Numerical control cold polishing machine for outer surface of laser cavity

CN224809162UActive Publication Date: 2026-09-29QUZHOU TEOS SEMICON EQUIP MFG CO LTD
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Patent Information

Application Number
CN202522181593.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-14
Publication Date
2026-09-29
Estimated Expiration
2035-10-14

AI Technical Summary

Technical Problem

透明度提升有限:火抛工艺受限于火焰温度均匀性和石英材料的热变形特性,难以完全消除深层划痕,抛光后腔体透明度仍无法满足高精密激光设备的要求;

Benefits of technology

[0017]本实用新型的突出效果是:

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Abstract

The utility model relates to the technical field of polishing machine discloses a numerical control cold polishing machine of laser cavity outer surface, including X direction feed unit, Y direction feed unit and Z direction feed unit, the X direction feed unit includes X direction sliding box body, the Y direction feed unit includes Y direction sliding seat, is equipped with first clamp and second clamp on Y direction sliding seat, the top of first clamp is equipped with first polishing assembly, and the top of second clamp is equipped with second polishing assembly, the Z direction feed unit includes the Z direction sliding seat of sliding connection in X direction sliding box body, first polishing assembly and second polishing assembly set up on Z direction sliding seat. Through three -axis linkage, polishing pad carries out outer surface polishing work to laser cavity, replaces traditional fire polishing through the mode of cold polishing, can effectively improve the transparency of laser cavity, improves product quality, and simultaneously double -position synchronous polishing can improve polishing efficiency, saves equipment cost.
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Description

Technical Field

[0001] This utility model relates to the field of polishing machine technology, and in particular to a CNC cold polishing machine for the outer surface of a laser cavity. Background Technology

[0002] As the core component of laser equipment, the laser cavity is typically waist-shaped, requiring extremely high light transmittance and surface precision. Current laser cavity manufacturing processes involve using rectangular quartz blocks as raw materials, which are then shaped through cutting processes. This inevitably leaves microscopic defects such as tool marks and scratches on the surface. These rough surfaces cause diffuse reflection of light, significantly reducing the transparency of the laser cavity and consequently affecting the stability of laser output and energy conversion efficiency.

[0003] To address the aforementioned issues, existing technologies primarily employ flame polishing to treat the surface of the laser cavity. The process generally involves: initial annealing to eliminate cutting stress; flame polishing to melt the surface and fill microscopic pits; and secondary annealing to eliminate the thermal stress from flame polishing. While flame polishing can improve transparency to some extent, it still suffers from the following significant drawbacks: Limited improvement in transparency: Due to the limitations of flame temperature uniformity and the thermal deformation characteristics of quartz material, the flame polishing process is difficult to completely eliminate deep scratches, and the transparency of the cavity after polishing still cannot meet the requirements of high-precision laser equipment. Long process cycle and high cost: Multiple annealing steps increase heat treatment time and energy consumption, and the quartz material is prone to new stress due to local overheating during fire polishing, which leads to an increase in scrap rate.

[0004] As laser technology develops towards higher power and higher stability, the requirements for the transparency of laser cavities are increasing, and traditional fire polishing processes can no longer meet production needs. Utility Model Content

[0005] The purpose of this invention is to provide a CNC cold polishing machine for the outer surface of a laser cavity. It performs outer surface polishing on the laser cavity through three-axis linkage and a polishing pad. By using cold polishing instead of traditional fire polishing, it can effectively improve the transparency of the laser cavity and improve product quality. At the same time, dual-station synchronous polishing can improve polishing efficiency and save equipment costs.

