Structure for collecting substrate edge cutting waste liquid

Abstract

The utility model belongs to semiconductor equipment edge cutting waste liquid collection technical field, concretely is a kind of structure for substrate edge cutting waste liquid collection, including recovery tank, on-off valve A, buffer container, on-off valve B, liquid pump, vacuum generator, on-off valve C.Control on-off valve A opens, can make the waste liquid that recovery tank directly fetches into buffer container;Control on-off valve C opens, can make the gas extraction end of vacuum generator produce negative pressure, so that the gas in buffer container can be discharged from buffer container, and waste liquid is temporarily accumulated in buffer container due to gravity, realize gas-liquid separation;Control on-off valve B and liquid pump open, can discharge the waste liquid accumulated in buffer container to waste liquid recovery pipe network outside.This utility model can carry out gas-liquid separation treatment to the waste liquid generated in the recovery of substrate edge cutting process, avoid the waste liquid discharged with more process gas, facilitate subsequent recovery waste liquid treatment and utilization, relatively simple structure, relatively reliable use.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor equipment edge cutting waste liquid collection technology, specifically a structure for collecting substrate edge cutting waste liquid. Background Technology

[0002] Existing semiconductor equipment generates waste liquid during the edge trimming process of substrates. This waste liquid is usually simply discharged directly through the plant's waste discharge pipe. This discharge causes the waste liquid to carry away a lot of process gases, making it difficult to recycle the waste liquid and resulting in waste. Utility Model Content

[0003] To address the above problems, the purpose of this utility model is to provide a structure for collecting waste liquid from substrate cutting edges.

[0004] The objective of this utility model is achieved through the following technical solution: A structure for collecting waste liquid from substrate cutting includes a recovery tank, an on / off valve A, a buffer container, an on / off valve B, a pump, a vacuum generator, and an on / off valve C. The recycling tank is used to directly collect the waste liquid generated by the substrate cutting process. The bottom of the recycling tank is provided with a drain port, and the drain port of the recycling tank is connected to one end of the on-off valve A through a pipeline. The top surface of the buffer container is provided with a liquid inlet pipe and an air outlet pipe, and the bottom surface of the buffer container is provided with a drain pipe. The liquid inlet pipe, the air outlet pipe, and the drain pipe are all open at both ends. One end opening of the liquid inlet pipe, one end opening of the air outlet pipe, and one end opening of the drain pipe are all located on the outside of the buffer container. The other end opening of the liquid inlet pipe and the other end opening of the air outlet pipe extend into the inner cavity of the buffer container. The other end opening of the drain pipe is connected to the bottom of the buffer container and communicates with the inner cavity of the buffer container. The pump has a pumping end and a draining end. The draining end of the pump is connected to an external waste liquid recovery network. The pumping end of the pump is connected to one end of the on / off valve B through a pipeline. The other end of the on / off valve B is connected to one end of the drain conduit through a pipeline. The vacuum generator has an external compressed air source connection end, a gas extraction end, and a gas discharge end. The external compressed air source connection end of the vacuum generator is connected to one end of the on / off valve C through a pipeline. The other end of the on / off valve C is connected to the external compressed air source through a pipeline. The gas extraction end of the vacuum generator is connected to one open end of the gas outlet duct through a pipeline. The gas discharge end of the vacuum generator is connected to the outside atmosphere or an external gas recovery pipeline network.

[0005] A flow meter is installed on the pipeline connecting the gas extraction end of the vacuum generator and one of the openings of the gas outlet duct.

[0006] A pressure gauge is installed on the pipeline connecting the gas extraction end of the vacuum generator and the flow meter.

[0007] A pressure regulating valve is installed on the pipeline connecting the other end of the on / off valve C to the external compressed air source.

[0008] The other end of the vent pipe opens at a higher position within the inner cavity of the buffer container than the other end of the inlet pipe opens within the inner cavity of the buffer container.

[0009] The buffer container has a perforated plate inside its cavity, which divides the inner space of the buffer container into an upper space and a lower space. The perforated plate has a number of ventilation holes, each of which is connected to both the upper and lower spaces of the buffer container.

[0010] The other end of the liquid inlet conduit opens through the mesh plate and is located in the lower space of the buffer container, while the other end of the air outlet conduit opens in the upper space of the buffer container.

