AMB liner laser cleaning equipment

Abstract

The present application relates to the technical fields of AMB liner plate cleaning, in particular to a kind of AMB liner plate laser cleaning equipment, including rack and the hoist frame being set on rack, laser cleaning module is set on hoist frame for laser processing to AMB liner plate, longitudinal and transverse movement module, it is fixedly set on rack, for driving AMB liner plate to carry out longitudinal and transverse direction positioning movement;Placement module, it is set on longitudinal and transverse movement module for limiting and containing AMB liner plate.The longitudinal electric slide of longitudinal and transverse movement module and the linkage of transverse electric slide, cooperate with the track guide structure of guide support piece, can improve the positioning accuracy of AMB liner plate, ensure that laser processing head is always aligned with the area to be cleaned, the integrated design of industrial camera and laser processing head, can real-time acquisition liner plate surface stain image, the placement groove being evenly opened on placement box can simultaneously to multiple liner plate, cooperate with the batch positioning function of longitudinal and transverse movement module, improve the efficiency of liner plate processing.

Description

Technical Field

[0001] This invention relates to the technical field of AMB liner cleaning, and in particular to an AMB liner laser cleaning device. Background Technology

[0002] AMB substrates are key materials in silicon carbide power module packaging. Their performance directly affects the module's heat dissipation capacity, electrical reliability, and long-term stability. During the processing of AMB substrates, surface cleanliness is a critical factor in ensuring substrate performance and reliability. Stains or oxide layers on the substrate surface can easily lead to poor bonding stability between the substrate and the molding compound, increased interfacial thermal resistance, and affect subsequent processing of the substrate. In particular, stains generated during AMB substrate welding operations can easily corrode and oxidize during long-term use, affecting its service life. Traditional cleaning processes, such as chemical solvent cleaning, often leave corrosive residues. Ultrasonic cleaning has low efficiency in removing tiny oxides, while mechanical polishing can damage the coating on the substrate surface. Existing laser cleaning equipment, such as the ceramic substrate laser cleaning device (patent number CN212528163U), although employing laser cleaning technology, uses a single fixed station design, making it impossible to perform batch cleaning of multiple substrates and lacking an adaptive positioning structure. This results in poor adaptability for cleaning AMB substrates of different specifications. Another laser cleaning device (patent number CN113146350A) has a moving module that can only move along a single axis. During cleaning, the substrate position needs to be manually adjusted, resulting in low automation and difficulty in guaranteeing cleaning accuracy. Especially when dealing with stubborn oxide layers generated after welding, the cleaning efficiency is often low due to the lag in laser focus adjustment.

[0003] For the reasons mentioned above, the technical problems in the cleaning and processing of AMB liners urgently need to be overcome. Summary of the Invention

[0004] To overcome the technical problems mentioned above, this application provides an AMB liner laser cleaning device with the following technical solution: An AMB liner laser cleaning device includes a frame and a lifting frame mounted on the frame. A laser cleaning module is mounted on the lifting frame for laser treatment of the AMB liner. A longitudinal and transverse movement module is fixedly mounted on the frame for positioning and moving the AMB liner in the longitudinal and transverse directions. A placement module is mounted on the longitudinal and transverse movement module for limiting and holding the AMB liner. The placement module includes a placement box that is fixed to the longitudinal and transverse moving module by bolts. The placement box has evenly spaced placement slots, which are rectangular in structure. The placement box contains a positioning unit that mates with the placement slots, and a placement plate is provided on the inner wall of the placement box.

[0005] Preferably, the longitudinal and transverse movement module includes a longitudinal electric slider arranged along the longitudinal direction of the frame, a transverse plate arranged on the longitudinal electric slider, a guide support member arranged on the side of the transverse plate away from the longitudinal electric slider, a transverse electric slider arranged on the transverse electric slider, a mounting frame arranged on the transverse electric slider, threaded holes evenly opened on the mounting frame, and the placement box is fixed to the mounting frame by bolts.

[0006] Preferably, the guide support includes a guide rail mounted on the frame and parallel to the longitudinal electric slider, a guide frame slidably mounted on the guide rail, and the guide frame connected to the horizontal plate.

[0007] Preferably, the horizontal plate has two sliding grooves, which are symmetrically located on both sides of the mounting frame. The mounting frame has an inverted U-shaped structure, and its lower end face is slidably disposed in the sliding grooves.

[0008] Preferably, the laser cleaning module includes a lifting cylinder 1 mounted on a hoisting frame, a fixed frame mounted on the lifting cylinder 1, a laser processing head mounted on the fixed frame, and an industrial camera mounted on the fixed frame.

