Evaporation material cleaning apparatus

Abstract

The utility model discloses an evaporate material cleaning equipment, include: casing, dry ice device is located in the casing, and dry ice device includes dry ice spray head and dry ice equipment, and dry ice equipment includes: dry ice container is located in the casing, the stirring motor is located outside dry ice container, and the electric connection controller, the stirring spiral is located in dry ice container and with controller electric connection, temperature sensor is located in the lateral wall of dry ice container, and with controller electric connection, when the controller is used to receive the dry ice container temperature of temperature sensor detection and is lower than the preset value, control stirring motor drive stirring spiral stirring, heating band is equidistantly wound in dry ice container outside along the same direction. This embodiment sets up the stirring spiral in dry ice container, and the temperature sensor starts stirring spiral stirring when dry ice container temperature is lower than the preset value, and the dry ice particle delivery is even, and the injection is stable, and the cleaning effect consistency is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a cleaning device for vapor deposition materials. Background Technology

[0002] Evaporation is a core process in OLED screen production, involving heating organic materials in a vacuum environment to vaporize and deposit them into a thin film. However, during evaporation, the random movement of organic molecules causes a large amount of material to adhere to the surface of the evaporation pot, anti-adhesion plate, and other materials, forming stubborn deposits. When using dry ice cleaning technology, clean compressed air is used to spray dry ice particles onto the surface to be cleaned. However, when dry ice is stored in a container, it is prone to frost buildup on the inner walls, and the dry ice particles are easily agglomerated under pressure and temperature fluctuations, leading to poor dry ice delivery, unstable spray volume, and significantly reduced cleaning efficiency and effectiveness. Utility Model Content

[0003] Therefore, in order to overcome at least some of the defects and deficiencies in the prior art, this utility model provides a vapor deposition material cleaning device that effectively prevents dry ice from adhering and caking.

[0004] Specifically, this utility model provides a vapor deposition material cleaning device, comprising: a controller; a housing, wherein a negative pressure cavity is formed within the housing, the housing including a first sliding guide rail disposed within the negative pressure cavity; a material placement platform disposed within the negative pressure cavity and movably connected to the housing, the material placement platform being used to place the material to be cleaned; a loading trolley disposed outside the housing, the loading trolley having a second sliding guide rail, the loading trolley being used to slide the material placement platform into the negative pressure cavity via the second sliding guide rail and the first sliding guide rail, and to replace the material placement platform via the loading trolley; a dry ice device disposed within the housing, the dry ice device including a dry ice nozzle and a dry ice equipment, the dry ice equipment including: a dry ice container disposed within the housing; and a stirring motor located within the dry ice container. The container is externally connected to the controller; a stirring spiral is located inside the dry ice container and electrically connected to the controller; a temperature sensor is located on the side wall of the dry ice container and electrically connected to the controller; the controller is used to control the stirring motor to drive the stirring spiral to stir when the temperature of the dry ice container detected by the temperature sensor is lower than a preset value; a heating belt is wound around the outside of the dry ice container at equal intervals in the same direction; a moving component is located inside the housing, the dry ice nozzle is connected to the moving component, and the moving component can drive the dry ice nozzle to move relative to the material placement platform to clean the material to be cleaned on the material placement platform; a vapor deposition material recovery device is located inside the housing, the material placement platform is located on the vapor deposition material recovery device and is connected to the vapor deposition material recovery device.

[0005] In embodiments of this application, the negative pressure chamber includes a first cleaning area and a second cleaning area that are interconnected; the number of dry ice devices is two sets, and the dry ice nozzle includes a first nozzle and a second nozzle, the first nozzle and the second nozzle being respectively connected to the two sets of dry ice devices; the moving component includes: a first robotic arm, disposed in the first cleaning area and connected to the first nozzle, the first robotic arm being used to drive the first nozzle to move relative to the material placement platform within the first cleaning area to clean the material to be cleaned located within the first cleaning area; and a second robotic arm, disposed in the second cleaning area and connected to the second nozzle, the second robotic arm being used to drive the second nozzle to move relative to the material placement platform within the second cleaning area to clean the material to be cleaned located within the second cleaning area.

[0006] In an embodiment of this application, the dry ice device further includes: a ranging sensor located at the top of the dry ice container and electrically connected to the controller, used to measure the remaining dry ice in the dry ice container.

[0007] In an embodiment of this application, the vapor deposition material recovery device includes: a recovery component, comprising a first opening and a second opening disposed opposite to each other, the first opening being larger than the second opening, and the material placement platform being connected to the first opening; an outlet pipe, one end of which is connected to the second opening, and the other end of which is provided with a first sealing element; a circular dust collection box, provided with a second sealing element, the circular dust collection box being detachably connected to the outlet pipe through the second sealing element and the first sealing element; and a clamp, one end of which is fixedly connected to the outlet pipe, and the other end of which is detachably connected to the connection between the first sealing element and the second sealing element, and the clamp surrounds and fixes the first sealing element and the second sealing element.

