Adsorption stage and substrate cleaning line

Abstract

The utility model discloses an adsorption support and substrate cleaning line, adsorption support includes adsorption board, is equipped with first negative pressure area, second negative pressure area and isolation area on adsorption board, is equipped with a plurality of interval first adsorption hole of setting in first negative pressure area, is equipped with a plurality of interval second adsorption hole of setting in second negative pressure area, isolation area is located between first negative pressure area and second negative pressure area, and is set around the outer periphery of first negative pressure area, and is equipped with a plurality of interval air inlet hole of setting in isolation area. Due to the outside gas into the air inlet hole, the air pressure in the air inlet hole is greater than the air pressure in the second negative pressure area, which can effectively prevent the liquid sucked by the second negative pressure area from flowing into the first negative pressure area through the isolation area, thereby improving the convenience of substrate unloading and reducing the substrate unloading breakage rate.

Description

Technical Field

[0001] This utility model belongs to the technical field of vacuum adsorption devices, specifically relating to an adsorption stage and substrate cleaning line. Background Technology

[0002] In the cutting and processing of ultra-thin glass, the process typically involves cleaning first, then applying a protective layer, followed by laser cutting. After cutting, the protective layer and burrs are removed through acid etching. Currently, in the glass cleaning stage, an adsorption platform is typically used to adsorb the glass through vacuum, thereby transferring the glass between multiple cleaning stations. However, because the adsorption platform is always in a vacuum adsorption state, the negative pressure generated by the vacuum will draw water and cleaning fluid into the space between the glass and the adsorption platform. When unloading the glass after cleaning, a large lifting force is required to overcome atmospheric pressure, liquid surface tension, and adhesive forces to push the glass out, which can easily lead to glass breakage. Utility Model Content

[0003] To address the aforementioned defects or deficiencies, this utility model provides an adsorption stage and substrate cleaning line, aiming to solve the technical problem of high glass breakage rate caused by liquid being drawn into the space between the glass and the adsorption stage mechanism.

[0004] To achieve the above objectives, this utility model provides an adsorption platform, which includes an adsorption plate, and the adsorption plate is provided with: The first negative pressure zone has multiple spaced-apart first adsorption holes. The second negative pressure zone is provided with multiple spaced-apart second adsorption holes. An isolation zone is located between the first negative pressure zone and the second negative pressure zone, and is set around the outer periphery of the first negative pressure zone. Multiple air inlets are set at intervals within the isolation zone.

[0005] In this embodiment of the invention, the isolation zone is further provided with an isolation groove, and the air inlet is located inside the isolation groove.

[0006] In this embodiment of the invention, the width of the isolation groove is 3mm to 5mm; and / or, the width of the second negative pressure zone is 5mm to 10mm.

[0007] In this embodiment of the invention, a material feeding auxiliary groove is provided in the second negative pressure zone.

[0008] In this embodiment of the invention, the number of material feeding auxiliary grooves is set to multiple, and the multiple material feeding auxiliary grooves are arranged at intervals along the inner edge of the second negative pressure zone, and each material feeding auxiliary groove is connected to the isolation groove.

[0009] In this embodiment of the invention, the second negative pressure zone is arranged around the outer periphery of the isolation zone.

[0010] In this embodiment of the invention, the adsorption stage further includes a sliding plate, the adsorption plate is disposed on the sliding plate, the sliding plate has a first connecting hole communicating with the air inlet, and the sliding plate has an installation groove for mounting the vacuum adsorption head.

[0011] In this embodiment of the utility model, the adsorption stage further includes a transfer plate, which is disposed between the sliding plate and the adsorption plate. The transfer plate has a second connecting hole, one end of which is connected to the air inlet and the other end of which is connected to the first connecting hole. The transfer plate also has a mounting hole and a negative pressure groove. One end of the mounting hole is connected to the mounting groove and allows the vacuum adsorption head to extend into it, and the other end of the mounting hole is connected to the negative pressure groove.

