A device for replacing a film in a grinding apparatus

Abstract

The utility model provides a kind of grinding equipment adhesive film replacement device, including cutting unit, cutting unit vertical arrangement, middle formation cutting groove;Supporting plate is installed on the vertical side of cutting unit, the bottom of supporting plate is extended and arranged along the direction away from cutting unit;Supporting plate away from the end of cutting unit is installed on sliding unit, cutting unit is driven by sliding unit to approach or away from equipment, the bottom of sliding unit is installed on equipment by connecting block;Damper is installed on the top side of sliding unit, when supporting plate moves away from equipment, it is blocked and set on the maximum limit of the movement of supporting plate.The utility model adds fixed plate on both ends of cutting panel, even if there is screw off cutting groove, it will not be deformed;Replacement device is connected with equipment by connecting block as a whole, after adhesive film replacement, replacement device does not need to be removed, it is more simple and convenient to operate, improve equipment utilization rate and increase product competitiveness.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, and in particular to the field of packaging and polishing equipment technology, specifically a film replacement device for polishing equipment. Background Technology

[0002] In the back-side grinding process of semiconductor packaging, product cracking caused by foreign matter has always been a persistent problem. After sorting out and analyzing relevant data, it was found that the proportion of product defects caused by film debris is relatively large, and it occurs continuously each time. The gaps left by film debris lock the film replacement device, which leads to a design defect.

[0003] Existing film replacement device structure description:

[0004] The two cut panels of the adhesive film are fixed to the substrate with screws; the substrate has support feet at both ends for connection to the equipment; the support feet and the equipment are fixed with detachable nuts.

[0005] The existing film replacement devices have the following main problems:

[0006] 1. When replacing the adhesive film, the old adhesive film needs to be cut first and fixed to the adhesive film replacement device with a magnetic strip. When installing the new adhesive film, the new adhesive film passes through the adhesive film replacement device and is fixed to the adhesive film fixing device with a magnetic strip. After the new adhesive film is re-attached and aligned with the old adhesive film, it is cut along the cutting groove of the adhesive film replacement device. The cutting panel maintains a certain distance to form the cutting groove. The screws of the fixing panel often loosen, causing the cutting groove to deform. As a result, the adhesive film is cut multiple times, producing debris and causing quality abnormalities.

[0007] 2. After the old and new films are connected, the film needs to be rewound to the roller. Because the film replacement device blocks the film rewinding, the film replacement device needs to be removed. The film rewinding is done by removing the film replacement device. The removal and installation of the film replacement device wastes a lot of time and there is a risk of injury when handling it. Summary of the Invention

[0008] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a coating replacement device for grinding equipment, which solves the difficulties of the prior art.

[0009] To achieve the above and other related objectives, this utility model provides a film replacement device for a grinding equipment, comprising:

[0010] A cutting unit, wherein the cutting unit is vertically arranged and a cutting groove 7 is formed in the middle;

[0011] Support plate 3 is installed on the vertical side of the cutting unit, and the bottom of the support plate 3 extends away from the cutting unit.

[0012] The sliding unit has one end of the support plate 3 away from the cutting unit mounted on it. The sliding unit drives the cutting unit to move closer to or away from the equipment. The bottom of the sliding unit is mounted on the equipment via a connecting block 5.

[0013] The damper 1 is installed on the top side of the sliding unit and is positioned at the maximum movement limit of the support plate 3 when the support plate 3 moves away from the equipment.

[0014] According to the preferred embodiment, the cutting unit includes:

[0015] A pair of cutting panels 6 are arranged opposite to each other, with a cutting groove 7 formed between them;

[0016] The substrate 8 is respectively mounted on the top and bottom surfaces of the pair of cut panels 6 that are far apart from each other;

[0017] A fixing plate 12 is mounted on the vertical two sides of a pair of cutting panels 6 by screws.

[0018] According to the preferred embodiment, the length of the fixing plate 12 is less than the length of the support plate 3.

[0019] According to the preferred embodiment, the cutting panel 6 is arranged in a trapezoidal shape, and the inclined sides of a pair of cutting panels 6 are arranged close to each other, forming a cutting groove 7 between the inclined sides.

[0020] According to the preferred embodiment, handles 2 are installed on the side of the fixing plates 12 away from the cutting panel 6 on both sides.

[0021] According to the preferred embodiment, the sliding unit includes:

[0022] The slide rail 10 is connected to the connecting block 5 by locking screws;

[0023] The slider 4 is mounted on the side of the slide rail 10 near the cutting unit via rollers, and a support plate 3 is mounted on the slider 4.

[0024] According to the preferred embodiment, the length of the slide rail 10 is greater than the length of the cutting panel 6.

[0025] According to a preferred embodiment, a slide rail stabilizer 9 is also installed between the pair of sliders 4.