[0008] In the embodiments of this application, the vapor deposition material cleaning equipment further includes a cyclone integrated device disposed within the housing; the vapor deposition material recovery device further includes: a three-way pipe; a rigid pipe, the outlet pipe further including a conveying outlet, one end of the rigid pipe being connected to the conveying outlet and the other end being connected to the three-way pipe; the rigid pipe being inclined relative to the outlet pipe; and a flexible hose, one end being connected to the three-way pipe and the other end being connected to the cyclone integrated device.

[0009] In an embodiment of this application, the vapor deposition material cleaning equipment further includes an exhaust device, which includes: an exhaust channel located outside the housing; a wind speed sensor located inside the exhaust channel for measuring the flow rate of the emitted gas; and a filter element located between the cyclone integration device and the exhaust channel, with one end connected to the exhaust channel and the other end connected to the cyclone integration device. The filter element is used to filter the gas emitted by the cyclone integration device.

[0010] In an embodiment of this application, the vapor deposition material cleaning equipment further includes a gas replenishment device, which includes: an air inlet channel located outside the housing and connected to the housing; a check valve fixed outside the air inlet channel, the outlet end of the check valve being connected to the air inlet channel to prevent gas from flowing out of the negative pressure chamber; and a filter fixed to the inlet end of the check valve to filter the gas entering the negative pressure chamber.

[0011] In embodiments of this application, the first sliding guide rail and the second sliding guide rail include: a groove; a plurality of rollers spaced apart in the groove; each roller includes: a shaft body, both ends of which are fixedly connected to the sidewall of the groove; and a wheel body rotatably connected to the shaft body.

[0012] In the embodiments of this application, the housing is provided with an operating port and a protective structure connected to the operating port. The protective structure includes: a safety door, one end of which is fixed to the housing; a mechanical latch, fixed to the housing, and the other end of the safety door is fixedly connected to the mechanical latch; the vapor deposition material cleaning equipment also includes: antifreeze gloves, connected to the operating port.

[0013] In an embodiment of this application, the mechanical latch is equipped with a pin-type sensor, which is used to control the vapor deposition material cleaning equipment to stop working when no pin insertion is detected.

[0014] As can be seen from the above, the technical features of this utility model can have one or more of the following beneficial effects: By incorporating a stirring spiral within the dry ice container, in conjunction with a temperature sensor, the spiral activates when the temperature falls below a preset value. This agitates the dry ice particles, ensuring thorough mixing and more even dispersion within the container. Simultaneously, a heating element prevents the dry ice from hardening and clumping due to excessively low temperatures. The stirring spiral further optimizes the looseness and flowability of the dry ice particles, ensuring uniform delivery and stable spraying, thus guaranteeing consistent cleaning results. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 A schematic diagram of a vapor deposition material cleaning device provided in an embodiment of this utility model; Figure 2 for Figure 1A schematic diagram of the structure of a steam evaporation material cleaning equipment from one perspective; Figure 3 for Figure 1 Another structural diagram of the vapor deposition material cleaning equipment; Figure 4 for Figure 2 Schematic diagram of the structure of the vapor deposition material recovery device; Figure 5 for Figure 4 Exploded view of the outlet pipe and the circular dust collection box; Figure 6 for Figure 2 Schematic diagram of the central air supply device; Figure 7 for Figure 3 Schematic diagram of the central exhaust device; Figure 8 for Figure 2 Schematic diagram of the dry ice device; Figure 9 for Figure 8 Another structural schematic diagram of the medium dry ice device; Figure 10 for Figure 2 Schematic diagram of the middle sliding guide rail; Figure 11 for Figure 10 A magnified view of a portion of region A in the middle; Figure 12 for Figure 10 Exploded view of the middle roller; Figure 13 A schematic diagram of the structure of the loading trolley and the material placement platform; Figure 14 for Figure 1 A magnified view of a portion of region B in the middle.

