Counterweight balancing structure and rotary processing apparatus

Abstract

The application provides a counterweight balancing structure and a rotary processing device. The counterweight balancing structure comprises a mounting seat, a first counterweight adjusting member and a second counterweight adjusting member. The first counterweight adjusting member is connected to the mounting seat, and the mounting position of the first counterweight adjusting member on the mounting seat is adjustable along a first direction. The mounting position of the second counterweight adjusting member on the first counterweight adjusting member is adjustable along a second direction. The second direction intersects with the first direction, so that the balancing counterweight adjustment of multiple degrees of freedom of the counterweight balancing structure is realized, the range and capacity of the balancing adjustment of the counterweight balancing structure are expanded, the unbalanced force caused by the assembly and processing errors and other factors of the functional module is compensated, the adjustment difficulty of the balancing state of the functional module is reduced, and the adjustment precision and efficiency of the counterweight balancing structure are improved.

Description

Technical Field

[0001] This application relates to the technical field of machining, and more particularly to a counterweight balancing structure and rotary machining equipment. Background Technology

[0002] In rotary machining equipment, functional modules and counterweight modules are mounted on the turntable to achieve dynamic balance during rotation. However, the existing counterweight modules and functional modules are fixed in their mounting positions, making it impossible to adjust the imbalance caused by assembly and processing errors in the functional modules based on the counterweight modules. This increases the difficulty of adjusting the functional modules to a balanced state. Utility Model Content

[0003] In view of this, this application provides a counterweight balancing structure and a rotary processing device, which solves the technical problem of the difficulty in adjusting the balance state of the functional modules.

[0004] In a first aspect, this application provides a counterweight balancing structure, including a mounting base, a first counterweight adjusting member, and a second counterweight adjusting member. The first counterweight adjusting member is connected to the mounting base, and its mounting position on the mounting base is adjustable along a first direction. The mounting position of the second counterweight adjusting member on the first counterweight adjusting member is adjustable along a second direction. The second direction intersects the first direction.

[0005] The counterweight balancing structure provided in this application, on the one hand, allows the first counterweight adjusting member to provide a balancing force vector in any direction along its rotation radius, while the installation position of the second counterweight adjusting member on the first counterweight adjusting member can be adjusted in a second direction to adjust the distance between the center of mass of the second counterweight adjusting member and the functional module. This achieves multi-degree-of-freedom balancing counterweight adjustment of the counterweight balancing structure, expands the range and capability of the balancing adjustment of the counterweight balancing structure, compensates for the unbalanced forces caused by assembly and processing errors in the functional module, and reduces the difficulty of adjusting the balance state of the functional module. On the other hand, the first counterweight... The first and second counterweight adjustment components are set separately, so that the adjustment process of the first and second counterweight adjustment components in the two-dimensional plane does not interfere with each other. This improves the adjustment accuracy and efficiency of the counterweight balance structure, reduces the risk of remanufacturing the counterweight balance structure, and improves the maintenance efficiency of the counterweight module. Furthermore, the installation positions of the first and second counterweight adjustment components are adjustable. Therefore, the counterweight balance structure can adjust the imbalance of the functional module and the counterweight module caused by assembly and processing errors, reducing the risk of the functional module deflecting during rotation and reducing the wear of the turntable.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the first counterweight adjusting member is provided with a limiting groove, and the second counterweight adjusting member is translatably disposed within the limiting groove along the second direction. Thus, on the one hand, the limiting groove can serve as a physical guide rail to restrict the linear translation of the second counterweight adjusting member along the second direction, thereby avoiding the problem of inaccurate adjustment caused by slight rotation or offset of the second counterweight adjusting member before locking; on the other hand, since the second counterweight adjusting member is confined within the limiting groove, the first counterweight adjusting member will drive the second counterweight adjusting member to rotate together during rotation, improving the adjustment accuracy and efficiency of the counterweight balancing structure; furthermore, the nested arrangement of the first and second counterweight adjusting members improves the overall compactness of the counterweight balancing structure, reduces the weight of the first counterweight adjusting member, and lowers the center of gravity of the counterweight balancing structure, reducing the risk of the second counterweight adjusting member tipping over relative to the first counterweight adjusting member.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, at least one sidewall of the limiting groove parallel to the second direction is provided with a first rack, and the second counterweight adjusting member is provided with a second rack that meshes with the first rack. Thus, the meshing of the first and second racks serves two purposes: firstly, it restricts the sliding of the first rack relative to the second rack along the second direction, thereby enabling step adjustment of the second counterweight adjusting member and improving its adjustment accuracy; secondly, the simultaneous meshing of multiple teeth on the first and second racks shares the load, improving the load-bearing capacity and lifespan of both the first and second counterweight adjusting members, eliminating the sliding friction pair between the smooth limiting groove and the second counterweight adjusting member, and maintaining the accuracy of the counterweight balancing structure for long-term use; furthermore, the limiting groove also prevents the operator or automatic control system from moving the second counterweight adjusting member beyond the allowable range of the mechanical structure, thus preventing collisions or interference with surrounding components.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the tooth pitch of the first rack is a first tooth pitch, the tooth pitch of the second rack is a second tooth pitch, the first tooth pitch is equal to the second tooth pitch, and the first tooth pitch is 0.5mm-1.0mm. Thus, on the one hand, by setting the first and second tooth pitches to be equal, complete matching and synchronous meshing of the first and second racks are achieved, stress concentration is avoided, and the lifespan of the first and second counterweight adjusting components is extended; on the other hand, by setting the first and second tooth pitches within a suitable range, the adjustment resolution of the balance weight of the second counterweight adjusting component is improved, while also ensuring that the first and second racks have good mechanical strength and wear resistance, and are easy to manufacture.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the extension length of the limiting groove in the second direction is a first length, and the extension length of the second counterweight adjusting member in the second direction is a second length, with the difference between the first length and the second length being 10mm-20mm. Therefore, the embodiments of this application, based on setting the difference between the first length and the second length within a suitable range, on the one hand, ensure that the adjustment stroke of the second counterweight adjusting member is appropriate, meeting the adjustment requirements of counterweight balance, and improving the assembly efficiency and manufacturing tolerance of the second counterweight adjusting member; on the other hand, the length difference between the second counterweight adjusting member and the length of the limiting groove is moderate, improving space utilization and preventing the second counterweight adjusting member from vibrating or shifting during high-speed rotation of the counterweight balance structure, thereby improving the stability and reliability of the counterweight balance adjustment.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the first counterweight adjusting member is provided with a first locking hole, and the second counterweight adjusting member is provided with a second locking hole. The first locking hole and the second locking hole are opposite to and connected to each other, and are used for the insertion of the first locking member. Therefore, by locking the first and second counterweight adjusting members together using the first locking member, on the one hand, rigid linkage between the first and second counterweight adjusting members is achieved, and on the other hand, it avoids the problem of the first and second counterweight adjusting members having separate locking structures, and the potential for asynchronous, minute displacement of the first and second counterweight adjusting members due to slight loosening when the counterweight balancing structure rotates at high speed. This ensures that once the installation positions of the first and second counterweight adjusting members are determined, they can be locked together. Even if the first and second counterweight adjusting members are forced to vibrate slightly together when the counterweight balancing structure rotates or vibrates at high speed, there is no degree of freedom of relative motion between the first and second counterweight adjusting members. This improves the accuracy, stability, and reliability of the counterweight balance adjustment. Furthermore, the clamping force provided by a single first locking element is far greater than that of two independent first locking elements, thereby enhancing resistance to loosening caused by vibration. This ensures the balance of the counterweight balance structure remains stable during long-term operation, reduces the number of parts, and improves structural compactness. Additionally, when the counterweight balance structure is used for the counterweight balance of a magnetic cyclotron, the various parts of the counterweight balance structure will experience thermal expansion and contraction due to the large amount of heat generated during the operation of the magnetic cyclotron. The first locking element, by fixing the first and second counterweight adjustment elements into an integral structure, helps maintain the consistency of their relative positions when heated, avoiding the problem of balance disruption due to asynchronous thermal deformation.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the first locking hole and the second locking hole are each configured as elongated holes, the length of the first locking hole in the second direction is greater than the length of the second locking hole in the second direction, and the maximum width of the first locking hole in the direction perpendicular to the second direction is less than the maximum width of the second locking hole in the direction perpendicular to the second direction. Therefore, on the one hand, by configuring the first locking hole and the second locking hole as elongated holes, after the first locking member releases the first and second counterweight adjusting members, the operator or automatic control system can adjust the second counterweight adjusting member to quickly approach the target balance position, avoiding the problem of redundant back-and-forth adjustments during the fine-tuning stage and improving the efficiency of counterweight balance adjustment. On the other hand, by setting the length of the first locking hole in the second direction to be greater than the length of the second locking hole in the second direction, and the maximum width of the first locking hole in the direction perpendicular to the second direction to be less than the maximum width of the second locking hole in the direction perpendicular to the second direction, the second counterweight adjusting member can be moved in the second direction to achieve counterweight balance adjustment. During the counterweight balance adjustment process, the first locking member can retract and move into the wider second locking member. After initially determining the installation position of the second counterweight adjusting member, the first locking member is inserted into the first and second locking holes in sequence, so that the first locking member presses against the first and second counterweight adjusting members, thereby improving the adjustment efficiency and effect of the counterweight balance of the second counterweight adjusting member.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the mounting base is provided with a mounting groove, and the first counterweight adjustment member is rotatably disposed within the mounting groove along the first direction. Thus, on the one hand, the mounting groove can serve as a physical guide rail to restrict the circumferential rotation of the first counterweight adjustment member along the first direction, thereby avoiding the problem of inaccurate adjustment caused by slight rotation or offset of the first counterweight adjustment member before locking; on the other hand, the nested arrangement of the first counterweight adjustment member and the mounting base improves the overall compactness of the counterweight balancing structure, reduces the weight of the mounting base, lowers the center of gravity of the counterweight balancing structure, and reduces the risk of the first counterweight adjustment member tipping over relative to the second counterweight adjustment member.