[0012] In this embodiment of the utility model, a plurality of material ejection holes are provided in the first negative pressure zone and / or the second negative pressure zone. The plurality of material ejection holes are spaced apart, and each material ejection hole is for a material ejection rod to extend into.

[0013] To achieve the above objectives, this utility model also provides a substrate cleaning line, which includes a substrate transfer device. The substrate transfer device includes a frame, a sliding drive mechanism, and an adsorption platform as described above. The sliding drive mechanism is slidably disposed on the frame and is drivenly connected to the adsorption platform to drive the adsorption platform to slide between the loading position and the unloading position.

[0014] Through the above technical solutions, the adsorption stage and substrate cleaning line provided in this utility model embodiment have the following beneficial effects: In the technical solution of this utility model, a first negative pressure zone, an isolation zone, and a second negative pressure zone are sequentially arranged from the inside to the outside on the adsorption plate of the adsorption stage. Multiple first and second adsorption holes are respectively opened in the first and second negative pressure zones for adsorbing the substrate through negative pressure. The isolation zone surrounds the first negative pressure zone to separate the first and second negative pressure zones. Simultaneously, an air inlet is provided in this area to connect with external gas, allowing external gas to flow into the first and second negative pressure zones respectively through the air inlet and flow out from the multiple first and second adsorption holes. This ensures that the negative pressure generated in the multiple first adsorption holes stabilizes the center of the substrate and that the negative pressure generated in the multiple second adsorption holes effectively adsorbs the periphery of the substrate, guaranteeing the stability and reliability of substrate adsorption. Furthermore, the air inlet allows external gas to pass through, forming an "air barrier" that acts as a liquid barrier. Since the air pressure in the air inlet is greater than the air pressure in the second negative pressure zone, it can effectively prevent the liquid drawn into the second negative pressure zone from flowing through the isolation zone into the first negative pressure zone, thereby improving the convenience of substrate unloading and reducing the substrate breakage rate.

[0015] Other features and advantages of this invention will be described in detail in the following detailed description section. Attached Figure Description

[0016] The accompanying drawings are provided to further illustrate the embodiments of the present invention and form part of the specification. They are used together with the following detailed description to explain the embodiments of the present invention, but do not constitute a limitation thereof. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without any inventive effort. In the drawings: Figure 1 This is a schematic diagram of the structure of the adsorption platform according to an embodiment of the present invention; Figure 2 yes Figure 1 Enlarged view of region A in the middle; Figure 3 This is a cross-sectional structural schematic diagram of an adsorption stage according to an embodiment of the present invention; Figure 4 yes Figure 3 Enlarged view of region B in the middle; Figure 5 This is a partial structural schematic diagram of the adsorption plate in an adsorption stage according to an embodiment of the present invention; Figure 6 This is a schematic diagram of the structure of a substrate transfer device according to an embodiment of the present invention; Figure 7 This is a schematic diagram of the structure of a substrate cleaning line according to an embodiment of the present invention.

[0017] Explanation of reference numerals in the attached figures Detailed Implementation

[0018] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.

[0019] The adsorption platform of this utility model is described below with reference to the accompanying drawings.

[0020] like Figure 1 and Figure 2As shown, this utility model provides an adsorption stage 100, which includes an adsorption plate 10. The adsorption plate 10 is provided with a first negative pressure zone 11, a second negative pressure zone 12 and an isolation zone 13. The first negative pressure zone 11 has a plurality of spaced-apart first adsorption holes 111, and the second negative pressure zone 12 has a plurality of spaced-apart second adsorption holes 121. The isolation zone 13 is located between the first negative pressure zone 11 and the second negative pressure zone 12 and surrounds the outer periphery of the first negative pressure zone 11. The isolation zone 13 has a plurality of spaced-apart air inlets 131.

[0021] It should be noted that the adsorption platform 100 of this utility model is used to carry and adsorb the substrate for conveying the substrate, thereby facilitating the loading, cleaning and unloading of the substrate. The substrate can be made of glass. The adsorption platform 100 of this utility model does not limit the type and material of the substrate being adsorbed. This utility model embodiment only uses the adsorption platform 100 for adsorbing glass substrates as an example for illustration.

