A protective kit for a vacuum apparatus

Abstract

This utility model provides a protective kit for vacuum equipment, relating to the field of vacuum equipment technology. It includes a support frame, on the upper surface of which a reaction vessel, a protective shell, and a vacuum pump are fixedly mounted. This utility model achieves multi-stage purification of the gas entering the vacuum pump from the reaction vessel by installing a condenser tube inside the protective shell and sequentially arranging a dust filter and an adsorption plate along the airflow path. The gas first passes through the dust filter to intercept solid particles, then through the condenser tube to liquefy harmful vapors such as acid mist, and finally through the adsorption plate to capture residual droplets and harmful components. This effectively prevents corrosive substances and dust from entering the vacuum pump, significantly improving the operational stability and service life of the vacuum equipment. Furthermore, a motor-driven bidirectional lead screw moves a sliding block and a limiting block, allowing the limiting rod to disengage from the limiting hole of the insert block, enabling quick removal of the dust filter and adsorption plate for cleaning or replacement.

Description

Technical Field

[0001] This utility model relates to the field of vacuum equipment technology, and in particular to a protective kit for vacuum equipment. Background Technology

[0002] Vacuum equipment refers to devices used for material handling, physical experiments, or industrial production in environments below atmospheric pressure. It is widely used in semiconductor manufacturing, chemical engineering, pharmaceuticals, vacuum coating, and electronic device packaging. Its core components, such as vacuum pumps, valves, and sensors, require extremely high cleanliness of the working medium. In actual operation, the system being evacuated may release various contaminants, including volatile acid mists, organic solvent vapors, dust particles, water vapor, and process byproducts. If these contaminants enter the vacuum equipment directly without treatment, especially high-precision equipment such as dry pumps and molecular pumps, they can easily cause corrosion, blockages, lubrication failure, or rotor wear, leading to decreased equipment performance, frequent malfunctions, and even permanent damage.

[0003] In existing technologies, traditional solutions often rely on single-function components, such as simply installing a dust filter, which cannot handle acid mist, or setting up a separate acid mist condensation device without a structure to adsorb liquefied products. This means that condensate may still enter the vacuum equipment with the airflow, and maintenance is inconvenient. The overall structure of the protective components is mostly welded or bolted around the circumference, making disassembly, cleaning, or replacement of internal components cumbersome and affecting equipment downtime and maintenance efficiency, thus requiring improvement. Utility Model Content

[0004] The purpose of this invention is to solve the problems of existing vacuum equipment protection kits, such as limited functionality, incomplete acid mist treatment, and cumbersome maintenance, and to propose a protection kit for vacuum equipment.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a protective kit for vacuum equipment, comprising a bracket, a reaction vessel, a protective shell, and a vacuum pump fixedly mounted on the upper surface of the bracket, a connecting pipe 1 fixedly connected to the upper surface of the reaction vessel, a connecting pipe 2 fixedly connected to the side of the protective shell, a mounting plate 1 and a mounting plate 2 fixedly mounted on the inner side of the protective shell, a condenser pipe provided inside the protective shell, a dust filter screen provided inside the mounting plate 1, an adsorption plate provided inside the mounting plate 2, a drain pipe fixedly connected to the bottom of the protective shell, a collection tank provided at the lower end of the drain pipe, inserts fixedly connected to the sides of both the dust filter screen and the adsorption plate, slots provided on the sides of both the mounting plate 1 and the mounting plate 2, and a disassembly mechanism provided on the sides of both the mounting plate 1 and the mounting plate 2. The disassembly mechanism includes a horizontal plate, a limiting block on the surface of the horizontal plate, a limiting rod fixedly connected to the side of the limiting block, a limiting hole on the side of the insertion block, a sliding block slidably connected inside the horizontal plate, a bidirectional lead screw rotatably connected inside the horizontal plate, and a motor fixedly installed on the side of the horizontal plate.

[0006] Preferably, one end of the first connecting pipe is fixedly connected to the inlet end of the protective housing, and one end of the second connecting pipe is fixedly connected to the inlet end of the vacuum pump.

[0007] Preferably, the upper surface of the sliding block is fixedly connected to the lower surface of the limiting block, the sliding block is threadedly connected to the bidirectional lead screw, and the motor is fixedly connected to one end of the bidirectional lead screw.

[0008] Preferably, the limiting rod and the limiting hole are slidably connected.

[0009] Preferably, a connecting sleeve is fixedly installed on the lower surface of the sewage pipe, a connecting block is fixedly connected to the upper surface of the liquid collection tank, a magnet is fixedly installed on the surface of the connecting block, a magnet is fixedly installed on the inner side of the connecting sleeve, a locking block is slidably connected inside the connecting block, a tension spring is fixedly connected to the inner side of the connecting block, and a locking hole is opened on the side of the connecting sleeve.

