A cleaning spray structure for a reticle pod

Abstract

The utility model relates to the technical field of cleaning and spraying, and discloses a photomask box cleaning and spraying structure, which comprises a rack and a cleaning cylinder installed on the rack, an upper cover capable of being opened and closed is covered on the upper end of the cleaning cylinder, a rotatable supporting and positioning assembly is arranged inside the cleaning cylinder and is used for bearing a photomask box body and driving the photomask box body to rotate, a reciprocating swingable upper spraying arm is further arranged inside the cleaning cylinder, and the upper spraying arm is located above the supporting and positioning assembly; the supporting and positioning assembly comprises a lower spraying seat, and a plurality of spraying heads are arranged on the upper part of the upper spraying arm and the lower spraying seat. The utility model forms a three-dimensional cleaning flow field covering all outer surfaces and inner cavities of the photomask box body through the multidimensional synergistic effect of "upper spraying arm swing + lower spraying seat rotation + lateral fixed spraying / heating", and completely eliminates the cleaning blind area existing in the traditional single-direction spraying.

Description

Technical Field

[0001] This utility model relates to the field of cleaning spray technology, specifically a photomask cleaning spray structure. Background Technology

[0002] The photomask container is a critical carrier used in semiconductor manufacturing to store and transport photomasks (masks / reticles). Its internal cleanliness directly determines the risk of photomask contamination, which in turn has a decisive impact on the final yield of the chip. Therefore, cleaning the photomask container is a crucial auxiliary process in semiconductor front-end manufacturing, requiring extremely high cleanliness, non-destructive operation, and high efficiency.

[0003] Currently, common precision cleaning technologies each have their limitations: 1. Ultrasonic cleaning: It has limited cleaning effect on firmly attached nano-sized particles or complex deep pore structures inside the photomask box, and high-frequency vibration may cause hidden damage to the precision structure of the photomask box itself or secondary adsorption after the particles are loosened. 2. Chemical soaking cleaning: There is a risk of chemical residue, which may introduce new pollutants. At the same time, the use and discharge of high-purity chemicals pose safety and environmental hazards, and the process is relatively complex. 3. Dry ice / laser cleaning: Although it is an advanced dry cleaning method, the equipment investment and operating costs are high, the maturity of the technology and the stability of its application on the specific object of photomask box still need to be verified, and there may be thermal stress risks.

[0004] In contrast, spray cleaning technology has advantages such as high efficiency, controllable cost, and easy automation. However, ordinary spray structures are difficult to deal with the complex internal and external structures of photomask boxes, resulting in cleaning dead corners and liquid residues. It cannot simultaneously meet the stringent requirements of all-round, non-destructive, and rapid drying.

[0005] Therefore, there is an urgent need to develop a high-efficiency spray structure specifically designed for photomask boxes, capable of achieving all-round coverage and integrated cleaning and drying. Utility Model Content

[0006] The purpose of this invention is to overcome the shortcomings of the prior art and provide a photomask box cleaning spray structure. This structure can perform separate, all-round, and automated cleaning and drying of the photomask box body and door cover, effectively eliminating cleaning dead corners, improving cleaning efficiency and cleanliness, and achieving rapid drying.

[0007] The present invention proposes a photomask cleaning spray structure, including a frame and a cleaning cylinder installed on the frame. The upper end of the cleaning cylinder is covered with an openable and closable top cover. The cleaning cylinder is provided with a rotatable support and positioning component inside, which is used to support the photomask box body and drive it to rotate. The cleaning cylinder is also equipped with an upper spray arm that can swing back and forth, and the upper spray arm is located above the support and positioning assembly. The support and positioning assembly includes a lower spray seat, and both the lower spray seat and the upper spray arm are provided with multiple spray heads; The inner peripheral wall of the cleaning cylinder is provided with lateral functional elements, including heating elements and / or nozzles; The rotation of the support positioning component and the reciprocating swing of the upper spray arm form a dynamic spray trajectory. Together with the upper and lower nozzles and lateral functional elements, a three-dimensional cleaning flow field is constructed, which thoroughly covers the inner and outer surfaces of the photomask box, eliminating the cleaning dead corners of traditional spraying. The integrated design of the heating element and the nozzle allows the entire cleaning and drying process to be completed in the same cavity without the need for transfer between equipment, avoiding secondary pollution and greatly improving work efficiency.