[0017] [Explanation of Key Figure Markings] 1: Evaporation material cleaning equipment; 10: Housing; 101: First movable door; 102: Operating port; 103: Safety door; 104: Mechanical lock; 1041: Pin-type sensor; 11: Negative pressure chamber; 112: First cleaning area; 113: Second cleaning area; 13: Anti-freeze gloves; 14: Material placement platform; 141: Through hole; 15: First sliding guide rail; 151: Groove; 152: Roller; 153: Shaft; 154: Wheel; 16: First robotic arm; 17: Moving component; 18: Second robotic arm; 20: Dry ice device; 201: First nozzle; 202: Second nozzle; 203: Dry ice nozzle; 21: Dry ice equipment; 212: Dry ice container; 213: Stirring motor; 2 14: Stirring spiral; 215: Temperature sensor; 218: Distance sensor; 30: Evaporation material recovery device; 301: Recovery component; 3011: First opening; 3012: Second opening; 302: Outlet pipe; 3021: First seal; 3023: Conveying outlet; 303: Circular dust collection box; 3031: Second seal; 304: Clamp; 305: T-joint; 306: Rigid pipe; 40: Cyclone integrated device; 50: Exhaust device; 501: Exhaust channel; 502: Wind speed sensor; 503: Filter element; 60: Air replenishment device; 601: Air inlet channel; 602: Check valve; 603: Filter; 70: Adjustment platform; 71: Loading trolley; 711: Second sliding guide rail. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments described in this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0019] It should be noted that all directional indicators (such as up, down, left, right, front, back, top, and bottom) in this embodiment of the invention are only used to explain the relative positional relationship and movement of the components in a specific posture (as shown in the attached figure). If the specific posture changes, the directional indicator will also change accordingly. Furthermore, the term "vertical" in the embodiments and claims refers to an angle of 90° between two components or a deviation of -5° to +5°, and the term "parallel" refers to an angle of 0° between two components or a deviation of -5° to +5°.

[0020] In this embodiment of the invention, the use of terms such as "first" and "second" is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features.

[0021] Reference Figure 1 , Figure 2 , Figure 3 , Figure 8 , Figure 9 and Figure 13 As shown, the vapor deposition material cleaning equipment 1 provided in this embodiment includes: a controller, a housing 10, a material placement platform 14, a feeding trolley 71, a dry ice device 20, a moving component 17, and a vapor deposition material recycling device 30.

[0022] Specifically, a negative pressure cavity 11 is formed within the housing 10. The housing 10 includes a first sliding guide rail 15 disposed within the negative pressure cavity 11. A material placement platform 14 is disposed within the negative pressure cavity 11 and movably connected to the housing 10. The material placement platform 14 is used to place materials to be cleaned. The material placement platform 14 completely covers the first cleaning area 112 and the second cleaning area 113. A dry ice device 20 is disposed within the housing 10. The dry ice device 20 includes a dry ice nozzle 203 and a dry ice assembly 21. A moving component 17 is disposed within the housing 10. The dry ice nozzle 203 is connected to the moving component 17. The moving component 17 can drive the dry ice nozzle 203 to move relative to the material placement platform 14 to clean the materials to be cleaned on the material placement platform 14.

[0023] A loading trolley 71 is located outside the housing 10. The loading trolley 71 is equipped with a second sliding guide rail 711. The loading trolley 71 is used to slide the material placement platform 14 into the negative pressure chamber 11 via the second sliding guide rail 711 and the first sliding guide rail 15, and to replace the material placement platform 14. The loading trolley 71 is movable outside the housing 10 and can be pushed to the edge of the housing 10. A first movable door 101 is provided on the housing 10 corresponding to the material placement platform 14. The first movable door 101 can be, for example, a double door and is fixed by a horn lock. The first movable door 101 is, for example, located on the side of the housing 10, opposite to the dry ice device 20. The material placement platform 14 can slide within the negative pressure chamber 11 via the first sliding guide rail 15. The material placement platform 14 is first placed on the second sliding guide rail 711 of the loading trolley 71. The loading trolley 71 slides to the vicinity of the first movable door 101, where the second sliding guide rail 711 connects with the first sliding guide rail 15. The material placement platform 14 is then pushed from the second sliding guide rail 711 through the first movable door 101 to the first sliding guide rail 15 and into the negative pressure chamber 11. Conversely, the material placement platform 14 can slide from the negative pressure chamber 11 to the external loading trolley 71, where the materials to be cleaned can be replaced, facilitating replacement and improving work efficiency.

[0024] A vapor deposition material recovery device 30 is disposed within the housing 10, and a material placement platform 14 is disposed on and connected to the vapor deposition material recovery device 30. The material placement platform 14 has through holes 141 communicating with the vapor deposition material recovery device 30. The surface area of ​​the material placement platform 14 can be, for example, larger than the placement area of ​​the material to be cleaned; that is, the through holes 141 can be located, for example, around the material to be cleaned. This allows the vapor deposition material that has been rinsed off to fall into the vapor deposition material recovery device 30 through the through holes 141, thereby enabling the recovery and reuse of the vapor deposition material, reducing waste and lowering costs. Furthermore, since dry ice rapidly sublimates into gaseous carbon dioxide in the negative pressure chamber 11, it will not contaminate the vapor deposition material during rinsing, thus improving the recovery rate of the vapor deposition material. In some embodiments of this example, the material placement platform 14 can be, for example, a mesh structure. In other embodiments, the material placement platform 14 can be provided with multiple through holes 141, the size, shape, and position of which can be set according to actual needs.

