A combined lifting and rotating mechanism for a rack

Abstract

The utility model relates to wafer production field, concretely is a kind of hanger lifting and rotating composite mechanism.It includes backplate, lifting mechanism, rotating mechanism and hanger;Lifting mechanism includes lifting seat and the lifting assembly of driving lifting seat lifting;Rotating mechanism includes the rotating drum of vertical distribution and the rotating assembly of driving rotating drum rotation, and rotating assembly is set on lifting seat;Hanger includes the adapter frame of setting in rotating drum bottom end and the hook claw of setting on adapter frame, multiple are set side by side in hook claw, and hook claw has the hook groove towards up.The utility model can improve production efficiency and security, reduce pollution, improve product yield.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing, and in particular to a hanging bracket lifting and rotating composite mechanism. Background Technology

[0002] In modern semiconductor wafer fabs, cleaning machines are crucial equipment used to remove contaminants from the wafer surface before and after multiple process steps. Wafers are placed on wafer basket racks, which are then manually moved and placed into different cleaning tanks of the cleaning machine for multiple cleaning processes.

[0003] In environments with extremely high cleanliness requirements, manual handling of wafer basket racks can easily contaminate or even damage the wafers. Furthermore, manual handling is inefficient and unsafe. Utility Model Content

[0004] The purpose of this invention is to address the problems existing in the background technology by proposing a hanging bracket lifting and rotating composite mechanism, which can improve production efficiency and safety, reduce pollution, and increase product yield.

[0005] The technical solution of this utility model is a hanging bracket lifting and rotating composite mechanism, including a back plate, a lifting mechanism, a rotating mechanism and a hanging bracket; the lifting mechanism includes a lifting seat and a lifting component for driving the lifting seat to lift; the rotating mechanism includes a vertically distributed rotating cylinder and a rotating component for driving the rotating cylinder to rotate, the rotating component being disposed on the lifting seat; the hanging bracket includes a transfer frame disposed at the bottom end of the rotating cylinder and hooks disposed on the transfer frame, multiple hooks being arranged side by side, the hooks having upward-facing hook grooves.

[0006] Preferably, an outer cover two is provided on the back plate, the outer cover two is a rectangular frame structure, and an outer cover one is provided around the back plate and the outer cover two.

[0007] Preferably, the outer cover has two transparent windows on the front side.

[0008] Preferably, the lifting assembly includes a lifting power source mounted on the back plate, a lead screw rotatably mounted on the back plate and driven by the lifting power source, a lead screw nut threadedly connected to the lead screw, a guide rail vertically mounted on the back plate, and a lifting slider vertically slidably mounted on the guide rail. The lifting seat is mounted on the lifting slider, and the lead screw nut is mounted on the lifting seat.

[0009] Preferably, a movable plate is provided on the side of the lifting seat, and two sets of photoelectric limit switches are arranged side by side along the vertical direction on the back plate.

[0010] Preferably, the back plate is provided with two sets of anti-collision blocks, which are located at the top and bottom of the guide rail, respectively.

[0011] Preferably, the rotating assembly includes a rotating power source mounted on the lifting seat, a bearing seat mounted on the lifting seat, and a connecting shaft mounted on the bearing seat via the bearing assembly. The connecting shaft is driven by the rotating power source, and the rotating drum is located at the bottom end of the connecting shaft.

[0012] Preferably, the bearing housing includes a first bearing housing and a second bearing housing arranged side by side on the lifting seat, and the bearing assembly includes a thrust ball bearing arranged on the first bearing housing and a deep groove ball bearing arranged on the second bearing housing.

[0013] Compared with existing technologies, this invention has the following beneficial technical effects: It can improve production efficiency and safety, reduce pollution, increase product yield, and enable automatic transfer of wafer basket racks. Switching the wafer basket rack from one cleaning tank to another in the cleaning machine saves labor and increases transfer efficiency. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model; Figure 2 This is a partial structural schematic diagram of an embodiment of the present utility model; Figure 3 for Figure 2 Enlarged view of the structure at point A in the middle.

[0015] Reference numerals in the attached diagram: 1. Outer cover one; 101. Transparent window; 2. Outer cover two; 3. Back plate; 4. Lifting power source; 5. Coupling one; 6. Lead screw; 7. Lead screw nut; 8. Lifting seat; 81. Moving plate; 82. Photoelectric limit switch; 9. Guide rail; 10. Anti-collision block; 11. Rotary power source; 12. Coupling two; 13. Connecting shaft; 14. Rotary drum; 15. Bearing seat one; 16. Bearing seat two; 17. Adapter frame; 18. Hook; 19. Wafer basket hanger. Detailed Implementation

[0016] Example 1: As Figures 1-3 As shown in the figure, the hanging bracket lifting and rotating composite mechanism proposed in this embodiment includes a back plate 3, a lifting mechanism, a rotating mechanism and a hanging bracket.

