends of one side of the truss 14. The function of the guide grooves 13 is to guide the boat body 1 to maintain the correct orientation during insertion. Limiting holes 16 and 17 are respectively provided at the upper and lower ends of the guide grooves 13. The function of limiting holes 16 and 17 is to ensure that the insertion depth and position of the boat body 1 are accurate during insertion by positioning the boat body 1.

[0044] Both ends of the movable bracket 4 facing the fixed bracket 3 are provided with guide grooves 26. The function of the guide grooves 26 is to guide the movable bracket 4 to maintain the correct trajectory during movement. The design of the movable bracket 4 allows it to slide along the guide grooves 26 with the support of the fixed bracket 3, thereby achieving precise installation and adjustment of the boat body 1.

[0045] Guide blocks 15, which match the guide grooves 26, are provided at both ends of one side of the truss 14. The function of the guide blocks 15 is to ensure that the movable bracket 4 can fit tightly with the truss 14 during the sliding process, so as to avoid deviation or jamming. The shape and size of the guide blocks 15 match the guide grooves 26 to ensure its stability and reliability during the sliding process.

[0046] The inner wall of the guide groove 13 is provided with a wear-resistant pad 12, and the diameter of the second limiting hole 16 is larger than the diameter of the first limiting hole 17. The diameter of the second positioning rod 22 is larger than the diameter of the first positioning rod 23, and the top of the second positioning rod 22 and the first positioning rod 23 are both provided with ball bearings 25.

[0047] A return spring 21 is provided between the positioning rod 22 and the positioning rod 23 and the support block 8, and a hole 24 is provided on the fixing bracket 3 for the positioning rod 22 and the positioning rod 23 to pass through.

[0048] The guide groove 13 is located inside the fixed bracket 3, and a wear-resistant pad 12 is fixed on its inner wall. The wear-resistant pad 12 is made of highly wear-resistant material, which can effectively reduce the wear of the partition plate 2 during the movement and extend the service life of the device.

[0049] Limiting holes 17 and 16 are respectively located at both ends of the guide groove 13 to limit the movement range of the partition plate 22. The diameter of limiting hole 16 is larger than that of limiting hole 17. Specifically, limiting hole 17 first contacts positioning rod 22. Because positioning rod 22 and limiting hole 16 are matched, the diameter of positioning rod 22 is larger than that of limiting hole 17. This allows limiting hole 17 of partition plate 2 to move downwards past positioning rod 22 until limiting hole 16 aligns with positioning rod 22, and then limiting hole 17 aligns with positioning rod 23.

[0050] Positioning rod 1 23 and positioning rod 22 are the core components of the device, used to achieve the positioning function. Both positioning rod 1 23 and positioning rod 22 have ball bearings 25 at their tips. These ball bearings 25 reduce friction between the positioning rod and the inner wall of the guide groove, making the movement of the positioning rod smoother.

[0051] The reset spring 21 is set between the positioning rod 1 23 and the positioning rod 22 and the support block 8. During the downward insertion process, the partition plate 2 squeezes the positioning rod 1 23 and the positioning rod 22, and the limiting hole 2 16 connects with the positioning rod 22. After the limiting hole 1 17 connects with the positioning rod 1 23, it drives the positioning rod 1 23 and the positioning rod 22 to be inserted into the interior of the limiting hole 1 17 and the limiting hole 2 16.

[0052] In this embodiment of the application, the width of the insertion slot 10 is adjusted according to the thickness of the partition plate 2 to be installed: First, loosen the limiting bolts 7 on the outer side of the support blocks 8 at both ends of the movable bracket 4 counterclockwise to release the movable bracket 4 from fixation; push the support blocks 8 to allow the movable bracket 4 to slide along the guide rail 6 on the outer wall of the boat body 1 through the sliding groove 9 on the inner wall until the width of the insertion slot 10 between the fixed bracket 3 and the movable bracket 4 matches the thickness of the partition plate 2; after the width adjustment is completed, tighten the limiting bolts 7 clockwise to fix the position of the movable bracket 4.

[0053] Pick up the partition plate 2 to be installed and observe the structure of its top truss 14: align the guide blocks 15 at both ends of one side of the truss 14 with the guide groove 26 on the side of the movable bracket 4 facing the fixed bracket 3, and ensure that the two are in corresponding positions to provide guidance for the insertion of the partition plate 2.

[0054] Slowly insert the partition plate 2 vertically into the insertion groove 10 formed by the fixed bracket 3 and the movable bracket 4: During the insertion process, the guide grooves 13 at both ends of the other side of the truss 14 will contact the positioning rod 1 23 and positioning rod 22 at the extension end of the fixed bracket 3. With the help of the ball bearing 25 at the top of the positioning rod, friction is reduced, allowing the guide groove 13 to slide smoothly along the positioning rod. As the partition plate 2 continues to be inserted, the inner wall of the guide groove 13 will squeeze the positioning rod 1 23 and positioning rod 22, pushing them to move away from the guide groove 13. At this time, the return spring 21 between the positioning rod 1 23, positioning rod 22 and the support block 8 is compressed.