[0010] Preferably, the connecting block and the connecting sleeve are slidably connected, and the first magnet and the second magnet are attracted to each other.

[0011] Preferably, one end of the tension spring is fixedly connected to the side of the locking block, and the locking block is slidably connected to the locking hole.

[0012] Compared with the prior art, the advantages and positive effects of this utility model are as follows: 1. In this utility model, by setting a condenser tube inside the protective shell and arranging a dust filter and an adsorption plate in sequence along the airflow path, multi-stage purification of the gas entering the vacuum pump from the reactor is achieved. The gas first passes through the dust filter to intercept solid particles, then passes through the condenser tube to liquefy harmful vapors such as acid mist, and finally passes through the adsorption plate to capture residual droplets and harmful components. This effectively prevents corrosive substances and dust from entering the vacuum pump, significantly improving the operational stability and service life of the vacuum equipment. Furthermore, the motor-driven bidirectional lead screw moves the sliding block and the limiting block, allowing the limiting rod to disengage from the limiting hole of the insertion block, enabling the dust filter and adsorption plate to be quickly removed for cleaning or replacement.

[0013] 2. In this utility model, the sliding connection between the connecting block and the connecting sleeve, the mutual attraction between magnet one and magnet two, and the sliding cooperation between the locking block and the locking hole can quickly complete the positioning, installation and disassembly of the liquid collection tank, greatly improving the convenience of component maintenance and waste liquid cleaning, and reducing equipment downtime. Attached Figure Description

[0014] Figure 1 A three-dimensional structural diagram of a protective kit for vacuum equipment is provided for this utility model; Figure 2 A cross-sectional view of a protective kit for vacuum equipment is provided for this utility model; Figure 3 This utility model provides a partial structural diagram of a mounting plate, dust filter, and horizontal plate for a protective kit used in vacuum equipment. Figure 4 This utility model provides a partial structural diagram of a drain pipe, connecting sleeve, connecting block, and liquid collection tank for a protective kit used in vacuum equipment.

[0015] Legend: 1. Support; 2. Reactor; 3. Protective shell; 4. Vacuum pump; 5. Connecting pipe one; 6. Connecting pipe two; 7. Mounting plate one; 8. Mounting plate two; 9. Condenser; 10. Dust filter; 11. Adsorption plate; 12. Drain pipe; 13. Collection tank; 14. Insert block; 15. Slot; 16. Disassembly mechanism; 161. Horizontal plate; 162. Limiting block; 163. Limiting rod; 164. Limiting hole; 165. Sliding block; 166. Bidirectional lead screw; 167. Motor; 17. Connecting sleeve; 18. Connecting block; 19. Magnet one; 20. Magnet two; 21. Locking block; 22. Tension spring; 23. Locking hole. Detailed Implementation

[0016] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0017] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0018] Example 1: As Figures 1-4As shown, this utility model provides a technical solution: a protective kit for vacuum equipment, including a bracket 1. A reaction vessel 2, a protective shell 3, and a vacuum pump 4 are fixedly mounted on the upper surface of the bracket 1. A connecting pipe 5 is fixedly connected to the upper surface of the reaction vessel 2. A connecting pipe 6 is fixedly connected to the side of the protective shell 3. A mounting plate 7 and a mounting plate 8 are fixedly mounted on the inner side of the protective shell 3. A condenser pipe 9 is provided inside the protective shell 3. A dust filter screen 10 is provided inside the mounting plate 7. An adsorption plate 11 is provided inside the mounting plate 8. A drain pipe 12 is fixedly connected to the bottom of the protective shell 3. A collection tank 13 is provided at the lower end of the drain pipe 12. Inserts 14 are fixedly connected to the sides of both the dust filter screen 10 and the adsorption plate 11. Slots 15 are provided on the sides of both the mounting plate 7 and the mounting plate 8. Each side is equipped with a disassembly mechanism 16, which includes a horizontal plate 161. A limiting block 162 is provided on the surface of the horizontal plate 161. A limiting rod 163 is fixedly connected to the side of the limiting block 162. A limiting hole 164 is opened on the side of the insert block 14. A sliding block 165 is slidably connected inside the horizontal plate 161. A double-acting screw 166 is rotatably connected inside the horizontal plate 161. A motor 167 is fixedly installed on the side of the horizontal plate 161. One end of the connecting pipe 1 5 is fixedly connected to the inlet end of the protective housing 3. One end of the connecting pipe 2 6 is fixedly connected to the inlet end of the vacuum pump 4. The upper surface of the sliding block 165 is fixedly connected to the lower surface of the limiting block 162. The sliding block 165 and the double-acting screw 166 are threadedly connected. The motor 167 is fixedly connected to one end of the double-acting screw 166. The limiting rod 163 and the limiting hole 164 are slidably connected.