[0013] In conjunction with the first aspect, in some implementations of the first aspect, the first counterweight adjusting member is provided with a countersunk groove, the countersunk groove is spaced apart from the limiting groove, the mounting base is provided with a plurality of mounting holes communicating with the mounting groove, the plurality of mounting holes are arranged at intervals along the first direction, at least one of the plurality of mounting holes is located in the countersunk groove in a projection plane perpendicular to the rotation axis of the first counterweight adjusting member, and the countersunk groove and the mounting holes are used for the insertion of the second locking member. Therefore, on the one hand, by setting the countersunk groove and the limiting groove alternately, the problem of motion interference between the second counterweight adjusting member and the first counterweight adjusting member is avoided; on the other hand, by setting multiple mounting holes arranged at intervals along the first direction, and setting the first counterweight adjusting member to be rotatably connected relative to the mounting base, and such that at least one of the multiple mounting holes is located in the countersunk groove in the projection plane perpendicular to the rotation axis of the first counterweight adjusting member, multiple predefined, discrete mounting positions are provided for the first counterweight adjusting member, and the countersunk groove can be set relative to the mounting hole after the first counterweight adjusting member rotates to any position, thereby realizing the full-angle adjustment of the first counterweight adjusting member in the first direction of 360°, and improving the coarse adjustment accuracy of the counterweight balance adjustment.

[0014] In conjunction with the first aspect, in some implementations of the first aspect, the countersunk groove includes a first groove and a second groove, which are symmetrically arranged relative to the limiting groove. Thus, on the one hand, the symmetrical arrangement of the first groove and the second groove relative to the limiting groove ensures that the mass distribution of the first counterweight adjustment component is balanced, thereby reducing the initial imbalance of the system during installation and improving the efficiency and accuracy of counterweight balance adjustment; on the other hand, the two symmetrical first grooves and the second groove provide two symmetrical installation areas for the first counterweight adjustment component on the mounting base, thereby increasing the rotational adjustment range of the first counterweight adjustment component.

[0015] In conjunction with the first aspect, in some implementations of the first aspect, the countersunk groove is configured as an arc-shaped groove, and the center of the arc-shaped groove coincides with the rotation center of the first counterweight adjusting member. Thus, the center of mass of the second locking member and its load always remains on a circle of the same radius. On the one hand, the arc-shaped countersunk groove provides the most natural and smoothest path for the movement of the second locking member, improving the smoothness and efficiency of adjustment; on the other hand, the second locking member can evenly distribute the centrifugal force across the entire groove wall during the high-speed rotation of the counterweight balancing structure, extending the lifespan of the counterweight balancing structure.

[0016] In conjunction with the first aspect, in some implementations of the first aspect, the adjustment diameter of the counterweight balancing structure is less than or equal to 30 mm in the projection plane perpendicular to the rotation axis of the first counterweight adjustment member. Therefore, by setting the size of the counterweight balancing structure within a suitable range, the entire balancing system of the counterweight balancing structure can be seamlessly integrated into a specific part of the magnetic gyro rotor without interfering with surrounding key components such as magnetic poles, microwave cavities, and cooling channels. Simultaneously, this reduces the search area required by the balancing operator or automatic balancing equipment, decreases the time required to find the optimal balance point, and improves the efficiency of dynamic balancing adjustment.

[0017] In conjunction with the first aspect, in some implementations of the first aspect, the first counterweight adjusting member includes a plurality of first sub-counterweight blocks, the plurality of first sub-counterweight blocks being detachably stacked along a third direction; and / or, the second counterweight adjusting member includes a plurality of second sub-counterweight blocks, the plurality of second sub-counterweight blocks being detachably stacked along a third direction, wherein the third direction is parallel to the rotation axis of the first counterweight adjusting member.

[0018] Secondly, this application provides a rotary processing device, including a turntable, at least one functional module, and at least one counterweight balancing structure as described above. The at least one functional module and the at least one counterweight balancing structure are mounted on the turntable to form a rotary structure. The turntable drives the rotary structure to rotate around its rotation center, and the counterweight balancing structure adjusts the center of gravity of the rotary structure to coincide with the rotation center. Thus, by adjusting the installation angles and distances of the first and second counterweight adjusting components through centrifugal force dynamic and static balance calculations or dynamic balancing instrument measurements, the problem of center of gravity deviation caused by manufacturing, testing, and installation processes, and even differences in component density, is eliminated. This achieves balance of the turntable's rotation center and solves the problems of off-center loading, vibration, wear noise, and short lifespan of the turntable shaft.

[0019] In conjunction with the second aspect, in some implementations of the second aspect, the turntable is provided with a first positioning structure, and the mounting base is provided with a second positioning structure, the second positioning structure being connected in cooperation with the first positioning structure. Therefore, by providing the second positioning structure in cooperation with the first positioning structure, the alignment and assembly efficiency and yield of the turntable and the counterweight balancing structure are improved.

[0020] In conjunction with the second aspect, in some implementations of the second aspect, the first positioning structure includes a first positioning element and a second positioning element, and the second positioning structure includes a third positioning element and a fourth positioning element. The first positioning element and the third positioning element are connected with a transition fit, and the second positioning element and the fourth positioning element are connected with a clearance fit. Thus, the first positioning element is used for precise positioning, and the second positioning element is used for initial positioning, thereby improving the assembly yield and efficiency of the counterweight balancing structure, as well as increasing the tolerance for processing errors and improving the product production yield.

[0021] In conjunction with the second aspect, in some implementations of the second aspect, the functional module includes a magnetron, a sensor, or a cutting mechanism. Thus, the functional module achieves weight and center of gravity balance based on a counterweight balancing structure, improving the operational stability of the functional module, reducing noise and safety accidents, and extending the lifespan of the rotary machining equipment.

[0022] In conjunction with the second aspect, in some implementations of the second aspect, the mounting base, the first counterweight adjusting component, and the second counterweight adjusting component are fixedly connected as an integral structure by adhesive bonding or welding. Therefore, by fixing the various parts of the counterweight balancing structure into an integral structure after the counterweight balancing structure is installed, the problem of the counterweight balancing structure losing balance due to relative displacement of at least two of the mounting base, the first counterweight adjusting component, and the second counterweight adjusting component during high-speed rotation is prevented. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is an exploded structural diagram of a counterweight balancing structure provided in an embodiment of this application.

