A feeding automatic lifting device for semiconductor electronic special material production

Abstract

The utility model discloses a kind of automatic lifting devices of feeding for semiconductor electronic special material production, belong to the related technical field of semiconductor material production equipment, including support base plate, a group of lifting units and mobile pushing unit;Support base plate has corresponding supporting force;A group of lifting units are configured along the length direction of support base plate with interval;Mobile pushing unit includes linear guide rail configured on a group of lifting units;Fixed support unit is configured at the end of linear guide rail;Movable support unit is slidably configured on linear guide rail;Wherein the sliding support unit is connected with corresponding linear drive, realizes lifting, multi-size adaptive clamping and stable pushing function.

Description

Technical Field

[0001] This utility model belongs to the technical field of semiconductor material production equipment, and in particular relates to an automatic lifting device for feeding semiconductor electronic special materials. Background Technology

[0002] Semiconductor electronic materials include silicon wafers, photoresists, electronic gases, and polishing materials. Silicon wafers are all made by cutting silicon rods, and single-crystal silicon rods are available in sizes such as 4 inches, 6 inches, 8 inches, and 12 inches. Different processing equipment has different requirements for the length, diameter (e.g., a 300mm silicon rod is required for a 12-inch wafer), and operating height of the silicon rods. Traditional fixed feeding devices are difficult to adjust flexibly, and manual handling or simple clamps can easily cause silicon rod displacement or surface damage, especially during the pushing and feeding process. Utility Model Content

[0003] In view of the above situation and to overcome the defects of the prior art, this utility model provides an automatic lifting device for feeding semiconductor electronic special materials production, which has lifting, multi-size adaptable clamping and stable pushing functions.

[0004] The technical solution adopted by this utility model is as follows: an automatic lifting device for feeding semiconductor electronic special materials production, including a supporting base plate, a set of lifting units and a moving pushing unit; the supporting base plate has a corresponding supporting force; the set of lifting units are spaced apart along the length direction of the supporting base plate; the moving pushing unit includes a linear guide rail disposed on the set of lifting units; a fixed support unit disposed at the end of the linear guide rail; and a movable support unit slidably disposed on the linear guide rail; wherein the movable support unit is connected to a corresponding linear drive.

[0005] Furthermore, the active support unit includes: A sliding seat adapted to a linear guide rail, wherein a pair of mounting side plates are arranged on both sides of the working direction of the linear guide rail on the supporting working surface of the sliding seat; and multiple supporting rollers are rotatably arranged on the supporting working surface of the sliding seat, the supporting rollers being spaced apart along the working direction of the linear guide rail. A pair of positioning components are distributed opposite each other between mounting side panels and connected to a drive component, the drive component being configured to drive the pair of positioning components to move opposite each other between the mounting side panels.

[0006] Furthermore, the fixed support unit includes a support body and a plurality of support rollers rotatably arranged on the support working surface of the support body. The support body is fixed to the end of the linear guide rail, and the plurality of support rollers are spaced apart along the working direction of the linear guide rail.

[0007] Furthermore, the lifting unit includes a lifting drive, fixedly configured on the support base plate, including a fixed end and a lifting end; a bearing housing, fixedly configured on the top of the fixed end, the lifting end movably penetrating the support working surface of the bearing housing; and a lifting plate, configured on the lifting end and located above the support working surface of the bearing housing, with multiple lifting guide rods connected to its bottom, the lifting guide rods movably penetrating the support working surface of the bearing housing.

[0008] Furthermore, the positioning component includes an arc-shaped plate, the central axis of which is aligned with the working direction of the linear guide rail, and positioning rollers are respectively disposed at the upper and lower ends of the arc-shaped plate. The arc-shaped plate has a predetermined length along its axial direction, and the positioning rollers have a predetermined length along the axial direction of the arc-shaped plate.

[0009] The beneficial effects of this utility model after adopting the above structure are as follows: The automatic lifting device for feeding semiconductor electronic special materials proposed in this utility model can adaptively clamp and position the monocrystalline silicon rod at one end through the set moving pushing unit, and adapt to the length of the monocrystalline silicon rod, and support it at the other end. It can realize the positioning and support of monocrystalline silicon rods with different outer diameters and lengths. Combined with the lifting unit, the height of the monocrystalline silicon rod can be adjusted to adapt to the working height of different processing equipment. In addition, it can push and feed the positioning and monocrystalline silicon rod, and ensure the positioning at one end and the support at multiple points during the pushing and feeding process, so as to achieve stable feeding of monocrystalline silicon rods. Attached Figure Description

[0010] The accompanying drawings are provided to further understand the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation thereof.

[0011] Figure 1 This is a schematic diagram of the overall structure of an automatic lifting device for feeding semiconductor electronic special materials production proposed in this utility model; Figure 2 This is a partial cross-sectional view of an automatic lifting device for feeding semiconductor electronic special materials production proposed in this utility model; Figure 3 This is a schematic diagram of the movable support unit structure of an automatic lifting device for feeding semiconductor electronic special materials production proposed in this utility model; Figure 4 This is a schematic diagram of the overall structure of an automatic lifting device for feeding semiconductor electronic special materials proposed in this utility model from another angle.