[0055] Continue inserting the partition plate 2 downwards until the slots 11 at both ends of the bottom of the truss 14 are in contact with the side wall of the boat 1. At this time, the limiting hole 17 inside the guide slot 13 is aligned with the positioning rod 23, and the limiting hole 16 is aligned with the positioning rod 22. The compressed return spring 21 releases its elastic force, pushing the positioning rod 23 into the limiting hole 17 and the positioning rod 22 into the limiting hole 26, thus completing the fixing of the partition plate 2. Gently push the partition plate 2 to confirm that there is no displacement, and it is installed in place.

[0056] After the process is completed, take out the boat body 1, first loosen the adjusting bolts 19 on the U-shaped frame 20 at both ends of the fixed bracket 3 counterclockwise. The adjusting bolts 19 drive the adjusting plate 18 on the inner side of the U-shaped frame 20 to move away from the partition plate 2, thereby pulling the positioning rod 1 23 and positioning rod 22 at both ends of the adjusting plate 18 to disengage from the limiting hole 17 and limiting hole 2 16 in the guide groove 13, and release the positioning of the partition plate 2.

[0057] Pull the truss 14 at the top of the partition plate 2 upwards so that the guide block 15 of the truss 14 disengages along the guide groove 26 of the movable bracket 4, and completely remove the partition plate 2 from the insertion groove 10 for cleaning.

[0058] Obviously, the embodiments described above are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0059] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0060] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.

[0061] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A detachable partition device for an easy-to-clean quartz boat, comprising a boat body (1), characterized in that: The interior of the boat body (1) is intermittently provided with fixed brackets (3). The two ends of the fixed brackets (3) extend to the outside of the boat body (1) and are equipped with adjusting bolts (19) through U-shaped frames (20). One end of the adjusting bolts (19) extends to the inside of the U-shaped frames (20) and is connected to an adjusting plate (18). The upper and lower ends of the adjusting plate (18) are respectively provided with positioning rod two (22) and positioning rod one (23). Movable brackets (4) are provided inside the boat body (1) on one side of the fixed bracket (3). An insertion groove (10) is formed between the movable bracket (4) and the fixed bracket (3). Both ends of the movable bracket (4) extend to the outside of the boat body (1) and are provided with support blocks (8). Limit bolts (7) are provided on the outside of the support blocks (8). The insertion slot (10) is provided with a partition plate (2) inside. A truss (14) is provided on the top of the partition plate (2). A guide slot (13) is provided at both ends of one side of the truss (14). A limit hole two (16) and a limit hole one (17) are respectively provided at the upper and lower ends of the guide slot (13).

2. The detachable partition plate device for an easy-to-clean quartz boat according to claim 1, characterized in that: The inner walls of both the fixed bracket (3) and the movable bracket (4) are uniformly covered with quartz fiber cushioning pads (5).

3. The detachable partition plate device for an easy-to-clean quartz boat according to claim 1, characterized in that: The inner wall of the support block (8) is provided with a groove (9), and the outer wall of the boat body (1) on one side of the groove (9) is provided with a guide rail (6), and one end of the guide rail (6) is provided with a stop block.

4. The detachable partition plate device for an easy-to-clean quartz boat according to claim 1, characterized in that: The bottom of the truss (14) is provided with slots (11) at both ends, and the width of the slots (11) matches the thickness of the side wall of the hull (1).

5. The detachable partition plate device for an easy-to-clean quartz boat according to claim 1, characterized in that: The movable bracket (4) is provided with guide grooves (26) at both ends facing the fixed bracket (3), and the truss (14) is provided with guide blocks (15) at both ends matching the guide grooves (26).

6. The detachable partition plate device for an easy-to-clean quartz boat according to claim 1, characterized in that: The inner wall of the guide groove (13) is provided with a wear-resistant pad (12), and the diameter of the second limiting hole (16) is larger than the diameter of the first limiting hole (17). The diameter of the second positioning rod (22) is larger than the diameter of the first positioning rod (23), and the top ends of the second positioning rod (22) and the first positioning rod (23) are both provided with ball bearings (25).

7. The detachable partition plate device for an easy-to-clean quartz boat according to claim 1, characterized in that: A return spring (21) is provided between the second positioning rod (22) and the first positioning rod (23) and the support block (8), and a hole (24) is provided on the fixed bracket (3) for the second positioning rod (22) and the first positioning rod (23) to pass through.

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