[0022] Specifically, the adsorption platform 100 includes an adsorption plate 10. The adsorption plate 10 has a first negative pressure zone 11, an isolation zone 13, and a second negative pressure zone 12 arranged sequentially from the inside out. The first negative pressure zone 11 has multiple first adsorption holes 111 for negative pressure adsorption of the substrate. The isolation zone 13 surrounds the first negative pressure zone 11 to separate the first negative pressure zone 11 and the second negative pressure zone 12, and the isolation zone 13 has an air inlet 131 for air intake. The second negative pressure zone 12 has multiple second adsorption holes 121 for negative pressure adsorption of the substrate. When adsorbing the substrate, the adsorption plate 10 serves as the adsorption support platform for the substrate. At this time, external gas can flow through the air inlet 131 to the first negative pressure zone 11 and the second negative pressure zone 12, and then flow out from the multiple first adsorption holes 111 and the multiple second adsorption holes 121, respectively. This airflow design ensures that the negative pressure generated within the multiple first adsorption holes 111 stabilizes the center of the substrate, while the negative pressure generated within the multiple second adsorption holes 121 effectively adsorbs the periphery of the substrate, guaranteeing the stability and reliability of substrate adsorption. Furthermore, the continuous flow of external gas through the air inlet 131 forms an "air barrier," effectively preventing liquid from entering. Because the air pressure within the air inlet 131 is greater than the air pressure within the second negative pressure zone 12, it effectively prevents liquid drawn into the second negative pressure zone 12 from flowing through the isolation zone 13 into the first negative pressure zone 11, thereby improving the ease of substrate unloading and reducing the substrate breakage rate.

[0023] Understandably, the adsorption stage 100 of this utility model includes a vacuuming mechanism. The upper side of the adsorption stage 100 is used for placing the substrate, and the vacuuming mechanism is located on the lower side of the adsorption stage 100 to draw in external gas. When adsorbing the substrate, the external gas can be drawn from bottom to top into the air inlet 131 under the action of the vacuuming mechanism to form an air wall that blocks the liquid. The external gas flows through the air inlet 131 and flows out from top to bottom through the first adsorption hole 111 and the second adsorption hole 121 respectively. A negative pressure is formed in the first adsorption hole 111 and the second adsorption hole 121 to stably adsorb the substrate onto the adsorption plate 10. The air pressure of the air wall in the air inlet 131 is greater than the air pressure in the first negative pressure area 11 and the second negative pressure area 12, effectively isolating the liquid in the first negative pressure area 11 and the second negative pressure area 12, preventing the liquid drawn in from the periphery of the second negative pressure area 12 from flowing into the first negative pressure area 11 and the substrate, thereby reducing the difficulty of substrate unloading.

[0024] In this embodiment of the invention, the isolation zone 13 is further provided with an isolation groove 132, and the air inlet 131 is disposed within the isolation groove 132. Figure 1 and Figure 2 As shown, an isolation groove 132 is provided in the isolation zone 13, surrounding the outer perimeter of the first negative pressure zone 11. Multiple air inlets 131 are provided on the bottom wall of the isolation groove 132 at intervals. The air inlets 131 are used to allow external gas to enter, forming an air wall that blocks the second negative pressure zone 12 and the first negative pressure zone 11. This effectively prevents liquid drawn into the edge of the second negative pressure zone 12 from seeping into the first negative pressure zone 11. Furthermore, the isolation groove 132 further separates the first negative pressure zone 11 and the second negative pressure zone 12. Even if a small amount of liquid seeps into the isolation groove 132, it can flow out from the air inlets 131 in the isolation groove 132 by gravity, preventing the liquid from flowing into the first negative pressure zone 11 and improving the reliability of liquid barrier.