[0026] According to the preferred embodiment, a support rod 11 is also installed on the connecting block 5 on the side away from the damper 1. The top of the support rod 11 extends upward and successively passes over the bottom of the slider 4 and the cutting unit.

[0027] When the cutting unit moves toward the equipment, it is positioned against the support rod 11.

[0028] This invention adds fixing plates to both ends of the cutting panel, so that the cutting groove will not deform even if screws fall off; the entire replacement device is connected to the equipment through a connecting block, so the replacement device does not need to be removed after the film is replaced, making the operation simpler and more convenient, improving the equipment utilization rate and increasing product competitiveness.

[0029] The preferred embodiments of the present invention will be described in more detail below with reference to the accompanying drawings, so as to facilitate an understanding of the features and advantages of the present invention. Attached Figure Description

[0030] Figure 1 The diagram shown is a three-dimensional structural schematic of this utility model;

[0031] Figure 2 The diagram shown is a schematic representation of a pair of cutting panels in this invention.

[0032] Label Explanation

[0033] 1. Damper; 2. Handle; 3. Support plate; 4. Slider; 5. Connecting block; 6. Cutting panel; 7. Cutting gap;

[0034] 8. Base plate; 9. Slide rail stabilizer; 10. Slide rail; 11. Support rod; 12. Fixing plate. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. The same reference numerals in the drawings represent the same components. It should be noted that the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the described embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0036] Compared to the embodiments shown in the accompanying drawings, feasible embodiments within the scope of protection of this utility model may have fewer components, have other components not shown in the drawings, different components, components arranged differently, or components with different connections, etc. Furthermore, two or more components shown in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.

[0037] Unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms “first,” “second,” and similar terms used in this patent application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, “an” or “a” and similar terms do not necessarily indicate a quantity limitation. Terms such as “comprising” or “including” mean that the element or object preceding the word encompasses the element or object listed following the word and its equivalents, without excluding other elements or objects. Terms such as “connected” or “linked” are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as “upper,” “lower,” “left,” and “right” are used only to indicate relative positional relationships; these relative positional relationships may change accordingly when the absolute position of the described object changes.

[0038] This invention proposes a film replacement device for a grinding equipment, used in the film replacement process. This invention does not limit the type of film, but the structure of the film replacement device is particularly suitable for the back-side grinding process in the semiconductor packaging field.

[0039] In general, the grinding equipment film replacement device proposed in this utility model mainly includes a cutting unit, a support plate 3, a sliding unit, and a damper 1. See also... Figure 1 It shows the arrangement of the cutting unit, support plate 3, sliding unit and damper 1.

[0040] To address issues such as product malfunctions caused by debris generated during adhesive film replacement, and the safety hazards of difficult disassembly and injury to personnel associated with adhesive film replacement devices, the following solutions are provided: In the background technology, when replacing adhesive film, the old film must first be cut and secured to the adhesive film replacement device with magnetic strips. When installing the new film, it passes through the adhesive film replacement device and is secured to the adhesive film fixing device with magnetic strips. After the new film is aligned with the old film, it is cut along the cutting groove of the adhesive film replacement device. The cutting panel maintains a certain distance to form the cutting groove. However, the screws on the fixing panel often loosen, causing deformation of the cutting groove. Repeated cutting of the adhesive film produces debris, leading to quality abnormalities. After connecting the old and new adhesive films, the film needs to be rewound to the roller. However, the film replacement device obstructs this rewinding, requiring the device to be removed for rewinding. This process is time-consuming and poses a risk of injury during handling. Therefore, the technical solution provided in this embodiment adds fixing plates 12 to both ends of the cutting panel 6, preventing deformation of the cutting groove even if screws fall off. The replacement device is connected to the equipment via connecting block 5, eliminating the need to remove it after film replacement, making operation simpler and more convenient.

[0041] Specifically, such as Figure 1 As shown, in order to solve the problems of difficult disassembly and operation of the film replacement device and the safety hazard of personnel injury, in this embodiment, the cutting unit is connected to the equipment through the support plate 3 and the sliding unit. The support plate 3 is installed on the vertical side of the cutting unit, and the bottom of the support plate 3 extends away from the cutting unit. The end of the support plate 3 away from the cutting unit is installed on the sliding unit. The sliding unit drives the cutting unit to move closer to or away from the equipment. The bottom of the sliding unit is installed on the equipment through the connecting block 5.

