Safety door opening interlocking trigger structure of semiconductor equipment mechanical hand cavity

Abstract

The utility model belongs to the technical field of semiconductor equipment, concretely is a kind of semiconductor equipment mechanical hand cavity safety door opening interlocking trigger structure, including opposite emission sensor component, light barrier, rotating handle component, locking screw.The utility model is cooperated and is set to opposite emission sensor component, light barrier, rotating handle component, locking screw etc., can be before opening mechanical hand cavity door mechanical lock, through relatively simple operation, the locking of mechanical lock is unfastened, according to predetermined operation locking screw and rotating handle component are sequentially operated, can effectively ensure that predetermined operation time can be reached while operating, and further ensure that semiconductor equipment mechanical hand is fully safe stop, so that mechanical hand cavity door opening work is safe and reliable, operation is convenient, sudden situation caused by human error cannot lead to mechanical impact injury of high-speed moving component such as mechanical hand to personnel, improve the safety reliability of product equipment.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor equipment technology, specifically a safety door opening interlock triggering structure for a semiconductor equipment robotic arm cavity. Background Technology

[0002] During the operation of semiconductor equipment, there are times when it is necessary to open the robotic arm cavity to perform inspections, adjustments, and maintenance. Once the robotic arm cavity is opened, there is a risk that high-speed moving parts may move outwards, potentially causing mechanical injury to maintenance personnel. Existing semiconductor equipment robotic arm cavities cannot completely prevent the safety hazards posed by the sudden opening of the robotic arm cavity in unexpected situations. Utility Model Content

[0003] To address the aforementioned problems, the purpose of this utility model is to provide a safety interlocking trigger structure for opening the cavity of a semiconductor device robotic arm.

[0004] The objective of this utility model is achieved through the following technical solution: A safety door opening interlock trigger structure for a semiconductor device robotic arm cavity is correspondingly disposed on the robotic arm cavity of the semiconductor device. The robotic arm cavity includes an outer frame and a door. One side of the outer frame has an entrance. The robotic arm cavity door is disposed on the outer frame and is used to close the entrance. One side of the door is connected to the outer frame via a hinge. A mechanical lock is provided on the other side of the door. The mechanical lock on the door is used to lock the door at the entrance of the outer frame or to release the door from the entrance. A semiconductor device robotic arm is disposed inside the outer frame. The safety door opening interlocking trigger structure for the semiconductor device robotic arm cavity proposed in this utility model includes a beam sensor assembly, a light blocking sheet, a rotating handle assembly, and a locking screw; The beam sensor assembly includes a light emitting end and a light receiving end, which are respectively disposed in the outer frame of the robotic arm cavity. The light emitting end and the light receiving end are respectively communicatively connected to an external upper-level controller, which is communicatively connected to the semiconductor device robotic arm. When the semiconductor device is in normal working condition, the light emitted by the light emitting end is received by the corresponding light receiving end. The rotating handle assembly is rotatably mounted on the robotic arm cavity door. A portion of the rotating handle assembly is located on the inner side of the robotic arm cavity door, and another portion is located on the outer side of the robotic arm cavity door. The light blocking plate is disposed on the portion of the rotating handle assembly located on the inner side of the robotic arm cavity door. The locking screw is threaded onto the portion of the rotating handle assembly located on the outer side of the robotic arm cavity door. A positioning threaded hole A is provided on the outer side of the robotic arm cavity door or the outer side of the mechanical lock to cooperate with the locking screw. When the semiconductor device is in normal working condition, the door of the robotic arm cavity remains closed at the doorway of the outer frame of the robotic arm cavity. At this time, the locking screw is connected to the positioning threaded hole A by threads. The light blocking plate does not block the light emitted from the light emitting end, and the other part of the rotating handle assembly located on the outside of the robotic arm cavity door blocks the opening part of the mechanical lock. When it is necessary to safely open the robotic arm cavity door, the locking screw is disengaged from the positioning threaded hole A. Then, the other part of the rotating handle assembly located on the outside of the robotic arm cavity door is rotated, which in turn drives the part of the rotating handle assembly located on the inside of the robotic arm cavity door and the light blocking plate to rotate. The light blocking plate blocks the light emitted from the light emitting end. After the light is blocked, the through-beam sensor assembly sends a signal to the external upper-level controller. After receiving the signal that the light is blocked detected by the through-beam sensor assembly and determining that the light has been blocked for a predetermined time, the external upper-level controller controls the semiconductor device robotic arm to stop moving, and the other part of the rotating handle assembly located on the outside of the robotic arm cavity door no longer blocks the opening part of the mechanical lock.