[0006] The above-mentioned technical objective of this utility model is achieved through the following technical solution: A CNC cold polishing machine for the outer surface of a laser cavity includes an X-axis feed unit, a Y-axis feed unit and a Z-axis feed unit, wherein the X-axis feed unit includes an X-axis sliding box. The Y-axis feed unit includes a Y-axis slide block, on which a first clamp and a second clamp are provided; a first polishing component is provided above the first clamp, and a second polishing component is provided above the second clamp; The Z-axis feed unit includes a Z-axis sliding seat slidably connected to an X-axis sliding housing. The first polishing assembly and the second polishing assembly are mounted on the Z-axis sliding seat. A first clamp is used for vertical mounting of the laser cavity, and then the first polishing assembly moves downwards and presses against the end of the laser cavity. The end is polished by the reciprocating motion of the first polishing assembly in the Y-axis. Similarly, a second clamp is used for horizontal mounting of the laser cavity, and then the second polishing assembly moves downwards and presses against the side of the laser cavity. The end is polished by the reciprocating motion of the second polishing assembly in the Y-axis. Furthermore, two parts of the laser housing can be polished simultaneously, improving polishing efficiency.

[0007] The present invention is further configured such that: the first clamp includes a first positioning seat and a pair of first limiting seats fixed on the Y-axis sliding seat, the pair of first limiting seats being respectively disposed at the front end and rear end of the first limiting seats; the first positioning seat is formed with a rectangular slot with an upper opening; the laser cavity is inserted into the rectangular slot in a vertical state, which can restrict the left and right sides of the laser cavity in this placement state, preventing it from moving left and right or flipping in the left and right direction; the first limiting seats restrict the front and rear ends of the laser cavity, preventing it from moving back and forth during the polishing process and affecting the polishing work.

[0008] The second fixture is fixed to a second positioning seat and a pair of second limiting seats on a Y-axis sliding seat. The pair of second limiting seats are respectively set at the front end and rear end of the second limiting seats. A rectangular groove with an upper opening is formed on the second positioning seat. The laser cavity is inserted into the rectangular groove in a lateral state, which can restrict the left and right sides of the laser cavity in this placement state, preventing it from moving left and right or flipping in the left and right direction. The second limiting seats restrict the front and rear ends of the laser cavity, preventing it from moving back and forth during the polishing process and affecting the polishing work.

[0009] The present invention is further configured such that: the first polishing component includes a first polishing mold base, the bottom of the first polishing mold base is formed with a mold groove that matches the end of the laser cavity, and a first polishing pad is fixed on the inner wall of the mold groove; the first polishing pad is fixed on the mold groove in an "n" shape, and the first polishing pad is attached to the end surface of the laser cavity during polishing.

[0010] The second polishing assembly includes a second polishing mold base. The bottom of the second polishing mold base is formed with a mold surface that mates with the side of the laser cavity. A second polishing pad is fixed on the mold surface. The mold surface can be planar or concave, and its contour is similar to that of the outer surface of the side of the laser cavity. During polishing, the second polishing pad rests against the side surface of the laser cavity.

[0011] The present invention is further configured such that: the first polishing mold base is fixed on the first double-rod cylinder; The second polishing mold base is fixed on the second double-rod cylinder; The first and second double-rod cylinders are fixed on the Z-axis sliding seat. The pressure for polishing different parts is provided by their respective double-rod cylinders, allowing for relatively independent polishing and making the polishing process more efficient.

[0012] The present invention is further configured such that: the first double-rod cylinder is connected to a first pressure regulating valve; The second double-rod cylinder is connected to a second pressure regulating valve. The pressure regulating valve can adjust the clamping pressure of the corresponding double-rod cylinder, thereby providing different polishing pressures to meet the needs of various working conditions.

[0013] The present invention is further configured such that: a gap is left between the first positioning seat and the first limiting seat; a first adjusting elongated hole is formed on the first limiting seat; a first locking screw is sleeved in the first adjusting elongated hole; and the first locking screw is screwed onto the Y-axis sliding seat; loosening the first locking screw can adjust the position of the first limiting seat, thereby adapting to the clamping work of laser cavities of different lengths. There is a gap between the second positioning seat and the second limiting seat. The second limiting seat has a second adjusting elongated hole formed on it. A second locking screw is sleeved in the second adjusting elongated hole. The second locking screw is screwed onto the Y-axis sliding seat. Similarly, the position of the second limiting seat can also be adjusted.