[0019] In this embodiment, during use, the gas containing dust and acid mist generated in the reactor 2 enters the protective shell 3 through the connecting pipe 5. The gas first passes through the dust filter 10 installed in the mounting plate 7, where large dust particles are effectively intercepted, preventing them from entering subsequent structures and causing blockage or corrosion. Subsequently, the gas flow passes through the condenser 9 area, where the condenser 9 lowers the gas temperature through external cooling circulation or built-in refrigerant, causing the acidic vapor to condense into small liquid droplets. The gas flow containing droplets continues forward, passing through the adsorption plate 11 installed in the mounting plate 8. The adsorption plate 11 uses a porous material or modified surface with a high specific surface area to deeply adsorb and capture incompletely liquefied acid mist and fine particles, further purifying the gas. The purified gas then passes through... Connecting pipe 2 6 enters the vacuum pump 4 to ensure its safe and stable operation. During operation, the liquid generated by condensation and the droplets falling off the adsorption plate 11 fall into the bottom of the protective shell 3 under the action of gravity, and flow into the collection tank 13 through the drain pipe 12 for centralized collection. When maintenance is required, the motor 167 of the disassembly mechanism 16 is started. The motor 167 drives the bidirectional lead screw 166 to rotate, causing the sliding block 165 to move along the lead screw axis, thereby driving the limiting block 162 and the limiting rod 163 fixed thereto to slide out from the limiting hole 164 of the insertion block 14, releasing the locking of the insertion block 14. Then the dust filter screen 10 or the adsorption plate 11 can be pulled out horizontally along the slot 15 for cleaning or replacement. The operation is convenient and does not require disassembling the pipeline or using tools.

[0020] Example 2: As Figures 1-4 As shown, a connecting sleeve 17 is fixedly installed on the lower surface of the drain pipe 12, a connecting block 18 is fixedly connected to the upper surface of the collection tank 13, a magnet 19 is fixedly installed on the surface of the connecting block 18, a magnet 20 is fixedly installed on the inner side of the connecting sleeve 17, a locking block 21 is slidably connected inside the connecting block 18, a tension spring 22 is fixedly connected to the inner side of the connecting block 18, a locking hole 23 is opened on the side of the connecting sleeve 17, the connecting block 18 and the connecting sleeve 17 are slidably connected, the magnet 19 and the magnet 20 attract each other, one end of the tension spring 22 is fixedly connected to the side of the locking block 21, and the locking block 21 is slidably connected to the locking hole 23.

[0021] In this embodiment, the liquid collection tank 13 is connected to the connecting sleeve 17 at the lower end of the drain pipe 12 via the connecting block 18. The connecting block 18 is inserted into the connecting sleeve 17, and magnet 19 and magnet 20 attract each other to achieve quick positioning and initial fixation. When the connecting block 18 is fully inserted, the locking block 21 automatically engages with the locking hole 23 on the side of the connecting sleeve 17 under the elastic force of the tension spring 22, forming a mechanical lock to ensure that the liquid collection tank 13 will not accidentally fall off during the liquid collection process. When it is necessary to remove the liquid collection tank 13, simply pull the locking block 21 outward to disengage it from the locking hole 23, and the liquid collection tank 13 can be removed as a whole for waste liquid treatment or cleaning. This connection structure has both magnetic positioning and mechanical locking functions, and is quick and reliable to disassemble and assemble. It has good sealing performance, effectively prevents waste liquid leakage, and improves the safety and maintenance convenience of the equipment.