[0025] In this embodiment of the invention, the width of the isolation groove 132 is 3mm~5mm; and / or, the width of the second negative pressure zone 12 is 5mm~10mm. Figure 5 As shown, the width of the isolation groove 132 is set to d1, where d1 = 3mm~5mm, to effectively separate the first negative pressure zone 11 and the second negative pressure zone 12. The width of the isolation groove 132, set to 3mm~5mm, effectively separates the liquid from the first negative pressure zone 11 while ensuring the adsorption stability of the substrate. Figure 5 As shown, the width of the second negative pressure zone 12 is set to d2, where d2 = 5mm~10mm, so that the multiple second adsorption holes 121 in the second negative pressure zone 12 can fully contact the periphery of the substrate, thereby stabilizing the adsorption of the substrate and improving the adsorption reliability of the substrate.

[0026] In this embodiment of the invention, a material feeding auxiliary groove 122 is provided within the second negative pressure zone 12. For example... Figure 1 and Figure 2 As shown, the feeding auxiliary groove 122 reduces the contact area between the second negative pressure zone 12 and the substrate. This design not only ensures the stable adsorption of the substrate by the second adsorption hole 121, but also facilitates the smooth feeding of the substrate. Even if liquid seeps between the second negative pressure zone 12 and the substrate under suction, the feeding auxiliary groove 122 can still reduce the adhesion force, thereby further reducing the breakage rate of the substrate during the feeding process.

[0027] Furthermore, the number of material feeding auxiliary channels 122 is set to multiple, and the multiple material feeding auxiliary channels 122 are arranged at intervals along the inner edge of the second negative pressure zone 12, and each material feeding auxiliary channel 122 is connected to the isolation channel 132. Figure 1 and Figure 2 As shown, a plurality of feeding auxiliary grooves 122 are provided in the second negative pressure zone 12, which are spaced apart along the outer periphery of the isolation zone 13. The plurality of feeding auxiliary grooves 122 can effectively reduce the contact area between the second negative pressure zone 12 and the substrate, thereby reducing the difficulty of substrate feeding. The feeding auxiliary grooves 122 are connected to the isolation grooves 132, so that the liquid that seeps into the second negative pressure zone 12 can flow smoothly into the isolation grooves 132 through the feeding auxiliary grooves 122 and flow out from the air inlet 131 under the action of gravity, further improving the convenience and efficiency of substrate feeding.

[0028] In this embodiment of the invention, the width of the material feeding auxiliary groove 122 is 3mm to 4mm. For example... Figure 5 As shown, the width of the feeding auxiliary groove 122 is set to d3, where d3 = 3mm~4mm. This ensures that the second adsorption hole 121 in the second negative pressure zone 12 can stably adsorb the substrate, while also reducing the contact area between the second negative pressure zone 12 and the substrate, thus facilitating substrate feeding.

[0029] In this embodiment of the invention, the second negative pressure zone 12 is arranged around the outer periphery of the isolation zone 13. For example... Figure 1 and Figure 2 As shown, the isolation zone 13 extends along the outer periphery of the first negative pressure zone 11 to surround the outside of the first negative pressure zone 11, and the second negative pressure zone 12 extends along the outer periphery of the isolation zone 13 to surround the outside of the isolation zone 13. The isolation zone 13 is used to separate the first negative pressure zone 11 and the second negative pressure zone 12 to prevent liquid absorbed from the periphery of the second negative pressure zone 12 from seeping into the first negative pressure zone 11, thereby reducing the substrate breakage rate. The second negative pressure zone 12 is provided with a plurality of second adsorption holes 121. The second adsorption holes 121 are used to generate negative pressure to adsorb the periphery of the substrate. The second negative pressure zone 12 is arranged around the outer periphery of the isolation zone 13 to increase the contact area with the substrate, thereby improving the adsorption stability and reliability of the substrate periphery.

[0030] In this embodiment of the utility model, the adsorption stage 100 further includes a sliding plate 20, the adsorption plate 10 is disposed on the sliding plate 20, the sliding plate 20 is provided with a first connecting hole 21 communicating with the air inlet 131, and the sliding plate 20 is provided with an installation groove 22 for mounting the vacuum adsorption head 200.