[0014] The present invention is further configured such that: a closed baffle plate is fixed on the outer side of the Y-direction sliding seat, and the cavity formed by the baffle plate and the Y-direction sliding seat is filled with polishing liquid; The first and second fixtures are placed in the polishing fluid. During polishing, the laser cavity is also in the polishing fluid. The polishing fluid, together with the polishing pad, can further improve the polishing effect. At the same time, the polishing fluid can cool the gun barrel cavity in time to prevent excessive stress caused by high temperature.

[0015] This invention is further configured such that the upper end of the baffle plate has an inwardly folded edge. During polishing, the Y-axis sliding seat reciprocates in the Y direction, causing the polishing fluid to oscillate. The folded edge prevents the polishing fluid from oscillating and overflowing.

[0016] The present invention is further configured such that: a liquid outlet pipe is connected to one side of the baffle plate, and a ball valve is provided on the liquid outlet pipe; A polishing fluid replenishment pipe is provided above the first and second clamps, and the polishing fluid replenishment pipe is fixed on the Z-axis sliding seat. The other end of the ball valve is connected to a polishing fluid storage tank. After filtration, the polishing fluid can be pumped back into the polishing fluid replenishment pipe, which replenishes the polishing fluid on the Y-axis moving seat.

[0017] The outstanding effect of this utility model is: Compared with existing technologies, the laser cavity outer surface polishing is performed by three-axis linkage and polishing pad, and cold polishing is used instead of traditional fire polishing, which can effectively improve the transparency of the laser cavity and improve product quality; at the same time, dual-station synchronous polishing can improve polishing efficiency and save equipment costs.

[0018] By using polishing fluid and polishing pads in combination, the surface processing precision of the laser cavity can be improved, further enhancing its transparency.

[0019] The polishing slurry also has a cooling effect, and the cold polishing process is free from high temperature effects, avoiding the generation of thermal stress and further improving the service life of the laser cavity. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 for Figure 1 A view of A; Figure 3 for Figure 1 A magnified view of a portion of B; Figure 4 for Figure 1 A magnified view of a portion of C.

[0021] Reference numerals: 1. X-axis feed unit; 11. X-axis sliding housing; 2. Y-axis feed unit; 21. Y-axis sliding seat; 22. Water baffle; 23. Polishing fluid; 24. Folding edge; 25. Discharge pipe; 26. Ball valve; 27. Polishing fluid replenishment pipe; 3. Z-axis feed unit; 31. Z-axis slide block; 4. First clamp; 41. First positioning seat; 42. First limiting seat; 43. Rectangular slot; 44. First adjusting elongated hole; 45. First locking screw; 5. Second clamp; 51. Second positioning seat; 52. Second limiting seat; 53. Rectangular countersunk groove; 54. Second adjusting elongated hole; 55. Second locking screw; 6. First polishing assembly; 61. First polishing mold base; 62. Mold groove; 63. First polishing pad; 64. First double-rod cylinder; 65. First solenoid valve; 66. First pressure regulating valve; 7. Second polishing assembly; 71. Second polishing mold base; 72. Mold surface; 73. Second polishing pad; 74. Second double-rod cylinder; 75. Second solenoid valve; 76. Second pressure regulating valve; 9. Laser cavity; 91. End; 92. Side. Detailed Implementation

[0022] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0023] The following is for reference Figures 1 to 4 The present invention will be described as follows: like Figure 1 As shown, a CNC cold polishing machine for the outer surface of a laser cavity 9 includes an X-axis feed unit 1, a Y-axis feed unit 2, a Z-axis feed unit 3, and a controller. The controller controls the X-axis feed unit 1, the Y-axis feed unit 2, and the Z-axis feed unit 3. The X-axis feed unit 1 includes an X-axis sliding housing 11; the X-axis sliding housing 11 is slidably connected to an X-axis guide rail, the X-axis guide rail is fixed to the frame, and the X-axis sliding housing 11 is screwed to an X-axis lead screw by an X-axis nut. The X-axis lead screw is rotatably connected to the frame, and one end of it is connected to a first servo motor that drives its rotation.

