Leveling device in a laser transfer printing apparatus

Abstract

The utility model discloses a kind of levelling devices in laser transfer equipment, including rectangular frame;Electric lifting platform;Fixed disc;Movable disc;Vacuum chuck;Slide carrier;Spherical concave cavity, the spherical concave cavity is set in the upper end of the fixed disc;Spherical convex surface, the spherical convex surface is set in the lower end of the movable disc;The outer wall of the spherical convex surface is optionally with the inner wall of the spherical concave cavity and stops;The lower end of the spherical convex surface is provided with cutout;Spherical concave cavity inner bottom is provided with air hole;The rectangular frame upper end is provided with multiple pressing plate.Fixed disc and movable disc's movable contact position contact area is larger, the movement resistance between two is larger, and there is no relative motion trend, the air pressure requirement of locking position is extremely low, the stability after levelling is high, thin gas film makes the movement resistance of fixed disc and movable disc small, and levelling precision is also higher.Locking height of pressing plate can be quickly adjusted, realize to the slide carrier of different thickness and lock.

Description

Technical Field

[0001] This utility model belongs to the field of laser transfer technology, and in particular relates to a leveling device in laser transfer equipment. Background Technology

[0002] In laser transfer technology, to ensure that the surface of the substrate stage is perfectly parallel to the reference plane (focal plane) of the laser / camera, guaranteeing transfer accuracy, pattern consistency, and transfer quality, and avoiding defects caused by stage tilt or height differences, the substrate stage needs to be leveled before the transfer process begins. In actual operation, the substrate stage has multiple margins of movement and a locking mechanism. After adjusting the substrate stage to be parallel to the carrier stage and locking the substrate stage's posture, the leveling process is complete, and laser transfer operations can then proceed normally.

[0003] Chinese patent document CN218547251U discloses an air-floating leveling mechanism, including a base with three cylinders vertically and evenly distributed on it. A floating plate is placed at the end of the cylinder rod. A guide shaft is vertically mounted on one side of each cylinder, and the guide shaft is movably connected to the base. A piston rod for locking the guide shaft is located inside the base, and a tension spring is provided between the guide shaft and the floating plate. When the wafer chuck on the three-point floating support contacts the photomask, the piston rod automatically locks the guide shaft, achieving leveling between the wafer chuck and the photomask.

[0004] In the aforementioned patented solution, the floating plate's attitude is locked by locking the guide shaft with a piston rod, i.e., the movement of the floating plate is restricted by the friction between the piston rod and the guide shaft. However, the floating plate is affected by gravity and the pressure of contact with the stage, resulting in a long-term tendency for relative movement between the guide shaft and the piston rod. In addition, pressure fluctuations in the piston rod and incomplete sealing can cause slight positional shifts in the guide shaft, ultimately leading to changes in the floating plate's attitude and reducing photolithography quality. Therefore, the aforementioned leveling mechanism suffers from poor stability during long-term use. Utility Model Content

[0005] To overcome the technical problem that existing leveling mechanisms, which employ pneumatic clamping and contact-type limiting, often fail due to relative motion and the combined effects of long-term use, air pressure fluctuations, or inadequate sealing, leading to low lithography quality, this invention aims to provide a leveling device for laser transfer equipment. This device utilizes a fixed disk with a spherical cavity and a movable disk with a spherical convex surface. The larger contact area between the cavity and convex surface results in greater friction, increased resistance to movement, and lower requirements for air pressure to limit movement, significantly improving stability after leveling.

[0006] To achieve the above objectives, this utility model adopts the following technical solution: a leveling device in a laser transfer printing equipment, comprising a rectangular frame; an electric lifting platform disposed at the inner bottom of the rectangular frame; a fixed plate disposed on the movable end of the electric lifting platform; a movable plate movably connected to the upper end of the fixed plate; a vacuum suction cup disposed on the movable plate; and a substrate carrier detachably connected to the upper end of the rectangular frame, the substrate carrier being located directly above the vacuum suction cup. A spherical concave cavity is disposed at the upper end of the fixed disk; a spherical convex surface is disposed at the lower end of the movable disk; wherein, the outer wall of the spherical convex surface may optionally abut against the inner wall of the spherical concave cavity; a slit is provided at the lower end of the spherical convex surface; an air hole is provided at the bottom of the spherical concave cavity; the air hole is located directly below the slit; multiple pressure plates are disposed at the upper end of the rectangular frame on the outer periphery of the slide stage; the middle part of the pressure plate is rotatably connected to the rectangular frame, and the end of the pressure plate may optionally abut against the upper end of the slide stage.

[0007] Furthermore, a pressure sensor is provided between the movable disk and the vacuum suction cup.

