A filter mounting device

Abstract

The utility model provides a filter mounting device, include: delivery pipeline, including inlet pipe, inlet pipe includes the interface for installing filter, support base is fixed on delivery pipeline, and is located above interface, installation component is used for fixing filter at interface and forms sealed connection, protection component includes pressure detection piece, executing part and locking part, and pressure detection piece is located on inlet pipe to detect pipeline pressure, executing part is installed on support base, and is electrically connected with pressure detection piece, locking part is connected with executing part, can form locking cooperation or remove locking with installation component under the drive of executing part, to limit the operation of installation component. Through setting protection component, utilize pressure detection piece monitoring pipeline pressure, and executing part drives locking part to lock or unlock installation component, has realized the limitation operation when pipeline pressure to avoid the risk, does not allow operation when pressure to be convenient for replacement, gives both safety and convenience.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a filter installation device. Background Technology

[0002] In the semiconductor manufacturing industry, TEL TRACK machines are core equipment for chemical transport and processing. Their filters require regular replacement to ensure the purity of the chemicals and the stability of the machine's operation. Currently, the filter replacement process for TEL TRACK machines relies entirely on manual operation. Specifically, the operator first depressurizes the pipeline connected to the filter. After depressurization, there are no objective pressure detection methods; the operator relies solely on personal experience (such as the duration of depressurization and the feel of the pipeline) to determine if the pressure has dropped to a safe range. Once confirmed, the operator turns the handle to release the filter and completes the replacement. Throughout this process, the filter bracket lacks any integrated pressure protection function and is not designed to prevent disassembly under pressure.

[0003] In actual operation, due to operational negligence (such as...) Figure 1 As shown, factors such as replacing filter 1 but mistakenly depressurizing pipe 2 corresponding to filter 2 instead of depressurizing pipe 1 of filter 1, and biases in experience judgment (such as misjudging the pressure as sufficient before the safe depressurization time has elapsed), can easily lead to incorrect depressurization or insufficient depressurization. Forcibly disassembling the filter in this situation can cause residual pressure in the pipes to drive chemical leakage, potentially leading to splashing. This not only causes chemical contamination and corrosion of the filter, support, and surrounding pipes, affecting subsequent machine operation and chemical purity, but may also result in chemical burns to workers. Furthermore, it increases the costs of chemical cleaning, equipment maintenance, and process downtime, posing significant risks to the safety and economy of semiconductor manufacturing. Utility Model Content

[0004] To address all or part of the problems of the prior art, this utility model provides a filter installation device. By setting up protective components and using pressure detection components to monitor pipeline pressure, the device uses actuators to drive locking components to lock or unlock the installation components. This achieves the goal of limiting operation when the pipeline is pressurized to avoid risks, and allowing operation when the pipeline is depressurized for easy replacement, thus balancing safety and convenience.

[0005] To achieve the above objectives, this utility model provides the following technical solution: A filter mounting device, comprising: The delivery pipeline includes an inlet pipe, the inlet pipe including an interface for installing a filter; A support base is fixed to the delivery pipeline and located above the interface; Mounting components are used to secure the filter at the interface and form a sealed connection; The protection component includes a pressure detection element, an actuator, and a locking element. The pressure detection element is disposed on the inlet pipe to detect the pipeline pressure. The actuator is mounted on the bracket base and is electrically connected to the pressure detection element. The locking element is connected to the actuator and can form a locking engagement with the mounting component or unlock under the drive of the actuator to restrict the operation of the mounting component.

[0006] The delivery pipeline also includes an outlet pipe and a discharge pipe, and the interface is located between the inlet pipe, the outlet pipe and the discharge pipe.

[0007] The pressure detection element is connected to the inlet pipe via a connector, which is a T-joint. Two ports of the T-joint are respectively connected to the corresponding sections of the inlet pipe, and the third port is connected to the pressure detection element.

[0008] The actuator includes a solenoid valve and a cylinder. The signal input terminal of the solenoid valve is electrically connected to the signal output terminal of the pressure detection device, and the signal output terminal of the solenoid valve is connected to the control terminal of the cylinder.

[0009] The fixed end of the cylinder is connected to the bracket base, and the output end extends in the direction toward the mounting assembly and is fixedly connected to the locking member.

[0010] The bracket base and the mounting assembly are respectively provided with matching limiting structures. The locking member can be inserted into the limiting structure to form a lock, or disengage from the limiting structure to release the lock.

[0011] The limiting structure includes a first limiting hole in the bracket base and a second limiting hole in the mounting assembly, wherein the first limiting hole and the second limiting hole are coaxially corresponding.

[0012] The locking element is a cylindrical pin, the diameter of which is adapted to the inner diameter of the first limiting hole and the second limiting hole.

[0013] The mounting component and the interface are connected by a threaded structure. The inner wall of the mounting component is provided with an internal thread, and the outer wall of the interface is provided with an external thread that is adapted to the internal thread.

[0014] The mounting assembly is provided with an operating part, which is a handle fixedly connected to the outer peripheral wall of the mounting assembly. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the specific embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram illustrating the misoperation of the pressure relief pipeline during filter replacement in the background art.