[0024] The Y-axis feed unit 2 includes a Y-axis slide block 21, which is slidably connected to a Y-axis guide rail. The Y-axis guide rail is fixed to the frame. The Y-axis slide block 21 is screwed onto a Y-axis lead screw via a Y-axis nut. The Y-axis lead screw is rotatably connected to the frame, and one end of the lead screw is connected to a second servo motor that drives its rotation. The Y-axis slide block 21 is provided with a first clamp 4 and a second clamp 5. A first polishing assembly 6 is provided above the first clamp 4, and a second polishing assembly 7 is provided above the second clamp 5. Z-axis feed unit 3 includes Z-axis slide seat 31 slidably connected in X-axis slide box 11, first polishing component 6 and second polishing component 7 are disposed on Z-axis slide seat 31, Z-axis slide seat 31 is movably connected to Z-axis guide rail, Z-axis guide rail is fixed in X-axis slide box 11, Z-axis slide seat 31 is screwed to Z-axis lead screw by Z-axis nut, Z-axis lead screw is rotatably connected to X-axis slide box 11 and one end of it is connected to a third servo motor that drives it to rotate, the third servo motor is fixed in X-axis slide box 11.

[0025] like Figure 2 As shown, the first clamp 4 includes a first positioning seat 41 fixed on the Y-axis sliding seat 21 and a pair of first limiting seats 42. The pair of first limiting seats 42 are respectively disposed at the front end and the rear end of the first limiting seats 42. A rectangular slot 43 with an upper opening is formed on the first positioning seat 41. The laser cavity 9 is inserted into the rectangular slot 43 in a vertical state, which can restrict the left and right sides of the laser cavity 9 in this placement state, preventing it from moving left and right or flipping in the left and right direction. The first limiting seats 42 restrict the front and rear ends of the laser cavity 9, preventing it from moving back and forth during the polishing process and affecting the polishing work.

[0026] The second clamp 5 is fixed to the second positioning seat 51 and a pair of second limiting seats 52 on the Y-axis sliding seat 21. The pair of second limiting seats 52 are respectively set at the front end and the rear end of the second limiting seats 52. The second positioning seat 51 has a rectangular groove 53 with an upper opening. The laser cavity 9 is inserted into the rectangular groove 53 in a horizontal state, which can restrict the left and right sides of the laser cavity 9 in this placement state, preventing it from moving left and right or flipping in the left and right direction. The second limiting seats 52 restrict the front and rear ends of the laser cavity 9, preventing it from moving back and forth during the polishing process and affecting the polishing work.

[0027] There is a gap between the first positioning seat 41 and the first limiting seat 42. The first limiting seat 42 is formed with a first adjusting elongated hole 44. A first locking screw 45 is sleeved in the first adjusting elongated hole 44. The first locking screw 45 is screwed onto the Y-axis sliding seat 21. Loosening the first locking screw 45 can adjust the position of the first limiting seat 42, thereby adapting to the clamping work of laser cavities 9 of different lengths. There is a gap between the second positioning seat 51 and the second limiting seat 52. The second limiting seat 52 is formed with a second adjusting elongated hole 54. A second locking screw 55 is sleeved in the second adjusting elongated hole 54. The second locking screw 55 is screwed onto the Y-direction sliding seat 21. Similarly, the position of the second limiting seat 52 can also be adjusted.

[0028] like Figure 3 As shown, the first polishing assembly 6 includes a first polishing mold base 61. The bottom of the first polishing mold base 61 is formed with a mold groove 62 that mates with the end 91 of the laser cavity 9. A first polishing pad 63 is fixed on the inner wall of the mold groove 62. The first polishing pad 63 is fixed on the mold groove 62 in an "n" shape. During polishing, the first polishing pad 63 abuts against the surface of the end 91 of the laser cavity 9. The first polishing mold base 61 is fixed on a first double-rod cylinder 64, which is fixed on a Z-axis sliding seat 31. The first double-rod cylinder 64 is connected to a first solenoid valve 65 through an air pipe. The first solenoid valve 65 is connected to a first pressure regulating valve 66 through an air pipe.