[0025] The dry ice device 21 includes a dry ice container 212, a stirring motor 213, a stirring spiral 214, a temperature sensor 215, and a heating belt. The dry ice container 212 is housed within the casing 10. The stirring motor 213 is located outside the dry ice container 212 and is electrically connected to a controller. The stirring spiral 214 is located inside the dry ice container 212 and is electrically connected to the controller. The temperature sensor 215 is located on the side wall of the dry ice container 212 and is electrically connected to the controller. When the temperature of the dry ice container 212 detected by the temperature sensor 215 is lower than a preset value, the controller controls the stirring motor 213 to drive the stirring spiral 214 to stir. The heating belt is wound evenly around the outside of the dry ice container 212 in the same direction.

[0026] Specifically, the dry ice container 212 may be, for example, funnel-shaped, with the stirring spiral 214 located inside the dry ice container 212, and the distance between the stirring spiral 214 and the inner wall of the dry ice container 212 is approximately 10-20 mm. A temperature sensor 215 may be, for example, located on the side of the dry ice container 212. The temperature sensor 215 may be, for example, a PT100 temperature sensor, used to detect the internal temperature of the dry ice container 212 and send the detected temperature data to the controller. Upon receiving the temperature data from the temperature sensor 215, the controller controls the stirring motor 213 to start when the temperature is below a preset value, causing the stirring spiral 214 to stir. The preset value is 5°C below the ambient temperature, and the controller controls the stirring spiral 214 to rotate alternately in both directions, with a 30-second interval between clockwise and counterclockwise rotations.

[0027] Temperature sensor 215 monitors the temperature of dry ice container 212 in real time. When the temperature falls below a preset value, stirring motor 213 is activated to drive stirring screw 214. This effectively prevents dry ice from clogging the nozzle due to low-temperature agglomeration, ensuring uniform delivery and stable spraying of dry ice particles, and guaranteeing consistent cleaning results. Simultaneously, the stirring screw 214 operates alternately in both directions during stirring, agitating the dry ice particles from different directions. This ensures thorough mixing and more even dispersion of the dry ice within the container, avoiding problems such as localized compaction and clumping caused by unidirectional stirring, and further ensuring the stability of the dry ice particle morphology.

[0028] The dry ice device 21 also includes a heating band, which is wound around the outside of the dry ice container at equal intervals in the same direction; it also includes sound insulation cotton, which is wrapped around the heating band. The sound insulation cotton can be, for example, aluminum foil sound insulation cotton. The heating band and sound insulation cotton can be fixed by, for example, attaching mesh double-sided tape along the outer surface of the dry ice container 212, attaching the heating band at equal intervals in a clockwise direction, and finally attaching the sound insulation cotton. The heating band is located between the dry ice container 212 and the sound insulation cotton.

[0029] The heating element, wrapped around the exterior of the dry ice container 212, prevents the dry ice from hardening and clumping due to excessively low temperatures. Combined with the stirring spiral 214, it further optimizes the looseness and flowability of the dry ice particles, ensuring spray stability. Simultaneously, it reduces the impact of frost formation on the container's outer wall on the equipment and lowers wear and tear on surrounding components due to low temperatures. For example, the heating element can be connected to the overall equipment control system for manual or automatic heating. Secondly, the outer layer of sound-absorbing cotton effectively blocks noise generated by the operation of the stirring motor 213 and the movement of the dry ice particles. Combined with the sound-insulating design of the casing 10, this creates a dual noise reduction effect, improving the acoustic environment of the equipment and reducing noise interference for production line operators.

[0030] Reference Figure 1 , Figure 2 and Figure 3 As shown. In some embodiments, the negative pressure chamber 11 includes a first cleaning area 112 and a second cleaning area 113 that are interconnected. There are two sets of dry ice devices 21, and the dry ice nozzles 203 include a first nozzle 201 and a second nozzle 202, which are respectively connected to the two sets of dry ice devices 21. Both the first nozzle 201 and the second nozzle 202 are located within the negative pressure chamber 11 and correspond to the first cleaning area 112 and the second cleaning area 113, respectively. The moving assembly 17 includes a first robotic arm 16 and a second robotic arm 18.

[0031] Dry ice particles within the dry ice device 20 are sprayed onto the surface of the material to be cleaned via the first nozzle 201 and the second nozzle 202. The physical effect of the temperature difference causes different substances to peel off due to their different shrinkage rates. Upon contact with the dirt surface, the ultra-low temperature dry ice particles induce embrittlement and micro-explosion, causing the dirt to shrink and loosen rapidly. Simultaneously, the instantaneous vaporization of the dry ice particles generates volume expansion, creating a powerful peeling force that can quickly and thoroughly peel the dirt off the metal surface.

