Silicon wafer basket lifting and rotating device

Abstract

The application discloses a silicon wafer flower basket lifting and rotating device, which comprises a base, a rotating driving mechanism, a lifting driving mechanism, a rotating platform, a clamping and correcting mechanism and a position sensor. The rotating driving mechanism is arranged on the base, the driving end of the rotating driving mechanism is connected with the base, the lifting driving mechanism is arranged on the base, the rotating platform is arranged on the lifting driving mechanism, the driving end of the lifting driving mechanism is connected with the rotating platform, the rotating platform is provided with a positioning pin matched with the positioning hole of the silicon wafer flower basket, the clamping and correcting mechanism comprises first and second installation plates arranged oppositely on the two sides of the base, the first installation plate is provided with a first clamping driving assembly, the first clamping driving assembly is provided with a first clamping plate, the second installation plate is provided with a second clamping driving assembly, and the second clamping driving assembly is provided with a second clamping plate. The position sensor is arranged on the rotating platform. Compared with the prior art, the position adjustment efficiency of the silicon wafer flower basket is improved.

Description

Technical Field

[0001] This application relates to the field of photovoltaic module technology, and more specifically, to a silicon wafer basket lifting and rotating device. Background Technology

[0002] Currently, the manufacturing process of solar cells can generally be divided into cleaning, PEVCD, PVD, and screen printing. Among them, the cassette furnace (cassette drying furnace) plays an important role in the production and manufacturing of solar cells. It is mainly used for the heat treatment process in the manufacturing of solar cells, such as drying the cells after the cleaning process, drying the cells after the screen printing process, etc. Since the silicon wafer baskets after the cassette furnace process usually need to be transferred and lifted to meet the material transfer requirements between different processes.

[0003] To solve the technical problem of silicon wafer basket transfer in various production processes, a silicon wafer basket rotation device consisting of a base and a rotating mechanism is generally used to adjust the position of the silicon wafer basket to meet the material transfer requirements between different processes. However, when the above device docks with the silicon wafer basket, the rotating mechanism needs to be continuously rotated to adjust the position of the base. Only after the position of the base is aligned with the position of the silicon wafer basket can the docking of the base and the silicon wafer basket be completed, so that the silicon wafer basket rotation device can adjust the position of the silicon wafer basket. Therefore, the above device has the disadvantage of cumbersome silicon wafer basket position adjustment because the base and the silicon wafer basket cannot be docked quickly and accurately. Utility Model Content

[0004] This application provides a silicon wafer basket lifting and rotating device, which can improve the efficiency of silicon wafer basket position adjustment.

[0005] In a first aspect, embodiments of this application provide a silicon wafer basket lifting and rotating device, including a base, a rotation drive mechanism, a lifting drive mechanism, a rotating platform, a clamping and correction mechanism, and a position sensor. A rotary drive mechanism is mounted on a base, with its drive end connected to the base to drive the base to rotate. A lifting drive mechanism is mounted on the base, and a rotating platform is mounted on the lifting drive mechanism. The drive end of the lifting drive mechanism is connected to the rotating platform to drive the rotating platform to move linearly along a first direction. A positioning pin is provided on the rotating platform to engage with the positioning holes of the silicon wafer basket. A clamping and correction mechanism includes a first mounting plate and a second mounting plate disposed opposite to each other on both sides of the base along a second direction. A first clamping drive assembly is provided on the first mounting plate, and a first clamping plate is provided on the first clamping drive assembly. A second clamping drive assembly is provided on the second mounting plate, and a second clamping plate is provided on the second clamping drive assembly. The drive end of the first clamping drive assembly is connected to the first clamping plate to drive the first clamping plate to move linearly along a second direction, and the drive end of the second clamping drive assembly is connected to the second clamping plate to drive the second clamping plate to move linearly along a second direction. A position sensor is mounted on the rotating platform to detect the position of the silicon wafer basket. The first and second directions are perpendicular to each other.

