A wafer basket grabbing structure

Abstract

The utility model discloses a kind of piece basket grabbing structures, for grabbing piece basket, including a pair of clamps installed on manipulator and by the manipulator control opening and closing, each clamp includes fixed block, and the first grabbing rod of U-shaped structure arranged on the bottom surface of fixed block, further include a pair of U-shaped structure's second grabbing rod, two second grabbing rods are respectively installed on corresponding fixed block and located the outside of first grabbing rod, the second grabbing rod extends downward and exceeds first grabbing rod.The utility model is adapted to multiple size piece basket, without stopping machine to change clamp, different size piece basket can be grabbed respectively, so as to avoid production line interruption, improve production efficiency.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, specifically to a chip basket gripping structure. Background Technology

[0002] In the semiconductor manufacturing industry, wafer cleaning is a core process that directly affects chip quality and performance. The current mainstream cleaning process in the industry is as follows: first, the wafer is loaded into a wafer basket of the corresponding size, then a robotic arm picks up the wafer basket and transfers it to semiconductor cleaning equipment to complete the cleaning operation.

[0003] However, wafers of different sizes require different specifications of wafer baskets, and to ensure the stability of transmission when the robotic arm grasps the wafer baskets, the grippers used to hold the wafer baskets on the robotic arm strictly adhere to the principle of one specification corresponding to one model. For example, when grasping a wafer basket carrying 6-inch wafers, a dedicated model of gripper must be used; if a wafer basket carrying 8-inch wafers needs to be grasped subsequently, the equipment must be stopped and the gripper adapted to the 8-inch wafer basket must be replaced. This downtime for changing grippers not only interrupts the continuous production process, leading to a significant decline in overall production efficiency, but also requires professional personnel to handle the disassembly, installation, and debugging of the grippers, consuming a large amount of manpower and taking up additional time, increasing the company's labor and time costs. In addition, to meet the grasping needs of wafer baskets of different sizes, companies need to stock multiple specifications of grippers in advance. These grippers not only require dedicated storage space for storage, but also require dedicated resources for daily maintenance and management, further increasing the company's production cost burden. Utility Model Content

[0004] Based on this, and in response to the aforementioned technical problems, this utility model provides a basket grasping structure.

[0005] The objective of this utility model can be achieved through the following technical solutions:

[0006] A tray gripping structure for gripping trays includes a pair of grippers mounted on a robotic arm and controlled by the robotic arm to open and close. Each gripper includes a fixed block and a first gripping bar with a U-shaped structure disposed on the bottom surface of the fixed block. It also includes a pair of second gripping bars with U-shaped structures. The two second gripping bars are respectively mounted on corresponding fixed blocks and located outside the first gripping bars. The second gripping bars extend downward beyond the first gripping bars.

[0007] The above technical solution is compatible with multiple sizes of trays and can grip trays of different sizes without stopping the machine to change fixtures. The inner pair of first gripping rods can grip smaller trays, while the outer pair of longer second gripping rods can grip larger trays, thereby avoiding production line interruptions and improving production efficiency.

[0008] In a specific embodiment of this utility model: one of the fixed blocks is provided with a first detection mechanism for detecting whether the first gripping rod grips the basket, and the other fixed block is provided with a second detection mechanism for detecting whether the second gripping rod grips the basket.

[0009] In a specific embodiment of this utility model: the first detection mechanism includes a first photoelectric switch and a first sensing rod. The first sensing rod is hinged to the outer side of the corresponding fixed block, with its upper end in contact with the first photoelectric switch and its tail end extending downward to contact the outer side of the horizontal part of the corresponding first gripping rod.

[0010] In a specific embodiment of this utility model: the second detection mechanism includes a second photoelectric switch and a second sensing rod. The second sensing rod is hinged to the outer side of the corresponding fixed block, with its upper end in contact with the second photoelectric switch and its tail end extending downward to contact the outer side of the horizontal part of the corresponding second gripping rod.

[0011] In summary, this utility model is compatible with multi-size trays, eliminates the need to stop the machine to change clamps, and can grab trays of different sizes separately, thereby avoiding production line interruptions and improving production efficiency. Attached Figure Description

[0012] The present invention will be further described below with reference to the accompanying drawings.

[0013] Figure 1 This is a schematic diagram of a basket grasping structure according to the present invention;

[0014] Figure 2 This is the front view of the basket grabber structure;

[0015] Figure 3 It shows the gripping lever hooking onto the tray. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0017] Please see Figure 1 and Figure 2As shown, this utility model is a basket gripping structure for gripping baskets, including a pair of clamps 10 mounted on a robotic arm 9 and controlled by the robotic arm 9 to open and close. Each clamp 10 includes a fixing block 11 and a first gripping rod 12 of U-shape disposed on the bottom surface of the fixing block 11. It also includes a pair of second gripping rods 13 of U-shape. The two second gripping rods 13 are respectively mounted on the corresponding fixing blocks 11 and located outside the first gripping rods 12. The second gripping rods 13 extend downward beyond the first gripping rods 12.

[0018] Combination Figure 3 As shown, when a tray needs to be gripped, the robotic arm 9 drives the two grippers 10 to open in a V-shape and descend to the corresponding positions. Then, the robotic arm 9 drives the two grippers 10 to close vertically and rise. During this closing and rising process, the corresponding pair of gripping rods naturally hook onto the lower edge of the tray's ear 801, lifting the tray 8 and thus gripping it. Because the height of the ear 801 of the smaller tray 8 is higher than that of the larger tray 8, and the length of the second gripping rod 13 is longer than the length of the first gripping rod 12, the inner pair of first gripping rods 12 can grip the smaller tray 8, while the outer, longer pair of second gripping rods 12 can grip the larger tray 8. In this way, gripping trays of different sizes can be completed without stopping the machine to change grippers, avoiding production line interruptions caused by changing different types of grippers, and improving production continuity and overall efficiency. Here, the small-sized wafer basket 8 can be used to hold 6-inch wafers, and the large-sized wafer basket 8 can be used to hold 8-inch wafers.