[0032] The first robotic arm 16 is located in the first cleaning area 112 and connected to the first nozzle 201. The first robotic arm 16 is used to move the first nozzle 201 relative to the material placement table 14 within the first cleaning area 112 to clean the material to be cleaned within the first cleaning area 112. The first robotic arm 16 drives the first nozzle 201 to move flexibly within the first cleaning area 112 to perform dry ice spray cleaning on the material to be cleaned within the first cleaning area 112.

[0033] The second robotic arm 18 is located in the second cleaning area 113 and connected to the second nozzle 202. The second robotic arm 18 is used to move the second nozzle 202 relative to the material placement table 14 within the second cleaning area 113 to clean the material to be cleaned within the second cleaning area 113. The second robotic arm 18 drives the second nozzle 202 to move flexibly within the second cleaning area 113 to perform dry ice spray cleaning on the material to be cleaned within the second cleaning area 113.

[0034] The overall power of the cleaning equipment in this embodiment can be, for example, 3000W, and the entire machine can be applied to large-size panels on 8.6-generation lines in the panel industry. Furthermore, the dual robotic arms and dual cleaning zone design significantly expand the cleaning area while effectively controlling the overall height of the equipment; and the dual robotic arms offer greater flexibility compared to a single large robotic arm. The design employs a first cleaning zone 112 and a second cleaning zone 113, with the dual robotic arms driving the nozzles to operate synchronously. The two zones can simultaneously clean different parts of the material to be cleaned, or alternately process multiple pieces of material, significantly shortening the cleaning cycle compared to single-zone cleaning equipment.

[0035] Reference Figure 8 As shown, in some embodiments, the dry ice equipment 21 further includes a distance sensor 218, located at the top of the dry ice container 212 and electrically connected to the controller, for measuring the remaining dry ice in the dry ice container 212. The distance sensor 218 may be, for example, an infrared laser displacement sensor, installed at the top of the dry ice container 212 to detect the remaining dry ice, monitor the distance from the top of the dry ice container to the bottom in real time, and send the detection data to the controller. The controller calculates the remaining dry ice based on the distance and promptly reminds the operator to replenish the dry ice, avoiding interruption of the cleaning operation due to the depletion of dry ice.

[0036] Reference Figure 3 , Figure 4 and Figure 5 As shown, in some embodiments, the vapor deposition material recovery device 30 includes a recovery component 301, an outlet pipe 302, a circular dust collection box 303, and a clamp 304. The recovery component 301 includes a first opening 3011 and a second opening 3012 arranged opposite to each other, with the first opening 3011 being larger than the second opening 3012. The material placement platform 14 is connected to the first opening 3011. The sidewall connecting the first opening 3011 and the second opening 3012 is inclined towards the second opening 3012 to form a funnel-like recovery component 301. The recovery component 301 can be, for example, a circular funnel, a square funnel, etc., and this embodiment is not limited to this. The recovery component 301 allows for flow guidance. In one embodiment, the inner wall of the recovery component 301 is coated with a Teflon coating, which reduces the friction between the inner wall and the vapor deposition material, thereby accelerating the collection of the vapor deposition material.

[0037] One end of the outlet pipe 302 is connected to the second opening 3012, and the other end is provided with a first sealing element 3021. The outlet pipe 302 connects the recovery component 301 and the circular dust collection box 303. The circular dust collection box 303 is provided with a second sealing element 3031, and the circular dust collection box 303 is detachably connected to the outlet pipe 302 through the second sealing element 3031 and the first sealing element 3021. The vapor-deposited material washed off the material to be cleaned enters the circular dust collection box 303 sequentially through the through hole 141, the first opening 3011, the second opening 3012, and the outlet pipe 302, thereby recovering the vapor-deposited material and reducing waste. In this embodiment, there are two recovery components 301, but the number is not limited and can be set according to actual needs.

[0038] The fixed end of the clamp 304 is fixedly connected to the outlet pipe 302, and the openable end is detachably connected to the connection between the first sealing element 3021 and the second sealing element 3031. The clamp 304 surrounds and fixes the first sealing element 3021 and the second sealing element 3031. The clamp 304 surrounds and fixes the connection of the sealing elements, which can apply a uniform locking force to avoid gas leakage caused by local poor sealing and ensure a stable negative pressure environment. No complicated tools are required for disassembly. Simply loosening the clamp 304 can quickly separate the dust collection box from the outlet pipe 302, which significantly improves the convenience of material recovery and equipment maintenance and meets the needs of efficient production line operation.

[0039] The outlet pipe 302 and the circular dust collection box 303 are connected by a first seal 3021 and a second seal 3031, and are secured by a clamp 304. This double-seal design effectively prevents gas leakage from the negative pressure chamber 11, ensuring a stable negative pressure environment during equipment cleaning. Furthermore, the circular design of the dust collection box further enhances the sealing reliability with the outlet pipe 302.

