A fluid distributor for an electronic grade hydrochloric acid production process

Abstract

The utility model discloses a kind of fluid distributors for electronic grade hydrochloric acid production process, including columnar distribution shell, distribution shell is provided with liquid inlet pipeline;The upper distribution shell is evenly provided with multiple groups of connecting pipelines, multiple groups The connecting pipeline is annular array setting with the axis of distribution shell, the inner cavity of connecting pipeline and distribution shell is communicated, fluid distribution pipeline is provided on the connecting pipeline, distribution assembly is also provided in the distribution shell, distribution assembly is connected with distribution shell, so that fluid is evenly dispersed in the inner cavity of distribution shell;The beneficial effects of the utility model are: through the synergistic effect of columnar distribution shell and built-in distribution assembly, effectively realize the uniform dispersion and filling of electronic grade hydrochloric acid fluid in the inner cavity of shell, significantly improve the uniformity and stability of fluid distribution, avoid the problem of local flow concentration or uneven distribution.

Description

Technical Field

[0001] This utility model relates to a fluid distributor for electronic-grade hydrochloric acid production processes. Background Technology

[0002] Electronic-grade hydrochloric acid, as a key raw material in the field of wet electronic chemicals, is widely used in high-precision processing scenarios such as semiconductor manufacturing and cleaning of precision electronic components. Its production process includes evaporation and absorption processes, which require uniform dispersion of hydrochloric acid solution to achieve the best gas-liquid separation or absorption effect and meet the extremely high purity requirements of hydrochloric acid in semiconductor manufacturing.

[0003] In the prior art, traditional fluid distributors used for the transmission and distribution of electronic-grade hydrochloric acid have poor fluid dispersion effects, which easily lead to local flow concentration or uneven distribution. This results in inconsistent fluid coverage in subsequent processing steps, affecting product processing accuracy. Moreover, the multi-path diversion structure design is unreasonable, and the fluid supply consistency of each diversion channel is poor, making it difficult to meet the precise supply requirements of multiple workstations or large areas. In view of this, this utility model proposes a fluid distributor for electronic-grade hydrochloric acid production processes to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a fluid distributor for electronic-grade hydrochloric acid production processes to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: A fluid distributor for electronic-grade hydrochloric acid production process includes a columnar distribution housing with an inlet pipe provided on the distribution housing; The distribution shell is uniformly provided with multiple sets of connecting pipes, which are arranged in a ring array around the axis of the distribution shell. The connecting pipes are connected to the inner cavity of the distribution shell, and fluid distribution pipes are provided on the connecting pipes. The distribution shell is also provided with a distribution component, which is connected to the distribution shell, so that the fluid is uniformly dispersed in the inner cavity of the distribution shell.

[0006] As an improvement to the above technical solution, the distribution component includes a distribution cylinder, on which multiple sets of flow holes are uniformly formed; The distribution cylinder is disposed inside the distribution shell to uniformly disperse the fluid.

[0007] As an improvement to the above technical solution, a distribution plate is provided at the bottom end of the distribution cylinder, and an arc-shaped distribution protrusion is provided on the distribution plate; The arc-shaped protrusions are positioned directly below the liquid inlet pipe.

[0008] As an improvement to the above technical solution, a plurality of first connecting holes are uniformly arranged on the distribution shell, and a plurality of second connecting holes are uniformly arranged on the distribution plate, wherein the positions of the plurality of first connecting holes and the plurality of second connecting holes are matched. The first connecting hole and the second connecting hole are connected by bolts.

[0009] As an improvement to the above technical solution, the distribution pipe is provided with a straight pipe section and a bent pipe section. The bent pipe section is provided with multiple sets of diversion holes. The orientation of the multiple sets of diversion holes is opposite to the orientation of the liquid inlet pipe, so that the diversion holes are vertically arranged and the axis of the diversion holes is parallel to the axis of the distribution shell.

[0010] As an improvement to the above technical solution, the bent pipe section is also provided with a flange-connected collection housing, and the collection housing and the straight pipe section are respectively located at both ends of the bent pipe section.

[0011] As an improvement to the above technical solution, the included angle between the straight pipe section and the bent pipe section is between 120° and 160°.