[0025] Figure 2 This is a schematic diagram of the structure of the rotary processing equipment provided in the embodiments of this application.

[0026] Figure 3 yes Figure 2 An exploded view of the rotary machining equipment.

[0027] Figure 4 yes Figure 2 A top view of the rotary machining equipment.

[0028] Figure 5 is Figure 4 A cross-sectional view of the rotary machining equipment along line AA.

[0029] Figure 6 is an enlarged view of part I of the rotary machining equipment in Figure 5.

[0030] Figure 7 is an enlarged view of part II of the rotary machining equipment in Figure 4.

[0031] Figure 8 is an exploded structural diagram of a counterweight balancing structure provided in another embodiment of this application.

[0032] Figure 9 is an exploded structural diagram of a counterweight balancing structure provided in another embodiment of this application.

[0033] Application drawing reference numerals: Rotary machining equipment - 1; Turntable - 10; Turntable body - 11; First positioning structure - 111; First positioning component - 1111; Second positioning component - 1112; Rotary shaft - 12; Functional module - 20; Counterweight balancing structure - 30; Mounting base - 31; Mounting groove - 311; Mounting hole - 312; Second positioning structure - 313; Third positioning component - 3131; Fourth positioning component - 3132; First counterweight adjusting component - 32; Limiting groove - 321; First rack - 3211; First groove Body-3212; Second groove-3213; First locking hole-322; Countersunk groove-323; First hole groove-3231; Second hole groove-3232; First sub-counterweight-324; Second counterweight adjusting component-33; Second rack-331; Second locking hole-332; First hole-3321; Second hole-3322; Second sub-counterweight-333; First tooth pitch-D1; Second tooth pitch-D2; First length-L1; Second length-L2; First direction-X; Second direction-Y; Third direction-Z.

[0034] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this application. Detailed Implementation

[0035] To enable those skilled in the art to better understand the present application, the technical solutions of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present application.

[0036] The terms “first,” “second,” etc. (if present) in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a particular order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms “comprising” and “having,” and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0037] In this application, "multiple" means two or more.

[0038] The term "counterweight balancing," also known as balancing or counterweighting, refers to the techniques and methods used to adjust the mass distribution of a system (usually a rotating or lever system) by adding one or more counterweight structures, so that its center of gravity coincides with the system's center of rotation or fulcrum, thereby achieving or approaching a state of perfect balance.

[0039] In rotary machining equipment, functional modules and counterweight modules are mounted on a turntable to achieve dynamic balance during rotation. However, on the one hand, the existing counterweight and functional modules have fixed installation positions, making it impossible to adjust for imbalances caused by assembly and manufacturing errors in the functional modules based on the counterweight modules. This increases the difficulty of balancing the functional modules. On the other hand, since the counterweight modules are configured as individual counterweight blocks, remanufacturing is required when the counterweight modules are unbalanced, reducing maintenance efficiency and cost-effectiveness. Furthermore, because the installation positions of the functional modules and counterweight modules are not adjustable, they are prone to imbalances due to assembly and manufacturing errors. This increases the risk of deflection during rotation and also increases wear on the turntable.

[0040] Please see Figure 1 , Figure 1 This is an exploded view of a counterweight balancing structure 30 provided in an embodiment of this application. The counterweight balancing structure 30 includes a mounting base 31, a first counterweight adjusting member 32, and a second counterweight adjusting member 33. The first counterweight adjusting member 32 is connected to the mounting base 31, and its mounting position on the mounting base 31 is adjustable along a first direction X. The second counterweight adjusting member 33's mounting position on the first counterweight adjusting member 32 is adjustable along a second direction Y. The second direction Y intersects the first direction X.

[0041] The counterweight balancing structure 30 provided in this application, on the one hand, allows the first counterweight adjusting member 32 to provide a balancing force vector in any direction along the rotation radius of the first counterweight adjusting member 32, while the installation position of the second counterweight adjusting member 33 on the first counterweight adjusting member 32 can be adjusted in a second direction to adjust the distance between the center of mass of the second counterweight adjusting member 33 and the functional module 20. This achieves balance adjustment of the counterweight in multiple degrees of freedom of the counterweight balancing structure 30, expands the range and capability of balance adjustment of the counterweight balancing structure 30, compensates for the unbalanced force caused by assembly and processing errors in the functional module 20, and reduces the difficulty of adjusting the balance state of the functional module 20; on the other hand, the first counterweight adjusting member 33 can provide a balancing force vector in any direction along the rotation radius of the first counterweight adjusting member 32, while the installation position of the second counterweight adjusting member 33 on the first counterweight adjusting member 32 can be adjusted in a second direction to adjust the distance between the center of mass of the second counterweight adjusting member 33 and the functional module 20. The first counterweight adjustment component 32 and the second counterweight adjustment component 33 are arranged separately so that the adjustment process of the first counterweight adjustment component 32 and the second counterweight adjustment component 33 in the two-dimensional plane does not interfere with each other. This improves the adjustment accuracy and efficiency of the counterweight balance structure 30, reduces the risk of remanufacturing the counterweight balance structure 30, and improves the maintenance efficiency of the counterweight module. Furthermore, the installation positions of the first counterweight adjustment component 32 and the second counterweight adjustment component 33 are adjustable. Therefore, the counterweight balance structure 30 can adjust the problem of counterweight imbalance caused by assembly and processing errors of the functional module 20 and the counterweight module, reduce the risk of the functional module 20 deflecting during rotation, and reduce the wear of the turntable 10.

[0042] For example, the first direction X and the second direction Y are set at an angle, with the first direction X perpendicular to the rotation axis of the first counterweight adjusting member 32, and the second direction Y perpendicular to the rotation axis of the first counterweight adjusting member 32. The first counterweight adjusting member 32 is described as having a cylindrical structure. The rotation axis of the first counterweight adjusting member 32 is its central axis. For accuracy, all directions mentioned herein are referred to as directions. Figure 1 For reference, Figure 1 For example, "first direction X" refers to the circumferential direction of the first counterweight adjusting member 32, that is, the direction surrounding the central axis of the first counterweight adjusting member 32; the term "second direction Y" refers to the radial direction perpendicular to the first counterweight adjusting member 32, that is, the radial direction along the radial section of the first counterweight adjusting member 32; the term "third direction Z" refers to the axial direction of the first counterweight adjusting member 32, that is, the direction parallel to the central axis of the first counterweight adjusting member 32. The first direction X, second direction Y, and third direction Z of the first counterweight adjusting member 32 can be customized according to the specific structure of the product and the perspective of the accompanying drawings, and this application embodiment does not make specific limitations.

[0043] Please refer to it again. Figure 1 To Figure 3, Figure 2 This is a schematic diagram of the structure of the rotary processing equipment 1 provided in the embodiments of this application; Figure 3 yes Figure 2An exploded view of the rotary machining equipment 1 is shown. The rotary machining equipment 1 includes a turntable 10, at least one functional module 20, and at least one counterweight balancing structure 30. At least one functional module 20 and at least one counterweight balancing structure 30 are mounted on the turntable 10 to form a rotary structure. The turntable 10 drives the rotary structure to rotate around its rotation center. The counterweight balancing structure 30 is used to adjust the center of gravity of the rotary structure to coincide with the rotation center. Thus, by evaluating and calculating the weight and center of gravity of the counterweight balancing structure 30 matched with the functional module 20 using a static balancer and a dynamic balancer, and adjusting and determining the installation angle and position of the first counterweight adjusting member 32 and the second counterweight adjusting member 33, the problem of center of gravity deviation caused by the manufacturing, testing, and installation processes of the functional module 20 and the counterweight balancing structure 30, and even differences in component density, is eliminated. This achieves balance of the rotation center of the turntable 10 and solves the problems of off-center loading, vibration, wear noise, and short lifespan of the turntable 10's shaft.