[0006] In the above technical solution, firstly, the cooperation between the clamping and correction mechanism and the position sensor enables the lifting drive mechanism to quickly and accurately insert the positioning pin on the rotating platform into the positioning hole of the silicon wafer basket. Secondly, since the rotating platform can quickly dock with the silicon wafer basket, the rotating drive mechanism can quickly adjust the position of the silicon wafer basket, thereby improving the efficiency of silicon wafer basket position adjustment.

[0007] In some embodiments, a guiding mechanism is further included, which includes a guide rod and a guide sleeve. The guide rod is disposed on a base, and the guide sleeve is disposed on a rotating platform. The guide sleeve is fitted onto the guide rod and slides in cooperation with the guide rod.

[0008] In the above technical solution, by setting a guiding mechanism including a guide rod and a guide sleeve, and setting the guide rod on the base and the guide sleeve on the rotating platform, the guide sleeve and the guide rod slide together, which can limit the path of the rotating platform to move linearly in the first direction, making the movement of the rotating platform more stable.

[0009] In some embodiments, there are three guide sleeves arranged circumferentially along the rotating platform, and three guide rods arranged circumferentially along the base. The three guide sleeves are respectively fitted onto the three guide rods, and the three guide sleeves are slidably engaged with the three guide rods respectively.

[0010] In the above technical solution, by setting three guide sleeves along the circumference of the rotating platform and three guide rods along the circumference of the base, the cooperation of the three guide rods and the three guide sleeves can make the three guide rods provide three-point support for the rotating platform. The three-point support can further make the movement of the rotating platform more stable.

[0011] In some embodiments, a limit block is provided on the guide rod.

[0012] In the above technical solution, by setting a limiting block on the guide rod, the limiting block can limit the sliding stroke of the guide sleeve on the guide rod, thereby limiting the stroke of the rotating platform moving linearly in the first direction through the cooperation of the limiting block and the guide sleeve.

[0013] In some embodiments, the lifting drive mechanism includes a first motor, a first lead screw, and a first lead screw nut. The first motor is mounted on a base, and the drive end of the first motor is connected to the first lead screw. The first lead screw nut is mounted on a rotating platform and is sleeved on the first lead screw and threadedly engaged with the first lead screw.

[0014] In the above technical solution, by setting the lifting drive mechanism including a first motor, a first lead screw and a first lead screw nut, when the first motor drives the first lead screw to rotate, since the first lead screw and the first lead screw nut are threadedly engaged, the first lead screw nut can move relative to the first lead screw along a first direction, thereby driving the rotating platform to move linearly along the first direction through the first lead screw nut.

[0015] In some embodiments, the rotary drive mechanism includes a first cylinder, a first gear, and a first rack. The drive end of the first cylinder is connected to the first rack, the first gear is disposed on the base, and the first rack meshes with the first gear.

[0016] In the above technical solution, by setting a rotary drive mechanism including a first cylinder, a first gear and a first rack, when the first cylinder drives the first rack to move, since the first rack and the first gear mesh with each other, the movement of the first rack can drive the first gear to rotate, thereby driving the base to rotate through the first rack.

[0017] In some embodiments, the rotary drive mechanism includes a second motor, the drive end of which is connected to the base.

[0018] In the above technical solution, by setting a rotary drive mechanism including a second motor, when the second motor rotates, it can drive the base to rotate.

[0019] In some embodiments, a protective sleeve is provided on the side of the first clamping plate facing the second clamping plate, and a protective sleeve is provided on the side of the second clamping plate facing the first clamping plate.

[0020] In the above technical solution, by setting a protective sleeve, the first clamping plate and the second clamping plate will not directly contact the silicon wafer basket, so that the clamping force applied by the first clamping plate and the second clamping plate will not directly act on the silicon wafer basket, thereby reducing the probability of damage to the silicon wafer basket.

[0021] In some embodiments, the protective sleeve is a silicone sleeve or a rubber sleeve.