[0011] The plane containing the perforated plate forms an angle with the horizontal plane, meaning that the perforated plate gradually tilts downwards from one side to the other.

[0012] The other end of the air outlet duct is located directly below the center of the perforated plate, and the other end of the air outlet duct is higher than the highest point of the perforated plate.

[0013] The advantages and positive effects of this utility model are as follows: This invention can perform gas-liquid separation treatment on the waste liquid generated during the substrate cutting process during recycling, avoiding the discharge of a large amount of process gas with the discharged waste liquid, facilitating subsequent recycling and utilization of the waste liquid, with a relatively simple structure and relatively reliable use. Attached Figure Description

[0014] Figure 1 This is a schematic diagram illustrating the overall setup principle of this utility model; Figure 2 This is one of the schematic diagrams showing the arrangement structure of the buffer container of this utility model; Figure 3 This is the second schematic diagram of the structure of the buffer container of this utility model.

[0015] In the diagram: 1 is the recovery tank, 2 is the on / off valve A, 3 is the buffer container, 4 is the on / off valve B, 5 is the liquid pump, 6 is the vacuum generator, 7 is the on / off valve C, 8 is the liquid inlet pipe, 9 is the gas outlet pipe, 10 is the liquid discharge pipe, 11 is the flow meter, 12 is the pressure gauge, 13 is the pressure regulating valve, 14 is the perforated plate, and 1401 is the vent hole; 001 is the substrate, and 002 is the external compressed air source. Detailed Implementation

[0016] The following is in conjunction with the appendix Figures 1-3 The present invention will be described in further detail.

[0017] A structure for collecting waste liquid from substrate cutting edges, such as Figures 1-3 As shown, this embodiment includes a recovery tank 1, a shut-off valve A 2, a buffer container 3, a shut-off valve B 4, a liquid pump 5, a vacuum generator 6, and a shut-off valve C 7.

[0018] The recycling tank 1 is used to directly collect the waste liquid generated during the substrate trimming process. A drain port is provided at the bottom of the recycling tank 1, and the drain port is connected to one end of the on / off valve A2 via a pipeline. In this embodiment, the recycling tank 1 is generally located in the process chamber of the corresponding semiconductor equipment. During use, it is placed close to the substrate 001 that needs to undergo the trimming process. The specific structure of the recycling tank 1 adopts existing technology, for example, the setting of the photoresist removal component mentioned in the apparatus and method for removing edge photoresist (publication number CN117950270A). In this embodiment, other structures besides the recycling tank 1 can be arbitrarily set outside the process chamber of the semiconductor equipment as needed.

[0019] The top surface of the buffer container 3 is provided with an inlet conduit 8 and an outlet conduit 9, and the bottom surface of the buffer container 3 is provided with a drain conduit 10. The inlet conduit 8, the outlet conduit 9, and the drain conduit 10 all have two openings. One end opening of the inlet conduit 8, one end opening of the outlet conduit 9, and one end opening of the drain conduit 10 are all located on the outside of the buffer container 3. The other end opening of the inlet conduit 8 and the other end opening of the outlet conduit 9 extend into the inner cavity of the buffer container 3, and the other end opening of the drain conduit 10 is connected to the bottom of the buffer container 3 and communicates with the inner cavity of the buffer container 3.

[0020] The pump 5 has a pumping end and a draining end. The draining end of the pump 5 is connected to an external waste liquid recovery pipeline. The pumping end of the pump 5 is connected to one end of the on / off valve B4 through a pipeline. The other end of the on / off valve B4 is connected to one end of the drain pipe 10 through a pipeline.

[0021] The vacuum generator 6 has an external compressed gas source connection terminal, a gas extraction terminal, and a gas discharge terminal. The external compressed gas source connection terminal of the vacuum generator 6 is connected to one end of the on / off valve C7 via a pipeline, and the other end of the on / off valve C7 is connected to the external compressed gas source 002 via a pipeline. The gas extraction terminal of the vacuum generator 6 is connected to one open end of the gas outlet duct 9 via a pipeline. The gas discharge terminal of the vacuum generator 6 is connected to the outside atmosphere or an external gas recovery pipeline network. Depending on the specific gas generated in the specific process, the connection between the gas discharge terminal of the vacuum generator 6 and the outside atmosphere or an external gas recovery pipeline network can be selected. The aforementioned external waste liquid recovery pipeline network and external gas recovery pipeline network configuration are existing technologies.