[0029] The second polishing assembly 7 includes a second polishing mold base 71. The bottom of the second polishing mold base 71 is formed with a mold surface 72 that mates with the side portion 92 of the laser cavity 9. A second polishing pad 73 is fixed on the mold surface 72. The mold surface 72 can be planar or concave, and its contour is similar to the outer surface of the side portion 92 of the laser cavity 9. During polishing, the second polishing pad 73 rests against the surface of the side portion 92 of the laser cavity 9. The second polishing mold base 71 is fixed to a second double-rod cylinder 74; the second double-rod cylinder 74 is fixed to a Z-axis sliding seat 31. The second double-rod cylinder 74 is connected to a second solenoid valve 75 via an air pipe, and the second solenoid valve 75 is connected to a second pressure regulating valve 76 via an air pipe. The pressure regulating valve can adjust the clamping pressure of the corresponding double-rod cylinder, thereby providing different polishing pressures to meet the needs of various working conditions. The first solenoid valve 65 and the second solenoid valve 75 are electrically connected to the controller.

[0030] like Figure 4 As shown, a closed baffle plate 22 is fixed to the outside of the Y-axis sliding seat 21. The cavity formed by the baffle plate 22 and the Y-axis sliding seat 21 is filled with polishing fluid 23. The first clamp 4 and the second clamp 5 are placed in the polishing fluid 23. During polishing, the laser cavity 9 is also in the polishing fluid 23. The polishing fluid 23, together with the polishing pad, can further improve the polishing effect. At the same time, the polishing fluid 23 can cool the gun barrel cavity in time to prevent excessive stress caused by high temperature.

[0031] The upper end of the baffle plate 22 is formed with an inwardly folded edge 24. During polishing, the Y-axis sliding seat 21 moves back and forth in the Y direction, and the polishing liquid 23 will oscillate. The folded edge 24 can prevent the polishing liquid 23 from oscillating and overflowing.

[0032] A liquid outlet pipe 25 is connected to one side of the baffle plate 22, and a ball valve 26 is installed on the liquid outlet pipe 25. A polishing liquid 23 replenishment pipe is installed above the first clamp 4 and the second clamp 5, and the polishing liquid 23 replenishment pipe is fixed on the Z-axis sliding seat 31. The other end of the ball valve 26 is connected to a polishing liquid 23 storage tank. After filtration, the polishing liquid 23 can be pumped back into the polishing liquid 23 replenishment pipe, which replenishes the polishing liquid 23 on the Y-axis moving seat.

[0033] Working principle: First, take two laser cavities 9 after machining. One laser cavity 9 is placed vertically and inserted into the rectangular slot 43, and the other laser cavity 9 is placed horizontally and inserted into the rectangular recess 53. Then, the controller controls the first servo motor, the second servo motor, and the third servo motor to rotate. The first servo motor drives the X-axis lead screw to rotate, and the X-axis lead screw drives the X-axis sliding box 11 to move through the X-axis nut. The X-axis sliding box 11 drives the Z-axis sliding seat 31 to move in the X-direction. The Z-axis sliding seat 31 moves the first polishing component 6 and the second polishing component 7 above the corresponding first clamp 4 and second clamp 5. At the same time, the second servo motor drives the Y-axis lead screw to rotate, and the Y-axis lead screw drives the Y-axis sliding seat 21 to move through the Y-axis nut. The Y-axis sliding seat 21 drives the first clamp 4 and the second clamp 5 to move, and the first clamp 4 and the second clamp 5 drive the laser cavity 9 to move. Then, the third servo motor drives the Z-axis lead screw to rotate. The Z-axis lead screw, through the Z-axis nut, moves the first polishing assembly 6 and the second polishing assembly 7 down to a certain height. Then, it controls the piston rods of the first double-rod cylinder 64 and the second double-rod cylinder 74 to extend, causing the corresponding polishing mold base and polishing pad to move down. The first polishing pad 63 abuts against the end surface 91 of the laser cavity 9, and the second polishing pad 73 abuts against the side surface 92 of the laser cavity 9. Through the relative movement of the polishing pads and the laser cavity 9, the laser cavity 9 is polished. Polishing fluid 23 can improve the polishing effect.

[0034] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model. These improvements and modifications assumed above should also be considered within the protection scope of the present utility model.