[0012] In the attached diagram: 1. Support base plate, 2. Lifting unit, 3. Linear guide rail, 4. Fixed support unit, 5. Movable support unit, 6. Linear drive, 7. Sliding seat, 8. Mounting side plate, 9. Support roller, 10. Support body, 11. Lifting drive, 12. Bearing housing, 13. Lifting plate, 14. Lifting guide rod, 15. Arc plate, 16. Positioning roller, 17. Sliding block, 18. Limiting rod, 19. Drive motor, 20. Screw. Detailed Implementation

[0013] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0014] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0015] like Figures 1-4 As shown, an automatic lifting device for feeding semiconductor electronic materials includes a support base plate 1, a set of lifting units 2, and a moving pushing unit. The support base plate 1 has a corresponding supporting force. The set of lifting units 2 are spaced apart along the length of the support base plate 1. The moving pushing unit includes a linear guide rail 3 disposed on the set of lifting units 2; a fixed support unit 4 disposed at the end of the linear guide rail 3; and a movable support unit 5 slidably disposed on the linear guide rail 3. The movable support unit is connected to a corresponding linear drive 6. The monocrystalline silicon rod can be placed along the working direction of the guide rail. The working distance between the movable support unit 5 and the fixed support unit 4 can be adjusted according to the length of the monocrystalline silicon rod. The movable support unit 5 supports and positions one end of the monocrystalline silicon rod at multiple points, while the other end of the monocrystalline silicon rod is supported by the fixed support unit 4. During feeding, the movable support unit 5 can be driven to move along the linear guide rail 3 by the linear drive 6, and the monocrystalline silicon rod is pushed to an external processing platform along the linear guide rail 3. The linear drive 6 can be a telescopic push rod with customized stroke and thrust.

[0016] In some preferred embodiments, the movable support unit 5 includes a sliding seat 7 and a set of positioning components; the sliding seat 7 is adapted to the linear guide rail 3, and a pair of mounting side plates 8 are arranged on both sides of the working direction of the linear guide rail 3 on the support working surface of the sliding seat 7; a plurality of support rollers 9 are rotatably arranged on the support working surface of the sliding seat 7, and the support rollers 9 are spaced apart along the working direction of the linear guide rail 3. A pair of positioning components are distributed opposite each other between the mounting side plates 8 and connected to a drive component. The drive component is configured to drive the pair of positioning components to move opposite each other between the mounting side plates 8. Specifically, the drive component may include a screw 20 with positive and negative threads rotatably disposed between the two mounting side plates 8 and a limiting rod 18 fixed between the mounting side plates 8. The positive and negative threads of the screw 20 are respectively threaded with sliding blocks 17, which can slide along the limiting rod 18. Each sliding block 17 is connected to a positioning component. A drive motor 19 is mounted on the outer side of one mounting side plate 8. The output end of the drive motor 19 is fixedly connected to one end of the screw 20. After the drive motor 19 is started, the output end of the drive motor 19 drives the screw 20 to rotate, and the sliding blocks 17 move relative to each other along the limiting rod 18.

[0017] The positioning component includes an arc-shaped plate 15, the central axis of which is aligned with the working direction of the linear guide rail 3. Positioning rollers 16 are respectively arranged at the upper and lower ends of the arc-shaped plate 15. The arc-shaped plate 15 is laterally fixedly connected to the sliding block 17 via a fixing rod. The arc-shaped plate 15 has a predetermined length along its axial direction, and the positioning rollers 16 have a predetermined length along the axial direction of the arc-shaped plate 15. The positioning rollers 16 can be materials suitable for clamping single-crystal silicon rods in the prior art, such as alumina / aluminum nitride ceramics, PEEK / modified PEEK (with added carbon fiber), and graphite composite materials. Some materials require surface treatment to prevent surface contamination of the single-crystal silicon rod, reduce the coefficient of friction, and prevent static electricity, etc. These are all prior art, and will not be elaborated in detail in this embodiment.

[0018] In some preferred embodiments, the fixed support unit 4 includes a support body 10 and a plurality of support rollers 9 rotatably arranged on the support working surface of the support body 10. The support body 10 is fixed to the end of the linear guide rail 3, and the plurality of support rollers 9 are spaced apart along the working direction of the linear guide rail 3. The material of the support rollers 9 can be the same as that of the positioning rollers 16 and can be subjected to corresponding surface treatments. When the movable support unit 5 moves, the monocrystalline silicon rod moves with the movable support unit 5, and the support rollers 9 of the fixed support unit 4 facilitate the movement of the monocrystalline silicon rod. In addition, support rollers 9 can also be arranged on the support working surface of the sliding seat 7. During the feeding process along the linear guide rail 3, after moving to the support body 10 of the fixed support unit 4, one end of the monocrystalline silicon rod is released, and it is removed from the device under the operation of the robotic arm and adsorption clamp of the corresponding processing platform.