[0012] Compared with the prior art, the beneficial effects of this utility model are: Through the synergistic effect of the columnar distribution shell and the built-in distribution components, the electronic-grade hydrochloric acid fluid is effectively dispersed and filled in the inner cavity of the shell, significantly improving the uniformity and stability of the fluid distribution and avoiding the problems of local flow concentration or uneven distribution. Multiple sets of connecting pipes are arranged in a ring array around the distribution shell axis and are directly connected to the inner cavity of the shell. This ensures that after the fluid is homogenized by the distribution component 40, it can be synchronously and evenly introduced into each fluid distribution pipe, ensuring the consistency of multi-path diversion and meeting the fluid supply needs of multiple workstations or large areas. The overall structure adopts an integrated design for liquid inlet, homogenization, and diversion, with a clear and smooth fluid flow path. This reduces resistance loss and stagnation during fluid transmission, which helps maintain the high purity of electronic-grade hydrochloric acid and improves fluid distribution efficiency, making it suitable for high-precision applications in electronic-grade chemical processing. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a front view of the present invention; Figure 3 This utility model Figure 2 Sectional view of AA; Figure 4 This utility model Figure 3 A cross-sectional schematic diagram of the centrally distributed shell; Figure 5 This utility model Figure 3 A cross-sectional schematic diagram of the central distribution cylinder; Figure 6 This is a three-dimensional structural diagram of the distribution shell of this utility model; Figure 7 This is a three-dimensional structural diagram of the distribution cylinder of this utility model; Figure 8 This is a schematic diagram of the structure of the distribution pipeline of this utility model; Figure 9 This is a schematic diagram of the structure of the collection shell of this utility model.

[0014] In the figure: 10, distribution shell; 11, liquid inlet pipe; 12, connecting pipe; 13, first connecting hole; 20, distribution pipe; 21, straight pipe section; 22, bent pipe section; 23, diversion hole; 30, collection shell; 40, distribution assembly; 41, flow hole; 42, second connecting hole; 43, distribution plate; 44, arc-shaped distribution protrusion; 45, distribution cylinder. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0016] Example: like Figure 1-9 As shown, this embodiment proposes a fluid distributor for electronic-grade hydrochloric acid production process, including a columnar distribution shell 10, on which a liquid inlet pipe 11 is provided; The distribution housing 10 is uniformly provided with multiple sets of connecting pipes 12, which are arranged in a ring array around the axis of the distribution housing 10. The connecting pipes 12 are connected to the inner cavity of the distribution housing 10. A fluid distribution pipe 20 is provided on the connecting pipe 12. A distribution component 40 is also provided inside the distribution housing 10. The distribution component 40 is connected to the distribution housing 10, so that the fluid is uniformly dispersed in the inner cavity of the distribution housing 10.

[0017] In this embodiment, when distributing electronic-grade hydrochloric acid fluid, the fluid is introduced into the distribution housing 10 through the connecting pipe 12. The distribution component 40 inside the distribution housing 10 makes the fluid fill the inner cavity of the distribution housing 10. Then, the fluid is introduced into multiple sets of distribution pipes 20 through the connecting pipe 12. Through the synergistic effect of the columnar distribution shell 10 and the built-in distribution component 40, the electronic grade hydrochloric acid fluid is effectively dispersed and filled in the inner cavity of the shell, significantly improving the uniformity and stability of fluid distribution and avoiding the problems of local flow concentration or uneven distribution. Multiple sets of connecting pipes 12 are arranged in a ring array around the axis of the distribution shell 10 and are directly connected to the inner cavity of the shell. This ensures that after the fluid is homogenized by the distribution component 40, it can be synchronously and evenly introduced into each fluid distribution pipe 20, ensuring the consistency of multi-path diversion and meeting the fluid supply needs of multiple workstations or large areas. The overall structure adopts an integrated design for liquid inlet, homogenization, and diversion, with a clear and smooth fluid flow path. This reduces resistance loss and stagnation during fluid transmission, which helps maintain the high purity of electronic-grade hydrochloric acid and improves fluid distribution efficiency, making it suitable for high-precision applications in electronic-grade chemical processing.

[0018] Specifically, the distribution component 40 includes a distribution cylinder 45, on which multiple sets of flow holes 41 are uniformly formed; The distribution cylinder 45 is disposed in the inner cavity of the distribution shell 10 for uniformly dispersing the fluid.