[0044] It should be noted that the connection method between the turntable 10, at least one functional module 20, and at least one counterweight balancing structure 30 is not a specific limitation on the connection position, connection relationship, or specific structure of each component. Figure 2 is merely a schematic diagram of the structure of the rotary processing equipment 1 according to an embodiment of this application and does not constitute a specific limitation on the rotary processing equipment 1. In other embodiments of this application, the rotary processing equipment 1 may include more components than shown in Figure 2, or combine certain components, or different components. For example, the rotary processing equipment 1 may also include, but is not limited to, a drive module. The drive module is used to drive the turntable 10 to rotate. In some embodiments, the drive module may also be used to drive at least one functional module 20 to rotate. Specifically, the number of drive modules may be set to two, with the two drive modules respectively used to drive the turntable 10 and at least one functional module 20 to rotate; or, the number of drive modules may be set to one, with the drive module used to drive the turntable 10 to revolve while simultaneously driving at least one functional module 20 to rotate.

[0045] The turntable 10 includes a turntable body 11 and a rotating shaft 12. The rotating shaft 12 is fixedly connected to the turntable body 11 and is driven by the drive module. The rotating shaft can be integrally formed with the turntable body 11; or, the rotating shaft can be detachably connected to the turntable body 11. The rotating shaft 12 is located at the geometric center of the turntable body 11, thereby preventing unbalanced centrifugal forces from generating huge, periodic impact loads on the rotating shaft 12. This improves the stability and reliability of the drive module driving the rotating shaft 12 to rotate the turntable body 11, as well as the functional module 20 and the counterweight balance structure 30 mounted on the turntable body 11, around the central axis of the rotating shaft 12, thus extending the lifespan of the rotary machining equipment 1.

[0046] Please refer to Figures 4 to 6. Figure 4 yes Figure 2Figure 5 is a top view of the rotary machining equipment 1; Figure 4 Figure 5 shows a cross-sectional view of the rotary machining equipment 1 along line AA; Figure 6 is an enlarged view of part I of the rotary machining equipment 1 in Figure 5. In some embodiments, the turntable 10 is provided with a first positioning structure 111, and the mounting base 31 is provided with a second positioning structure 313, which is connected to the first positioning structure 111. Therefore, by providing the second positioning structure 313 to be connected to the first positioning structure 111, the alignment and assembly efficiency and yield of the turntable 10 and the counterweight balancing structure 30 are improved.

[0047] The first positioning structure 111 includes a first positioning element 1111 and a second positioning element 1112. The second positioning structure 313 includes a third positioning element 3131 and a fourth positioning element 3132. The first positioning element 1111 and the third positioning element 3131 are connected by a transition fit. The second positioning element 1112 and the fourth positioning element 3132 are connected by a clearance fit. Thus, the first positioning element 1111 is used for precise positioning, and the second positioning element 1112 is used for initial positioning, thereby improving the assembly yield and efficiency of the counterweight balancing structure 30, as well as improving the tolerance rate of processing errors and improving the product production yield. Exemplarily, the first positioning element 1111 and the third positioning element 3131 are each configured as positioning protrusions, and the third positioning element 3131 is each configured as a positioning groove or positioning hole that is inserted and connected to the positioning protrusion. Of course, in some embodiments, the first positioning member 1111 and the third positioning member 3131 are each configured as a positioning groove or a positioning hole, and the third positioning member 3131 is each configured as a positioning protrusion that is inserted and connected to the positioning groove or the positioning hole.

[0048] Functional module 20 can be applied to equipment involving rotating systems, such as thin film deposition chambers and cleaning chambers. For example, the rotary processing equipment 1 can be, but is not limited to, semiconductor manufacturing equipment, cleaning equipment, cutting equipment, or sensing equipment. Functional module 20 includes a magnetron, a sensor, or a cutting mechanism. Thus, functional module 20 achieves weight and center of gravity balance based on the counterweight balance structure 30, improving the operational stability of functional module 20, reducing noise and safety accidents, and extending the lifespan of the rotary processing equipment 1.

[0049] For example, functional module 20 is configured as a magnetron. The magnetron is used for magnetic field rotation control, and the balance of the rotating shaft 12 is adjusted and controlled by the configuration of the magnetic ring and the counterweight balancing structure 30, so as to avoid problems such as polarization of the turntable 10 and wear of the rotating shaft 12 of the turntable 10. It should be noted that the type of functional module 20 can be set according to the actual situation, and the embodiments of this application do not make specific limitations.

[0050] Please refer again to Figures 1 and 3. The materials of the mounting base 31, the first counterweight adjustment component 32, and the second counterweight adjustment component 33 can each include, but are not limited to, metallic materials. Metallic materials include, but are not limited to, 316 stainless steel, brass, nickel blocks, etc. Therefore, since metallic materials generally have high density and high structural strength, using metallic materials for the first counterweight adjustment component 32 and the second counterweight adjustment component 33 serves two purposes: firstly, it avoids vibration or displacement of the mounting base 31, the first counterweight adjustment component 32, and the second counterweight adjustment component 33 during high-speed rotation of the counterweight balancing structure 30, thus preventing a reduction in the accuracy of the counterweight balance adjustment; secondly, it avoids deformation of the mounting base 31, the first counterweight adjustment component 32, and the second counterweight adjustment component 33, thus preventing the disruption of the counterweight balance. For example, the material of the first counterweight adjustment component 32 can be the same as the material of the second counterweight adjustment component 33 and the material of the mounting base 31. Specifically, the materials of the first counterweight adjustment component 32, the second counterweight adjustment component 33, and the mounting base 31 are all 316 stainless steel. The material of the first counterweight adjustment component 32 may be different from the material of the second counterweight adjustment component 33 and the material of the mounting base 31. This application embodiment does not make specific limitations.

[0051] For example, the first counterweight adjustment member 32 is provided with a limiting groove 321, and the second counterweight adjustment member 33 is translatably disposed within the limiting groove 321 along the second direction Y. Thus, on the one hand, the limiting groove 321 can serve as a physical guide rail to restrict the linear translation of the second counterweight adjustment member 33 along the second direction Y, thereby avoiding the problem of inaccurate adjustment caused by slight rotation or offset of the second counterweight adjustment member 33 before locking; on the other hand, since the second counterweight adjustment member 33 is confined within the limiting groove 321, the first counterweight adjustment member 32 will drive the second counterweight adjustment member 33 to rotate together during rotation, improving the adjustment accuracy and efficiency of the counterweight balancing structure 30; furthermore, the nested arrangement of the first counterweight adjustment member 32 and the second counterweight adjustment member 33 improves the overall compactness of the counterweight balancing structure 30, reduces the weight of the first counterweight adjustment member 32, lowers the center of gravity of the counterweight balancing structure 30, and reduces the risk of the second counterweight adjustment member 33 tipping over relative to the first counterweight adjustment member 32.

[0052] Of course, in some embodiments, the first counterweight adjusting member 32 may not have a limiting groove 321. For example, the second counterweight adjusting member 33 and the first counterweight adjusting member 32 are stacked on the third direction Z, and the third direction Z is parallel to the rotation axis of the first counterweight adjusting member 32.

[0053] Please refer to the following: Figure 1 and Figure 7Figure 7 is an enlarged view of part II of the rotary machining equipment 1 in Figure 4. At least one sidewall of the limiting groove 321, which is parallel to the second direction Y, is provided with a first rack 3211, and the second counterweight adjusting member 33 is provided with a second rack 331 that meshes with the first rack 3211. Therefore, the meshing arrangement of the first rack 3211 and the second rack 331 serves two purposes. First, it restricts the sliding of the first rack 3211 relative to the second rack 331 along the second direction Y, thereby enabling the step adjustment of the second counterweight adjustment member 33 and improving the adjustment accuracy of the second counterweight adjustment member 33. Second, the simultaneous meshing of the first rack 3211 and the second rack 331 through multiple teeth, with these teeth sharing the load, improves the load-bearing capacity and lifespan of the first counterweight adjustment member 32 and the second counterweight adjustment member 33, maintains the accuracy of the counterweight balance structure 30 for long-term use, and avoids the problem of counterweight imbalance caused by the second counterweight adjustment member 33 sliding in the smooth limiting groove 321. Third, the setting of the limiting groove 321 can also prevent the operator or automatic control system from moving the second counterweight adjustment member 33 beyond the range allowed by the mechanical structure, thus preventing collisions or interference with surrounding components.

