Mask transfer robot with lifting and rotating structure

Abstract

The utility model provides a kind of mask transmission manipulator with lifting rotary structure, it includes support bearing assembly, lifting relay assembly, lifting drive component, rotary support assembly, rotary drive component and clamping suction assembly, the driving and transmission component of this mechanical arm is compactly integrated on support frame and relay support plate, overall layout is compact, can significantly reduce equipment volume and floor area, load weight is finally passed to lifting ring frame and driving wheel disc by clamping arm frame, support pedestal, rotary mandrel, support frame, relay support plate, with very high structural rigidity and deformation resistance, clamping arm frame is equipped with mechanical clamping and vacuum suction capacity simultaneously, both can be physically limited to mask from two sides, and can provide uniform gripping force by negative pressure suction, reliability and safety are improved.

Description

Technical Field

[0001] This utility model relates to integrated circuit manufacturing equipment, and more particularly to a mask transfer robot with a lifting and rotating structure. Background Technology

[0002] Patent document CN223073434U discloses a mask transfer mechanism, which includes a sliding assembly and a pick-and-place assembly slidably connected. The pick-and-place assembly can move in two mutually perpendicular directions along the extension direction of the sliding assembly. The pick-and-place assembly includes a robotic arm for picking up and placing the mask. The robotic arm can rotate along a vertical axis. This mask transfer mechanism reduces the overall structural volume through the relative movement of its components, while simultaneously enabling the mask to move and rotate flexibly in multiple directions, thus achieving precise, stable, and efficient mask transfer. However, this transfer mechanism uses a multi-section articulated robotic arm, resulting in a relatively loose structure, large space occupation, unclear load transfer path, poor overall rigidity, susceptibility to deformation under external forces, and poor operational accuracy. Therefore, it is necessary to optimize its structure to overcome the above-mentioned defects. Utility Model Content

[0003] The purpose of this invention is to provide a mask transfer robot with a lifting and rotating structure.

[0004] The technical solution adopted by this utility model to solve its technical problem is:

[0005] A mask transfer robot with a lifting and rotating structure, comprising:

[0006] A support load-bearing component is installed in the equipment frame via connectors and has internal load-bearing space.

[0007] A lifting and connecting assembly is installed in a supporting and bearing assembly via a sliding structure, and can rise or fall within the supporting and bearing assembly, and has a connecting space inside;

[0008] A lifting drive assembly is installed in the support and bearing assembly and cooperates with the lifting adapter assembly through a transmission structure. The lifting drive assembly drives the lifting adapter assembly to rise or fall in the support and bearing assembly.

[0009] A rotating support assembly is installed in a lifting adapter assembly via a rotating structure. It can rise or fall together with the lifting adapter assembly and can rotate independently within the lifting adapter assembly.

[0010] A rotary drive assembly is installed in the lifting and connecting assembly and cooperates with the rotary support assembly through a transmission structure. The rotary drive assembly drives the rotary support assembly to rotate.

[0011] The clamping and adsorption assembly is installed in the rotating support assembly. It can rise or fall together with the rotating support assembly and rotate together with the rotating support assembly. The clamping and adsorption assembly clamps and adsorbs the mask plate for positioning.

[0012] Specifically, the supporting load-bearing components include:

[0013] A support frame having a transverse seat plate at the top and a vertical seat plate at the bottom, with a lifting drive assembly installed in the transverse seat plate.

[0014] The lifting guide rails are provided in pairs, with each lifting guide rail installed on the side wall of the vertical seat plate and extending vertically.

[0015] The lifting adapter assembly includes:

[0016] The adapter plate is located outside the vertical base plate. It is arranged vertically and cooperates with the lifting guide rail through a slider, so that it can rise or fall along the lifting guide rail.

[0017] The lifting ring frame is installed on the top of the adapter plate and extends above the horizontal seat plate, and can rise or fall together with the adapter plate.