[0019] In some preferred embodiments, the lifting unit 2 includes a lifting drive 11, fixedly mounted on the support base plate 1, comprising a fixed end and a lifting end; a bearing housing 12, fixedly mounted on top of the fixed end (the fixed end housing may be equipped with a protective housing, and the bearing housing 12 is fixed on the protective housing), the lifting end movably penetrating the support working surface of the bearing housing 12; and a lifting plate 13, mounted on the lifting end and located above the support working surface of the bearing housing 12, with multiple lifting guide rods 14 connected to its bottom, the lifting guide rods 14 movably penetrating the support working surface of the bearing housing 12. The lifting drive 11 may be a hydraulic lifting rod, connected to a corresponding hydraulic working system. When the lifting end is raised or lowered, the lifting plate 13 is stably raised and lowered under the guidance of the lifting guide rods 14. Protective side plates may be provided on both sides of the bearing housing 12 on the linear guide rail 3.

[0020] It should be noted that the various drives involved in this application can be programmed using PLC to achieve timing matching and start / stop control between multiple motors and lifting drive 11.

[0021] The specific usage is as follows: Based on the required length of the monocrystalline silicon rod to be loaded, activate the linear drive 6 to drive the movable support unit 5 to move along the linear guide rail 3, adjusting the distance between the movable support unit 5 and the fixed support unit 4; place the monocrystalline silicon rod on the sliding seat 7 and the support body 10, with the sliding seat 7 and the support body 10 supporting both ends of the monocrystalline silicon rod respectively; through the drive assembly, adjust the distance between the arc-shaped plates 15 of the two positioning components and the positioning rollers 16; the monocrystalline silicon rod is positioned by multiple positioning rollers 16 clamping one end of the monocrystalline silicon rod; then, through the lifting drive 11, adjust the height of the lifting plate 13 and the monocrystalline silicon rod on it to a suitable loading position; continue to activate the linear drive 6 to push the monocrystalline silicon rod, changing its horizontal position, facilitating loading operations with the corresponding processing platform's robotic arm, suction cup clamp, etc.

[0022] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions, and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents. In summary, if those skilled in the art, inspired by this description, design similar structural methods and embodiments without departing from the inventive spirit of the present invention, such designs should fall within the protection scope of the present invention. Each component of this application can be driven by a corresponding external motor; this is prior art and will not be elaborated upon here.

Claims

1. An automatic lifting device for feeding semiconductor electronic special materials, characterized in that, include: The supporting base plate has the corresponding support force; A set of lifting units are spaced apart along the length of the supporting base plate; The mobile push unit includes a linear guide rail disposed on a set of lifting units; a fixed support unit disposed at the end of the linear guide rail; and a movable support unit slidably disposed on the linear guide rail; wherein the movable support unit is connected to a corresponding linear drive.

2. The automatic lifting device for feeding semiconductor electronic special materials production according to claim 1, characterized in that: The activity support unit includes: A sliding seat adapted to a linear guide rail, wherein a pair of mounting side plates are arranged on both sides of the working direction of the linear guide rail on the supporting working surface of the sliding seat; and multiple supporting rollers are rotatably arranged on the supporting working surface of the sliding seat, the supporting rollers being spaced apart along the working direction of the linear guide rail. A pair of positioning components are distributed opposite each other between mounting side panels and connected to a drive component, the drive component being configured to drive the pair of positioning components to move opposite each other between the mounting side panels.

3. The automatic lifting device for feeding semiconductor electronic special materials production according to claim 2, characterized in that: The fixed support unit includes a support body and a plurality of support rollers rotatably arranged on the support working surface of the support body. The support body is fixed to the end of the linear guide rail, and the plurality of support rollers are spaced apart along the working direction of the linear guide rail.

4. The automatic lifting device for feeding semiconductor electronic special materials production according to claim 1, characterized in that: The lifting unit includes a lifting drive, which is fixedly configured on the support base plate and includes a fixed end and a lifting end; a bearing housing, which is fixedly configured on the top of the fixed end, and the lifting end movably penetrates the support working surface of the bearing housing; A lifting plate is configured at the lifting end and located above the supporting working surface of the bearing housing. Multiple lifting guide rods are connected to the bottom, and the lifting guide rods movably penetrate through the supporting working surface of the bearing housing.

5. The automatic lifting device for feeding semiconductor electronic special materials production according to claim 2, characterized in that: The positioning component includes an arc-shaped plate, the central axis of which is aligned with the working direction of the linear guide rail. Positioning rollers are respectively arranged at the upper and lower ends of the arc-shaped plate. The arc-shaped plate has a predetermined length along its axial direction, and the positioning rollers have a predetermined length along the axial direction of the arc-shaped plate.

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