[0008] Compressed gas is injected below the cut through the air vent, forming a thin air film between the spherical convex surface and the spherical concave cavity, allowing the fixed plate and the movable plate to move flexibly. The vacuum suction cup with the substrate, driven by the lifting platform, abuts against the lower end of the substrate stage, the movable plate automatically levels itself, and the thin air film is simultaneously flattened. Air is then drawn out through the air vent, ensuring a firm fit between the spherical convex surface and the spherical concave cavity.

[0009] Furthermore, a hand-tightening screw is provided in the middle of the pressure plate and is threadedly connected to the rectangular frame; a stepped platform is provided at one end of the pressure plate; and a threaded abutment is threadedly connected to the lower end of the other end of the pressure plate.

[0010] Specifically, a threaded through hole is provided at the end of the pressure plate away from the stepped platform; the threaded abutment is rotatably connected in the threaded through hole.

[0011] The pressure plate presses the slide stage onto the rectangular frame. The position and pressing height of the pressure plate are easily adjustable, making it convenient to replace the slide stage, especially slide stages of different thicknesses.

[0012] Furthermore, the rectangular frame is provided with a top plate at its upper end; a through hole is provided through the upper end of the top plate; a notch is provided on the side wall of the top plate communicating with the through hole; the width of the notch is equal to the diameter of the through hole; and the slide stage is provided directly above the through hole.

[0013] Specifically, each of the pressure plates is evenly distributed around the outer periphery of the through hole along the circumferential direction; the upper end of the top plate is provided with a plurality of limiting posts evenly distributed along the circumferential direction of the through hole; the limiting posts are located on the side of the pressure plate close to the through hole.

[0014] The limiting post is used to position the slide stage, facilitating manual adjustment.

[0015] Furthermore, an electric turntable is provided at the lower end of the rectangular frame; the fixed end of the electric turntable is provided on the workbench, and the movable end is provided on the rectangular frame.

[0016] Furthermore, the inner bottom of the rectangular frame is horizontally provided with two linear fine-tuning parts; each linear fine-tuning part includes a fixed plate, a sliding plate horizontally slidably connected to the fixed plate, and a fine-tuning knob rotatably connected to the fixed plate for driving the sliding plate to slide; wherein, the fixed plate is provided with a locking plate; and the sliding plate is threadedly connected with a locking knob for restricting the movement of the locking plate.

[0017] Specifically, the sliding directions of the sliding plates of the two linear fine-tuning parts are perpendicular to each other; the two linear fine-tuning parts are arranged longitudinally, with the lower linear fine-tuning part located at the inner bottom of the rectangular frame, and the upper linear fine-tuning part located on the sliding plate of the lower linear fine-tuning part, and the electric lifting platform located on the sliding plate of the upper linear fine-tuning part.

[0018] Furthermore, the moving end of the electric lifting platform is provided with an angle fine-tuning part; the fixed plate is disposed on the moving end of the angle fine-tuning part.

[0019] The vacuum chuck can move horizontally and rotate laterally, allowing for precise fine-tuning of the processing position, which helps improve the quality and accuracy of photolithography.

[0020] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0021] 1. This utility model is a leveling mechanism for the chip mounting stage (i.e., vacuum chuck) in a chip laser transfer equipment, used to improve the accuracy of chip transfer and reduce the defect rate.

[0022] 2. The contact area between the fixed plate and the movable plate of this utility model is larger, the movement resistance between them is greater, and there is no relative movement tendency. The air pressure requirement for the locking position is extremely low, the stability after leveling is high, and it is not easy to deviate. In addition, by introducing air into the movable contact position, a thin air film can be formed, which reduces the movement resistance of the fixed plate and the movable plate, eliminating the need to apply excessive clamping force to the stage, making leveling easier and more accurate.

[0023] 3. This utility model also includes a pressure plate that facilitates locking the position of the slide stage. The locking height of the pressure plate can be quickly adjusted by a threaded abutment, enabling stable locking of slide stages of different thicknesses and broadening its applicability. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of this utility model;

[0025] Figure 2 This is an exploded view of the components of this utility model;

[0026] Figure 3 This is a schematic diagram of the structure of the fixed plate and the movable plate of this utility model;

[0027] Figure 4 For the present utility model Figure 2 Enlarged structural diagram of section A in the middle;

[0028] Figure 5 For the present utility model Figure 2 A magnified structural diagram of section B.