[0009] Preferably, the positioning unit includes an arc groove formed on the placement box at the corner of the placement slot, the arc groove communicating with the placement slot, and ear grooves symmetrically formed on both sides of the placement slot and communicating with the placement slot.

[0010] Preferably, the placement plate is provided with uniformly distributed adsorption holes, which are connected to a negative pressure air pump via air pipes. The negative pressure air pump is mounted on the frame.

[0011] Preferably, the positioning unit may further include an arc groove and a transverse groove formed on the placement plate below each placement slot. A longitudinal block is slidably disposed in the arc groove, and a transverse block is slidably disposed in the transverse groove. A longitudinal push plate is disposed on the longitudinal block, and a transverse push plate is disposed in the transverse groove. The lower ends of each longitudinal block are evenly connected by a longitudinal frame. Each transverse block located below the placement slot is connected by a transverse frame, and the longitudinal frame is located below the transverse frame.

[0012] The longitudinal frame is connected to a longitudinal drive component, and the transverse frame is connected to a transverse drive component. The longitudinal drive component and the transverse drive component have the same structure.

[0013] Preferably, the longitudinal drive component includes an electric motor mounted on the placement box, and the output shaft of the electric motor passes through a bearing and has a lead screw mounted on one end of the placement frame. A threaded hole is provided on the longitudinal frame, and the lead screw engages with the threaded hole.

[0014] In summary, the beneficial technical effects of this application are as follows: The invention is designed 1. By linking the longitudinal and transverse electric sliders of the longitudinal and transverse moving modules, and in conjunction with the track guiding structure of the guide support, the positioning accuracy of the AMB liner can be improved, ensuring that the laser processing head is always aligned with the area to be cleaned. 2. The combination design of the arc groove and ear groove in Embodiment 1 of this application can provide adsorption force for the standard AMB liner through the cooperation of the negative pressure air pump and the adsorption hole, preventing displacement during cleaning; 3. Example 2 can automatically adjust the positioning boundary for AMB liners of different specifications without changing the fixture, thus improving adaptability during operation; 4. The integrated design of industrial camera and laser processing head can acquire images of dirt on the liner surface in real time, improving the efficiency of laser cleaning of the liner surface; 5. The evenly spaced slots on the placement box can accommodate multiple liner plates simultaneously. Combined with the batch positioning function of the longitudinal and transverse movement module, this improves the efficiency of liner plate processing. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural schematic diagram of the present invention; Figure 2 This is a schematic diagram of the positioning unit in Embodiment 1 of the present invention; Figure 3 This is a schematic diagram of the first structure of the positioning unit in Embodiment 2 of the present invention; Figure 4 This is a schematic diagram of the second structure of the positioning unit in Embodiment 2 of the present invention; Detailed Implementation The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0016] Example 1 discloses an AMB liner laser cleaning device, such as Figure 1 , 2 As shown, the system includes a frame 1 and a lifting frame 2 mounted on the frame 1. A laser cleaning module 3 is mounted on the lifting frame 2 for laser treatment of AMB liners. A longitudinal and transverse movement module 4 is fixedly mounted on the frame 1 and is used to move the AMB liners in the longitudinal and transverse directions. A placement module 5 is mounted on the longitudinal and transverse movement module 4 for limiting and holding the AMB liners. The longitudinal and transverse movement module 4 controls the movement of the AMB liners in the placement module 5, while the laser cleaning module 3 performs laser cleaning treatment on the AMB liners that need to be cleaned.

[0017] The placement module 5 includes a placement box 51 that is fixed to the longitudinal and transverse moving module 4 by bolts. Placement slots 52 are evenly provided on the placement box 51. The placement slots 52 are rectangular. A positioning unit 53 that cooperates with the placement slots 52 is provided inside the placement box 51. A placement plate 54 is provided on the inner wall of the placement box 51.

[0018] The placement slots 52 evenly distributed on the placement box 51 can hold multiple AMB liners at the same time, while the positioning unit 53 can position the placed AMB liners during operation to improve the stability of the AMB liners during the laser cleaning process.

[0019] The longitudinal and transverse movement module 4 includes a longitudinal electric slider 41 arranged along the longitudinal direction of the frame 1, a transverse plate 42 arranged on the longitudinal electric slider 41, a guide support 43 arranged on the side of the transverse plate 42 away from the longitudinal electric slider 41, a transverse electric slider 44 arranged on the transverse electric slider 44, a mounting frame 45 arranged on the transverse electric slider 44, threaded holes evenly opened on the mounting frame 45, and the placement box 51 is fixed to the mounting frame 45 by bolts.