[0031] like Figure 3 and Figure 4 As shown, the sliding carrier plate 20 is used to drive the adsorption plate 10 and the substrate placed on the adsorption plate 10 to slide and realize the transport of the substrate. The sliding carrier plate 20 is provided with a first connecting hole 21 for communicating with the air inlet 131 at the position of each air inlet 131, so that the external gas can flow into the air inlet 131 through the first connecting hole 21 and thus form an air wall that blocks the liquid. In addition, the sliding carrier plate 20 is provided with a mounting groove 22, which communicates with the first adsorption hole 111 or the second adsorption hole 121. The vacuum adsorption head 200 for drawing gas is provided in the mounting groove 22 to draw gas and create a negative pressure in the first adsorption hole 111 or the second adsorption hole 121, thereby stabilizing the adsorption of the substrate.

[0032] Furthermore, the adsorption stage 100 also includes a transition plate 30, which is disposed between the sliding stage 20 and the adsorption plate 10. The transition plate 30 has a second connecting hole 31, one end of which is connected to the air inlet 131, and the other end of which is connected to the first connecting hole 21. The transition plate 30 also has a mounting hole 32 and a negative pressure groove 33. One end of the mounting hole 32 is connected to the mounting groove 22 and allows the vacuum adsorption head 200 to extend into it. The other end of the mounting hole 32 is connected to the negative pressure groove 33.

[0033] like Figure 3 and Figure 4 As shown, the adapter plate 30 is located on the upper side of the adsorption platform 100, and the adsorption plate 10 is located on the upper side of the adapter plate 30. The adapter plate 30 has a second connecting hole 31. The first connecting hole 21, the second connecting hole 31, and the air inlet 131 are connected sequentially from bottom to top, so that external gas can flow through the first connecting hole 21 and the second connecting hole 31 into the air inlet 131 to form an air wall that isolates the liquid from the first negative pressure zone 11. Furthermore, the lower side of the adapter plate 30 has a groove for connecting with the mounting groove 22. The mounting hole 32 is open, and the upper side of the adapter plate 30 is provided with a negative pressure groove 33 that communicates with the first adsorption hole 111 or the second adsorption hole 121. The vacuum adsorption head 200 passes through the mounting groove 22 and extends into the mounting hole 32, which improves the installation stability of the vacuum adsorption head 200 and facilitates the vacuum adsorption head 200 to draw gas from the negative pressure groove 33. The communication between the negative pressure groove 33 and the first adsorption hole 111 or the second adsorption hole 121 increases the gas flow rate and improves the adsorption stability and reliability of the substrate.

[0034] In this embodiment of the invention, a plurality of material ejection holes 112 are provided in the first negative pressure zone 11 and / or the second negative pressure zone 12. The plurality of material ejection holes 112 are spaced apart, and each material ejection hole 112 is for a material ejector rod to extend into. Figure 1 and Figure 2 As shown, a plurality of spaced-apart discharge holes 112 are provided in the first negative pressure zone 11 and / or the second negative pressure zone 12. A discharge device is provided on the substrate cleaning line 300. The discharge device includes a discharge rod and a lifting drive. The lifting drive is connected to the discharge rod and is used to drive the discharge rod to rise and fall. When the substrate is discharged, the lifting drive can drive the discharge rod to extend from the lower side of the adsorption plate 10 into the discharge hole 112, thereby helping the substrate overcome atmospheric pressure, liquid surface tension and adhesion to discharge the substrate, and further improving the convenience of discharge.

[0035] In addition, this utility model also provides a substrate cleaning line 300, which includes a substrate transfer device 301. The substrate transfer device 301 includes a frame 3011, a sliding drive mechanism 3012, and an adsorption platform 100 as described above. The sliding drive mechanism 3012 is slidably disposed on the frame 3011 and is drivenly connected to the adsorption platform 100 to drive the adsorption platform 100 to slide between the loading position 302 and the unloading position 303.