[0008] As a further optimization of this utility model, the support positioning component includes a plurality of support positioning plates evenly distributed circumferentially on the outside of the lower spray seat. The support positioning plates extend axially upward, and a limiting structure for corner positioning of the photomask box body is provided on their upper part. The circumferentially distributed support and positioning plates provide stable support for the photomask box body, preventing it from shifting during rotation. The corner limiting structure precisely positions the photomask box, ensuring accurate spraying position, while reducing the contact area between the box body and the components, reducing the risk of surface scratches, and adapting to the precision structural requirements of the photomask box.

[0009] As a further optimization of this utility model, the limiting structure includes two limiting posts installed on the upper end of the support positioning plate, the two limiting posts being arranged opposite to each other and having adjustable height; The relatively set limiting posts form a clamping space, which flexibly limits the four corners of the photomask box to avoid damage from rigid contact. The height-adjustable design can adapt to photomask boxes of different specifications, enhancing the versatility of the structure. At the same time, the height can be adjusted to ensure that the box is placed horizontally, ensuring uniform cleaning.

[0010] As a further optimization of this utility model, a vacuum adsorption component is provided on the inner side of the upper cover for adsorbing and fixing the door cover of the photomask box, and the spray head is also provided on the upper surface of the upper spray arm. The vacuum adsorption assembly enables the door cover and the box body to be separated and fixed, allowing the inner side of the door cover and the inner cavity of the box body to be fully exposed for easy all-round cleaning. The nozzles on the upper surface of the upper spray arm can clean the door cover at the same time, realizing parallel processing of the box body and the door cover, improving cleaning efficiency. The adsorption fixing method also prevents the door cover from shifting or being damaged during the cleaning process.

[0011] As a further optimization of this utility model, a gas protection nozzle is provided around the vacuum adsorption component. The gas protection nozzle can spray gas to form an air curtain, preventing the cleaning liquid from splashing onto the vacuum adsorption component and the inner mechanism of the upper cover, thus avoiding component failure or secondary pollution caused by liquid residue. At the same time, the gas sprayed by the gas protection nozzle can assist the door cover in drying and improve the drying effect.

[0012] As a further optimization of this utility model, the lateral functional element is installed on a plurality of fixing plates evenly distributed circumferentially on the inner wall of the cleaning cylinder. The circumferentially distributed fixing plates ensure that the lateral functional components are evenly distributed, so that the sides of the photomask box are evenly sprayed or heated. The fixing plates provide a stable mounting base for the functional components, preventing the components from shifting due to vibration during the cleaning process, ensuring operational stability, and facilitating the maintenance and replacement of the components.

[0013] As a further optimization of this utility model, the nozzle includes a gas nozzle and a liquid nozzle, which are connected to an external supply system through an air inlet pipe and a liquid inlet pipe, respectively. The gas nozzle can introduce clean, dry gas to blow away residual liquid on the surface of the photomask; the liquid nozzle introduces cleaning fluid to achieve the cleaning function. The two nozzles can be controlled independently and switched flexibly. With the help of the heating element, the entire process of "cleaning-blowing-drying" can be completed to meet the requirements of high cleanliness cleaning.

[0014] As a further optimization of this utility model, the upper spray arm is connected to a driver that drives its reciprocating swing via a rotating shaft, and the driver is a rotary cylinder. The rotary cylinder drive offers rapid response and controllable swing angle, allowing for precise adjustment of the upper spray arm's swing range and frequency. It adapts to the cleaning needs of photomask boxes of different sizes. Compared to motor drive, the rotary cylinder has a compact structure, is easy to maintain, and operates smoothly, avoiding interference with the precision cleaning environment.

[0015] As a further optimization of this utility model, the support and positioning component is installed at the bottom of the cleaning cylinder via a rotating base and is driven to rotate by a drive motor. The drive motor provides stable rotational power and can adjust the rotational speed to adapt to the needs of different cleaning stages. For example, high-speed rotation during cleaning improves the rinsing effect, while low-speed rotation during drying ensures uniform heating. The rotating base ensures that the support and positioning component rotates coaxially, avoiding uneven spraying or box shaking caused by eccentricity, and improving the overall structural stability.

[0016] As a further optimization of this utility model, the number of the supporting positioning plates is four, which are arranged in a rectangular pattern. The four rectangular supporting positioning plates are adapted to the four corners of the bottom of the photomask box, ensuring accurate positioning and balanced force, so as to ensure that the box remains stable during high-speed rotation. The rectangular distribution structure is simple and easy to process, while reserving sufficient spraying space for the nozzle of the lower spray seat to avoid obstruction and ensure the cleaning effect of the bottom of the box.