[0005] The light-blocking plate is divided into a blocking plate main body and a connecting collar part connected together. The rotating handle assembly includes an outer handle, a locking nut A, a locking nut B, and a washer. The outer handle is divided into an outer handle main body, a limiting stop, and a screw part connected together. The limiting stop is connected to one end of the outer handle main body in the length direction. The outer circumferential surface of the screw part is provided with external threads. One end of the screw part is connected to the limiting stop. The robotic arm cavity door has a screw part through hole for the other end of the screw part of the outer handle to pass through. After the other end of the screw part passes through the screw part through hole into the inner side of the robotic arm cavity door, the washer and the connecting collar part of the light-blocking plate are respectively fitted onto the other end of the screw part on the inner side of the robotic arm cavity door. The locking nuts A and B are respectively connected by threads. On the other end of the screw portion located inside the robotic arm cavity door, the washer, the locking nut A, the connecting collar portion of the light blocking plate, and the locking nut B are arranged sequentially from the side closest to the inner side of the robotic arm cavity door to the side furthest from the inner side of the robotic arm cavity door. The locking nut A presses the washer against the inner side of the robotic arm cavity door. The outer periphery of the washer and the outer periphery of the limiting stop portion of the outer handle are both larger than the outer periphery of the through hole of the screw portion. The locking nut B and the locking nut A together clamp and fix the connecting collar portion of the light blocking plate. The locking screw is threaded to the other end of the outer handle body portion of the outer handle in the length direction. The outer handle body portion of the outer handle is used to block the opening part of the mechanical lock when the semiconductor device is in normal working condition.

[0006] The plane containing the connecting collar of the light blocking sheet is parallel to the inner side of the robotic arm cavity door, and the plane containing the blocking body of the light blocking sheet and the plane containing the connecting collar of the light blocking sheet are perpendicular to each other.

[0007] The axial center line of the locking screw is parallel to the axial center line of the screw portion of the outer handle.

[0008] The length direction of the main body of the outer handle is parallel to the outer side of the robotic arm cavity door.

[0009] The locking screw has a screw head at the end furthest from the robotic arm cavity door. A status indicator line is engraved on the end face of the screw head furthest from the robotic arm cavity door. An open indicator line and a close indicator line, which cooperate with the status indicator line, are engraved on the main body of the outer handle. When the semiconductor device is in normal working condition, the locking screw is threadedly connected to the positioning threaded hole A, and the status indicator line points to the close indicator line. Then, when it is necessary to safely open the robotic arm cavity door, the locking screw is rotated 90 degrees in a predetermined direction, and the status indicator line points to the open indicator line, after which the locking screw disengages from the positioning threaded hole A.

[0010] The outer surface of the robotic arm cavity door is also provided with a positioning threaded hole B for use with the locking screw; the part of the rotating handle assembly located on the inner side of the robotic arm cavity door and the light blocking plate are rotated 90 degrees in a predetermined direction, at which time the light blocking plate can block the light emitted from the light emitting end, and at this time the position of the locking screw corresponds to the setting position of the positioning threaded hole B; rotating the locking screw and making the locking screw and the positioning threaded hole B connected by threads, thereby keeping the light blocking plate in the state of blocking the light.

[0011] The advantages and positive effects of this utility model are as follows: This invention, through the coordinated arrangement of a through-beam sensor assembly, a light blocking plate, a rotating handle assembly, and a locking screw, allows for the relatively simple unlocking of the mechanical lock before opening the robotic arm's cavity door. By sequentially operating the locking screw and rotating handle assembly according to a predetermined procedure, the predetermined operation time can be achieved simultaneously, ensuring the semiconductor equipment robotic arm comes to a complete and safe stop. This makes the robotic arm's cavity opening operation safe, reliable, and convenient, preventing mechanical impact injuries to personnel from high-speed moving parts such as the robotic arm due to human error. It meets the SEMI S2 safety interlocking standard requirements, improving the safety and reliability of the product equipment. Attached Figure Description