Claims

1. A CNC cold polishing machine for the outer surface of a laser cavity, comprising an X-axis feed unit (1), a Y-axis feed unit (2), and a Z-axis feed unit (3), characterized in that: The X-axis feed unit (1) includes an X-axis sliding box (11); The Y-axis feed unit (2) includes a Y-axis slide seat (21), on which a first clamp (4) and a second clamp (5) are provided; a first polishing component (6) is provided above the first clamp (4), and a second polishing component (7) is provided above the second clamp (5); The Z-axis feed unit (3) includes a Z-axis slide seat (31) slidably connected in the X-axis slide box (11), and the first polishing component (6) and the second polishing component (7) are disposed on the Z-axis slide seat (31).

2. The CNC cold polishing machine for the outer surface of a laser cavity as described in claim 1, characterized in that: The first clamp (4) includes a first positioning seat (41) fixed on the Y-axis sliding seat (21) and a pair of first limiting seats (42). The pair of first limiting seats (42) are respectively disposed at the front end and the rear end of the first limiting seat (42); a rectangular slot (43) with an upper opening is formed on the first positioning seat (41). The second clamp (5) is fixed on the second positioning seat (51) and a pair of second limiting seats (52) on the Y-direction sliding seat (21). The pair of second limiting seats (52) are respectively set at the front end and the rear end of the second limiting seat (52); a rectangular groove (53) with an upper opening is formed on the second positioning seat (51).

3. The CNC cold polishing machine for the outer surface of a laser cavity as described in claim 2, characterized in that: The first polishing assembly (6) includes a first polishing mold base (61), and the bottom of the first polishing mold base (61) is formed with a mold groove (62) that matches the end (91) of the laser cavity (9). A first polishing pad (63) is fixed on the inner wall of the mold groove (62). The second polishing assembly (7) includes a second polishing mold base (71), the bottom of which is formed with a mold surface (72) that cooperates with the side (92) of the laser cavity (9), and a second polishing pad (73) is fixed on the mold surface (72).

4. The CNC cold polishing machine for the outer surface of a laser cavity as described in claim 3, characterized in that: The first polishing mold base (61) is fixed on the first double-rod cylinder (64); The second polishing mold base (71) is fixed on the second double-rod cylinder (74); The first double-rod cylinder (64) and the second double-rod cylinder (74) are fixed on the Z-axis sliding seat (31).

5. A CNC cold polishing machine for the outer surface of a laser cavity as described in claim 4, characterized in that: The first double-rod cylinder (64) is connected to a first pressure regulating valve (66); The second double-rod cylinder (74) is connected to a second pressure regulating valve (76).

6. A CNC cold polishing machine for the outer surface of a laser cavity according to claim 2, characterized in that: There is a gap between the first positioning seat (41) and the first limiting seat (42). The first limiting seat (42) has a first adjusting elongated hole (44) formed on it. A first locking screw (45) is sleeved in the first adjusting elongated hole (44). The first locking screw (45) is screwed onto the Y-direction sliding seat (21). There is a gap between the second positioning seat (51) and the second limiting seat (52). The second limiting seat (52) has a second adjusting elongated hole (54) formed on it. A second locking screw (55) is sleeved inside the second adjusting elongated hole (54). The second locking screw (55) is screwed onto the Y-direction sliding seat (21).

7. A CNC cold polishing machine for the outer surface of a laser cavity according to claim 1, characterized in that: A closed baffle plate (22) is fixed on the outside of the Y-axis sliding seat (21), and the cavity formed by the baffle plate (22) and the Y-axis sliding seat (21) is filled with polishing liquid (23). The first clamp (4) and the second clamp (5) are placed in the polishing liquid (23).

8. A CNC cold polishing machine for the outer surface of a laser cavity according to claim 7, characterized in that: The upper end of the water baffle (22) is formed with an inwardly folded edge (24).

9. A CNC cold polishing machine for the outer surface of a laser cavity according to claim 7, characterized in that: One side of the baffle plate (22) is connected to a liquid outlet pipe (25), and a ball valve (26) is provided on the liquid outlet pipe (25). The first clamp (4) and the second clamp (5) are provided with a polishing liquid replenishment pipe (27), which is fixed on the Z-axis sliding seat (31).