[0022] In the above technical solution, since the materials of the silicone head and rubber sleeve are not very hard, the protective sleeve is made of silicone or rubber, which can further reduce the probability of damage to the silicon wafer basket. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of the silicon wafer basket lifting and rotating device provided in some embodiments of this application;

[0025] Figure 2 A schematic diagram of the structure of a silicon wafer basket lifting and rotating device provided in some embodiments of this application (showing the guide mechanism);

[0026] Figure 3 A schematic diagram of the structure of a silicon wafer basket lifting and rotating device provided for other embodiments of this application (showing the guide mechanism).

[0027] icon:

[0028] 10- Rotary drive mechanism;

[0029] 20 - Base;

[0030] 30 - Lifting drive mechanism, 31 - First motor, 32 - First lead screw, 33 - First lead screw nut;

[0031] 40 - Rotary platform; 41 - Locating pin;

[0032] 50-Clamping and correction mechanism, 51-First mounting plate, 52-First clamping drive assembly, 53-First clamping plate, 54-Second mounting plate, 55-Second clamping drive assembly, 56-Second clamping plate;

[0033] 60 - Position sensor;

[0034] 70-Guide mechanism, 71-Guide rod, 72-Guide sleeve, 73-Limit block;

[0035] X - First direction; Y - Second direction. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0037] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used in the description of this application is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms "comprising" and "having," and any variations thereof, in the description, claims, and accompanying drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the description, claims, or accompanying drawings of this application are used to distinguish different objects, not to describe a specific order or hierarchy.

[0038] In this application, the reference to "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments.

[0039] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "attachment" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0040] In this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, in this application, the character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0041] In the embodiments of this application, the same reference numerals denote the same components, and for the sake of brevity, detailed descriptions of the same components are omitted in different embodiments. It should be understood that the thickness, length, width, and other dimensions of various components in the embodiments of this application shown in the accompanying drawings, as well as the overall thickness, length, width, and other dimensions of the integrated device, are merely illustrative and should not constitute any limitation on this application.

[0042] Currently, the manufacturing process of solar cells can generally be divided into cleaning, PEVCD, PVD, and screen printing. Among them, the cassette furnace (cassette drying furnace) plays an important role in the production and manufacturing of solar cells. It is mainly used for the heat treatment process in the manufacturing of solar cells, such as drying the cells after the cleaning process, drying the cells after the screen printing process, etc. Since the silicon wafer baskets after the cassette furnace process usually need to be transferred and lifted to meet the material transfer requirements between different processes.

[0043] To solve the technical problem of silicon wafer basket transfer in various production processes, a silicon wafer basket rotation device consisting of a base and a rotating mechanism is generally used to adjust the position of the silicon wafer basket to meet the material transfer requirements between different processes. However, when the above device docks with the silicon wafer basket, the rotating mechanism needs to be continuously rotated to adjust the position of the base. Only after the position of the base is aligned with the position of the silicon wafer basket can the docking of the base and the silicon wafer basket be completed, so that the silicon wafer basket rotation device can adjust the position of the silicon wafer basket. Therefore, the above device has the disadvantage of cumbersome silicon wafer basket position adjustment because the base and the silicon wafer basket cannot be docked quickly and accurately.