[0012] Figure 1 This is a three-dimensional structural diagram of the present invention before the door is opened and when the semiconductor equipment is in normal working condition. Figure 2 This is a front view structural diagram of the present invention when the robotic arm cavity door needs to be opened safely before opening the door; Figure 3 This is a three-dimensional structural diagram of the present invention after the door is opened and the rotating handle assembly and light blocking sheet are reset. Figure 4 This is one of the schematic diagrams showing the arrangement structure of the rotary handle assembly and the light blocking sheet of this utility model; Figure 5 This is the second schematic diagram of the arrangement structure of the rotating handle assembly and the light blocking sheet of this utility model.

[0013] In the diagram: 1 is a light blocking plate, 101 is the main body of the blocking plate, 102 is the connecting collar, 2 is a locking screw, 201 is the screw head, 202 is the status indicator line, 3 is the light emitting end, 4 is the light receiving end, 5 is the outer handle, 501 is the main body of the outer handle, 502 is the limit stop edge, 503 is the screw, 504 is the open indicator line, 505 is the closed indicator line, 6 is the locking nut A, 7 is the locking nut B, and 8 is the washer; 001 is the outer frame of the robotic arm cavity, 002 is the robotic arm cavity door, 003 is the mechanical lock, 004 is the semiconductor equipment robotic arm, and 0041 is the positioning threaded hole A. Detailed Implementation

[0014] The following is in conjunction with the appendix Figures 1-5 The present invention will be described in further detail.

[0015] A safety door opening interlock triggering structure for a semiconductor device robotic arm cavity, such as... Figures 1-3 As shown, in this embodiment, it is correspondingly disposed on the robotic arm cavity of the semiconductor device. The robotic arm cavity includes a robotic arm cavity outer frame 001 and a robotic arm cavity door 002. One side of the robotic arm cavity outer frame 001 has an entrance. The robotic arm cavity door 002 is disposed on the robotic arm cavity outer frame 001 and is used to close the entrance of the robotic arm cavity outer frame 001. One side of the robotic arm cavity door 002 is connected to the robotic arm cavity outer frame 001 by a hinge. The other side of the robotic arm cavity door 002 is provided with a mechanical lock 003. The mechanical lock 003 on the robotic arm cavity door 002 is used to lock the robotic arm cavity door 002 at the entrance of the robotic arm cavity outer frame 001 or to release the robotic arm cavity door 002 from the entrance of the robotic arm cavity outer frame 001. A semiconductor device robotic arm 004 is disposed inside the robotic arm cavity outer frame 001.

[0016] In this embodiment, the inner side of the outer frame 001 of the robotic arm cavity is the side of the outer frame 001 facing the semiconductor device robotic arm 004 when the door of the outer frame 001 of the robotic arm cavity is closed, and the outer side of the outer frame 001 of the robotic arm cavity is the side of the outer frame 001 of the robotic arm cavity away from the semiconductor device robotic arm 004 when the door of the outer frame 001 of the robotic arm cavity is closed. This will not be described further below. In this embodiment, the structure of the outer frame 001 of the robotic arm cavity, the robotic arm cavity door 002, the semiconductor device robotic arm 004, and the mechanical lock 003 all adopt existing technology. The opening part of the mechanical lock 003 is exposed on the outside of the robotic arm cavity door 002, and the main body of the mechanical lock 003 can be exposed on the outside of the robotic arm cavity door 002 or located on the inside of the robotic arm cavity door 002.

[0017] The safety door opening interlocking trigger structure of the semiconductor device robotic arm cavity in this embodiment includes a beam sensor assembly, a light blocking plate 1, a rotating handle assembly, and a locking screw 2.

[0018] The through-beam sensor assembly includes a light emitting end 3 and a light receiving end 4, which are respectively disposed within the outer frame 001 of the robotic arm cavity. Both the light emitting end 3 and the light receiving end 4 are communicatively connected to an external upper-level controller, which in turn is communicatively connected to the semiconductor device robotic arm 004. During normal operation of the semiconductor device, the light emitted by the light emitting end 3 is received by the corresponding light receiving end 4. In this embodiment, the through-beam sensor assembly including the light emitting end 3 and the light receiving end 4 are commercially available products, and the external upper-level controller is also configured using existing technology.