[0029] In the diagram: 1. Electric turntable; 2. Rectangular frame; 3. Linear fine-tuning section; 31. Fine-tuning knob; 32. Locking plate; 321. Slide groove; 33. Locking knob; 4. Electric lifting platform; 5. Angle fine-tuning section; 6. Fixed plate; 61. Spherical cavity; 7. Movable plate; 71. Spherical convex surface; 72. Cutout; 8. Pressure sensor; 9. Vacuum suction cup; 10. Top plate; 101. Through hole; 102. Notch; 11. Plate stage; 12. Hand screw; 13. Pressure plate; 131. Stepped platform; 14. Threaded abutment; 15. Limiting post. Detailed Implementation

[0030] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0031] In the description of this utility model, it should be noted that the directional terms such as "center", "lateral", "longitudinal", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", and "counterclockwise" are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. They should not be construed as limiting the specific protection scope of this utility model.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features. Thus, the use of "first" and "second" to define a feature may explicitly or implicitly include one or more of that feature. In this description of the utility model, "a number" means two or more, unless otherwise explicitly specified.

[0033] In this utility model, unless otherwise explicitly specified and limited, terms such as "set" and "install" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can also refer to a mechanical connection; they can refer to a direct connection or a connection through an intermediate medium; or they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0034] See Figures 1-5 A leveling device in a laser transfer printing equipment includes an electric turntable 1, a rectangular frame 2 disposed on the moving end of the electric turntable 1, and a top plate 10 disposed on the upper end of the rectangular frame 2; the rectangular frame 2 is provided with at least two linear fine adjustment parts 3, an electric lifting platform 4, an angle fine adjustment part 5, a fixed plate 6, a movable plate 7, a pressure sensor 8, and a vacuum suction cup 9 in sequence from bottom to top.

[0035] The pressure sensor 8 is used to detect the pressure on the vacuum suction cup 9; the fixed end of the electric turntable 1 is set on the worktable surface, and the movable end is set on the rectangular frame 2; the fixed plate 6 is set on the movable end of the angle fine-tuning part 5; the angle fine-tuning part 5 is set on the movable end of the electric lifting platform 4.

[0036] A spherical cavity 61 is provided at the center of the upper end of the fixed disk 6; a spherical convex surface 71 is provided at the center of the lower end of the movable disk 7; the outer wall of the spherical convex surface 71 may abut against the inner wall of the spherical cavity 61; a cut 72 is provided at the lower end of the spherical convex surface 71; an air hole is provided at the bottom of the spherical cavity 61; the air hole is located directly below the cut 72.

[0037] The top plate 10 has a through hole 101 extending through its upper end; the side wall of the top plate 10 has a notch 102 communicating with the through hole 101; the width of the notch 102 is equal to the diameter of the through hole 101.

[0038] The top plate 10 is detachably connected to a slide carrier 11 directly above the through hole 101. The diameter of the slide carrier 11 is larger than the diameter of the through hole 101. Three pressure plates 13 are evenly distributed along the circumference of the through hole 101 at the top end of the top plate 10. A hand-tightening screw 12 is threadedly connected to the top plate 10 at the middle of the pressure plate 13. A stepped platform 131 is provided at one end of the pressure plate 13. A threaded abutment 14 is threadedly connected to the lower end of the other end of the pressure plate 13. A threaded through hole is provided at the end of the pressure plate 13 away from the stepped platform 131. The threaded abutment 14 is rotatably connected in the threaded through hole. The end of the pressure plate 13 can optionally abut against the upper end of the slide carrier 11.

[0039] The top plate 10 is provided with a plurality of limiting posts 15 evenly distributed along the circumference of the through hole 101; the limiting posts 15 are located on the side of the hand screw 12 near the through hole 101.

[0040] The linear fine-tuning part 3 includes a fixed plate, a sliding plate horizontally slidably connected to the fixed plate, and a fine-tuning knob 31 rotatably connected to the fixed plate for driving the sliding plate to slide; a locking plate 32 is provided on the fixed plate; a groove 321 is provided on the locking plate 32 along the sliding direction of the sliding plate; a locking knob 33 for restricting the movement of the locking plate 32 is threadedly connected to the sliding plate.

[0041] The sliding directions of the sliding plates of the two linear fine-tuning parts 3 are perpendicular to each other; the two linear fine-tuning parts 3 are arranged longitudinally, with the lower linear fine-tuning part 3 located at the inner bottom of the rectangular frame 2, and the upper linear fine-tuning part 3 located on the sliding plate of the lower linear fine-tuning part 3, and the electric lifting platform 4 located on the sliding plate of the upper linear fine-tuning part 3.

[0042] The purpose of this invention is to eliminate the parallelism error between the upper and lower top plates (i.e., the vacuum suction cup and the substrate stage). Because the materials we use and the glass itself that carries the material will have certain errors, these errors will accumulate between the two contacting surfaces, resulting in uneven stress distribution on the contact surface and affecting the processing effect.