[0022] In this embodiment, the vacuum generator 6 is a commercially available product, and the corresponding external compressed air source 002 is also configured using existing technology. For example, a commercially available air pump can be used to provide compressed air to the vacuum generator 6. The liquid pump 5 can be a commercially available vacuum liquid pump. The on / off valves A2, B4, and C7 are all commercially available electromagnetic switching valves. The liquid pump 5, on / off valves A2, B4, and C7 can be controlled by the control system of the corresponding semiconductor device. The configuration of the on / off valves A2, B4, and C7 facilitates the control of the on / off states at each location.

[0023] In operation, opening the on / off valve A2 allows the waste liquid directly collected from the recovery tank 1 to pass through the on / off valve A2 and the inlet pipe 8 into the buffer container 3. Opening the on / off valve C7 allows the external compressed gas source 002 to supply compressed gas to the vacuum generator 6, creating a negative pressure at the gas extraction end of the vacuum generator 6. This allows the gas in the buffer container 3 to be discharged, while the waste liquid temporarily accumulates in the buffer container 3 due to gravity, achieving gas-liquid separation. Opening the on / off valve B4 and the liquid pump 5 allows the waste liquid accumulated in the buffer container 3 to be discharged to the external waste liquid recovery network for recycling and subsequent treatment. The buffer container 3 effectively prevents waste liquid from flowing back into the vacuum generator 6 when the vacuum generator 6 unexpectedly stops generating a vacuum, and effectively prevents the vacuum generator 6 from coming into contact with a large amount of waste liquid, thus avoiding severe corrosion. In this embodiment, the buffer container 3 can be made of transparent material to allow observation of the liquid level, making it convenient for staff to determine whether manual control of the on / off valve B4 and the pump 5 is required; or a liquid level sensor can be installed on the buffer container 3 to detect the liquid level in the buffer container 3 and to automatically control whether the on / off valve B4 and the pump 5 need to be opened.

[0024] Specifically, such as Figure 1As shown, in this embodiment, a flow meter 11 is installed on the pipeline connecting the gas extraction end of the vacuum generator 6 and one end of the outlet conduit 9. A pressure gauge 12 is installed on the pipeline connecting the gas extraction end of the vacuum generator 6 and the flow meter 11. A pressure regulating valve 13 is installed on the pipeline connecting the other end of the on / off valve C7 and the external compressed air source 002. In this embodiment, the flow meter 11 and pressure gauge 12 are commercially available products, and the pressure regulating valve 13 can be a commercially available manual pressure regulating valve. The flow meter 11 can measure the flow rate of gas extracted by the gas extraction end of the vacuum generator 6, and the pressure gauge 12 can display the gas pressure in the pipeline at that location, allowing operators to monitor the status. In addition, before using the equipment, the pressure of the gas output from the external compressed air source 002 can be adjusted by operating the pressure regulating valve 13 based on the values ​​displayed by the flow meter 11 and pressure gauge 12 to ensure that it meets the usage requirements.

[0025] Specifically, such as Figure 2 and Figure 3 As shown, in this embodiment, a perforated plate 14 is welded into the inner cavity of the buffer container 3. The perforated plate 14 divides the inner cavity of the buffer container 3 into an upper space and a lower space. A plurality of vent holes 1401 are evenly distributed on the perforated plate 14, and each vent hole 1401 is connected to both the upper and lower spaces of the buffer container 3. The other end of the liquid inlet conduit 8 opens through the perforated plate 14 and is located in the lower space of the buffer container 3. The other end of the vent outlet conduit 9 opens in the upper space of the buffer container 3, and its height within the inner cavity of the buffer container 3 is higher than that of the other end of the liquid inlet conduit 8. The plane containing the perforated plate 14 forms an angle with the horizontal plane, meaning the perforated plate 14 gradually slopes downwards from one side to the other. The other end of the vent outlet conduit 9 is located directly below the center of the perforated plate 14, and its height is higher than the highest point of the perforated plate 14. In this embodiment, the vent hole 1401 has a diameter of 10-12 mm, and the angle between the plane of the perforated plate 14 and the horizontal plane can be 40-50 degrees. Since the waste liquid generated from the substrate trimming process recycled in the recycling tank 1 may contain some foam, the specific arrangement of the perforated plate 14, the liquid inlet pipe 8, and the vent outlet pipe 9 allows the waste liquid to primarily enter the lower space of the buffer container 3 after entering it. Most of the foam can be blocked when it comes into contact with the perforated plate 14, effectively preventing a large amount of foam from being extracted by the vacuum generator 6 and affecting subsequent use.