[0054] For example, the two sidewalls of the limiting groove 321, which are parallel to the second direction Y, are each provided with a first rack 3211. The limiting groove 321 can be configured as a rectangular groove. In other words, the limiting groove 321 has a rectangular shape. Of course, in some embodiments, the shape of the limiting groove 321 can also be configured as a unicorn, a spiral, or other regular or irregular shapes. It should be noted that a unicorn is a geometric shape composed of a rectangle and two semicircles, and the shape of a unicorn is similar to a standard track. The shape of the second counterweight adjustment member 33 can be the same as or different from the shape of the limiting groove 321, and this application does not specifically limit it. For example, in this embodiment, the shape of the second counterweight adjustment member 33 is a cuboid.

[0055] As shown in Figures 1 and 7, specifically, the tooth pitch of the first rack 3211 is the first tooth pitch D1. The tooth pitch of the second rack 331 is the second tooth pitch D2. The first tooth pitch D1 is equal to the second tooth pitch D2. The first tooth pitch D1 is 0.5mm-1.0mm. Understandably, if the first tooth pitch D1 and the second tooth pitch D2 are too large, the adjustment accuracy of the second counterweight adjustment component 33 will decrease, while if the first tooth pitch D1 and the second tooth pitch D2 are too small, the structural strength of the first rack 3211 and the second rack 331 will decrease. Therefore, on the one hand, by setting the first gear and the second tooth pitch D2 to be equal, the first rack 3211 and the second rack 331 are fully matched and synchronously meshed, stress concentration is avoided, and the service life of the first counterweight adjustment component 32 and the second counterweight adjustment component 33 is extended; on the other hand, by setting the first tooth pitch D1 and the second tooth pitch D2 within a suitable range, the adjustment resolution of the balance counterweight of the second counterweight adjustment component 33 is improved, while the first rack 3211 and the second rack 331 have good mechanical strength and wear resistance, and are easy to process and manufacture.

[0056] The first tooth pitch D1 and the second tooth pitch D2 can be, but are not limited to, 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, or 1.0mm, etc., and the embodiments of this application do not impose specific limitations. For example, both the first tooth pitch D1 and the second tooth pitch D2 are 0.8mm. It should be noted that the size of the first tooth pitch D1 and the second tooth pitch D2 can be set according to factors such as the specifications of the actual application product of the counterweight balancing structure 30, and the embodiments of this application do not impose specific limitations.

[0057] For example, the first rack 3211 and the first counterweight adjustment member 32 are integrally formed, and the second rack 331 and the second counterweight adjustment member 33 are integrally formed, thereby improving the connection strength between the first rack 3211 and the first counterweight adjustment member 32, and between the second rack 331 and the second counterweight adjustment member 33. Of course, in some embodiments, the first rack 3211 and the first counterweight adjustment member 32 are separately arranged and fixedly connected, and the second rack 331 and the second counterweight adjustment member 33 are separately arranged and fixedly connected. The first rack 3211 and the first counterweight adjustment member 32, and the second rack 331 and the second counterweight adjustment member 33 can be fixedly connected by, but not limited to, bonding, welding, or snap-fitting; the embodiments in this application do not specifically limit this connection.

[0058] Of course, in some embodiments, the limiting groove 321 can also be configured as a smooth groove. Specifically, the two groove sidewalls of the limiting groove 321 parallel to the second direction Y are configured as flat surfaces, and the first counterweight adjustment member 32 has a marking scale on its end face facing away from the mounting base 31 in the third direction Z. The marking scale is used to indicate the translation distance of the second counterweight adjustment member 33.

[0059] In other embodiments, the counterweight balancing structure 30 may further include a driving member. The driving member is drively connected to at least one of the first counterweight adjusting member 32 and the second counterweight adjusting member 33. For example, the driving member may be used to drive the first counterweight adjusting member 32 to rotate relative to the mounting base 31 along a first direction X to a first preset position, so that the first counterweight adjusting member 32 can be fixed relative to the mounting base 31 at the first preset position; the driving member may also be used to drive the second counterweight adjusting member 33 to translate relative to the first counterweight adjusting member 32 along a second direction Y to a second preset position, so that the second counterweight adjusting member 33 can be fixed relative to the first counterweight adjusting member 32 at the second preset position. Thus, by setting the driving member to drive the first counterweight adjusting member 32 and the second counterweight adjusting member 33 to move with different degrees of freedom relative to the mounting base 31, the adjustment accuracy of the first counterweight adjusting member 32 and the second counterweight adjusting member 33 is improved, and intelligent adjustment of the counterweight balance is achieved.

[0060] In some embodiments, the drive component integrates both driving and locking functions. The drive component is used to drive the first counterweight adjustment component 32 to rotate relative to the mounting base 31 to a first preset position, thereby locking the first counterweight adjustment component 32 onto the mounting base 31. For example, the output shaft of the drive component is fixedly connected to the first counterweight adjustment component 32, so that the first counterweight adjustment component 32 only rotates with the rotation of the output shaft of the drive component, and when the output shaft of the drive component stops rotating, the first counterweight adjustment component 32 can be fixed relative to the mounting base 31. Alternatively, the output shaft of the drive component is provided with an anti-rotation section and a rotation section, and the first counterweight adjustment component 32 is provided with an anti-rotation hole and a rotation hole. When the anti-rotation hole engages with the rotation section, the drive component cannot drive the first counterweight adjustment component 32 to rotate relative to the mounting base 31, thus fixing the first counterweight adjustment component 32 relative to the mounting base 31. When the rotation section engages with the rotation hole, the drive component cannot drive the first counterweight adjustment component 32 to rotate relative to the mounting base 31. Similarly, the driving component can also be used to drive the second counterweight adjustment component 33 to rotate relative to the first counterweight adjustment component 32 to a second preset position and then lock the second counterweight adjustment component 33 onto the first counterweight adjustment component 32.

[0061] In other embodiments, the driving component only has a driving function, that is, the driving component is only used to drive the first counterweight adjustment component 32 to rotate relative to the mounting base 31; or, only used to drive the second counterweight adjustment component 33 to rotate relative to the first counterweight adjustment component 32. For example, before rotating the first counterweight adjustment component 32, the operator can release the fixed connection between the first counterweight adjustment component 32 and the mounting base 31, thereby enabling the driving component to drive the first counterweight adjustment component 32 to rotate relative to the mounting base 31 to a first preset position. After the first counterweight adjustment component 32 rotates relative to the mounting base 31 to the first preset position, the operator then manually fixes the first counterweight adjustment component 32 and the mounting base 31 together using the first locking component.

[0062] The extension length of the limiting groove 321 in the second direction Y is the first length L1. The extension length of the second counterweight adjusting member 33 in the second direction Y is the second length L2. The difference between the first length L1 and the second length L2 is 10mm-20mm. Understandably, when the difference between the first length L1 and the second length L2 is too small, the adjustment stroke of the second counterweight adjustment component 33 is insufficient, the counterweight balance adjustment is limited, and the assembly efficiency and manufacturing error tolerance of the second counterweight adjustment component 33 are low. When the difference between the first length L1 and the second length L2 is too large, it causes space waste, and when the second counterweight adjustment component 33 moves to a certain end of the limiting groove 321, it will form a cantilever beam structure, so that most of the mass of the second counterweight adjustment component 33 is suspended outside the support center point. When the counterweight balance structure 30 rotates at high speed, the huge centrifugal force will act on this cantilever beam structure and generate a torque that causes the second counterweight adjustment component 33 to twist or bend, which can easily cause the second counterweight adjustment component 33 to vibrate or shift, thereby reducing the stability and reliability of the counterweight balance adjustment. Therefore, based on the fact that the difference between the first length L1 and the second length L2 is set within a suitable range, the adjustment stroke of the second counterweight adjustment member 33 is appropriate, which meets the adjustment requirements of counterweight balance and improves the assembly efficiency and manufacturing error tolerance of the second counterweight adjustment member 33. On the other hand, the length difference between the second counterweight adjustment member 33 and the length of the limiting groove 321 is moderate, which improves the space utilization rate and avoids the second counterweight adjustment member 33 from vibrating or shifting when the counterweight balance structure 30 rotates at high speed, thereby improving the stability and reliability of counterweight balance adjustment.