[0044] Based on the above considerations, in order to solve the technical problem of complicated silicon wafer basket position adjustment due to the inability of the base and silicon wafer basket to quickly and accurately align, this application provides a silicon wafer basket lifting and rotating device, including a base, a rotating drive mechanism, a lifting drive mechanism, a rotating platform, a clamping and correction mechanism, and a position sensor. The rotary drive mechanism is mounted on the base, and its drive end is connected to the base to drive the base to rotate. The lifting drive mechanism is mounted on the base, and the rotating platform is mounted on the lifting drive mechanism. The drive end of the lifting drive mechanism is connected to the rotating platform to drive the rotating platform to move linearly along a first direction. The rotating platform is provided with a positioning pin that engages with the positioning hole of the silicon wafer basket. The clamping and correction mechanism includes a first mounting plate and a second mounting plate disposed opposite to each other on both sides of the base along a second direction. The first mounting plate is provided with a first clamping drive assembly, and a first clamping plate is disposed on the first clamping drive assembly. The second mounting plate is provided with a second clamping drive assembly, and a second clamping plate is disposed on the second clamping drive assembly. The drive end of the first clamping drive assembly is connected to the first clamping plate to drive the first clamping plate to move linearly along a second direction. The drive end of the second clamping drive assembly is connected to the second clamping plate to drive the second clamping plate to move linearly along a second direction. The position sensor is mounted on the rotating platform and is used to detect the position of the silicon wafer basket. The first direction and the second direction are perpendicular to each other.

[0045] In this silicon wafer basket lifting and rotating device, when the silicon wafer basket is transported to the clamping and correction mechanism via a transmission line, the first clamping drive assembly drives the first clamping plate to move linearly along the second direction, and the second clamping drive assembly drives the second clamping plate to move linearly along the second direction. This allows the first and second clamping plates to move closer together, providing clamping force to the silicon wafer basket. This clamping force adjusts the position of the silicon wafer basket on the transmission line, ensuring that the silicon wafer basket is aligned, i.e., the positioning holes on the silicon wafer basket are aligned with the positioning pins on the rotating platform. Secondly, a position sensor detects the position of the silicon wafer basket. When the alignment is detected, the position sensor sends a sensing signal. The device signal can be used to control the lifting drive mechanism to drive the rotating platform to move linearly in the first direction. Since the positioning hole on the silicon wafer basket and the positioning pin on the rotating platform are aligned by the clamping and correction mechanism, the positioning pin can be quickly and accurately inserted into the positioning hole when the rotating platform moves linearly in the first direction. Finally, the base is driven to rotate by the rotating drive mechanism, thereby completing the adjustment of the silicon wafer basket position. In summary, firstly, the cooperation between the clamping and correction mechanism and the position sensor enables the lifting drive mechanism to quickly and accurately insert the positioning pin on the rotating platform into the positioning hole of the silicon wafer basket. Secondly, since the rotating platform can quickly dock with the silicon wafer basket, the rotating drive mechanism can quickly adjust the position of the silicon wafer basket, thereby improving the efficiency of silicon wafer basket position adjustment.

[0046] Please refer to Figure 1 , Figure 1This is a schematic diagram of the structure of a silicon wafer basket lifting and rotating device provided in some embodiments of this application. Embodiments of this application provide a silicon wafer basket lifting and rotating device, including a base 20, a rotation drive mechanism 10, a lifting drive mechanism 30, a rotating platform 40, a clamping and correction mechanism 50, and a position sensor 60. The rotation drive mechanism 10 is disposed on the base 20, and its drive end is connected to the base 20 to drive the base 20 to rotate. The lifting drive mechanism 30 is disposed on the base 20, and the rotating platform 40 is disposed on the lifting drive mechanism 30. The drive end of the lifting drive mechanism 30 is connected to the rotating platform 40 to drive the rotating platform 40 to move linearly along a first direction X. The rotating platform 40 is provided with a positioning pin 41 that positions and cooperates with the positioning hole of the silicon wafer basket. The clamping and correction mechanism 50 includes a first mounting plate 51 and a second mounting plate 54 disposed opposite each other on both sides of the base 20 along a second direction Y. The first mounting plate 51 is provided with a first clamping device. The first clamping drive assembly 52 is provided with a first clamping plate 53, and the second mounting plate 54 is provided with a second clamping drive assembly 55. The second clamping drive assembly 55 is provided with a second clamping plate 56. The drive end of the first clamping drive assembly 52 is connected to the first clamping plate 53 to drive the first clamping plate 53 to move linearly along the second direction Y. The drive end of the second clamping drive assembly 55 is connected to the second clamping plate 56 to drive the second clamping plate 56 to move linearly along the second direction Y. The position sensor 60 is provided on the rotating platform 40 and is used to detect the position of the silicon wafer basket. The first direction X and the second direction Y are perpendicular to each other.