[0018] The lifting drive component includes:

[0019] A lifting motor is installed on the top of the horizontal seat plate and can operate on the top of the horizontal seat plate.

[0020] The drive wheel is mounted on the top of the transverse seat plate via a rotating shaft and is connected to the power output shaft of the lifting motor via a worm gear pair. The lifting motor drives the drive wheel to rotate.

[0021] The drive wheel is mounted on the edge of the drive wheel disk via a rotating shaft. It can rotate with the drive wheel disk and can also rotate independently in the drive wheel disk. Its outer edge protrudes radially outward from the drive wheel disk and can abut against the inner wall of the top of the lifting ring frame. When the drive wheel disk rotates, it drives the drive wheel to make the lifting ring frame and the transfer plate rise or fall along the guide rail.

[0022] A pair of reset springs are provided, with each end of the reset spring engaging with the vertical base plate and the transfer plate respectively. The reset springs apply an upward pulling force to the transfer plate and the lifting ring frame.

[0023] The rotating support assembly includes:

[0024] The support frame is installed in the transfer plate and can rise or fall together with the transfer plate. It has a support space inside.

[0025] A rotating mandrel is arranged vertically, with its two ends mounted in the support frame via bearings. It can rise or fall together with the support frame and can rotate independently within the support frame.

[0026] The support base is located below the support frame and is engaged with the bottom of the rotating spindle. It can rise or fall together with the rotating spindle and rotate together with the rotating spindle.

[0027] The rotary drive assembly includes:

[0028] A rotary motor is installed on the top of the support frame, and its power output shaft is connected to the top of the rotating spindle. The rotary motor drives the rotating spindle and the support base to rotate.

[0029] The clamping and holding assembly includes:

[0030] The clamping arms are provided in pairs, with each clamping arm installed at both ends of the carrier base. They can rise or fall together with the carrier base and rotate together with the carrier base. The clamping arms are also connected to the vacuum equipment through pipelines, and the clamping arms are used to adsorb and position the mask.

[0031] The advantages of this utility model are:

[0032] The drive and transmission components of the robotic arm are compactly integrated into the support frame and the transfer plate. The overall layout is compact, which can significantly reduce the size of the equipment and the floor space. The load weight is finally transferred to the lifting ring and drive wheel through the clamping arm, the support base, the rotating spindle, the support frame, and the transfer plate. It has extremely high structural rigidity and resistance to deformation. The clamping arm has both mechanical clamping and vacuum adsorption capabilities. It can physically limit the mask from both sides and provide uniform gripping force through negative pressure adsorption, thus improving reliability and safety. Attached Figure Description

[0033] Figure 1 This is a schematic diagram of the mask transfer robot with lifting and rotating structure proposed in this utility model;

[0034] Figure 2 This is one of the schematic diagrams of a partial structure of the robotic arm;

[0035] Figure 3 yes Figure 2 A schematic diagram of the rear structure;

[0036] Figure 4 This is the second partial structural diagram of the robotic arm;

[0037] Figure 5 yes Figure 4 A schematic diagram of the rear structure;

[0038] Figure 6 This is the third partial structural diagram of the robotic arm;

[0039] Figure 7 yes Figure 6 A schematic diagram of the rear structure;

[0040] Figure 8 This is a schematic diagram of the bottom structure of the clamping boom;

[0041] Figure 9 This is a schematic diagram of the top structure of the clamping boom. Detailed Implementation