[0020] The longitudinal electric slider 41 and the transverse electric slider 44 work together to move any AMB liner in the placement box 51 to the working position of the laser cleaning module 3, ensuring the accuracy of the AMB liner during laser cleaning operations. The guide support 43 includes a guide rail mounted on the frame 1 and parallel to the longitudinal electric slider 41. A guide frame is slidably mounted on the guide rail and connected to the horizontal plate 42. This improves the working stability of the horizontal plate 42 and also increases its load-bearing capacity.

[0021] Two sliding grooves are provided on the horizontal plate 42, and the two sliding grooves are symmetrically located on both sides of the mounting frame 45. The mounting frame 45 has an inverted U-shaped structure, and its lower end face is slidably disposed in the sliding grooves, which can improve the stability of the mounting frame 45 during operation. The laser cleaning module 3 includes a lifting cylinder 21 mounted on a hoisting frame 2, a fixed frame 22 mounted on the lifting cylinder 21, a laser processing head 23 mounted on the fixed frame 22, and an industrial camera mounted on the fixed frame 22. An industrial camera is electrically connected to an image processor via a gigabit network cable, transmitting real-time images of surface contaminants at a resolution of 1280×960. The image processor is electrically connected to a PLC controller via a communication cable, converting the processed contaminant coordinate data into control commands. The PLC is electrically connected to a cylinder signal transmitter via a DO digital output port, which converts the 0-10V control voltage into a pneumatic signal to drive the lifting cylinder 21. The industrial camera and laser processing head 23 adopt a coaxial optical path design, integrated at the front end of the mounting bracket 22 via a 45° beam splitter prism, ensuring that the deviation between the visual coordinate system and the laser processing coordinate system is ≤0.05mm. The industrial camera works in conjunction with the laser processing head 23 during operation. The industrial camera identifies the location of the AMB liner that needs to be cleaned and feeds back the location information to the image processor. The image processor feeds back the image conversion information to the PLC. The PLC feeds back the received information to the lifting cylinder 21 through the cylinder signal device. The lifting cylinder 21 drives the laser processing head 23 to adjust the focus, and then the laser processing head 23 works to perform laser cleaning on the AMB liner.

[0022] Upon detecting that the AMB liner needs cleaning, the lifting cylinder 21 controls the laser processing head 23 to adjust its height, thereby enabling the light to be focused on the cleaning area on the AMB liner. The laser processing head 23 then begins to perform laser cleaning on the AMB liner.

[0023] The positioning unit 53 includes an arc groove 61 located at the corner of the placement slot 52 on the placement box 51. The arc groove 61 is connected to the placement slot 52. The placement box 51 has ear grooves 62 symmetrically located on both sides of the placement slot 52 and connected to the placement slot 52.

[0024] The arc groove 61 can prevent friction and collision of the edges and corners of the AMB liner during operation, while the ear groove improves the ease of handling the AMB liner.

[0025] The placement plate 54 is provided with uniformly distributed adsorption holes 63, and the placement box 51 is connected to a negative pressure air pump through an air pipe. The negative pressure air pump is installed on the frame 1.

[0026] After the AMB liner is placed inside the placement slot 52, the negative pressure air pump is started. The negative pressure generated by the negative pressure air pump during operation is used to adsorb the AMB liner through the cooperation between the air pipe and the adsorption hole 63, thereby improving the stability of the AMB liner during processing.

[0027] Example 2: The content identical to that in Example 1 will not be described in this example. The main focus is on the different solutions described below. Figure 1 , Figure 3-4 As shown, the positioning unit 53 may further include a longitudinal groove 71 and a transverse groove 72 formed on the placement plate 54 below each placement slot 52. A longitudinal block 73 is slidably disposed in the longitudinal groove 71, and a transverse block 74 is slidably disposed in the transverse groove 72. A longitudinal push plate 75 is disposed on the longitudinal block 73, and a transverse push plate 76 is disposed in the transverse groove 72. The lower ends of each longitudinal block 73 are evenly connected by a longitudinal frame 77. Each transverse block 74 located below the placement slot 52 is connected by a transverse frame 78, and the longitudinal frame 77 is located below the transverse frame 78.

[0028] A longitudinal drive component 79 is connected to the longitudinal frame 77, and a transverse drive component is connected to the transverse frame 78. The longitudinal drive component 79 and the transverse drive component have the same structure.

[0029] By adopting the above technical solution, positioning processing can be performed on AMB liners of different specifications during operation without changing the fixtures, thus improving the convenience of AMB liner cleaning and processing.