[0063] Please refer again to Figures 1 and 4. The difference between the first length L1 and the second length L2 can be, but is not limited to, 10mm, 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm, or 20mm, etc., and this application does not impose a specific limitation. For example, the difference between the first length L1 and the second length L2 is 15mm. It should be noted that the difference between the first length L1 and the second length L2 can be set according to factors such as the size and specifications of the actual application product of the counterweight balancing structure 30, and the implementation method of this application does not impose a specific limitation.

[0064] The first counterweight adjusting member 32 is provided with a first locking hole 322. The second counterweight adjusting member 33 is provided with a second locking hole 332. The first locking hole 322 and the second locking hole 332 are opposite to and connected to each other, and are used for the insertion of the first locking member. Therefore, by locking the first counterweight adjusting member 32 and the second counterweight adjusting member 33 together using the first locking member, on the one hand, rigid linkage between the first counterweight adjusting member 32 and the second counterweight adjusting member 33 is achieved, and on the other hand, it avoids the problem of the first counterweight adjusting member 32 and the second counterweight adjusting member 33 having separate locking structures. Furthermore, when the counterweight balancing structure 30 rotates at high speed, the first counterweight adjusting member 32 and the second counterweight adjusting member 33 may experience asynchronous, minute displacements due to slight loosening. This ensures that once the installation positions of the first counterweight adjusting member 32 and the second counterweight adjusting member 33 are determined, they can be locked together. Even if the first counterweight adjusting member 32 and the second counterweight adjusting member 33 are forced to vibrate slightly together when the counterweight balancing structure 30 rotates at high speed or vibrates, there will be no relative movement between the first counterweight adjusting member 32 and the second counterweight adjusting member 33. The freedom of movement improves the accuracy, stability, and reliability of the counterweight balance adjustment. On the other hand, the clamping force provided by a single first locking element is much greater than that of two independent first locking elements, thereby improving the resistance to loosening caused by vibration. This ensures that the balance state of the counterweight balance structure 30 remains stable during long-term operation, reduces the number of parts, and improves the structural compactness. Furthermore, when the counterweight balance structure 30 is used for the counterweight balance of a magnetic cyclotron, the various parts of the counterweight balance structure 30 will undergo thermal expansion and contraction due to the large amount of heat generated during the operation of the magnetic cyclotron. The first locking element fixes the first counterweight adjustment element 32 and the second counterweight adjustment element 33 into an integral structure, which helps the first counterweight adjustment element 32 and the second counterweight adjustment element 33 maintain the consistency of their relative positions when heated, avoiding the problem of imbalance caused by asynchronous thermal deformation.

[0065] For example, the first locking hole 322 and the second locking hole 332 are each configured as elongated holes. The length of the first locking hole 322 in the second direction Y is greater than the length of the second locking hole 332 in the second direction Y, and the maximum width of the first locking hole 322 in the direction perpendicular to the second direction Y is less than the maximum width of the second locking hole 332 in the direction perpendicular to the second direction Y. Therefore, on the one hand, by configuring the first locking hole 322 and the second locking hole 332 as elongated holes, after the first locking member releases the first counterweight adjusting member 32 and the second counterweight adjusting member 33, the operator or automatic control system can adjust the second counterweight adjusting member 33 to quickly approach the target balance position, improving the efficiency of counterweight balance adjustment; on the other hand, by setting the length of the first locking hole 322 in the second direction Y to be greater than the length of the second locking hole 332 in the second direction Y, and the maximum width of the first locking hole 322 in the direction perpendicular to the second direction Y to be less than the maximum width of the second locking hole 332 in the direction perpendicular to the second direction Y, the efficiency of counterweight balance adjustment is improved. The maximum width in the direction perpendicular to the second direction Y allows the second counterweight adjustment member 33 to translate in the second direction Y to achieve counterweight balance adjustment. During the counterweight balance adjustment process, the first locking member can retract and move into the wider second locking member. After initially determining the installation position of the second counterweight adjustment member 33, the first locking member is inserted into the first locking hole 322 and the second locking hole 332 in sequence, so that the first locking member presses the first counterweight adjustment member 32 and the second counterweight adjustment member 33, thereby improving the adjustment efficiency and effect of the counterweight balance of the second counterweight adjustment member 33.

[0066] The second counterweight adjusting member 33 is detachably connected to the first counterweight adjusting member 32 via a first locking member, thereby allowing the installation position of the second counterweight adjusting member 33 on the first counterweight adjusting member 32 to be adjustable. In some embodiments, a loosening shim may also be fitted onto the first locking member, thereby increasing the stability and reliability of the connection between the second counterweight adjusting member 33 and the first counterweight adjusting member 32, and preventing the imbalance caused by relative displacement between the second counterweight adjusting member 33 and the first counterweight adjusting member 32. The first locking member may be, but is not limited to, screws, bolts, etc.

[0067] Of course, in some embodiments, after the installation position of the second counterweight adjusting member 33 on the first counterweight adjusting member 32 is determined, the second counterweight adjusting member 33 and the first counterweight adjusting member 32 can also be directly fixed together by adhesive bonding or welding. For example, adhesive can be injected into the second locking hole 332 and the first locking hole 322 to achieve adhesive bonding between the second counterweight adjusting member 33 and the first counterweight adjusting member 32; or, the first locking member can be welded to the first counterweight adjusting member 32 and / or the first counterweight adjusting member 32 to prevent the second counterweight adjusting member 33 and the first counterweight adjusting member 32 from being disrupted due to relative displacement.

[0068] Please refer again to Figures 1 and 6. The second locking hole 332 is configured as a stepped hole. Specifically, the second locking hole 332 includes a first hole 3321 and a second hole 3322. The second hole 3322 connects the first hole 3321 and the first locking hole 3322. The width of the second hole 3322 in the direction perpendicular to the second direction Y is less than the width of the first hole 3321 in the direction perpendicular to the second direction Y, and equal to the width of the first locking hole 322 in the direction perpendicular to the second direction Y. Therefore, by setting the second hole 3322 and the first locking hole 322 to have the same diameter, the first locking member is locked within the second hole 3322 and the first locking hole 322, thereby improving the stability and reliability of the first locking member in pressing and fixing the first counterweight adjusting member 32 and the second counterweight adjusting member 33.

[0069] For example, the mounting base 31 is provided with a mounting groove 311. The first counterweight adjustment member 32 is rotatably disposed within the mounting groove 311 along the first direction X. Thus, on the one hand, the mounting groove 311 can serve as a physical guide rail to restrict the first counterweight adjustment member 32 from rotating circumferentially along the first direction X, thereby avoiding the problem of inaccurate adjustment caused by slight rotation or offset of the first counterweight adjustment member 32 before locking; on the other hand, the nested arrangement of the first counterweight adjustment member 32 and the mounting base 31 improves the overall compactness of the counterweight balancing structure 30, reduces the weight of the mounting base 31, lowers the center of gravity of the counterweight balancing structure 30, and reduces the risk of the first counterweight adjustment member 32 tipping over relative to the second counterweight adjustment member 33.