Claims

1. A structure for collecting waste liquid from substrate cutting edges, characterized in that: Includes a recovery tank (1), on / off valve A (2), buffer container (3), on / off valve B (4), liquid pump (5), vacuum generator (6), and on / off valve C (7); The recycling tank (1) is used to directly collect the waste liquid generated by the substrate cutting process. The bottom of the recycling tank (1) is provided with a drain port. The drain port of the recycling tank (1) is connected to one end of the on / off valve A (2) through a pipeline. The top surface of the buffer container (3) is provided with an inlet conduit (8) and an outlet conduit (9), and the bottom surface of the buffer container (3) is provided with a drain conduit (10). The inlet conduit (8), the outlet conduit (9), and the drain conduit (10) all have openings at both ends. One end of the inlet conduit (8), one end of the outlet conduit (9), and one end of the drain conduit (10) are all located outside the buffer container (3). The other end of the inlet conduit (8) and the other end of the outlet conduit (9) extend into the inner cavity of the buffer container (3). The other end of the drain conduit (10) is connected to the bottom of the buffer container (3) and communicates with the inner cavity of the buffer container (3). The pump (5) has a pumping end and a draining end. The draining end of the pump (5) is connected to an external waste liquid recycling pipeline. The pumping end of the pump (5) is connected to one end of the on / off valve B (4) through a pipeline. The other end of the on / off valve B (4) is connected to one end of the drain pipe (10) through a pipeline. The vacuum generator (6) has an external compressed air source connection end, a gas extraction end and a gas discharge end. The external compressed air source connection end of the vacuum generator (6) is connected to one end of the on / off valve C (7) through a pipeline. The other end of the on / off valve C (7) is connected to the external compressed air source (002) through a pipeline. The gas extraction end of the vacuum generator (6) is connected to one end of the gas outlet duct (9) through a pipeline. The gas discharge end of the vacuum generator (6) is connected to the outside atmosphere or an external gas recovery pipeline network.

2. The structure for collecting waste liquid from substrate cutting according to claim 1, characterized in that: A flow meter (11) is installed on the pipeline connecting the gas extraction end of the vacuum generator (6) and one end opening of the gas outlet duct (9).

3. The structure for collecting waste liquid from substrate cutting according to claim 2, characterized in that: A pressure gauge (12) is provided on the pipeline connecting the gas extraction end of the vacuum generator (6) and the flow meter (11).

4. The structure for collecting waste liquid from substrate cutting according to claim 3, characterized in that: A pressure regulating valve (13) is provided on the pipeline connecting the other end of the on / off valve C (7) to the external compressed air source (002).

5. The structure for collecting waste liquid from substrate cutting according to claim 1, characterized in that: The other end of the vent pipe (9) opens at a higher position in the inner cavity of the buffer container (3) than the other end of the inlet pipe (8) opens at a higher position in the inner cavity of the buffer container (3).

6. The structure for collecting waste liquid from substrate cutting according to claim 1, characterized in that: The inner cavity of the buffer container (3) is provided with a perforated plate (14), which divides the inner cavity of the buffer container (3) into an upper space and a lower space. The perforated plate (14) has a plurality of ventilation holes (1401), and each ventilation hole (1401) is connected to the upper space and the lower space of the buffer container (3).

7. The structure for collecting waste liquid from substrate cutting according to claim 6, characterized in that: The other end of the liquid inlet conduit (8) opens through the mesh plate (14) and is located in the lower space of the buffer container (3), while the other end of the air outlet conduit (9) opens in the upper space of the buffer container (3).

8. The structure for collecting waste liquid from substrate cutting according to claim 7, characterized in that: The plane containing the perforated plate (14) forms an angle with the horizontal plane, that is, the perforated plate (14) gradually tilts downward from one side to the other.

9. The structure for collecting waste liquid from substrate cutting according to claim 8, characterized in that: The other end of the air outlet duct (9) is located directly below the middle of the perforated plate (14), and the other end of the air outlet duct (9) is higher than the highest point of the perforated plate (14).

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