[0042] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely represents selected embodiments of the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0043] like Figures 1 to 7 As shown, the mask transfer robot with a lifting and rotating structure proposed in this utility model includes a support and bearing assembly, a lifting and connecting assembly, a lifting and driving assembly, a rotating support assembly, a rotating driving assembly, and a clamping and holding assembly. The support and bearing assembly is installed in the equipment frame via a connector and has a bearing space inside. The lifting and connecting assembly is installed in the support and bearing assembly via a sliding structure and can rise or fall within the support and bearing assembly. It also has a connecting space inside. The lifting and driving assembly is installed in the support and bearing assembly and cooperates with the lifting and connecting assembly via a transmission structure. The lifting and driving assembly drives the mask transfer robot. The lifting and lowering assembly rises or falls within the supporting and carrying assembly. The rotating support assembly is installed within the lifting and lowering assembly via a rotating structure, and can rise or fall together with the lifting and lowering assembly. It can also rotate independently within the lifting and lowering assembly. The rotating drive assembly is installed within the lifting and lowering assembly and cooperates with the rotating support assembly via a transmission structure. The rotating drive assembly drives the rotating support assembly to rotate. The clamping and suction assembly is installed within the rotating support assembly and can rise or fall together with the rotating support assembly. It can also rotate together with the rotating support assembly. The clamping and suction assembly clamps and suctions the mask plate for positioning.

[0044] In this embodiment, the support and bearing assembly includes a support frame 110 and a lifting guide rail 120. The top of the support frame has a horizontal seat plate 111 arranged in a horizontal direction, and the bottom of the frame has a vertical seat plate 112 arranged in a vertical direction. The lifting drive assembly is installed in the horizontal seat plate. A pair of lifting guide rails are provided, and each lifting guide rail is installed on the side wall of the vertical seat plate and extends vertically.

[0045] The lifting adapter assembly includes an adapter plate 210 and a lifting ring frame 220. The adapter plate is located outside the vertical seat plate and is arranged vertically. It cooperates with the lifting guide rail through a slider and can rise or fall along the lifting guide rail. The lifting ring frame is installed on the top of the adapter plate and extends above the horizontal seat plate. It can rise or fall together with the adapter plate.

[0046] The lifting drive assembly includes a lifting motor 310, a drive wheel 320, a drive side wheel 330, and a return spring 340. The lifting motor is mounted on the top of the transverse seat plate and can operate on the top of the transverse seat plate. The drive wheel is mounted on the top of the transverse seat plate via a rotating shaft and engages with the power output shaft of the lifting motor via a worm gear pair. The lifting motor drives the drive wheel to rotate. The drive side wheel is mounted on the edge of the drive wheel via a rotating shaft and can rotate with the drive wheel, but can also rotate independently within the drive wheel. Its outer edge protrudes radially outward from the drive wheel and can abut against the inner wall of the top of the lifting ring frame. When the drive wheel rotates, it drives the drive side wheel, causing the lifting ring frame and the transfer plate to rise or fall along the guide rail. A pair of return springs are provided, with each end of the return spring engaging with the vertical seat plate and the transfer plate, respectively. The return springs apply a lifting force to the transfer plate and the lifting ring frame. In this embodiment, the lifting ring frame has a rectangular structure, and the drive side wheel does not abut against other parts of the lifting ring frame during rotation.

[0047] The rotating support assembly includes a support frame 410, a rotating spindle 420, and a support base 430. The support frame is installed in the transfer plate and can rise or fall together with the transfer plate. It has a support space inside. The rotating spindle is arranged vertically, and its two ends are respectively installed in the support frame through bearings. It can rise or fall together with the support frame and can rotate independently in the support frame. The support base is located below the support frame and is engaged with the bottom of the rotating spindle. It can rise or fall together with the rotating spindle and rotate together with the rotating spindle.

[0048] The rotary drive assembly includes a rotary motor 500, which is mounted on the top of the support frame. Its power output shaft is connected to the top of the rotary spindle, and the rotary motor drives the rotary spindle and the support base to rotate.

[0049] The clamping and positioning assembly includes a clamping arm 600, which is provided in pairs. Each clamping arm is installed at both ends of the carrier base and can rise or fall together with the carrier base and rotate together with the carrier base. The clamping arm is also connected to a vacuum device through a pipeline, and the clamping arm is used to adsorb and position the mask.