[0030] The longitudinal drive component 79 includes an electric motor mounted on the placement box 51. The output shaft of the electric motor passes through a bearing and a lead screw is mounted on one end of the placement frame. A threaded hole is provided on the longitudinal frame 77, and the lead screw engages with the threaded hole.

[0031] When using the above technical solution for cleaning AMB liners of different specifications, two working methods can be adopted: Method 1: First, place the AMB liner to be processed onto the placement plate 54. Then, start the longitudinal drive component 79 and the transverse drive component in sequence. The lead screw is controlled by an electric motor. During operation, the lead screw controls the longitudinal frame 77 or the transverse frame 78 to adjust through lead screw transmission, thereby controlling the longitudinal push plate 75 or the transverse push plate 76 to fit against the end face of the AMB liner to achieve the purpose of positioning the AMB liner. Method 2: First, start the longitudinal drive component 79 and the transverse drive component alternately according to the specifications of the AMB liner, so as to drive the longitudinal push plate 75 or the transverse push plate 76 to adjust to the appropriate position, and then place the AMB liner on the placement plate 54 for limiting.

[0032] The foregoing has only described certain exemplary embodiments of the present invention by way of illustration. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the foregoing drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. An AMB liner laser cleaning device, comprising a frame and a lifting frame mounted on the frame, wherein a laser cleaning module is mounted on the lifting frame for laser treatment of the AMB liner, characterized in that: The longitudinal and transverse movement module is fixedly mounted on the frame and is used to drive the AMB liner to move in the longitudinal and transverse directions for positioning. The placement module, which is set on the longitudinal and transverse movement module, is used to limit and hold the AMB liner. The placement module includes a placement box that is fixed to the longitudinal and transverse moving module by bolts. The placement box has evenly spaced placement slots, which are rectangular in structure. The placement box contains a positioning unit that mates with the placement slots, and a placement plate is provided on the inner wall of the placement box.

2. The AMB liner laser cleaning equipment according to claim 1, characterized in that, The longitudinal and transverse movement module includes a longitudinal electric slider arranged along the longitudinal direction of the frame, a transverse plate on the longitudinal electric slider, a guide support on the side of the transverse plate away from the longitudinal electric slider, a transverse electric slider on the transverse electric slider, a mounting frame on the transverse electric slider, threaded holes evenly opened on the mounting frame, and the placement box is fixed to the mounting frame by bolts.

3. The AMB liner laser cleaning equipment according to claim 2, characterized in that, The guide support includes a guide rail mounted on the frame and parallel to the longitudinal electric slider, a guide frame slidably mounted on the guide rail, and the guide frame connected to the horizontal plate.

4. The AMB liner laser cleaning equipment according to claim 3, characterized in that, Two sliding grooves are provided on the horizontal plate, and the two sliding grooves are symmetrically located on both sides of the mounting frame. The mounting frame has an inverted U-shaped structure and its lower end face is slidably set in the sliding groove.

5. The AMB liner laser cleaning equipment according to claim 1, characterized in that, The positioning unit includes an arc groove on the placement box located at the corner of the placement slot, the arc groove being connected to the placement slot, and ear grooves symmetrically provided on both sides of the placement slot and connected to the placement slot.

6. The AMB liner laser cleaning equipment according to claim 5, characterized in that, The placement plate is evenly provided with adsorption holes, and the placement box is connected to a negative pressure air pump through an air pipe. The negative pressure air pump is installed on the frame.

7. The AMB liner laser cleaning equipment according to claim 1, characterized in that, The positioning unit may also include a longitudinal groove and a transverse groove formed on the placement plate below each placement slot. A longitudinal block is slidably arranged in the longitudinal groove, and a transverse block is slidably arranged in the transverse groove. A longitudinal push plate is arranged on the longitudinal block, and a transverse push plate is arranged in the transverse groove. The lower ends of each longitudinal block are evenly connected by a longitudinal frame. Each transverse block located below the placement slot is connected by a transverse frame, and the longitudinal frame is located below the transverse frame. The longitudinal frame is connected to a longitudinal drive component, and the transverse frame is connected to a transverse drive component. The longitudinal drive component and the transverse drive component have the same structure.

8. The AMB liner laser cleaning equipment according to claim 7, characterized in that, The longitudinal drive component includes an electric motor mounted on the placement box. The output shaft of the electric motor passes through a bearing and a lead screw is mounted on one end of the placement frame. A threaded hole is provided on the longitudinal frame, and the lead screw engages with the threaded hole.

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