[0070] For example, the mounting base 31 is configured as a cylindrical structure. The mounting base 31 and the first counterweight adjustment member 32 are coaxially arranged. In other words, the mounting base 31 has a circular shape. The mounting groove 311 is configured as a cylindrical groove. The first counterweight adjustment member 32 is also configured as a disc-shaped structure, and the first counterweight adjustment member 32 is coaxially arranged with the mounting base 31, thereby achieving the effect of rotating the first counterweight adjustment member 32 to balance the counterweight, and realizing the nested arrangement of the mounting base 31 and the first counterweight adjustment member 32, and avoiding the problem of interference between the first counterweight adjustment member 32 and the mounting base 31. Specifically, the mounting base 31, the first counterweight adjustment member 32 and the second counterweight adjustment member 33 are nested together so that the overall shape of the counterweight balancing structure 30 is approximately disc-shaped. Therefore, on the one hand, the disc-shaped structure reduces the radial space occupied by the counterweight balancing structure 30, and the disc-shaped structure has good bending resistance, extending the lifespan of the counterweight balancing structure 30 and maintaining its long-term accuracy. On the other hand, since the center of gravity of the disc-shaped structure is generally located at the center of the disc-shaped structure in simulation, the accuracy of the counterweight adjustment by the counterweight balancing structure 30 is improved. Of course, in some embodiments, the mounting base 31 is configured as an arc-shaped structure, a regular polygonal structure, or a shape with a fixed center of gravity that is easy to process and adapt for installation. This application embodiment does not specifically limit this. In other words, the shape of the mounting base 31 can also be, but is not limited to, arc-shaped, regular polygonal, etc. Of course, in some embodiments, the mounting base 31 may not be provided with a mounting groove 311. For example, the first counterweight adjustment member 32 and the mounting base 31 are stacked in the third direction Z.

[0071] like Figure 1As shown, in some embodiments, the first counterweight adjusting member 32 is provided with a countersunk groove 323. The countersunk groove 323 is spaced apart from the limiting groove 321. The mounting base 31 is provided with a plurality of mounting holes 312 communicating with the mounting groove 311. The plurality of mounting holes 312 are arranged at intervals along a first direction X. In the projection plane perpendicular to the rotation axis of the first counterweight adjusting member 32, at least one of the plurality of mounting holes 312 is located in the countersunk groove 323, and the countersunk groove 323 and the mounting holes 312 are used for the insertion of the second locking member. Therefore, on the one hand, by setting the countersunk groove 323 and the limiting groove 321 alternately, the problem of motion interference between the second counterweight adjusting member 33 and the first counterweight adjusting member 32 is avoided; on the other hand, by setting multiple mounting holes 312 arranged at intervals along the first direction X, and setting the first counterweight adjusting member 32 to be rotatably connected relative to the mounting base 31, and ensuring that at least one of the multiple mounting holes 312 is located in the countersunk groove 323 in the projection plane perpendicular to the rotation axis of the first counterweight adjusting member 32, multiple predefined, discrete mounting positions are provided for the first counterweight adjusting member 32. This allows the countersunk groove 323 to be relatively positioned relative to at least one mounting hole 312 in the third direction Z after the first counterweight adjusting member 32 rotates to any position, thereby enabling the first counterweight adjusting member 32 to perform 360° full-angle adjustment along the first direction X, improving the coarse adjustment accuracy of the counterweight balance adjustment. Specifically, the longest line connecting two adjacent mounting holes 312 along the first direction X is defined as the first arc. The line connecting the two ends of the countersunk groove 323 along the first direction X on the extension path of the countersunk groove 323 is defined as the second arc. The maximum central angle corresponding to the first arc is the first central angle, and the central angle corresponding to the second arc is the second central angle, wherein the second central angle is greater than or equal to the first central angle. Therefore, after the first counterweight adjusting member 32 rotates to any position, since the sector area corresponding to the first central angle can at least partially overlap with the sector area corresponding to the first central angle, at least one mounting hole 312 can be set relative to the countersunk groove 323 in the third direction Z.

[0072] The mounting base 31 and the first counterweight adjustment member 32 are detachably connected via a second locking member, thereby allowing the installation position of the first counterweight adjustment member 32 on the mounting base 31 to be adjustable. In some embodiments, a relaxation shim may also be fitted onto the second locking member, thereby increasing the stability and reliability of the connection between the mounting base 31 and the first counterweight adjustment member 32, and preventing the balance from being disrupted due to relative displacement between the mounting base 31 and the first counterweight adjustment member 32. The second locking member can be, but is not limited to, screws, bolts, etc.

[0073] In some embodiments, after the installation position of the first counterweight adjusting member 32 on the mounting base 31 is determined, the mounting base 31 and the first counterweight adjusting member 32 can also be directly fixed together by adhesive bonding or welding. For example, adhesive can be injected into the countersunk groove 323 to achieve adhesive bonding between the mounting base 31 and the first counterweight adjusting member 32; or, the second locking member can be welded to the mounting base 31 and / or the first counterweight adjusting member 32 to prevent the mounting base 31 and the first counterweight adjusting member 32 from losing balance due to relative displacement.

[0074] In some embodiments, after the installation position of the first counterweight adjusting member 32 on the second counterweight adjusting member 33 is determined, that is, when the counterweight balancing structure 30 and the functional module 20 are balanced, the mounting base 31, the first counterweight adjusting member 32, and the second counterweight adjusting member 33 can be fixedly connected as an integral structure by adhesive bonding or welding. Therefore, by fixing the counterweight balancing structure 30 into an integral structure after it is installed in place, the problem of the counterweight balancing structure 30 losing balance due to relative displacement of at least two of the mounting base 31, the first counterweight adjusting member 32, and the second counterweight adjusting member 33 during high-speed rotation is prevented.

[0075] For example, the bottom of the mounting base 31 is provided with four mounting holes 312. The line connecting two adjacent mounting holes 312 to the geometric center of the mounting base 31 is set at a right angle, thereby increasing the rotation adjustment range of the first counterweight adjustment member 32 and reducing the machining difficulty of the multiple mounting holes 312. The central angle corresponding to the countersunk groove 323 is greater than or equal to 120°, thereby realizing the alignment and assembly of the countersunk groove 323 and the mounting holes 312.

[0076] For example, the countersunk groove 323 includes a first groove 3231 and a second groove 3232, which are symmetrically arranged with respect to the limiting groove 321. Thus, on the one hand, the symmetrical arrangement of the first groove 3231 and the second groove 3232 with respect to the limiting groove 321 ensures that the mass distribution of the first counterweight adjustment member 32 is balanced, thereby reducing the initial imbalance of the system during installation and improving the efficiency and accuracy of counterweight balance adjustment. On the other hand, the two symmetrical first grooves 3231 and the second groove 3232 provide two symmetrical installation areas for the first counterweight adjustment member 32 on the mounting base 31, thereby increasing the rotational adjustment range of the first counterweight adjustment member 32.

[0077] The countersunk groove 323 is configured as an arc-shaped groove. The center of the arc-shaped groove coincides with the rotation center of the first counterweight adjustment member 32. As a result, the center of mass of the second locking member and its load always remains on a circle of the same radius. On the one hand, the arc-shaped countersunk groove 323 provides an effective path for the movement of the second locking member, improving the smoothness and efficiency of counterweight adjustment between the functional module 20 and the counterweight balancing structure 30; on the other hand, the second locking member can evenly distribute the centrifugal force across the entire groove wall during the high-speed rotation of the counterweight balancing structure 30, extending the lifespan of the counterweight balancing structure 30.

[0078] In the projection plane perpendicular to the rotation axis of the first counterweight adjustment member 32, the adjustment diameter of the counterweight balancing structure 30 is less than or equal to 30 mm. Therefore, by setting the dimensions of the counterweight balancing structure 30 within a suitable range, the entire balancing system of the counterweight balancing structure 30 can be seamlessly integrated into a specific part of the magnetic gyro rotor without interfering with surrounding critical components such as magnetic poles, microwave cavities, and cooling channels. Simultaneously, the search area required by the balancing operator or automatic balancing equipment is reduced, decreasing the time needed to find the optimal balance point and improving the efficiency of dynamic balancing adjustment. For example, the rotation radius of the first counterweight adjustment member 32 is less than or equal to 30 mm.

[0079] Please refer to the following: Figure 1 Figure 8 is an exploded structural diagram of the counterweight balancing structure 30 provided in another embodiment of this application. Figure 8 The structure of the counterweight balance structure 30 in the middle is similar to Figure 1 The structure of the counterweight balancing structure 30 is similar to that of the counterweight balancing structure 30. The counterweight balancing structure 30 includes a mounting base 31, a first counterweight adjusting member 32, and a second counterweight adjusting member 33. The mounting base 31 is provided with a mounting groove 311, and the first counterweight adjusting member 32 is provided with a limiting groove 321 for accommodating the second counterweight adjusting member 33. The difference is that the first counterweight adjusting member 32 includes multiple first sub-counterweight blocks 324, which are detachably stacked along a third direction Z. The third direction Z is parallel to the rotation axis of the first counterweight adjusting member 32. Therefore, by adjusting the thickness of the first counterweight adjusting member 32, the height of the center of gravity of the counterweight balancing structure 30 in the third direction Z can be adjusted, thereby realizing the adjustment of the counterweight balancing structure 30 at multiple points and in multiple directions. This expands the range and capability of the counterweight balancing structure 30 in terms of balance adjustment, compensates for the unbalanced forces caused by assembly and processing errors in the functional module 20, and reduces the difficulty of adjusting the balance state of the functional module 20.