[0019] In this embodiment, the right-side fixing block 11 is provided with a first detection mechanism 20 for detecting whether the first gripping rod 12 grips the tray 8. The left-side fixing block 11 is provided with a second detection mechanism 30 for detecting whether the second gripping rod 13 grips the tray 8.

[0020] In this embodiment, the first detection mechanism 20 includes a first photoelectric switch and a first sensing rod 21. The first sensing rod 21 is hinged to the outer surface of the right-side fixing block 11, with its upper end in contact with the first photoelectric switch and its tail end extending downward to contact the outer side of the horizontal portion of the right-side first gripping rod 12. The second detection mechanism 30 includes a second photoelectric switch 31 and a second sensing rod 32. The second sensing rod 32 is hinged to the outer surface of the left-side fixing block 11, with its upper end in contact with the second photoelectric switch 31 and its tail end extending downward to contact the outer side of the horizontal portion of the left-side second gripping rod 13.

[0021] Initially, both the first sensing rod 21 and the second sensing rod 32 remain naturally vertical under their own weight. The lower ends of the two sensing rods are in contact with the corresponding gripping rods, while the upper ends are in contact with their respective photoelectric switches. The photoelectric switches do not send identification signals to the equipment control system. During operation, the two clamps 10 open to prepare to grip the tray 8. Because they open in a V-shape, the lower ends of the first sensing rod 21 and the second sensing rod 32 remain in contact with the corresponding gripping rods, and the contact between the upper ends and the photoelectric switches is not broken. Therefore, neither the first detection mechanism 20 nor the second detection mechanism 30 can activate the identification function and cannot provide valid feedback to the control system. The two open clamps 10 begin to close. When one pair of gripping rods (the inner first gripping rod 12 or the outer second gripping rod 13) successfully grips the tray 8, the tray ear 801 of the tray 8 will exert force on the tail end of the sensing rod on the outer side of the corresponding gripping rod. Under the force of the basket lugs, the lower end of the corresponding sensing rod is pushed open and swings outward; simultaneously, the upper end of the sensing rod swings inward and disengages from the photoelectric switch. Once the sensing rod disengages from the photoelectric switch, the photoelectric switch immediately sends a signal, transmitting information that the wafer basket has been successfully grasped to the equipment control system. After receiving the signal, the control system, based on the preset wafer basket model data, determines the wafer size carried by the currently grasped wafer basket 8, preparing for subsequent processes.

[0022] To better illustrate this embodiment, we take a large wafer basket 8 carrying an 8-inch wafer as an example. When the wafer basket needs to be gripped, the robotic arm 9 drives the two grippers 10 to open in a V-shape and descend to the corresponding position. Subsequently, the robotic arm 9 drives the two grippers 10 to close into a vertical position and rise. During the closing and rising process, the second gripping rod 13 on the left hooks onto the lower edge of the basket ear 801 of the wafer basket 8. The outer end of the left basket ear 801 will contact the lower end of the second sensing rod 32 and push it outward. At the same time, the upper end of the second sensing rod 32 will swing inward and disengage from the second photoelectric switch 31. Once disengaged, the second photoelectric switch 31 will immediately send a signal to transmit the information that the wafer basket 8 has been successfully gripped to the equipment control system. After receiving the signal, the control system will combine the preset wafer basket 8 model data to determine that the wafer size carried by the currently gripped wafer basket 8 is 8 inches. This determination result will prepare for subsequent production processes, ensuring the continuity and accuracy of the entire production process. During this grasping process, the first grasping rod did not grasp the tray 8, so the contact between the upper end of the first sensing rod and the first photoelectric switch was not broken. Therefore, the first sensing rod did not emit a signal, thus avoiding interference with the judgment of the control system.

[0023] In summary, this utility model is compatible with multi-size trays, eliminates the need to stop the machine to change clamps, and can grab trays of different sizes separately, thereby avoiding production line interruptions and improving production efficiency.

[0024] The above description provides a detailed account of one embodiment of the present invention. However, this description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the patent coverage of the present invention.

Claims

1. A tray gripping structure for gripping trays, comprising a pair of grippers mounted on a robotic arm and controlled by the robotic arm to open and close, each gripper comprising a fixed block and a first gripping rod of a U-shape disposed on the bottom surface of the fixed block, characterized in that, It also includes a pair of U-shaped second gripping rods, which are respectively mounted on corresponding fixed blocks and located outside the first gripping rod, with the second gripping rods extending downward beyond the first gripping rod.

2. The basket grasping structure according to claim 1, characterized in that, One of the fixed blocks is equipped with a first detection mechanism for detecting whether the first gripping rod grips the tray, and the other fixed block is equipped with a second detection mechanism for detecting whether the second gripping rod grips the tray.

3. The basket grasping structure according to claim 2, characterized in that, The first detection mechanism includes a first photoelectric switch and a first sensing rod. The first sensing rod is hinged to the outer side of the corresponding fixed block, with its upper end in contact with the first photoelectric switch and its tail end extending downward to contact the outer side of the horizontal part of the corresponding first gripping rod.

4. The basket grasping structure according to claim 2, characterized in that, The second detection mechanism includes a second photoelectric switch and a second sensing rod. The second sensing rod is hinged to the outer side of the corresponding fixed block, with its upper end in contact with the second photoelectric switch and its tail end extending downward to contact the outer side of the horizontal part of the corresponding second gripping rod.

Images