[0047] The base 20 along the first direction X has an upper surface and a lower surface that are disposed opposite to each other. The rotation drive mechanism 10 can be disposed on the lower surface of the base 20, and the lifting drive mechanism 30 can be disposed on the upper surface of the base 20.

[0048] The position sensor 60 can be a through-beam sensor, for example, an infrared through-beam sensor or a laser through-beam sensor.

[0049] In an embodiment where the position sensor 60 is an infrared beam sensor, the infrared beam sensor includes an infrared transmitter and an infrared receiver. The position of the silicon wafer basket is detected by receiving the infrared beam emitted by the infrared transmitter through the infrared receiver. The detection of the position of the silicon wafer basket can be whether the position of the edge of the silicon wafer basket is aligned with the position of the edge of the rotating platform 40. The detection of the position of the silicon wafer basket can also be whether the position of the positioning hole on the silicon wafer basket is aligned with the position of the positioning pin 41 on the rotating platform 40.

[0050] In this embodiment, when the silicon wafer basket is transported to the clamping and correction mechanism 50 via the transmission line, the first clamping drive assembly 52 drives the first clamping plate 53 to move linearly along the second direction Y, and the second clamping drive assembly 55 drives the second clamping plate 56 to move linearly along the second direction Y. This allows the first clamping plate 53 and the second clamping plate 56 to move relatively close, thereby providing clamping force to the silicon wafer basket. This clamping force then adjusts the position of the silicon wafer basket on the transmission line, ensuring the basket is properly aligned, i.e., the positioning holes on the silicon wafer basket are aligned with the positioning pins 41 on the rotating platform 40. Secondly, the position of the silicon wafer basket can be detected by the position sensor 60. When the alignment is detected, the position sensor 60 sends a sensor signal. Finally, the position can be... By controlling the lifting drive mechanism 30 to drive the rotating platform 40 to move linearly along the first direction X, and by aligning the positioning hole on the silicon wafer basket with the positioning pin 41 on the rotating platform 40 through the clamping and correction mechanism 50, the positioning pin 41 can be quickly and accurately inserted into the positioning hole when the rotating platform 40 moves linearly along the first direction X. Finally, the base 20 is driven to rotate by the rotating drive mechanism 10, thereby completing the adjustment of the silicon wafer basket position. In summary, firstly, the cooperation between the clamping and correction mechanism 50 and the position sensor 60 enables the lifting drive mechanism 30 to quickly and accurately insert the positioning pin 41 on the rotating platform 40 into the positioning hole of the silicon wafer basket. Secondly, since the rotating platform 40 can quickly dock with the silicon wafer basket, the rotating drive mechanism 10 can quickly adjust the position of the silicon wafer basket, thereby improving the efficiency of silicon wafer basket position adjustment.

[0051] In some embodiments, please refer to Figure 2 , Figure 2 This is a schematic diagram of the structure of a silicon wafer basket lifting and rotating device provided in some embodiments of this application (showing the guide mechanism 70). It also includes a guide mechanism 70, which comprises a guide rod 71 and a guide sleeve 72. The guide rod 71 is disposed on the base 20, and the guide sleeve 72 is disposed on the rotating platform 40. The guide sleeve 72 is sleeved on the guide rod 71 and slides in cooperation with the guide rod 71.

[0052] The guide mechanism 70 may also include a slider and a slide rail.

[0053] In this embodiment, the guide mechanism 70 includes a guide rod 71 and a guide sleeve 72. The guide rod 71 is mounted on the base 20, and the guide sleeve 72 is mounted on the rotating platform 40. Since the guide sleeve 72 and the guide rod 71 are slidably engaged, the path of the rotating platform 40 moving in the first direction X can be limited by the slidable engagement, making the movement of the rotating platform 40 more stable.