[0040] Reference Figure 2 , Figure 3 and Figure 4 As shown, in some embodiments, the vapor deposition material cleaning equipment 1 further includes a cyclone integrated device 40 disposed within the housing 10; the vapor deposition material recovery device 30 further includes a tee pipe 305, a rigid pipe 306, and a flexible hose. The outlet pipe 302 further includes a conveying outlet 3023, one end of the rigid pipe 306 is connected to the conveying outlet 3023, and the other end is connected to the tee pipe 305. The rigid pipe 306 is inclined relative to the outlet pipe 302. One end of the flexible hose is connected to the tee pipe 305, and the other end is connected to the cyclone integrated device 40.

[0041] The rigid tube 306 can be tilted at, for example, 45° relative to the outlet tube 302, using gravity to guide large particles of vapor-deposited material to naturally sink into the circular dust collection box 303, preventing them from accumulating inside the pipe. Compared to the flexible tube, which is prone to bending and material buildup, the tilted rigid tube 306 reduces material adhesion and residue, ensuring the recycling channel remains unobstructed and reducing the risk of equipment downtime due to pipe blockage. Large particles fall into the dust collection box, while fine particles enter the cyclone integrated device 40 for separation and collection via the three-way tube 305 and the flexible tube. The flexible tube can be, for example, a steel wire hose. This graded recycling design allows for the classification and processing of vapor-deposited materials according to particle size, improving material reuse rates, and is particularly suitable for OLED production scenarios with high purity requirements.

[0042] Reference Figure 2 and Figure 7 As shown, in some embodiments, the vapor deposition material cleaning equipment 1 further includes an exhaust device 50, which includes an exhaust channel 501, a wind speed sensor 502, and a filter element 503. The exhaust channel 501 is located outside the housing 10 and connects the internal negative pressure chamber 11 with the external atmosphere. The wind speed sensor 502 is located inside the exhaust channel 501 and is used to measure the flow rate of the emitted gas.

[0043] Filter element 503 is located between the cyclone integration device 40 and the exhaust channel 501, with one end connected to the exhaust channel 501 and the other end connected to the cyclone integration device 40. Filter element 503 is used to filter the gas emitted by the cyclone integration device 40. Filter element 503 can be, for example, a 5μm filter element with a six-ear filter screen. The gas filtered by this filter element 503 can meet the general emission requirements of GB standards, avoiding environmental impact caused by pollutant leakage and conforming to the environmental standards of OLED production. An anemometer 502 is connected to the outlet rigid pipe 306 of filter element 503. When the anemometer 502 detects an air velocity below 3m / s, it indicates that filter element 503 should be cleaned.

[0044] Reference Figure 3 and Figure 6As shown, in some embodiments, the vapor deposition material cleaning equipment 1 further includes an air replenishment device 60, which includes an air inlet channel 601, a check valve 602, and a filter 603. The air inlet channel 601 is located outside the housing 10 and connected to the housing 10 to connect the negative pressure chamber 11 with the external atmosphere. The check valve 602 is fixed outside the air inlet channel 601, and its outlet end is connected to the air inlet channel 601 to prevent gas from flowing out of the negative pressure chamber 11. The check valve 602 reverses the gas flow, allowing only external air to enter the chamber, effectively preventing gas and dust from leaking out of the negative pressure chamber 11. The filter 603 is fixed to the inlet end of the check valve 602 and is used to filter the gas entering the negative pressure chamber 11. The filter 603 pre-treats the air entering the chamber, intercepting external dust, impurities, and other contaminants. To prevent external impurities from entering the cavity and contaminating the materials to be cleaned or the vapor-deposited materials to be recycled, ensuring the cleaning quality and the purity of the recycled materials, and meeting the high cleanliness requirements of OLED production.

[0045] The air intake channel 601 connects the negative pressure chamber 11 to the external atmosphere, allowing for timely replenishment of air into the chamber and dynamic balance of the negative pressure environment. This prevents excessive pressure drop within the chamber due to exhaust or dry ice sublimation, ensuring that the cleaning and recovery systems operate stably according to set parameters and preventing pressure imbalances from affecting cleaning performance or causing equipment malfunctions.

[0046] Reference Figure 2 , Figure 10 , Figure 11 and Figure 12 As shown, in some embodiments, the first sliding guide rail 15 and the second sliding guide rail 711 include a groove 151 and a plurality of rollers 152, which are spaced apart within the groove 151. Each roller 152 includes a shaft 153 and a wheel 154. The two ends of the shaft 153 are fixedly connected to the sidewall of the groove 151, and the wheel 154 is rotatably connected to the shaft 153. The first sliding guide rail 15 and the second sliding guide rail 711 abandon the traditional bearing-type flow rail and adopt a bearingless structure combining the groove 151 and the rollers 152, effectively avoiding the problem of bearing jamming and failure in dusty environments. At the same time, no lubricating grease is required, which is suitable for the oil-free space requirements of the equipment, reduces the probability of guide rail failure due to dust accumulation or oil contamination, and ensures smooth sliding of the material placement platform 14.