[0017] like Figure 1 and Figure 2 As shown, a second outer cover 2 is mounted on the back panel 3. The second outer cover 2 has a rectangular frame structure and is assembled from four aluminum plates (top, bottom, left, and right). An outer cover 1, made of PP (polypropylene), is located around the back panel 3 and the second outer cover 2. The second outer cover 2 provides support inside the first outer cover 1. The front of the first outer cover 1 has two transparent windows 101 made of transparent acrylic, allowing for easy observation of the internal lifting and rotating mechanisms.

[0018] The lifting mechanism includes a lifting seat 8 and a lifting assembly that drives the lifting seat 8 to rise and fall. The lifting mechanism is located inside the outer cover 2. The lifting assembly includes a lifting power source 4 mounted on the back plate 3, a lead screw 6 rotatably mounted on the back plate 3 and driven by the lifting power source 4, a lead screw nut 7 threadedly connected to the lead screw 6, a guide rail 9 vertically mounted on the back plate 3, and a lifting slider vertically slidably mounted on the guide rail 9. The lifting seat 8 is mounted on the lifting slider, and the lead screw nut 7 is mounted on the lifting seat 8. The lifting power source 4 includes a servo motor and a reducer. The servo motor is mounted on the reducer, which is mounted on the back plate 3. The two ends of the reducer are respectively connected to the output end of the servo motor and a coupling 5. The coupling 5 is connected to the lead screw 6. When the servo motor is running, it drives the lead screw 6 to rotate. The lead screw 6 drives the lead screw nut 7 to move, and the lead screw nut 7 drives the lifting seat 8 to rise and fall. The lifting slider, which is slidably mounted on the guide rail 9, guides the lifting seat 8 to accurately rise and fall in the vertical direction.

[0019] like Figure 2 and Figure 3 As shown, a movable plate 81 is provided on the side of the lifting seat 8, and two sets of photoelectric limit switches 82 are arranged side by side along the vertical direction on the back plate 3. When the lifting seat 8 moves up and down, it can drive the movable plate 81 on the side to move up and down. The photoelectric limit switches 82 can detect the position of the movable plate 81 to determine whether the lifting seat 8 has moved to the highest or lowest position. When it moves to the highest or lowest position, a feedback signal is sent, and the servo motor in the lifting power source 4 is de-energized.

[0020] like Figure 2 As shown, two sets of anti-collision blocks 10 are provided on the back plate 3, located at the top and bottom of the guide rail 9 respectively. When the photoelectric limit switch 82 fails, the lifting seat 8 will exceed the highest or lowest position, and the anti-collision blocks 10 can buffer the impact of the lifting slider.

[0021] The rotating mechanism includes a vertically distributed rotating cylinder 14 and a rotating assembly that drives the rotating cylinder 14 to rotate. The rotating assembly is mounted on a lifting base 8. The rotating assembly is located inside the outer cover 2, and the rotating cylinder 14 extends downward through the outer cover 2 and the outer cover 1. The rotating assembly includes a rotating power source 11 mounted on the lifting base 8, a bearing seat mounted on the lifting base 8, and a connecting shaft 13 rotatably mounted on the bearing seat via the bearing assembly. The connecting shaft 13 is driven by the rotating power source 11, and the rotating cylinder 14 is located at the bottom end of the connecting shaft 13. The rotating power source 11 includes a servo motor 2 and a reducer 2. The servo motor 2 is mounted on the reducer 2, which is mounted on the lifting base 8. Both ends of the reducer 2 are respectively connected to the servo motor 2 and a coupling 2 12. The coupling 2 12 is connected to the connecting shaft 13. When the servo motor 2 is running, it drives the connecting shaft 13 to rotate, thereby driving the rotating cylinder 14 to rotate.

[0022] The rack includes an adapter frame 17 located at the bottom of the rotating drum 14 and hooks 18 located on the adapter frame 17. The hooks 18 are eccentrically distributed relative to the rotating drum 14. Multiple hooks 18 are arranged side by side, and each hook 18 has an upward-facing hook groove for hooking onto a wafer basket rack 19, in which multiple wafers are vertically placed.