[0043] Movement Flow: 1) The electric lifting platform 4 lowers the vacuum suction cup 9 to its lowest position, places the download body and material on the vacuum suction cup 9, and then places the upper carrier and material on the carrier stage; 2) Set the material leveling pressure on the human-machine interface, and turn on the positive air pressure switch of the spherical convex surface 71 and the spherical concave cavity 61 to form a thin air film between the spherical surfaces; 3) The electric lifting platform 4 lifts up, so that the download body and the upper carrier are in contact on both sides. At this time, under the action of the spherical surface with almost no friction, the download body and the upper carrier will make full contact; 4) Continue to lift slowly, and use the PLC / host computer to monitor the pressure sensor 8 at this time until the pressure reaches the set leveling pressure. At this time, under the action of pressure, the air film between the two spherical surfaces will be compressed and eliminated; 5) Turn off the positive pressure between the spherical surfaces, and then switch to negative pressure to increase the contact force between the spherical surfaces. The spherical convex surface 71 and the spherical concave cavity 61 are completely in contact, achieving a certain frictional self-locking; 6) The electric lifting platform 4 slowly lowers to complete the leveling.

[0044] The above description is only a specific embodiment of the present utility model, but the technical features of the present utility model are not limited thereto. Any changes or modifications made by those skilled in the art within the scope of the present utility model are covered by the patent scope of the present utility model.

Claims

1. A leveling device in a laser transfer printing equipment, characterized in that: It includes a rectangular frame; an electric lifting platform, which is located at the inner bottom of the rectangular frame; a fixed plate, which is located on the movable end of the electric lifting platform; a movable plate, which is movably connected to the upper end of the fixed plate; and a vacuum suction cup, which is located on the movable plate. A slide stage is detachably connected to the upper end of the rectangular frame and is located directly above the vacuum suction cup. A spherical cavity is located above the fixed disk. A spherical convex surface is located at the lower end of the movable disk. The outer wall of the spherical convex surface can optionally abut against the inner wall of the spherical cavity. A slit is provided at the lower end of the spherical convex surface. An air hole is provided at the bottom of the spherical cavity, located directly below the slit. Multiple pressure plates are provided on the upper end of the rectangular frame around the slide stage. The middle part of each pressure plate is rotatably connected to the rectangular frame, and the end of each pressure plate can optionally abut against the upper end of the slide stage.

2. The leveling device as described in claim 1, characterized in that: A pressure sensor is provided between the movable plate and the vacuum suction cup.

3. The leveling device as described in any one of claims 1-2, characterized in that: The middle part of the pressure plate is provided with a hand-tightening screw that is threadedly connected to the rectangular frame; one end of the pressure plate is provided with a stepped platform; the lower end of the other end of the pressure plate is threadedly connected with a threaded abutment.

4. The leveling device as described in claim 3, characterized in that: The end of the pressure plate away from the stepped platform is provided with a threaded through hole; the threaded abutment is rotatably connected in the threaded through hole.

5. The leveling device as described in any one of claims 1-2, characterized in that: The rectangular frame has a top plate at its upper end; a through hole is provided at the upper end of the top plate; a notch is provided on the side wall of the top plate that communicates with the through hole; the width of the notch is equal to the diameter of the through hole; and the slide stage is located directly above the through hole.

6. The leveling device as described in claim 5, characterized in that: Each of the pressure plates is evenly distributed around the outer periphery of the through hole along the circumferential direction; the upper end of the top plate is provided with a plurality of limiting posts evenly distributed along the circumferential direction of the through hole; the limiting posts are located on the side of the pressure plate close to the through hole.

7. The leveling device as described in any one of claims 1-2, characterized in that: An electric turntable is provided at the lower end of the rectangular frame; the fixed end of the electric turntable is provided on the workbench, and the movable end is provided on the rectangular frame.

8. The leveling device as described in any one of claims 1-2, characterized in that: The inner bottom of the rectangular frame has two linear fine-tuning sections horizontally arranged; each linear fine-tuning section includes a fixed plate, a sliding plate horizontally slidably connected to the fixed plate, and a fine-tuning knob rotatably connected to the fixed plate for driving the sliding plate to slide; wherein, the fixed plate is provided with a locking plate; and the sliding plate is threadedly connected with a locking knob for restricting the movement of the locking plate.

9. The leveling device as described in claim 8, characterized in that: The sliding directions of the sliding plates of the two linear fine-tuning parts are perpendicular to each other; the two linear fine-tuning parts are arranged longitudinally, with the lower linear fine-tuning part located at the inner bottom of the rectangular frame, and the upper linear fine-tuning part located on the sliding plate of the lower linear fine-tuning part, and the electric lifting platform located on the sliding plate of the upper linear fine-tuning part.

10. The leveling device as described in any one of claims 1-2, characterized in that: The electric lifting platform is provided with an angle fine-tuning part on its moving end; the fixed plate is provided on the moving end of the angle fine-tuning part.

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