[0017] This invention achieves all-round, no-dead-angle cleaning of photomask boxes through a multi-dimensional dynamic spray structure, and the separate adsorption design ensures thorough cleaning of the box body and door cover; it integrates cleaning, blowing, and drying functions, simplifies the process and avoids secondary pollution, and the flexible positioning and adjustable structure adapt to photomask boxes of different specifications and can effectively prevent surface damage. It has a high degree of automation and each action can be precisely controlled, meeting the high cleanliness, high efficiency and non-damage requirements of semiconductor manufacturing for photomask box cleaning.

[0018] The photomask cleaning spray structure proposed in this utility model has the following beneficial effects: (i) Through the multi-dimensional synergistic effect of “swing of the upper spray arm + rotation of the lower spray seat + lateral fixed spraying / heating”, a three-dimensional cleaning flow field covering all the outer surfaces and inner cavities of the photomask box is formed, completely eliminating the cleaning blind spots that exist in traditional unidirectional spraying. (ii) The innovative use of vacuum adsorption to fix the door cover to the top cover, separates it from the box body and cleans it simultaneously. This design allows the inner cavity of the box body and the inner side of the door cover, two key and difficult-to-clean parts, to be fully exposed and cleaned, which helps to improve the actual cleaning efficiency. (iii) The integrated side heating lamp tube and multi-channel gas / liquid nozzles can complete the entire process of cleaning, blowing, and drying in the same cavity (sequentially) or selectively, which greatly shortens the operation cycle and avoids the risk of secondary pollution caused by cross-equipment transfer. (iv) The T-shaped structure and adjustable limit post design of the support positioning component realize the rapid and accurate positioning and flexible clamping of the photomask box body, ensuring stability under high-speed rotation, while avoiding scratches on the product surface caused by rigid contact. (v) The entire cleaning process, including the swing of the spray arm, the rotation of the base, and the switching of the medium, can be automatically controlled. The system is highly automated, and the gas protection nozzles on the top cover can prevent liquid splashing and contamination of the top cover mechanism, providing comprehensive protection and improving the long-term operational reliability of the system.

[0019] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0020] Figure 1This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a first-view structural diagram of the internal components of the cleaning cylinder of this utility model; Figure 3 This is a second-view structural diagram of the internal components of the cleaning cylinder of this utility model; Figure 4 This is a third-view structural diagram of the internal components of the cleaning cylinder of this utility model; Figure 5 This is a schematic diagram of the structure of the top cover of this utility model.

[0021] Figure descriptions: 1. Frame; 2. Cleaning cylinder; 3. Top cover; 4. Rotating base; 5. Lower spray seat; 6. Support positioning plate; 7. Upper spray arm; 8. Rotating shaft; 9. Fixing plate; 10. Heating lamp; 11. Gas nozzle; 12. Liquid nozzle; 13. Air inlet pipe; 14. Liquid inlet pipe; 15. Vacuum adsorption assembly; 16. Gas protection nozzle; 17. Limiting post. Detailed Implementation

[0022] The embodiments of this utility model are described in detail below. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar symbols denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0023] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0024] Example 1 Please see Figures 1-4 The photomask cleaning spray structure proposed in this utility model includes a frame 1 and a cleaning cylinder 2 installed on the frame 1. The upper end of the cleaning cylinder 2 is open and covered with an outwardly opening top cover 3. The lower end of the cleaning cylinder 2 has a drain outlet. A rotating base 4 is coaxially mounted on the lower end of the inner cavity of the cleaning cylinder 2. A lower spray seat 5 and multiple support positioning plates 6 are evenly distributed on the outer side of the lower spray seat 5 on the upper end of the rotating base 4. The multiple support positioning plates 6 extend axially upward to form a support positioning assembly that is adapted to the photomask box. The photomask box is placed on the support positioning assembly. The lower end of the rotating base 4 is driven by a motor or other drive elements to drive the photomask box to rotate automatically. The inner cavity of the cleaning cylinder 2 is provided with an upper spray arm 7 located above the photomask box. The upper spray arm 7 is rotatably connected to the frame 1 via a rotating shaft 8. The upper spray arm 7 is driven to swing back and forth by the drive to rotate the rotating shaft 8. The drive can be a combination of a rotary cylinder or a motor driven rotating structure. The drive is preferably a rotary cylinder. One end of the upper spray arm 7 extends to the inner wall of the cleaning cylinder 2 and is fixedly connected to the upper end of the rotating shaft 8. The lower end of the rotating shaft 8 extends vertically downward and is connected to the piston end of the rotary cylinder. The rotating shaft 8 is driven by the rotary cylinder to drive the upper spray arm 7 to perform reciprocating rotation. Spray heads are installed on the lower end face of the upper spray arm 7 and the upper end face of the lower spray seat 5. There are multiple spray heads on the lower end face of the upper spray arm 7, which are evenly distributed along its length, so as to uniformly spray and wash the upper and lower surfaces of the photomask box during the rotation process.