[0019] In this embodiment, by providing a distribution cylinder 45 with multiple uniform flow holes 41 in the inner cavity of the distribution shell 10, the electronic-grade hydrochloric acid fluid entering the distribution shell 10 can achieve multi-directional and balanced penetration and diffusion along the flow holes 41, directly breaking the limitation of fluid flowing in a single direction, effectively avoiding the problem of fluid local accumulation and uneven flow rate in the inner cavity of the shell, and achieving preliminary homogenization of the fluid from the source. The uniform arrangement of the flow holes 41 works in synergy with the cavity structure of the distribution cylinder 45 to provide a stable flow buffer space for the fluid. When the fluid passes through each flow hole 41, a balanced flow distribution can be formed, ensuring that the fluid concentration and pressure in the outer periphery of the distribution cylinder 45 remain consistent. This provides a pre-homogenization basis for the synchronous and equal liquid collection of multiple sets of annular array connecting pipes 12, and avoids flow deviation caused by differences in fluid state at different liquid collection positions between different connecting pipes 12. The structure of the distribution cylinder 41 can guide the fluid to form a stable radial-circumferential composite flow field in the inner cavity of the shell, reducing the disturbance of the fluid caused by local turbulence. It can not only reduce the impact wear between the fluid and the inner wall of the shell and the wall of the distribution cylinder 45, but also avoid the secondary flow field disturbance introduced by the violent agitation of the fluid. This is conducive to maintaining the high purity and low impurity characteristics of electronic grade hydrochloric acid, and is suitable for the stringent requirements of fluid stability in the treatment of electronic grade chemicals.

[0020] Specifically, a distribution plate 43 is provided at the bottom end of the distribution cylinder 45, and an arc-shaped distribution protrusion 44 is provided on the distribution plate 43; The arc-shaped protrusions 44 are positioned directly below the liquid inlet pipe 11.

[0021] In this embodiment, the arc-shaped distributed protrusions 44 are arranged directly below the liquid inlet pipe 11, and can directly receive the electronic-grade hydrochloric acid fluid falling vertically from the liquid inlet pipe 11. The curved surface structure of the arc-shaped distributed protrusions 44 can transform the vertical downward impact flow of the fluid into a radially dispersed flow that radiates in all directions along the arc surface, effectively avoiding the problem of local liquid accumulation and sudden increase in flow velocity caused by the fluid directly impacting the distribution cylinder 45 or the bottom of the distribution shell 10. Directional homogenization is achieved from the initial contact end of the fluid entering the device, providing a uniform pre-fluid foundation for the secondary homogenization of the flow holes 41 of the distribution cylinder 45.

[0022] Specifically, the distribution housing 10 is uniformly provided with a plurality of first connecting holes 13, and the distribution plate 43 is uniformly provided with a plurality of second connecting holes 42, the plurality of first connecting holes 13 and the plurality of second connecting holes 42 being matched in position; The first connecting hole 13 and the second connecting hole 42 are connected by bolts.

[0023] In this embodiment, the position matching design of multiple sets of first connecting holes 13 and second connecting holes 42, combined with the rigid fastening characteristics of bolt connections, enables the distribution plate 43 and the distribution housing 10 to form a tight and balanced fixed relationship. The evenly distributed connecting holes can disperse the bolt fastening force to the circumferential and radial areas of the distribution plate 43 and the distribution housing 10, avoiding deformation and displacement of the distribution plate 43 caused by local force concentration. This ensures that the arc-shaped distribution protrusions 44 on the distribution plate 43 always accurately correspond to the preset position directly below the liquid inlet pipe 11, avoiding deviation in the flow direction of the arc-shaped distribution protrusions 44 caused by loose connections or positional displacement, thereby ensuring the stable realization of the initial fluid homogenization function and preventing flow field turbulence.

[0024] Specifically, the distribution pipe 20 is provided with a straight pipe section 21 and a bent pipe section 22. The bent pipe section 22 is provided with multiple sets of diversion holes 23. The orientation of the multiple sets of diversion holes 23 is opposite to that of the liquid inlet pipe 11, so that the diversion holes 23 are vertically arranged and the axis of the diversion holes 23 is parallel to the axis of the distribution housing 10.

[0025] In this embodiment, the distribution pipe 20, through the combination of the straight pipe section 21 and the bent pipe section 22, combined with the structural design of the vertically arranged diversion hole 23 with its axis parallel to the axis of the distribution housing 10, allows the fluid introduced through the connecting pipe 12 to first achieve pressure stabilization and smooth flow transition through the straight pipe section 21, then be precisely turned through the bent pipe section 22, and finally output vertically and directly from the diversion hole 23 with a unified direction. The consistent orientation and parallel axis of the multi-component flow holes 23 ensure that the liquid outlet direction and angle of all flow holes 23 are completely uniform, avoiding the problems of misalignment and uneven coverage of fluid spray area caused by deviation of the orientation of the flow holes 23, and providing a uniform fluid output basis for the precise distribution of electronic grade hydrochloric acid.