[0047] Reference Figure 1 , Figure 3 and Figure 14As shown, in some embodiments, the housing 10 is provided with an operation port 102 and a protective structure connected to the operation port 102. The protective structure includes a safety door 103 and a mechanical latch 104. One end of the safety door 103 is fixed to the housing 10. The mechanical latch 104 is fixed to the housing 10, and the other end of the safety door 103 is fixedly connected to the mechanical latch 104. The vapor deposition material cleaning equipment 1 also includes a freeze-proof glove 13, which is connected to the operation port 102.

[0048] The operating port 102 can be, for example, a circular opening. A freeze-proof glove 13 is connected to the operating port 102, and the glove 13 can be, for example, sealed to the operating port 102. The freeze-proof glove 13 can be made of freeze-proof materials such as butyl gloves or cowhide gloves, preventing users from being frostbitten by dry ice during operation. A handheld spray gun can be, for example, housed inside the housing 10 and connected to the dry ice device 20. Users can operate the handheld spray gun using the freeze-proof glove 13 to spray dry ice, allowing manual cleaning of areas not reached by the robotic arm, further ensuring thorough cleaning and improving cleaning quality. The purely mechanical structure design of the safety door 103 combined with the mechanical lock 104 securely closes the operating port 102, eliminating the risk of accidental opening during equipment operation. The structure boasts high stability and a low failure rate, effectively protecting operators from the low temperature or jet airflow inside the negative pressure chamber 11.

[0049] Reference Figure 14 As shown, in some embodiments, the mechanical latches 104 are equipped with pin-type sensors 1041. The pin-type sensors 1041 are used to control the vapor deposition material cleaning equipment 1 to stop working when no pin insertion is detected. All mechanical latches 104 are connected in series, and the open / closed state is detected and identified. The cleaning equipment will only work normally when all pins are fully inserted. This prevents accidental injury to the user if the robotic arm inside the negative pressure chamber 11 continues operating while the user is operating the handheld spray gun.

[0050] Reference Figure 1 and Figure 3 As shown, in some embodiments, the housing 10 is provided with a receiving cavity, and a slide rail is provided inside the receiving cavity. The vapor deposition material cleaning equipment 1 also includes an adjustment platform 70, which is slidably connected to the slide rail. When not in use, the adjustment platform 70 is located in the receiving cavity inside the housing 10. When needed, it slides out of the housing 10 via the slide rail for adjusting the overall vapor deposition material cleaning equipment 1.

[0051] Furthermore, it is understood that the foregoing embodiments are merely illustrative examples of this utility model. Provided that the technical features do not conflict, the structure is not contradictory, and the purpose of this utility model is not violated, the technical solutions of the various embodiments can be arbitrarily combined and used.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A cleaning device for vapor-deposited materials (1), characterized in that, include: Controller; A housing (10) has a negative pressure cavity (11) formed inside it. The housing (10) includes a first sliding guide rail (15) disposed inside the negative pressure cavity (11). A material placement platform (14) is located inside the negative pressure cavity (11) and is movably connected to the housing (10). The material placement platform (14) is used to place the material to be cleaned. A loading trolley (71) is provided outside the housing (10). The loading trolley (71) is provided with a second sliding guide rail (711). The loading trolley (71) is used to slide the material placement platform (14) into the negative pressure cavity (11) through the second sliding guide rail (711) and the first sliding guide rail (15), and to replace the material placement platform (14) through the loading trolley (71). A dry ice device (20) is disposed within the housing (10). The dry ice device (20) includes a dry ice nozzle (203) and a dry ice apparatus (21). The dry ice apparatus (21) includes: A dry ice container (212) is disposed inside the housing (10); A stirring motor (213) is located outside the dry ice container (212) and is electrically connected to the controller; A stirring spiral (214) is disposed inside the dry ice container (212) and electrically connected to the controller; A temperature sensor (215) is disposed on the side wall of the dry ice container (212) and electrically connected to the controller; the controller is used to control the stirring motor (213) to drive the stirring spiral (214) to stir when the temperature of the dry ice container (212) detected by the temperature sensor (215) is lower than a preset value. Heating strips are wound at equal intervals in the same direction around the outside of the dry ice container (212); A movable component (17) is disposed inside the housing (10). The dry ice nozzle (203) is connected to the movable component (17). The movable component (17) can drive the dry ice nozzle (203) to move relative to the material placement table (14) to clean the material to be cleaned on the material placement table (14). A vapor deposition material recovery device (30) is installed inside the housing (10), and a material placement platform (14) is installed on the vapor deposition material recovery device (30) and is connected to the vapor deposition material recovery device (30).