[0019] The rotating handle assembly is rotatably mounted on the robotic arm cavity door 002. A part of the rotating handle assembly is located inside the robotic arm cavity door 002, and another part of the rotating handle assembly is located outside the robotic arm cavity door 002. The light blocking plate 1 is disposed on the part of the rotating handle assembly located inside the robotic arm cavity door 002. The locking screw 2 is threadedly disposed on the part of the rotating handle assembly located outside the robotic arm cavity door 002. The outer side of the robotic arm cavity door 002 or the outer side of the mechanical lock 003 is provided with a positioning threaded hole A 0041 that cooperates with the locking screw 2. Figures 1-3 For the case where the positioning threaded hole A 0041 is located on the outer surface of the mechanical lock 003, Figure 4 In the case where the positioning threaded hole A 0041 is located on the outer surface of the robotic arm cavity door 002, the position of the rotating positioning threaded hole A 0041 can be adjusted according to the arrangement between the robotic arm cavity door 002 and the mechanical lock 003.

[0020] When the semiconductor equipment is in normal working condition, the robotic arm cavity door 002 remains closed at the doorway of the robotic arm cavity outer frame 001. At this time, the locking screw 2 is connected to the positioning threaded hole A 0041 by threads. The light blocking plate 1 does not block the light emitted from the light emitting end 3, and the other part of the rotating handle assembly located outside the robotic arm cavity door 002 blocks the opening part of the mechanical lock 003 to achieve the locking of the mechanical lock 003.

[0021] When it is necessary to safely open the robotic arm cavity door 002, the locking screw 2 is disengaged from the positioning threaded hole A 0041. Then, the other part of the rotating handle assembly located on the outside of the robotic arm cavity door 002 is rotated, which in turn drives the part of the rotating handle assembly located on the inside of the robotic arm cavity door 002 and the light blocking plate 1 to rotate. The light blocking plate 1 blocks the light emitted from the light emitting end 3. After the light is blocked, the through-beam sensor assembly sends a signal to the external upper-level controller. After receiving the signal that the light is blocked detected by the through-beam sensor assembly and determining that the light is blocked for a predetermined time, the external upper-level controller controls the semiconductor device robotic arm 004 to stop moving. At this time, the other part of the rotating handle assembly located on the outside of the robotic arm cavity door 002 no longer blocks the opening part of the mechanical lock 003. Following this, since the other part of the rotating handle assembly located outside the robotic arm cavity door 002 no longer blocks the opening part of the mechanical lock 003, and the semiconductor device robotic arm 004 has determined to stop moving, the robotic arm cavity door 002 can be opened through the opening part of the mechanical lock 003. The aforementioned predetermined time can be 3 to 5 seconds to avoid accidental operation such as the light blocking plate 1 blocking the light emitted from the light emitting end 3, which would instantly trigger the semiconductor device robotic arm 004 to stop moving, and to allow time for the external upper-level controller to fully stop the semiconductor device robotic arm 004. However, according to the existing technology, in an emergency, if the operation and maintenance personnel do not have time to perform the operations in sequence, they may open the robotic arm cavity door 002 before the semiconductor device robotic arm 004 has completely stopped moving. If the safety distance is insufficient, and the semiconductor device robotic arm 004 cannot stop immediately, there is a risk of contact with the operator causing injury, and the purpose of preventing injury from the moving parts inside the robotic arm cavity cannot be achieved.