[0017] Figure 2 This is a schematic diagram of the structure of a filter installation device (protective components not locked) according to an embodiment of the present invention.

[0018] Figure 3 This is a schematic diagram of the structure of a filter installation device (protective component locking) according to an embodiment of the present invention.

[0019] Reference numerals: 1. Inlet pipe; 2. Support base; 3. Mounting assembly; 301. Operating unit; 4. Protection assembly; 401. Pressure detection element; 402. Solenoid valve; 403. Cylinder; 404. Locking element; 5. Outlet pipe; 6. Discharge pipe; 7. Filter. Detailed Implementation

[0020] The technical solutions in specific embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0021] The implementation of this utility model will be described in detail below with reference to specific embodiments.

[0022] like Figures 2 to 3 As shown, this utility model discloses a filter installation device, mainly used in the installation and replacement of filters on TEL TRACK machines. It aims to achieve effective protection during pressurized disassembly of the filter through a combination of mechanical structure and electronic control. The device specifically includes a delivery pipeline, a support base 2, an installation assembly 3, and a protection assembly 4. The structure and connection relationships of each part are as follows: The delivery pipeline, serving as the core channel for drug liquid transmission, specifically consists of an inlet pipe 1, an outlet pipe 5, and a discharge pipe 6. The inlet pipe 1 is the drug liquid entry channel, used to introduce the drug liquid to be filtered into the filter 7. The outlet pipe 5 is the output channel for the filtered drug liquid, used to transport the purified drug liquid to subsequent processes. The discharge pipe 6 is the drug liquid discharge channel during filter 7 cleaning, used to discharge waste liquid generated during the cleaning process. An interface for installing the filter 7 is located at the intersection of the inlet pipe 1, outlet pipe 5, and discharge pipe 6. The structure and size of this interface are adapted to the installation requirements of the filter 7, ensuring that the filter 7, after installation, can form a sealed connection with the three pipelines. This allows for the normal flow path of the drug liquid to be filtered from the inlet pipe 1 into the filter 7, and after filtration, from the outlet pipe 5 out. It also allows for waste liquid discharge through the discharge pipe 6 during cleaning operations.

[0023] The bracket base 2 is made of metal and is installed on the delivery pipeline by bolts. Its installation position is directly above the interface, providing a stable installation carrier for the protection component 4.

[0024] Mounting component 3 is used to detachably fix filter 7 to the interface and ensure a sealed connection between them. Specifically, mounting component 3 and the interface can be connected by a threaded structure. The inner wall of mounting component 3 has internal threads, and the outer wall of the interface has matching external threads. The two are fixed by threaded engagement. An operating part 301 is integrally formed on the outer peripheral wall of mounting component 3. The operating part 301 is a handle extending radially outward. The operator can drive mounting component 3 to rotate by turning the handle. In this embodiment, mounting component 3 is specifically an annular fixing ring, the inner diameter of which is adapted to the outer diameter of filter 7. The fixing ring has a slot, and the filter 7 has a corresponding locking block. When filter 7 is placed at the interface, rotating the handle can make the locking block on filter 7 engage with the slot of the fixing ring, thereby fixing filter 7. When replacing filter 7, turning the handle in the opposite direction can disengage the locking block of filter 7 from the slot of the fixing ring, thereby releasing the constraint on filter 7.

[0025] The protection component 4, as the core protective structure, includes a pressure detection element 401, an actuator, and a locking element 404. These three components work together to dynamically restrict the operation of the installation component 3. The pressure detection element 401 is installed on the inlet pipe 1 and is used to detect the pressure of the liquid in the pipeline in real time. In this embodiment, the pressure detection element 401 is connected to the inlet pipe 1 via a connector, which is a tee connector. Two of its ports are sealed to the corresponding sections of the inlet pipe 1, and the third port is fixedly connected to the pressure detection element 401, ensuring that the pressure detection element 401 can accurately obtain the pressure data within the pipeline. Considering the characteristic of the detection element being in direct contact with the liquid, to avoid contamination of the pipeline and ensure chemical stability, the pressure detection element 401 uses an integrated pressure sensor made of the same PFA material as the Track liquid tank pipes. This material has excellent resistance to strong acids and alkalis and high chemical stability in common organic solvents, making it suitable for the liquid environment in semiconductor manufacturing.

[0026] The actuator is installed on the top surface of the support base 2. Its signal input end is electrically connected to the signal output end of the pressure detection element 401 via a wire. It can receive the electrical signal sent by the pressure detection element 401 and perform corresponding actions. In this embodiment, the actuator specifically includes a solenoid valve 402 and a cylinder 403. The solenoid valve 402 is a two-position five-way solenoid valve 402. Its signal input end is connected to the signal output end of the pressure sensor. The signal output end is connected to the control end of the cylinder 403 via an air pipe. The power source of the air circuit system is compressed dry air (CDA). The CDA is dried and purified to prevent moisture, oil, and particulate matter from entering the air circuit, meeting the cleanliness requirements of semiconductor manufacturing. The operation of the cylinder 403 is controlled by the opening and closing and reversing of the air circuit. The fixed end of the cylinder 403 is fixedly connected to the support base 2 by bolts. Its output end (piston rod) extends vertically toward the mounting assembly 3, and the end of the piston rod is fixedly connected to the locking element 404.