[0050] exist Figure 8 , Figure 9 In the illustrated embodiment, the clamping arm includes a clamping handle seat 610, a clamping suction arm 620, a clamping connecting rod 630, and a clamping cylinder 640. The clamping handle seat is mounted on a carrier base and can rise, fall, and rotate with the carrier base. A pair of clamping suction arms are provided, each clamping suction arm being mounted at both ends of the clamping handle seat via a clamping guide rail 611, and can move along the clamping guide rail to perform clamping actions within the clamping handle seat. The clamping connecting rod is located between the clamping suction arms, with its middle portion mounted in the clamping handle seat via a rotating shaft. Drive rollers are respectively provided at both ends of the connecting rod. Each arm has a mating hole at its inner end, and a transmission roller abuts against the inner wall of the mating hole. The clamping process of the clamping suction arm is synchronized by the clamping linkage rod. The clamping cylinder is installed in the clamping handle seat, and its piston rod is parallel to the clamping guide rail and engages with the clamping suction arm. The clamping suction arm is driven by the clamping cylinder to move along the clamping guide rail. Each clamping suction arm has an adsorption air hole 621 at its top that communicates with the vacuum equipment, which can adsorb the bottom of the mask. Each clamping suction arm is also provided with a positioning pin 622 at its top, which can position the edge of the mask.

[0051] The method of using the above-mentioned mask transfer robot with lifting and rotating structure includes the following steps:

[0052] In the initial state, the lifting and transfer assembly, the rotating support assembly, and the clamping and holding assembly are in their lowest initial positions under their own weight. The clamping arm is open and ready to be used. The vacuum equipment is not started. The rotating support assembly maintains its initial angle under the braking action of the rotating motor.

[0053] When the mask needs to be gripped, the rotary motor runs, and its power output shaft drives the rotary spindle to rotate. Under the support of the bearings of the support frame, the rotary spindle drives the support base and the clamping arms at both ends to rotate synchronously until the clamping arms are directly under the mask. Then the rotary motor stops running and brakes to position.

[0054] When the lifting motor operates, it drives the drive wheel to rotate through the worm gear pair. The drive wheel on the edge of the drive wheel moves with the wheel and applies an upward thrust to the inner wall of the top of the lifting ring frame. This thrust, combined with the upward tension of the reset spring, causes the lifting ring frame and the transfer plate to slide upward along the lifting guide rail of the vertical seat plate until the clamping arm is in contact with the mask plate.

[0055] Then the clamping arm closes, achieving limitation from both ends of the mask plate. At the same time, the vacuum equipment is activated, forming a negative pressure adsorption force on the contact surface between the clamping arm and the mask plate through the pipeline, thus doubly fixing the mask plate.

[0056] The rotary motor drives the rotary mandrel, carrier base and clamping arm to rotate until the mask reaches the target station matching angle, and then the rotary motor brakes.

[0057] Once the angle is reached, the lifting motor rotates in the opposite direction, and the drive wheel reduces the thrust of the drive side wheel. The lifting ring and the transfer plate descend along the lifting guide rail until the mask reaches the target station height.

[0058] Finally, the vacuum equipment is turned off, the clamping boom opens, and the lifting and transfer assembly, rotating support assembly, and clamping and holding assembly descend to their initial low positions, awaiting the next cycle.

[0059] In the description of this utility model, it should be noted that when terms such as "upper," "lower," "inner," "outer," "left," and "right" appear to indicate orientation or positional relationships, they should be understood as being based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationships commonly used when the product of this utility model is in use, or the orientation or positional relationships commonly understood by those skilled in the art. These terms are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, when terms such as "first" and "second" appear, they are only used to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, it should also be noted that unless otherwise explicitly specified and limited, terms such as "installation," "setting," and "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