[0022] Specifically, such as Figure 4 and Figure 5As shown, the light blocking plate 1 is divided into a blocking plate main body 101 and a connecting collar 102 connected together. The blocking plate main body 101 of the light blocking plate 1 is used to directly block the light emitted from the light emitting end 3. The rotating handle assembly includes an outer handle 5, a locking nut A 6, a locking nut B 7, and a washer 8. The outer handle 5 is divided into an outer handle main body 501, a limiting stop 502, and a screw 503 connected together. The limiting stop 502 is connected to one end of the outer handle main body 501 in the length direction. The screw 503 has an external thread on its outer circumferential surface. One end of the screw 503 is connected to the limiting stop 502. The robotic arm cavity door 002 has a screw through hole for the other end of the screw 503 of the outer handle 5 to pass through. After the other end of the screw portion 503 passes through the screw portion through the hole in the robotic arm cavity door 002 to the inside of the robotic arm cavity door 002, the connecting collar portion 102 of the gasket 8 and the light blocking plate 1 is respectively fitted onto the other end of the screw portion 503 on the inside of the robotic arm cavity door 002. Locking nuts A 6 and B 7 are respectively threaded onto the other end of the screw portion 503 located on the inside of the robotic arm cavity door 002. The gasket 8, locking nut A 6, connecting collar portion 102 of the light blocking plate 1, and locking nut B 7 are arranged sequentially from the side closest to the inside of the robotic arm cavity door 002 to the side furthest from the inside of the robotic arm cavity door 002. Locking nut A 6... 6. Press the gasket 8 against the inner side of the robotic arm cavity door 002. The outer periphery of the gasket 8 and the outer periphery of the limiting stop 502 of the outer handle 5 are both larger than the outer periphery of the through hole of the screw. Locking nut B 7 and locking nut A 6 together clamp and fix the connecting collar 102 of the light blocking plate 1, making the overall assembly of the rotating handle easy and reliable to disassemble and assemble. The locking screw 2 is threaded to the other end of the outer handle body 501 of the outer handle 5 in the length direction. The outer handle body 501 of the outer handle 5 is used to block the opening part of the mechanical lock 003 when the semiconductor equipment is in normal working condition.

[0023] In this embodiment, the plane containing the connecting collar portion 102 of the light blocking plate 1 is parallel to the inner side of the robotic arm cavity door 002. The plane containing the blocking plate body portion 101 of the light blocking plate 1 and the plane containing the connecting collar portion 102 of the light blocking plate 1 are perpendicular to each other. The length direction of the outer handle body portion 501 of the outer handle 5 is parallel to the outer side of the robotic arm cavity door 002. The axial center line of the locking screw 2 is parallel to the axial center line of the screw portion 503 of the outer handle 5. The installation position design is relatively simple.

[0024] In this embodiment, a positioning threaded hole B for cooperating with the locking screw 2 is also provided on the outer surface of the robotic arm cavity door 002. A portion of the rotating handle assembly located inside the robotic arm cavity door 002 and the light blocking plate 1 rotate in a predetermined direction (e.g., Figure 1 and Figure 2 As shown, in this embodiment, the predetermined direction is clockwise. Rotating the screw 1 90 degrees allows it to block the light emitted from the light emitting end 3, and the position of the locking screw 2 corresponds to the position of the positioning threaded hole B. Rotating the locking screw 2 and connecting it to the positioning threaded hole B via threads keeps the light blocking plate 1 in a light-blocking state. In this embodiment, the end of the locking screw 2 away from the robotic arm cavity door 002 has a screw head 201. A status indicator line 202 is engraved on the end face of the screw head 201 away from the robotic arm cavity door 002. The outer handle body 501 of the outer handle 5 has an opening indicator line 504 and a closing indicator line 505, which cooperate with the status indicator line 202. When the semiconductor device is in normal working condition, the locking screw 2 is connected to the positioning threaded hole A 0041 via threads, and the status indicator line 202 points to the closing indicator line 505. Then, when it is necessary to safely open the robotic arm cavity door 002, the screw 2 is rotated in a predetermined direction (e.g., clockwise). Figure 5 As shown in the figure, in this embodiment, the locking screw 2 is rotated 90 degrees (counterclockwise) and the status indicator line 202 is aligned with the open indicator line 504. After this, the locking screw 2 disengages from the positioning threaded hole A 0041. Subsequently, after the position of the locking screw 2 corresponds to the position of the positioning threaded hole B, the locking screw 2 can be rotated in the opposite direction to connect with the positioning threaded hole B via threads, ensuring that the light blocking plate 1 remains stationary. At this time, the status indicator line 202 also points to the closed indicator line 505. In this embodiment, the outer handle body 501 of the outer handle 5 is engraved with the letter "CL" near the closed indicator line 505, and the outer handle body 501 of the outer handle 5 is engraved with the letter "OP" near the open indicator line 504. In other words, when the status indicator line 202 points to the closed indicator line 505, it indicates that the locking screw 2 is threadedly connected to the positioning threaded hole A 0041 or the positioning threaded hole B, and the outer handle 5 and the light blocking plate 1 are in a fixed position. When the status indicator line 202 points to the open indicator line 504, it indicates that the locking screw 2 is disengaged from the positioning threaded hole A 0041 or the positioning threaded hole B, and the outer handle 5 can be rotated, making it convenient for operation and maintenance personnel to check the status. By rotating the locking screw 2 and the outer handle 5 in sequence according to the above operating procedure during use, it can be effectively ensured that the aforementioned predetermined time can be reached during operation, thereby ensuring that the semiconductor equipment robot 004 stops safely and fully.