2. The vapor deposition material cleaning equipment (1) according to claim 1, characterized in that, The negative pressure chamber (11) includes a first cleaning area (112) and a second cleaning area (113) that are interconnected; the number of dry ice devices (21) is two sets, and the dry ice nozzle (203) includes a first nozzle (201) and a second nozzle (202), the first nozzle (201) and the second nozzle (202) being respectively connected to the two sets of dry ice devices (21); the moving component (17) includes: A first robotic arm (16) is located in the first cleaning area (112) and connected to the first nozzle (201). The first robotic arm (16) is used to drive the first nozzle (201) to move relative to the material placement table (14) within the first cleaning area (112) to clean the material to be cleaned located in the first cleaning area (112). The second robotic arm (18) is located in the second cleaning area (113) and connected to the second nozzle (202). The second robotic arm (18) is used to drive the second nozzle (202) to move relative to the material placement table (14) in the second cleaning area (113) to clean the material to be cleaned located in the second cleaning area (113).

3. The vapor deposition material cleaning equipment (1) according to claim 1, characterized in that, The dry ice equipment (21) also includes: A ranging sensor (218) is located on top of the dry ice container (212) and is electrically connected to the controller for measuring the remaining dry ice in the dry ice container (212).

4. The vapor deposition material cleaning equipment (1) according to claim 1, characterized in that, The vapor deposition material recovery device (30) includes: The recycling component (301) includes a first opening (3011) and a second opening (3012) disposed opposite to each other, wherein the first opening (3011) is larger than the second opening (3012), and the material placement platform (14) is connected to the first opening (3011); The outlet pipe (302) is connected at one end to the second opening (3012) and at the other end is provided with a first sealing element (3021). A circular dust collection box (303) is provided with a second sealing element (3031), and the circular dust collection box (303) is detachably connected to the outlet pipe (302) through the second sealing element (3031) and the first sealing element (3021); The clamp (304) is fixedly connected at one end to the outlet pipe (302) and detachably connected at the other end to the connection between the first seal (3021) and the second seal (3031), and the clamp (304) surrounds and fixes the first seal (3021) and the second seal (3031).

5. The vapor deposition material cleaning equipment (1) according to claim 4, characterized in that, It also includes a cyclone integration device (40), disposed within the housing (10); the vapor deposition material recovery device (30) further includes: Tee (305); The rigid pipe (306) and the outlet pipe (302) further include a delivery outlet (3023). One end of the rigid pipe (306) is connected to the delivery outlet (3023), and the other end is connected to the tee pipe (305). The rigid pipe (306) is inclined relative to the outlet pipe (302). The hose is connected at one end to the tee pipe (305) and at the other end to the cyclone integrated device (40).

6. The vapor deposition material cleaning equipment (1) according to claim 5, characterized in that, It also includes an exhaust device (50), which includes: An exhaust passage (501) is provided outside the housing (10); A wind speed sensor (502) is installed in the exhaust channel (501) to measure the flow rate of the exhaust gas; The filter element (503) is located between the cyclone integration device (40) and the exhaust channel (501), with one end connected to the exhaust channel (501) and the other end connected to the cyclone integration device (40). The filter element (503) is used to filter the gas emitted by the cyclone integration device (40).

7. The vapor deposition material cleaning equipment (1) according to claim 1, characterized in that, It also includes a gas replenishment device (60), which includes: An air intake passage (601) is provided outside the housing (10) and connected to the housing (10). A check valve (602) is fixed outside the air intake channel (601). The outlet end of the check valve (602) is connected to the air intake channel (601) to prevent gas from flowing out of the negative pressure chamber (11). A filter (603) is fixed to the inlet end of the check valve (602) and is used to filter the gas entering the negative pressure chamber (11).

8. The vapor deposition material cleaning equipment (1) according to claim 1, characterized in that, The first sliding guide rail (15) and the second sliding guide rail (711) include: Groove (151); Multiple rollers (152) are spaced apart within the groove (151); each roller (152) includes: The shaft (153) is fixedly connected to the sidewalls of the groove (151) at both ends; The wheel (154) is rotatably connected to the shaft (153).

9. The vapor deposition material cleaning equipment (1) according to claim 1, characterized in that, The housing (10) is provided with an operation port (102) and a protective structure connected to the operation port (102), the protective structure including: Safety door (103), one end of which is fixed to the housing (10); A mechanical latch (104) is fixed to the housing (10), and the other end of the safety door (103) is fixedly connected to the mechanical latch (104). The vapor deposition material cleaning equipment (1) also includes: Antifreeze gloves (13) are attached to the operating port (102).

10. The vapor deposition material cleaning equipment (1) according to claim 9, characterized in that, The mechanical latch (104) is equipped with a pin-type sensor (1041), which is used to control the vapor deposition material cleaning equipment (1) to stop working when no pin insertion is detected.

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