[0022] The working principle of this embodiment is as follows: During use, the gas containing dust and acid mist generated in the reactor 2 enters the protective shell 3 through the connecting pipe 5. The gas first passes through the dust filter 10 installed in the mounting plate 7, where large dust particles are effectively intercepted, preventing them from entering subsequent structures and causing blockage or corrosion. Subsequently, the gas flow passes through the condenser 9 area, where the condenser 9 lowers the gas temperature through external cooling circulation or internal refrigerant, causing the acidic vapor to condense into small liquid droplets. The gas flow containing droplets continues forward and passes through the adsorption plate 11 installed in the mounting plate 8. The adsorption plate 11 uses a porous material or modified surface with a high specific surface area to deeply adsorb and capture the incompletely liquefied acid mist and fine particles, further purifying the gas. The purified gas enters the vacuum pump 4 through the connecting pipe 6, ensuring its safe and stable operation. During operation, the liquid generated by condensation and the droplets falling off the adsorption plate 11 fall into the protective shell under the action of gravity. The dust filter 10 or adsorption plate 11 is collected at the bottom and flows into the collection tank 13 through the drain pipe 12. When it is necessary to maintain the dust filter 10 or adsorption plate 11, the motor 167 is started first. The output end of the motor 167 drives the bidirectional lead screw 166 to rotate, causing the sliding block 165 to move along the lead screw axis. This causes the limiting block 162 and the limiting rod 163 fixed thereto to slide out from the limiting hole 164 of the insertion block 14, releasing the locking of the insertion block 14. Then the dust filter 10 or adsorption plate 11 can be pulled out horizontally along the slot 15 for cleaning or replacement. The operation is convenient and does not require disassembling the pipeline or using tools. When it is necessary to remove the collection tank 13 for cleaning, simply pull the locking block 21 outward to disengage it from the locking hole 23, and the collection tank 13 can be removed as a whole for waste liquid treatment or cleaning. This connection structure has both magnetic positioning and mechanical locking functions, and the disassembly and assembly are quick and reliable. It has good sealing performance, effectively prevents waste liquid leakage, and improves the safety and maintenance convenience of the equipment.

[0023] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A protective kit for vacuum equipment, comprising a support (1), characterized in that: The upper surface of the support (1) is fixedly mounted with a reactor (2), a protective shell (3) and a vacuum pump (4). The upper surface of the reactor (2) is fixedly connected with a connecting pipe (5). The side of the protective shell (3) is fixedly connected with a connecting pipe (6). The inner side of the protective shell (3) is fixedly mounted with a mounting plate (7) and a mounting plate (8). The inside of the protective shell (3) is provided with a condenser pipe (9). The inner side of the mounting plate (7) is provided with a dust filter screen (10). The inner side of the second mounting plate (8) is provided with an adsorption plate (11), the bottom of the protective shell (3) is fixedly connected with a drain pipe (12), the lower end of the drain pipe (12) is provided with a liquid collection tank (13), the side of the dust filter (10) and the adsorption plate (11) are both fixedly connected with inserts (14), the side of the first mounting plate (7) and the second mounting plate (8) are both provided with slots (15), and the side of the first mounting plate (7) and the second mounting plate (8) are both provided with disassembly mechanisms (16). The disassembly mechanism (16) includes a horizontal plate (161), a limiting block (162) is provided on the surface of the horizontal plate (161), a limiting rod (163) is fixedly connected to the side of the limiting block (162), a limiting hole (164) is opened on the side of the insert (14), a sliding block (165) is slidably connected inside the horizontal plate (161), a two-way lead screw (166) is rotatably connected inside the horizontal plate (161), and a motor (167) is fixedly installed on the side of the horizontal plate (161).

2. The protective kit for vacuum equipment according to claim 1, characterized in that: One end of the first connecting pipe (5) is fixedly connected to the inlet end of the protective shell (3), and one end of the second connecting pipe (6) is fixedly connected to the inlet end of the vacuum pump (4).

3. The protective kit for vacuum equipment according to claim 1, characterized in that: The upper surface of the sliding block (165) is fixedly connected to the lower surface of the limiting block (162), the sliding block (165) is threadedly connected to the bidirectional lead screw (166), and the motor (167) is fixedly connected to one end of the bidirectional lead screw (166).

4. The protective kit for vacuum equipment according to claim 1, characterized in that: The limiting rod (163) is slidably connected to the limiting hole (164).

5. The protective kit for vacuum equipment according to claim 1, characterized in that: A connecting sleeve (17) is fixedly installed on the lower surface of the drain pipe (12), a connecting block (18) is fixedly connected to the upper surface of the liquid collection tank (13), a magnet (19) is fixedly installed on the surface of the connecting block (18), a magnet (20) is fixedly installed on the inner side of the connecting sleeve (17), a locking block (21) is slidably connected inside the connecting block (18), a tension spring (22) is fixedly connected to the inner side of the connecting block (18), and a locking hole (23) is opened on the side of the connecting sleeve (17).

6. The protective kit for vacuum equipment according to claim 5, characterized in that: The connecting block (18) and the connecting sleeve (17) are slidably connected, and the first magnet (19) and the second magnet (20) are attracted to each other.

7. The protective kit for vacuum equipment according to claim 5, characterized in that: One end of the tension spring (22) is fixedly connected to the side of the locking block (21), and the locking block (21) is slidably connected to the locking hole (23).

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