Claims

1. A safety door opening interlock triggering structure for a semiconductor device robotic arm cavity, correspondingly disposed on the robotic arm cavity of the semiconductor device, the robotic arm cavity including a robotic arm cavity outer frame (001) and a robotic arm cavity door (002), one side of the robotic arm cavity outer frame (001) having an entrance, the robotic arm cavity door (002) being disposed on the robotic arm cavity outer frame (001) and used to close the entrance of the robotic arm cavity outer frame (001), one side of the robotic arm cavity door (002) being connected by a hinge. Connected to the outer frame (001) of the robotic arm cavity, a mechanical lock (003) is provided on the other side of the robotic arm cavity door (002). The mechanical lock (003) on the robotic arm cavity door (002) is used to lock the robotic arm cavity door (002) at the door of the robotic arm cavity outer frame (001) or to release the robotic arm cavity door (002) from the door of the robotic arm cavity outer frame (001). A semiconductor device robotic arm (004) is provided inside the robotic arm cavity outer frame (001). Its features are: Includes a beam sensor assembly, a light blocking plate (1), a rotating handle assembly, and a locking screw (2). The beam sensor assembly includes a light emitting end (3) and a light receiving end (4). The light emitting end (3) and the light receiving end (4) are respectively disposed in the outer frame (001) of the robotic arm cavity. The light emitting end (3) and the light receiving end (4) are respectively connected to an external upper-level controller. The external upper-level controller is connected to the semiconductor device robotic arm (004). When the semiconductor device is in normal working condition, the light emitted by the light emitting end (3) is received by the corresponding light receiving end (4). The rotating handle assembly is rotatably mounted on the robotic arm cavity door (002). A portion of the rotating handle assembly is located inside the robotic arm cavity door (002), and another portion of the rotating handle assembly is located outside the robotic arm cavity door (002). The light blocking plate (1) is disposed on the portion of the rotating handle assembly located inside the robotic arm cavity door (002). The locking screw (2) is threaded onto the portion of the rotating handle assembly located outside the robotic arm cavity door (002). The outer side of the robotic arm cavity door (002) or the outer side of the mechanical lock (003) is provided with a positioning threaded hole A (0041) that cooperates with the locking screw (2). When the semiconductor device is in normal working condition, the robotic arm cavity door (002) is kept closed at the door of the robotic arm cavity outer frame (001). At this time, the locking screw (2) is connected to the positioning threaded hole A (0041) by thread. The light blocking plate (1) does not block the light emitted from the light emitting end (3), and the other part of the rotating handle assembly located outside the robotic arm cavity door (002) blocks the opening part of the mechanical lock (003). When it is necessary to safely open the robotic arm cavity door (002), the locking screw (2) is disengaged from the positioning threaded hole A (0041). Then, the other part of the rotating handle assembly located on the outside of the robotic arm cavity door (002) is rotated, and the part of the rotating handle assembly located on the inside of the robotic arm cavity door (002) and the light blocking plate (1) are rotated. The light blocking plate (1) blocks the light emitted from the light emitting end (3). After the light is blocked, the through-beam sensor assembly sends a signal to the external upper-level controller. After receiving the signal that the light is blocked detected by the through-beam sensor assembly and determining that the light is blocked for a predetermined time, the external upper-level controller controls the semiconductor device robotic arm (004) to stop moving. The other part of the rotating handle assembly located on the outside of the robotic arm cavity door (002) no longer blocks the opening part of the mechanical lock (003).