[0036] like Figure 6 and Figure 7 As shown, the substrate cleaning line 300 has a loading position 302, a cleaning position, and a unloading position 303 arranged sequentially. The sliding drive mechanism 3012 is mounted on the frame 3011 and can drive the adsorption platform 100 to slide between the loading position 302 and the unloading position 303, so that the substrate can be cleaned when it slides to the cleaning position. During the substrate cleaning process, the isolation area 13 on the adsorption plate 10 effectively prevents liquid from flowing into the first negative pressure area 11, which facilitates the unloading of the substrate after cleaning and greatly reduces the substrate breakage rate. The specific structure of the adsorption platform 100 is as described in the above embodiment. Since the substrate transfer device 301 and the substrate cleaning line 300 adopt all the technical solutions of the above embodiments, they have at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described in detail here.

[0037] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0038] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0039] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0040] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. An adsorption stage, characterized in that, The adsorption stage (100) includes an adsorption plate (10), and the adsorption plate (10) is provided with: The first negative pressure zone (11) is provided with a plurality of spaced first adsorption holes (111); The second negative pressure zone (12) is provided with a plurality of spaced second adsorption holes (121); An isolation zone (13) is provided between the first negative pressure zone (11) and the second negative pressure zone (12) and is arranged around the outer periphery of the first negative pressure zone (11). A plurality of air inlets (131) are provided in the isolation zone (13) at intervals.

2. The adsorption stage according to claim 1, characterized in that, The isolation zone (13) is also provided with an isolation groove (132), and the air inlet (131) is located in the isolation groove (132).

3. The adsorption stage according to claim 2, characterized in that, The width of the isolation groove (132) is 3mm to 5mm; and / or the width of the second negative pressure zone (12) is 5mm to 10mm.

4. The adsorption stage according to claim 2, characterized in that, A material feeding auxiliary trough (122) is provided in the second negative pressure zone (12).

5. The adsorption stage according to claim 4, characterized in that, The number of the feeding auxiliary grooves (122) is set to be multiple, and the multiple feeding auxiliary grooves (122) are arranged at intervals along the inner edge of the second negative pressure zone (12), and each feeding auxiliary groove (122) is connected to the isolation groove (132).

6. The adsorption stage according to any one of claims 1 to 5, characterized in that, The second negative pressure zone (12) is arranged around the outer periphery of the isolation zone (13).

7. The adsorption stage according to any one of claims 1 to 5, characterized in that, The adsorption stage (100) further includes a sliding plate (20), the adsorption plate (10) is disposed on the sliding plate (20), the sliding plate (20) has a first connecting hole (21) communicating with the air inlet (131), and the sliding plate (20) has an installation groove (22) for mounting the vacuum adsorption head (200).

8. The adsorption stage according to claim 7, characterized in that, The adsorption stage (100) further includes a transition plate (30), which is disposed between the sliding stage (20) and the adsorption stage (10). The transition plate (30) has a second connecting hole (31), one end of which is connected to the air inlet (131), and the other end of which is connected to the first connecting hole (21). The transition plate (30) also has a mounting hole (32) and a negative pressure groove (33), one end of which is connected to the mounting groove (22) and allows the vacuum adsorption head (200) to extend into it, and the other end of which is connected to the negative pressure groove (33).

9. The adsorption stage according to any one of claims 1 to 5, characterized in that, Multiple material ejection holes (112) are provided in the first negative pressure zone (11) and / or the second negative pressure zone (12). The multiple material ejection holes (112) are spaced apart, and each material ejection hole (112) is for a material ejection rod to extend into.

10. A substrate cleaning line, characterized in that, The substrate cleaning line (300) includes a substrate transfer device (301), which includes a frame (3011), a sliding drive mechanism (3012), and an adsorption stage (100) according to any one of claims 1 to 9. The sliding drive mechanism (3012) is slidably disposed on the frame (3011), and the sliding drive mechanism (3012) is drivenly connected to the adsorption stage (100) and drives the adsorption stage (100) to slide between the loading position (302) and the unloading position (303).

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