[0026] Specifically, the bent pipe section 22 is also provided with a flange-connected collection housing 30, and the collection housing 30 and the straight pipe section 21 are respectively provided at both ends of the bent pipe section 22.

[0027] In this embodiment, the collection shell 30 and the straight pipe section 21 are respectively located at both ends of the bent pipe section 22, forming a complete closed-loop flow channel for fluid transportation, diversion, and residual collection. Most of the electronic-grade hydrochloric acid entering the bent pipe section 22 through the straight pipe section 21 is directionally output through the diversion hole 23, while the trace residual fluid that does not exit from the diversion hole 23, such as the liquid adhering to the inner wall of the pipe and the liquid stagnant at the end of the diversion, can flow naturally into the collection shell 30 at the end, which facilitates the storage of residual liquid during subsequent maintenance. Of course, the flange-connected collection housing 30 can also serve as a functional expansion interface. Depending on actual usage requirements, auxiliary components such as sampling valves, drain valves, or pressure sensors can be added via the flange connection. For example, residual fluid can be extracted from the collection housing 30 through the sampling valve for purity testing, and the collected residual impurities can be periodically discharged through the drain valve. Alternatively, the fluid pressure inside the bent pipe section 22 can be monitored through the pressure sensor. Functional upgrades can be achieved without modifying the main structure of the device, adapting to diverse needs such as purity monitoring and pressure control during the electronic-grade hydrochloric acid treatment process, significantly improving the device's flexibility in adapting to different scenarios.

[0028] Specifically, the included angle between the straight pipe section 21 and the bent pipe section 22 is between 120° and 160°.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A fluid distributor for electronic-grade hydrochloric acid production processes, characterized in that: It includes a columnar distribution shell (10), on which a liquid inlet pipe (11) is provided; The distribution shell (10) is uniformly provided with multiple sets of connecting pipes (12), which are arranged in a ring array around the axis of the distribution shell (10). The connecting pipes (12) are connected to the inner cavity of the distribution shell (10). A fluid distribution pipe (20) is provided on the connecting pipe (12). A distribution component (40) is also provided inside the distribution shell (10). The distribution component (40) is connected to the distribution shell (10) so that the fluid is uniformly dispersed in the inner cavity of the distribution shell (10).

2. A fluid distributor for electronic-grade hydrochloric acid production process according to claim 1, characterized in that: The distribution component (40) includes a distribution cylinder (45), on which multiple sets of flow holes (41) are uniformly opened; The distribution cylinder (45) is disposed in the inner cavity of the distribution shell (10) for uniformly dispersing the fluid.

3. A fluid distributor for electronic-grade hydrochloric acid production process according to claim 2, characterized in that: The bottom end of the distribution cylinder (45) is provided with a distribution plate (43), and the distribution plate (43) is provided with arc-shaped distribution protrusions (44). The arc-shaped protrusions (44) are located directly below the liquid inlet pipe (11).

4. A fluid distributor for electronic-grade hydrochloric acid production process according to claim 3, characterized in that: The distribution housing (10) is uniformly provided with multiple sets of first connecting holes (13), and the distribution plate (43) is uniformly provided with multiple sets of second connecting holes (42), with the multiple sets of first connecting holes (13) and the multiple sets of second connecting holes (42) being matched in position; The first connecting hole (13) and the second connecting hole (42) are connected by bolts.

5. A fluid distributor for electronic-grade hydrochloric acid production process according to claim 1, characterized in that: The distribution pipe (20) is provided with a straight pipe section (21) and a bent pipe section (22). The bent pipe section (22) is provided with multiple sets of diversion holes (23). The orientation of the multiple sets of diversion holes (23) is opposite to that of the liquid inlet pipe (11), so that the diversion holes (23) are vertically arranged, and the axis of the diversion holes (23) is parallel to the axis of the distribution shell (10).

6. A fluid distributor for electronic-grade hydrochloric acid production process according to claim 5, characterized in that: The bent pipe section (22) is also provided with a flange-connected collection housing (30), and the collection housing (30) and the straight pipe section (21) are respectively provided at both ends of the bent pipe section (22).

7. A fluid distributor for electronic-grade hydrochloric acid production process according to claim 5, characterized in that: The included angle between the straight pipe section (21) and the bent pipe section (22) is between 120° and 160°.

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