[0080] The first sub-counterweight 324 closest to the mounting base 31 is provided with a first groove 3212, and the remaining first sub-counterweights 324 are provided with second grooves 3213. The first groove 3212 and the second groove 3213 communicate to form a limiting groove 321 for accommodating the second counterweight adjustment member 33. The first groove 3212 is configured as a blind groove, and the second groove 3213 is configured as a through groove.

[0081] Please refer to the following: Figure 1 and Figure 9 , Figure 9 This is an exploded structural diagram of the counterweight balancing structure 30 provided in another embodiment of this application. Figure 9 The structure of the counterweight balance structure 30 in the middle is similar to Figure 1 The structure of the counterweight balancing structure 30 is similar to that of the counterweight balancing structure 30. The counterweight balancing structure 30 includes a mounting base 31, a first counterweight adjusting member 32, and a second counterweight adjusting member 33. The mounting base 31 is provided with a mounting groove 311, and the first counterweight adjusting member 32 is provided with a limiting groove 321 for accommodating the second counterweight adjusting member 33. The difference is that the second counterweight adjusting member 33 includes multiple second sub-counterweight blocks 333, which are detachably stacked along a third direction Z. The third direction Z is parallel to the rotation axis of the first counterweight adjusting member 32. Therefore, by adjusting the thickness of the second counterweight adjusting member 33, the height of the center of gravity of the counterweight balancing structure 30 in the third direction Z can be adjusted, thereby realizing the adjustment of the counterweight balancing structure 30 at multiple points and in multiple directions. This expands the range and capability of the counterweight balancing structure 30 in terms of balance adjustment, compensates for the unbalanced forces caused by assembly and processing errors in the functional module 20, and reduces the difficulty of adjusting the balance state of the functional module 20.

[0082] In some embodiments, the first counterweight adjustment member 32 includes a plurality of first sub-counterweight blocks 324, which are detachably stacked along a third direction Z. The second counterweight adjustment member 33 includes a plurality of second sub-counterweight blocks 333, which are detachably stacked along a third direction Z. The third direction Z is parallel to the rotation axis of the first counterweight adjustment member 32. Therefore, by adjusting the thickness of the first and second counterweight adjustment members 32 and 33, the center of gravity height of the counterweight balancing structure 30 in the third direction Z can be adjusted, thereby enabling multi-point and multi-directional adjustment of the counterweight balancing structure 30. This expands the range and capability of the counterweight balancing structure 30's balance adjustment, compensates for the unbalanced forces caused by assembly and processing errors in the functional module 20, and reduces the difficulty of adjusting the balance state of the functional module 20.

Claims

1. A counterweight balancing structure, characterized in that, include: Mounting base; A first counterweight adjustment component is connected to the mounting base, and the mounting position of the first counterweight adjustment component on the mounting base is adjustable along a first direction; The second counterweight adjustment component is installed on the first counterweight adjustment component in a second direction that is adjustable along the second direction and intersects with the first direction.

2. The counterweight balancing structure as described in claim 1, characterized in that, The first counterweight adjusting component is provided with a limiting groove, and the second counterweight adjusting component is movably disposed within the limiting groove along the second direction.

3. The counterweight balancing structure as described in claim 2, characterized in that, At least one sidewall of the limiting groove parallel to the second direction is provided with a first rack, and the second counterweight adjusting member is provided with a second rack that meshes with the first rack.

4. The counterweight balancing structure as described in claim 3, characterized in that, The tooth pitch of the first rack is the first tooth pitch, the tooth pitch of the second rack is the second tooth pitch, the first tooth pitch is equal to the second tooth pitch, and the first tooth pitch is 0.5mm-1.0mm.

5. The counterweight balancing structure as described in claim 3 or 4, characterized in that, The extension length of the limiting groove in the second direction is the first length, and the extension length of the second counterweight adjusting member in the second direction is the second length. The difference between the first length and the second length is 10mm-20mm.

6. The counterweight balancing structure as described in any one of claims 1-5, characterized in that, The first counterweight adjusting member is provided with a first locking hole, and the second counterweight adjusting member is provided with a second locking hole. The first locking hole and the second locking hole are opposite to and connected to each other, and are used for the insertion of the first locking member.

7. The counterweight balancing structure as described in claim 6, characterized in that, The first locking hole and the second locking hole are configured as elongated holes. The length of the first locking hole in the second direction is greater than the length of the second locking hole in the second direction. The maximum width of the first locking hole in the direction perpendicular to the second direction is less than the maximum width of the second locking hole in the direction perpendicular to the second direction.

8. The counterweight balancing structure as described in any one of claims 2-5, characterized in that, The mounting base is provided with a mounting groove, and the first counterweight adjustment member is rotatably disposed in the mounting groove along the first direction.

9. The counterweight balancing structure as described in claim 8, characterized in that, The first counterweight adjusting member is provided with a countersunk groove, which is spaced apart from the limiting groove. The mounting base is provided with a plurality of mounting holes communicating with the mounting groove. The plurality of mounting holes are arranged at intervals along the first direction. In the projection plane perpendicular to the rotation axis of the first counterweight adjusting member, at least one of the plurality of mounting holes is located in the countersunk groove. The countersunk groove and the mounting holes are used for the insertion of the second locking member.

10. The counterweight balancing structure as described in claim 9, characterized in that, The countersunk groove includes a first groove and a second groove, which are symmetrically arranged relative to the limiting groove.

11. The counterweight balancing structure as described in claim 9 or 10, characterized in that, The countersunk groove is configured as an arc-shaped groove, and the center of the arc-shaped groove coincides with the rotation center of the first counterweight adjustment component.

12. The counterweight balancing structure as described in any one of claims 1-11, characterized in that, Within the projection plane perpendicular to the rotation axis of the first counterweight adjustment component, the adjustment diameter of the counterweight balancing structure is less than or equal to 30 mm.

13. The counterweight balancing structure as described in any one of claims 1-12, characterized in that, The first counterweight adjustment component includes a plurality of first sub-counterweight blocks, which are detachably stacked along a third direction; and / or, the second counterweight adjustment component includes a plurality of second sub-counterweight blocks, which are detachably stacked along a third direction, wherein the third direction is parallel to the rotation axis of the first counterweight adjustment component.

14. A rotary machining apparatus, characterized in that, The device includes a turntable, at least one functional module, and at least one counterweight balancing structure as described in any one of claims 1-13. The at least one functional module and the at least one counterweight balancing structure are mounted on the turntable to form a rotating structure. The turntable is used to drive the rotating structure to rotate around the rotation center of the turntable, and the counterweight balancing structure is used to adjust the center of gravity of the rotating structure to coincide with the rotation center.

15. The rotary machining equipment as described in claim 14, characterized in that, The turntable is provided with a first positioning structure, and the mounting base is provided with a second positioning structure, which is connected to the first positioning structure.

16. The rotary machining equipment as described in claim 15, characterized in that, The first positioning structure includes a first positioning element and a second positioning element, and the second positioning structure includes a third positioning element and a fourth positioning element. The first positioning element and the third positioning element are connected by a transition fit, and the second positioning element and the fourth positioning element are connected by a clearance fit.

17. The rotary machining apparatus according to any one of claims 14-16, characterized in that, The functional modules include magnetrons, sensors, or cutting mechanisms.

18. The rotary machining apparatus according to any one of claims 14-17, characterized in that, The mounting base, the first counterweight adjustment component, and the second counterweight adjustment component are fixedly connected as an integral structure by adhesive bonding or welding.

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