2. The safety door opening interlock triggering structure for a semiconductor device robotic arm cavity according to claim 1, characterized in that: The light blocking plate (1) is divided into a blocking plate main body (101) and a connecting collar (102) connected together. The rotating handle assembly includes an outer handle (5), a locking nut A (6), a locking nut B (7), and a washer (8). The outer handle (5) is divided into an outer handle main body (501), a limiting stop (502), and a screw (503) connected together. The limiting stop (502) is connected to one end of the outer handle main body (501) in the length direction. The screw (503) has an external thread on its outer circumferential surface. One end of the screw (503) is connected to... The limiting stop (502) is connected, and the robotic arm cavity door (002) is provided with a screw part through hole for the other end of the screw part (503) of the outer handle (5) to pass through; after the other end of the screw part (503) passes through the screw part through hole of the robotic arm cavity door (002) to the inside of the robotic arm cavity door (002), the connecting collar (102) of the gasket (8) and the light blocking plate (1) are respectively fitted on the other end of the screw part (503) on the inside of the robotic arm cavity door (002), and the locking nut A (6) and the locking screw The female B (7) is threadedly connected to the other end of the screw part (503) located inside the manipulator cavity door (002). The gasket (8), the locking nut A (6), the connecting collar part (102) of the light blocking plate (1) and the locking nut B (7) are arranged sequentially from the side near the inner side of the manipulator cavity door (002) to the side away from the inner side of the manipulator cavity door (002). The locking nut A (6) presses the gasket (8) against the inner side of the manipulator cavity door (002). The outer periphery size of the outer handle (5) and the outer periphery size of the limiting stop (502) of the outer handle (5) are both larger than the outer periphery size of the through hole of the screw part. The locking nut B (7) and the locking nut A (6) together clamp and fix the connecting collar (102) of the light blocking plate (1). The locking screw (2) is threaded to the other end of the outer handle body (501) of the outer handle (5) in the length direction. The outer handle body (501) of the outer handle (5) is used to block the opening part of the mechanical lock (003) when the semiconductor device is in normal working condition.

3. The safety door opening interlock triggering structure for a semiconductor device robotic arm cavity according to claim 2, characterized in that: The plane of the connecting collar portion (102) of the light blocking plate (1) is parallel to the inner side of the manipulator cavity door (002), and the plane of the blocking plate body portion (101) of the light blocking plate (1) and the plane of the connecting collar portion (102) of the light blocking plate (1) are perpendicular to each other.

4. The safety door opening interlock triggering structure for a semiconductor device robotic arm cavity according to claim 2, characterized in that: The axial center line of the locking screw (2) is parallel to the axial center line of the screw portion (503) of the outer handle (5).

5. The safety door opening interlock triggering structure for a semiconductor device robotic arm cavity according to claim 2, characterized in that: The length direction of the outer handle body (501) of the outer handle (5) is parallel to the outer side of the mechanical arm cavity door (002).

6. The safety door opening interlock triggering structure for a semiconductor device robotic arm cavity according to claim 2, characterized in that: The locking screw (2) has a screw head (201) at one end away from the robotic arm cavity door (002). A status indicator line (202) is engraved on the end face of the screw head (201) away from the robotic arm cavity door (002). An opening indicator line (504) and a closing indicator line (505) are engraved on the outer handle body (501) of the outer handle (5) to cooperate with the status indicator line (202). When the semiconductor device is in normal working condition, the locking screw (2) is connected to the positioning threaded hole A (0041) by thread, and the status indicator line (202) points to the closing indicator line (505). Then, when it is necessary to safely open the robotic arm cavity door (002), the locking screw (2) is rotated ninety degrees in a predetermined direction, and the status indicator line (202) points to the opening indicator line (504), after which the locking screw (2) disengages from the positioning threaded hole A (0041).

7. The safety door opening interlock triggering structure for a semiconductor device robotic arm cavity according to claim 1, characterized in that: The outer surface of the robotic arm cavity door (002) is also provided with a positioning threaded hole B that cooperates with the locking screw (2); the part of the rotating handle assembly located on the inner side of the robotic arm cavity door (002) and the light blocking plate (1) are rotated 90 degrees in a predetermined direction. At this time, the light blocking plate (1) can block the light emitted from the light emitting end (3), and at this time, the position of the locking screw (2) corresponds to the setting position of the positioning threaded hole B; rotate the locking screw (2) and make the locking screw (2) and the positioning threaded hole B connected by threads, thereby keeping the light blocking plate (1) in the state of blocking the light.

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