[0025] Example 2 It illustrates yet another embodiment of the invention based on Embodiment 1; like Figures 2-4 As shown, multiple fixed plates 9 are evenly distributed circumferentially and extend axially on the inner wall of the cleaning cylinder 2. A heating lamp tube 10 opposite to the photomask box is installed on the inner side of at least one fixed plate 9. A nozzle is also installed on the inner side of at least one fixed plate 9. By introducing cleaning fluid into the nozzle, the upper and lower surfaces and sides of the photomask box can be cleaned in all directions. After cleaning, dry air is introduced into the nozzle and heated by the heating lamp tube 10 to dry the surface of the cleaned photomask box.

[0026] Example 3 It illustrates yet another embodiment of the present invention based on Embodiment 2; like Figure 3 and Figure 4 As shown, the nozzle includes a gas nozzle 11 and a liquid nozzle 12. The gas nozzle 11 is connected to an external air source through an air inlet pipe 13, and the liquid nozzle 12 is connected to an external cleaning fluid supply pipeline through a liquid inlet pipe 14, thereby achieving comprehensive cleaning and drying of the photomask surface.

[0027] Example 4 It illustrates yet another embodiment of the invention based on any of the above embodiments; The photomask box body and cover need to be cleaned separately. The body is supported and positioned above the lower spray seat 5 by multiple support positioning plates 6 for cleaning, while the cover needs to be cleaned from the lower end of the upper cover 3. Figures 3-5 As shown, a vacuum adsorption assembly 15 is installed at the center of the lower end face of the upper cover 3, and a nozzle is also installed on the upper end face of the upper spray arm 7. The vacuum adsorption assembly 15 performs vacuum adsorption on the door cover, and then the upper spray arm 7 washes and dries the door cover by reciprocating swing. Furthermore, a gas protection nozzle 16 is installed in the non-adsorption area at the bottom of the vacuum adsorption assembly 15. The gas protection nozzle 16 is connected to an external gas source and the nozzle extends downward to blow out gas, preventing the cleaning liquid from splashing onto the upper cover 3, thus playing a protective and cleaning role.

[0028] Example 5 It illustrates yet another embodiment of the invention based on any of the above embodiments; like Figure 4 As shown, there are four support positioning plates 6 arranged in a rectangular shape and adapted to the bottom of the photomask box. The upper end of the support positioning plate 6 is T-shaped, and both ends of the T-shape are equipped with axially upward extending limiting posts 17. The two limiting posts 17 are arranged opposite each other to form a limiting area. The four corners of the bottom of the photomask box are respectively engaged with the corresponding limiting areas, thereby facilitating the four-corner limiting of the photomask box. The T-shaped support positioning plate 6 has vertically arranged threaded holes at both ends. The limiting post 17 is a bolt rod that is threaded from bottom to top. The upper end of the bolt rod is fitted with an anti-slip sleeve. The anti-slip sleeve is a rubber sleeve that contacts the surface of the photomask box, which can improve the stability of the photomask box.