[0054] In some embodiments, please refer to Figure 2 There are three guide sleeves 72, which are arranged circumferentially along the rotating platform 40. There are three guide rods 71, which are arranged circumferentially along the base 20. The three guide sleeves 72 are respectively sleeved on the three guide rods 71, and the three guide sleeves 72 are slidably engaged with the three guide rods 71.

[0055] In a projection plane perpendicular to the first direction X, the orthographic projection shape of the base 20 can be rectangular or circular, and the orthographic projection shape of the rotating platform 40 can be rectangular or circular.

[0056] In an embodiment where the orthographic projection shape of the base 20 is circular and the orthographic projection shape of the rotating platform 40 is also circular, the three guide sleeves 72 can be evenly arranged circumferentially along the circumference of the rotating platform 40, the three guide rods 71 ​​can be evenly arranged circumferentially along the circumference of the base 20, and the positions of the three guide rods correspond one-to-one with the positions of the three guide sleeves 72.

[0057] In this embodiment, by setting three guide sleeves 72 around the circumference of the rotating platform 40 and three guide rods 71 ​​around the circumference of the base 20, the cooperation of the three guide rods 71 ​​and the three guide sleeves 72 can make the three guide rods 71 ​​support the rotating platform 40 at three points. The three-point support can further make the movement of the rotating platform 40 more stable.

[0058] In some embodiments, please refer to Figure 3 , Figure 3 The diagram below shows the structure of a silicon wafer basket lifting and rotating device provided in some other embodiments of this application (showing the guide mechanism 70), wherein a limit block 73 is provided on the guide rod 71.

[0059] The position of the limit block 73 on the guide rod 71 can be adaptively adjusted according to the required motion stroke of the rotating platform 40.

[0060] In this embodiment, by setting a limiting block 73 on the guide rod 71, the limiting block 73 can limit the sliding stroke of the guide sleeve 72 on the guide rod 71, thereby limiting the stroke of the rotating platform 40 moving linearly in the first direction X through the cooperation of the limiting block 73 and the guide sleeve 72.

[0061] In some embodiments, please refer to Figure 1The lifting drive mechanism 30 includes a first motor 31, a first lead screw 32, and a first lead screw nut 33. The first motor 31 is mounted on the base 20, and the drive end of the first motor 31 is connected to the first lead screw 32. The first lead screw nut 33 is mounted on the rotating platform 40, and the first lead screw nut 33 is sleeved on the first lead screw 32 and threadedly engaged with the first lead screw 32.

[0062] In this embodiment, the lifting drive mechanism 30 includes a first motor 31, a first lead screw 32, and a first lead screw nut 33. When the first motor 31 drives the first lead screw 32 to rotate, the first lead screw 32 and the first lead screw nut 33 are threaded together, so the first lead screw nut 33 can move relative to the first lead screw 32 along the first direction X, thereby driving the rotating platform 40 to move linearly along the first direction X through the first lead screw nut 33.

[0063] In some embodiments, please refer to Figure 1 The rotary drive mechanism 10 includes a first cylinder, a first gear, and a first rack. The drive end of the first cylinder is connected to the first rack. The first gear is disposed on the base 20, and the first rack meshes with the first gear.

[0064] In this embodiment, the rotary drive mechanism 10 includes a first cylinder, a first gear, and a first rack. When the first cylinder drives the first rack to move, the first rack and the first gear mesh with each other, so the first rack can drive the first gear to rotate, thereby driving the base 20 to rotate through the first rack.

[0065] In some embodiments, please refer to Figure 1 The rotary drive mechanism 10 includes a second motor, the drive end of which is connected to the base 20.

[0066] In this embodiment, by setting the rotary drive mechanism 10 to include a second motor, when the second motor rotates, it can drive the base 20 to rotate.

[0067] In some embodiments, please refer to Figure 1 The first clamping plate 53 is provided with a protective sleeve on the side facing the second clamping plate 56, and the second clamping plate 56 is provided with a protective sleeve on the side facing the first clamping plate 53.