[0023] This embodiment improves production efficiency and safety, reduces pollution, increases product yield, and enables automatic transfer of the wafer basket rack 19. Under the action of the lifting mechanism, the rotating mechanism rises and falls, thereby driving the rack to rise and fall via the rotating drum 14. After the wafer, along with the wafer basket rack 19, is lowered into a cleaning tank of the cleaning machine for cleaning, it can be lifted by the lifting mechanism, and the rotating mechanism drives the rotating drum 14 to rotate, thus rotating the rack and adjusting the position of the hook 18. This allows the wafer basket rack 19 on the hook 18 to be switched to above another cleaning tank in the cleaning machine, and then lowered by the lifting mechanism to lower the wafer basket rack 19 into that cleaning tank for further cleaning of the wafer.

[0024] Example 2: This example proposes a combined lifting and rotating mechanism for a hanging bracket. Compared to Example 1, in this example, as follows... Figure 3 As shown, the bearing housing includes bearing housing 15 and bearing housing 16 arranged side-by-side on the lifting seat 8. The bearing assembly includes a thrust ball bearing mounted on bearing housing 15 and a deep groove ball bearing mounted on bearing housing 16. The two ends of the connecting shaft 13 are respectively installed within the thrust ball bearing and the deep groove ball bearing. The thrust ball bearing is used to bear axial loads, to withstand unidirectional axial forces, and to provide axial positioning. The deep groove ball bearing is used to bear radial loads and mainly serves as radial support and allows for axial free expansion and contraction.

[0025] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited thereto. Various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the spirit of the present invention.

Claims

1. A combined lifting and rotating mechanism for a hanging bracket, characterized in that, include: Back panel (3); The lifting mechanism includes a lifting seat (8) and a lifting component for driving the lifting seat (8) to lift. The rotating mechanism includes vertically distributed rotating cylinders (14) and a rotating assembly that drives the rotating cylinders (14) to rotate. The rotating assembly is mounted on the lifting seat (8). The hanger includes a transfer frame (17) at the bottom of the rotating drum (14) and hooks (18) on the transfer frame (17). Multiple hooks (18) are arranged side by side and each hook (18) has an upward-facing hook groove.

2. The hanging bracket lifting and rotating composite mechanism according to claim 1, characterized in that, The back panel (3) is provided with an outer cover (2), which is a rectangular frame structure. The back panel (3) and the outer cover (2) are provided with an outer cover (1).

3. The hanging bracket lifting and rotating composite mechanism according to claim 2, characterized in that, The outer cover (1) has two transparent windows (101) on the front side.

4. The hanging bracket lifting and rotating composite mechanism according to claim 1, characterized in that, The lifting assembly includes a lifting power source (4) mounted on the back plate (3), a lead screw (6) rotatably mounted on the back plate (3) and driven by the lifting power source (4), a lead screw nut (7) threadedly connected to the lead screw (6), a guide rail (9) vertically mounted on the back plate (3), and a lifting slider vertically slidably mounted on the guide rail (9). The lifting seat (8) is mounted on the lifting slider, and the lead screw nut (7) is mounted on the lifting seat (8).

5. The hanging bracket lifting and rotating composite mechanism according to claim 4, characterized in that, The lifting seat (8) has a movable plate (81) on its side, and two sets of photoelectric limit switches (82) are arranged side by side along the vertical direction on the back plate (3).

6. The hanging bracket lifting and rotating composite mechanism according to claim 5, characterized in that, Two sets of anti-collision blocks (10) are provided on the back plate (3), and the two sets of anti-collision blocks (10) are located at the top and bottom of the guide rail (9) respectively.

7. The hanging bracket lifting and rotating composite mechanism according to claim 1, characterized in that, The rotating assembly includes a rotating power source (11) mounted on the lifting seat (8), a bearing seat mounted on the lifting seat (8), and a connecting shaft (13) mounted on the bearing seat via the bearing assembly. The connecting shaft (13) is driven by the rotating power source (11), and the rotating drum (14) is located at the bottom end of the connecting shaft (13).

8. The hanging bracket lifting and rotating composite mechanism according to claim 7, characterized in that, The bearing housing includes a first bearing housing (15) and a second bearing housing (16) arranged side by side on the lifting seat (8). The bearing assembly includes a thrust ball bearing arranged on the first bearing housing (15) and a deep groove ball bearing arranged on the second bearing housing (16).

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