[0042] To address the issue of product abnormalities caused by debris generated during film replacement, the cutting unit in this embodiment includes a pair of oppositely arranged cutting panels 6, a substrate 8, and a fixing plate 12. The cutting panels 6 are trapezoidal in shape, with their inclined sides close to each other, forming a cutting groove 7 between them. The substrate 8 is respectively mounted on the top and bottom surfaces of the pair of cutting panels 6, which are far apart from each other. To ensure the stability of the pair of cutting panels 6 after installation and during the cutting process, the fixing plate 12 is installed on the vertical sides of the pair of cutting panels 6 with screws. With fixing plates 12 installed at both ends, the cutting groove 7 will not deform even if a screw falls off.

[0043] Preferably, the length of the fixing plate 12 is less than the length of the support plate 3, in order to provide space for the support plate 3 to be installed, and after installation, a gap can be formed between it and the sliding unit to expand the spreading area of ​​the new and old adhesive films and effectively improve the film replacement efficiency.

[0044] As mentioned above, in this embodiment, a sliding unit is used to connect with the device. The sliding unit includes a slide rail 10 and a slider 4. The slide rail 10 is connected to the connecting block 5 by a locking screw. The slider 4 is mounted on the side of the slide rail 10 near the cutting unit by rollers. A support plate 3 is mounted on the slider 4. During installation, the cutting unit is connected to the slider 4 through the support plate 3, thereby enabling the cutting unit to move conveniently at the corresponding working position and the film replacement position on the device. Therefore, the length of the slide rail 10 is greater than the length of the cutting panel 6, providing sufficient movement space.

[0045] In addition, to facilitate the movement of the cutting unit by the operator, handles 2 are installed on the side of the fixing plate 12 on both sides of the cutting unit away from the cutting panel 6 for easy movement.

[0046] Preferably, a slide rail stabilizer 9 is also installed between a pair of sliders 4 to stabilize the equipment and prevent it from falling off or being damaged during movement. In addition, to prevent overload of the film replacement device, a damper 1 is installed on the top side of the sliding unit and blocks the support plate 3 at its maximum movement limit when the support plate 3 moves away from the equipment.

[0047] It should be specifically noted that a support rod 11 is also installed on the connecting block 5 on the side away from the damper 1. The top of the support rod 11 extends upward and successively passes over the bottom of the slider 4 and the cutting unit. When the cutting unit moves toward the equipment, it abuts against the support rod 11 for positioning.

[0048] During use, the new and old adhesive films are fixed to the cutting panel 6 by magnetic strips, and the film cutting tool is used to cut along the cutting groove 7. During cutting, the support plate 3 and support rod 11 stabilize the support base plate 8 to prevent shaking; after the adhesive films are connected, the handle 2 is used to move the film changing device to the left. After the adhesive film is rewound, the film changing device is moved back to the initial position.

[0049] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A film replacement device for a grinding equipment, characterized in that, include: A cutting unit, wherein the cutting unit is vertically arranged and a cutting groove (7) is formed in the middle; Support plate (3), the support plate (3) is installed on the vertical side of the cutting unit, and the bottom of the support plate (3) extends away from the cutting unit; The sliding unit, the end of the support plate (3) away from the cutting unit is mounted on the sliding unit, and the cutting unit is moved closer to or away from the equipment by the sliding unit. The bottom of the sliding unit is mounted on the equipment by the connecting block (5). The damper (1) is installed on the top side of the sliding unit and is positioned at the maximum movement limit of the support plate (3) when the support plate (3) moves away from the equipment.

2. The grinding equipment film replacement device according to claim 1, characterized in that, The cutting unit includes: Cutting panels (6), a pair of cutting panels (6) are arranged opposite to each other, and a cutting groove (7) is formed between them; The substrate (8) is respectively mounted on the top and bottom surfaces of the pair of cut panels (6) that are far apart from each other; A fixing plate (12) is mounted on the vertical sides of a pair of cutting panels (6) by screws.

3. The grinding equipment film replacement device according to claim 2, characterized in that, The cutting panel (6) is trapezoidal in shape, and the inclined sides of a pair of cutting panels (6) are close to each other, forming a cutting groove (7) between the inclined sides.

4. The grinding equipment film replacement device according to claim 3, characterized in that, Handles (2) are installed on the side of the fixing plates (12) on both sides away from the cutting panel (6).

5. The grinding equipment film replacement device according to claim 4, characterized in that, The sliding unit includes: The slide rail (10) is connected to the connecting block (5) by a locking screw; The slider (4) is mounted on the side of the slide rail (10) near the cutting unit by means of rollers, and a support plate (3) is mounted on the slider (4).

6. The grinding equipment film replacement device according to claim 5, characterized in that, A rail stabilizer (9) is also installed between the pair of sliders (4).

7. The grinding equipment film replacement device according to claim 6, characterized in that, A support rod (11) is also installed on the connecting block (5) on the side away from the damper (1). The top of the support rod (11) extends upward and successively passes over the bottom of the slider (4) and the cutting unit. When the cutting unit moves toward the equipment, it is positioned against the support rod (11).

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