[0027] The locking element 404 is a cylindrical pin made of wear-resistant metal, with a diameter that matches the preset limiting structure. The limiting structure includes a first limiting hole in the lower part of the bracket base 2 and a second limiting hole in the upper surface of the mounting component 3 (fixed ring). When the mounting component 3 is in the locked state, the first limiting hole and the second limiting hole are coaxially aligned in the vertical direction, providing an insertion channel for the locking element 404.

[0028] The working process of this device is as follows: When the pressure sensor detects that the pressure in the inlet pipe 1 exceeds the preset safety threshold, it immediately sends an electrical signal to the solenoid valve 402. After being energized, the solenoid valve 402 controls the piston rod of the cylinder 403 to extend downward through the air circuit, driving the pin to pass through the first limiting hole of the bracket base 2 and the second limiting hole of the mounting component 3 in sequence, forming a mechanical locking fit (e.g., Figure 3(As shown); At this time, due to the restriction of the pin, the mounting component 3 cannot be rotated, and the operator cannot remove the filter 7 by turning the handle, thus achieving a safety lock under pressure. When the pressure sensor detects that the pressure in the pipeline has dropped to within the safety threshold range, it stops sending signals to the solenoid valve 402. After the solenoid valve 402 is de-energized, the air path is reversed, and the piston rod of the cylinder 403 drives the pin to reset upward, disengaging from the second limit hole and the first limit hole, thus releasing the lock on the mounting component 3 (as shown). Figure 2 (As shown); at this time, the operator can turn the handle normally, rotate the installation component 3 and replace the filter 7.

[0029] Compared with existing technologies, this embodiment constructs an automatic pressure limiting system by adding a protection component 4 consisting of a pressure detection element 401, an actuator, and a locking element 404. This system can dynamically control the operation permissions of the installation component 3 according to the actual pressure status of the pipeline. When the pipeline pressure has not dropped to a safe range, the device mechanically locks to forcibly prevent the filter 7 from being disassembled. This avoids problems such as incorrect or insufficient pressure release caused by human negligence at the hardware level, effectively preventing the risk of liquid leakage or splashing, and significantly improving the safety and reliability of filter 7 replacement operations.

[0030] It should be noted that, for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principle of this utility model, and these improvements and modifications also fall within the scope of protection of the claims of this utility model.

Claims

1. A filter installation device, characterized in that, include: The delivery pipeline includes an inlet pipe, the inlet pipe including an interface for installing a filter; A support base is fixed to the delivery pipeline and located above the interface; Mounting components are used to secure the filter at the interface and form a sealed connection; The protection component includes a pressure detection element, an actuator, and a locking element. The pressure detection element is disposed on the inlet pipe to detect the pipeline pressure. The actuator is mounted on the bracket base and is electrically connected to the pressure detection element. The locking element is connected to the actuator and can form a locking engagement with the mounting component or unlock under the drive of the actuator to restrict the operation of the mounting component.

2. The apparatus according to claim 1, characterized in that, The delivery pipeline also includes an outlet pipe and a discharge pipe, and the interface is located between the inlet pipe, the outlet pipe and the discharge pipe.

3. The apparatus according to claim 2, characterized in that, The pressure detection element is connected to the inlet pipe via a connector, which is a T-joint. Two ports of the T-joint are respectively connected to the corresponding sections of the inlet pipe, and the third port is connected to the pressure detection element.

4. The apparatus according to claim 1, characterized in that, The actuator includes a solenoid valve and a cylinder. The signal input terminal of the solenoid valve is electrically connected to the signal output terminal of the pressure detection device, and the signal output terminal of the solenoid valve is connected to the control terminal of the cylinder.

5. The apparatus according to claim 4, characterized in that, The fixed end of the cylinder is connected to the bracket base, and the output end extends in the direction toward the mounting assembly and is fixedly connected to the locking member.

6. The apparatus according to claim 1, characterized in that, The bracket base and the mounting assembly are respectively provided with matching limiting structures. The locking member can be inserted into the limiting structure to form a lock, or disengage from the limiting structure to release the lock.

7. The apparatus according to claim 6, characterized in that, The limiting structure includes a first limiting hole in the bracket base and a second limiting hole in the mounting assembly, wherein the first limiting hole and the second limiting hole are coaxially corresponding.

8. The apparatus according to claim 7, characterized in that, The locking element is a cylindrical pin, the diameter of which is adapted to the inner diameter of the first limiting hole and the second limiting hole.

9. The apparatus according to claim 1, characterized in that, The mounting component and the interface are connected by a threaded structure. The inner wall of the mounting component is provided with an internal thread, and the outer wall of the interface is provided with an external thread that is adapted to the internal thread.

10. The apparatus according to claim 1, characterized in that, The mounting assembly is provided with an operating part, which is a handle fixedly connected to the outer peripheral wall of the mounting assembly.

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