[0029] The working principle of this utility model is based on the core ideas of "dynamic multi-dimensional coverage" and "functional temporal integration", and the specific process is as follows: Step 1: Open the top cover 3, place the photomask box upside down on the multiple support positioning plates 6 of the support positioning component, and achieve precise angular positioning and flexible clamping through the limiting post 17. Then place the door cover of the photomask box on the vacuum adsorption component 15 inside the top cover 3, start the vacuum to firmly adsorb it, and then close the top cover 3 to form a sealed cleaning space. Step 2, Pre-cleaning / Main Cleaning: The external control system opens the cleaning fluid valve. Ultrapure water is selected as the cleaning fluid. The ultrapure water is delivered to the liquid nozzles 12 of the upper spray arm 7, the liquid nozzles 12 of the lower spray seat 5, and the liquid nozzles 12 on the side fixing plate 9 through the liquid inlet pipe 14. At the same time, the drive motor starts, driving the rotating base 4, the lower spray seat 5, and the photomask box to rotate at a constant speed. The rotating cylinder drives the rotating shaft 8, causing the upper spray arm 7 to swing back and forth at a certain angle in the horizontal plane. The rotation of the box ensures that all points around it can be covered by the upper and lower sprays, while the swing of the upper spray arm 7 greatly expands its coverage range in the radial direction of the box. The side spray further supplements the cleaning angle. The combination of these three movements allows the cleaning medium to cover the entire complex outer surface and inner cavity of the box without dead angles. At the same time, the nozzles on the upper surface of the upper spray arm 7 clean the door cover adsorbed on the upper cover simultaneously. Step 3, Preliminary drying: Switch valves, close the liquid passage, open the gas passage, and clean, dry gas is sprayed out from all gas nozzles 11, using high-speed airflow to blow away most of the liquid droplets on the workpiece surface; Step 4, Drying: Turn on the heating lamp 10 installed on the side fixing plate 9 to radiate heat inside the cleaning drum. At this time, the box is still rotating, and the residual trace moisture is quickly evaporated and carried away by the airflow, so as to achieve thorough drying of the light cover box and the door cover. Throughout the cleaning and drying process, the gas protection nozzle 16 of the top cover 3 continuously sprays gas, forming a downward air curtain, which effectively prevents droplets or water vapor from splashing upward and condensing on the complex structure of the top cover 3, ensuring the cleanliness of the top cover and the long-term operational reliability of the vacuum adsorption component 15.

[0030] In summary, this utility model, through precise mechanical motion design and integration of a multi-media conveying system, sequentially completes the entire process from cleaning to drying within a closed workstation, achieving automated, efficient, and high-cleanliness processing of photomask boxes, a high-requirement workpiece.

[0031] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A photomask cleaning spray structure, comprising a frame (1) and a cleaning cylinder (2) mounted on the frame, wherein the upper end of the cleaning cylinder (2) is covered with an openable and closable top cover (3), characterized in that: The cleaning cylinder (2) is equipped with a rotatable support and positioning component, which is used to support the photomask box and drive it to rotate; The cleaning cylinder (2) is also equipped with an upper spray arm (7) that can swing back and forth, and the upper spray arm (7) is located above the support and positioning assembly. The support and positioning assembly includes a lower spray seat (5), and both the lower spray seat (5) and the upper spray arm (7) are provided with multiple nozzles; The inner peripheral wall of the cleaning cylinder (2) is provided with lateral functional elements, including heating elements and / or nozzles.

2. The photomask cleaning spray structure according to claim 1, characterized in that, The support positioning component includes a plurality of support positioning plates (6) evenly distributed circumferentially on the outside of the lower spray seat (5). The support positioning plates (6) extend axially upward, and a limiting structure for corner positioning of the photomask box body is provided on their upper part.

3. The photomask cleaning spray structure according to claim 2, characterized in that, The limiting structure includes two limiting posts (17) installed on the upper end of the support positioning plate (6), the two limiting posts (17) are arranged opposite each other and their height is adjustable.

4. The photomask cleaning spray structure according to claim 1, characterized in that, The inner side of the upper cover (3) is provided with a vacuum adsorption component (15) for adsorbing and fixing the door cover of the photomask box, and the upper surface of the upper spray arm (7) is also provided with the spray head.

5. The photomask cleaning spray structure according to claim 4, characterized in that, Gas protection nozzles (16) are arranged around the vacuum adsorption assembly (15).

6. The photomask cleaning spray structure according to claim 1, characterized in that, The lateral functional elements are mounted on a plurality of fixed plates (9) that are evenly distributed around the inner wall of the cleaning cylinder (2).

7. A photomask cleaning spray structure according to claim 1 or 6, characterized in that, The nozzle includes a gas nozzle (11) and a liquid nozzle (12), which are connected to an external supply system through an air inlet pipe (13) and a liquid inlet pipe (14), respectively.

8. The photomask cleaning spray structure according to claim 1, characterized in that, The upper spray arm (7) is connected to a drive that drives it to swing back and forth via a rotating shaft (8), and the drive is a rotary cylinder.

9. The photomask cleaning spray structure according to claim 1, characterized in that, The support and positioning component is installed at the bottom of the cleaning cylinder (2) via a rotating base (4) and is driven to rotate by a drive motor.

10. The photomask cleaning spray structure according to claim 2, characterized in that, The number of the support positioning plates (6) is four, and they are arranged in a rectangular shape.

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