Claims

1. A mask transfer robot with a lifting and rotating structure, characterized in that, include: A support load-bearing component is installed in the equipment frame via connectors and has internal load-bearing space. A lifting and connecting assembly is installed in a supporting and bearing assembly via a sliding structure, and can rise or fall within the supporting and bearing assembly, and has a connecting space inside; A lifting drive assembly is installed in the support and bearing assembly and cooperates with the lifting adapter assembly through a transmission structure. The lifting drive assembly drives the lifting adapter assembly to rise or fall in the support and bearing assembly. A rotating support assembly is installed in a lifting adapter assembly via a rotating structure. It can rise or fall together with the lifting adapter assembly and can rotate independently within the lifting adapter assembly. A rotary drive assembly is installed in the lifting and connecting assembly and cooperates with the rotary support assembly through a transmission structure. The rotary drive assembly drives the rotary support assembly to rotate. The clamping and adsorption assembly is installed in the rotating support assembly. It can rise or fall together with the rotating support assembly and rotate together with the rotating support assembly. The clamping and adsorption assembly clamps and adsorbs the mask plate for positioning.

2. The mask transfer robot with a lifting and rotating structure according to claim 1, characterized in that, The supporting load-bearing components include: A support frame having a transverse seat plate at the top and a vertical seat plate at the bottom, with a lifting drive assembly installed in the transverse seat plate. The lifting guide rails are provided in pairs, with each lifting guide rail installed on the side wall of the vertical seat plate and extending vertically.

3. A mask transfer robot with a lifting and rotating structure according to claim 2, characterized in that, The lifting adapter assembly includes: The adapter plate is located outside the vertical base plate. It is arranged vertically and cooperates with the lifting guide rail through a slider, so that it can rise or fall along the lifting guide rail. The lifting ring frame is installed on the top of the adapter plate and extends above the horizontal seat plate, and can rise or fall together with the adapter plate.

4. A mask transfer robot with a lifting and rotating structure according to claim 3, characterized in that, The lifting drive component includes: A lifting motor is installed on the top of the horizontal seat plate and can operate on the top of the horizontal seat plate. The drive wheel is mounted on the top of the transverse seat plate via a rotating shaft and is connected to the power output shaft of the lifting motor via a worm gear pair. The lifting motor drives the drive wheel to rotate. The drive wheel is mounted on the edge of the drive wheel disk via a rotating shaft. It can rotate with the drive wheel disk and can also rotate independently in the drive wheel disk. Its outer edge protrudes radially outward from the drive wheel disk and can abut against the inner wall of the top of the lifting ring frame. When the drive wheel disk rotates, it drives the drive wheel to make the lifting ring frame and the transfer plate rise or fall along the guide rail. A pair of reset springs are provided, with each end of the reset spring engaging with the vertical base plate and the transfer plate respectively. The reset springs apply an upward pulling force to the transfer plate and the lifting ring frame.

5. A mask transfer robot with a lifting and rotating structure according to claim 3, characterized in that, The rotating support assembly includes: The support frame is installed in the transfer plate and can rise or fall together with the transfer plate. It has a support space inside. A rotating mandrel is arranged vertically, with its two ends mounted in the support frame via bearings. It can rise or fall together with the support frame and can rotate independently within the support frame. The support base is located below the support frame and is engaged with the bottom of the rotating spindle. It can rise or fall together with the rotating spindle and rotate together with the rotating spindle.

6. A mask transfer robot with a lifting and rotating structure according to claim 5, characterized in that, The rotary drive assembly includes: A rotary motor is installed on the top of the support frame, and its power output shaft is connected to the top of the rotating spindle. The rotary motor drives the rotating spindle and the support base to rotate.

7. A mask transfer robot with a lifting and rotating structure according to claim 5, characterized in that, The clamping and holding assembly includes: The clamping arms are provided in pairs, with each clamping arm installed at both ends of the carrier base. They can rise or fall together with the carrier base and rotate together with the carrier base. The clamping arms are also connected to the vacuum equipment through pipelines, and the clamping arms are used to adsorb and position the mask.

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