[0068] In this embodiment, by providing a protective sleeve, the first clamping plate 53 and the second clamping plate 56 will not directly contact the silicon wafer basket, thereby preventing the clamping force applied by the first clamping plate 53 and the second clamping plate 56 from directly acting on the silicon wafer basket, thus reducing the probability of damage to the silicon wafer basket.

[0069] In some embodiments, the protective sleeve is a silicone sleeve or a rubber sleeve.

[0070] In this embodiment, since the materials of the silicone head and the rubber sleeve are not very hard, the protective sleeve is made of silicone or rubber, which can further reduce the probability of damage to the silicon wafer basket.

[0071] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other.

[0072] The above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit this application. For those skilled in the art, this application can have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A silicon wafer flower basket lifting and rotating device, characterized in that, include: Base; A rotary drive mechanism is disposed on the base, and the drive end of the rotary drive mechanism is connected to the base to drive the base to rotate. A lifting drive mechanism is provided on the base. The lifting drive mechanism includes a first motor, a first lead screw, and a first lead screw nut. The first motor is provided on the base, and the drive end of the first motor is connected to the first lead screw. The first lead screw nut is provided on the rotating platform and is sleeved on the first lead screw and threadedly engaged with the first lead screw. A rotating platform is provided on the lifting drive mechanism. The driving end of the lifting drive mechanism is connected to the rotating platform to drive the rotating platform to move linearly in a first direction. The rotating platform is provided with a positioning pin that engages with the positioning hole of the silicon wafer basket. A clamping and correction mechanism includes a first mounting plate and a second mounting plate disposed opposite to each other on both sides of the base along a second direction. A first clamping drive assembly is disposed on the first mounting plate, and a first clamping plate is disposed on the first clamping drive assembly. A second clamping drive assembly is disposed on the second mounting plate, and a second clamping plate is disposed on the second clamping drive assembly. The drive end of the first clamping drive assembly is connected to the first clamping plate to drive the first clamping plate to move linearly along the second direction. The drive end of the second clamping drive assembly is connected to the second clamping plate to drive the second clamping plate to move linearly along the second direction. A position sensor is disposed on the rotating platform and is used to detect the position of the silicon wafer basket. The first direction and the second direction are perpendicular to each other.

2. The silicon wafer basket lifting and rotating device as described in claim 1, characterized in that, It also includes a guiding mechanism, which includes a guide rod and a guide sleeve. The guide rod is disposed on the base, and the guide sleeve is disposed on the rotating platform. The guide sleeve is sleeved on the guide rod and slides in cooperation with the guide rod.

3. The silicon wafer basket lifting and rotating device as described in claim 2, characterized in that, There are three guide sleeves, which are arranged circumferentially along the rotating platform. There are three guide rods, which are arranged circumferentially along the base. The three guide sleeves are respectively fitted onto the three guide rods, and the three guide sleeves are slidably engaged with the three guide rods.

4. The silicon wafer basket lifting and rotating device as described in claim 2 or 3, characterized in that, A limit block is provided on the guide rod.

5. The silicon wafer basket lifting and rotating device as described in claim 1, characterized in that, The rotary drive mechanism includes a first cylinder, a first gear, and a first rack. The drive end of the first cylinder is connected to the first rack. The first gear is mounted on the base, and the first rack meshes with the first gear.

6. The silicon wafer basket lifting and rotating device as described in claim 1, characterized in that, The rotary drive mechanism includes a second motor, the drive end of which is connected to the base.

7. The silicon wafer basket lifting and rotating device as described in claim 1, characterized in that, A protective sleeve is provided on the side of the first clamping plate facing the second clamping plate, and a protective sleeve is provided on the side of the second clamping plate facing the first clamping plate.

8. The silicon wafer basket lifting and rotating device as described in claim 7, characterized in that, The protective sleeve is a silicone sleeve.

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