A molybdenum boat facilitating adjustment of deposition rate of evaporation coating layer

Abstract

The utility model relates to a molybdenum boat convenient to adjust evaporation coating deposition rate, including a cubic shape box body, the box body upper end opening, the both ends of box body are connected with the outward extension connecting piece respectively, two connecting pieces are used for connecting power supply positive and negative pole respectively, the both sides side wall of box body is set up respectively with a large number of escape holes, escape holes all are located the bottom surface in the box body top, the distance between the last layer escape hole and the bottom surface in the box body satisfies the demand of liquid medicine holding, the inboard of the side wall of box body set up with escape hole respectively is pasted with steel wool, the box cover is connected with the box body top opening, and the box cover covers the box body top opening. Through setting up steel wool in the inboard of the side wall of box body set up with escape hole, improve the resistance of the gasification medicament outward escape, reduce the gasification medicament escape speed, thereby reduce the deposition rate of medicament on the workpiece surface, ensure that the coating is compact, still can adjust the rate that the gasification medicament outward escapes the box body through replacing the steel wool of different thickness, density etc.

Description

Technical Field

[0001] This utility model belongs to the field of vapor deposition technology, specifically relating to a molybdenum boat that facilitates the adjustment of the vapor deposition coating deposition rate. Background Technology

[0002] In PVD equipment, molybdenum boats are often used as heating media to heat functional molecules, forming a functional coating with a special structure on the substrate surface. Typically, the molybdenum boat only serves as the heating medium, while the functional agents are usually contained in a steel wool carrier. However, with improvements in equipment and processes, a new process has been developed that directly heats and evaporates the functional agents without the need for a steel wool carrier. In this new process, the agents are directly injected into a square molybdenum boat through pipes. When the boat is heated, the agents escape from the side pores and deposit on the substrate surface, forming a functional coating.

[0003] However, in the new process, when the molybdenum boat is heated to a certain temperature, the reagent rapidly escapes and deposits on the substrate surface at a relatively fast deposition rate. But when the deposition rate is too high, the coating density is loose and prone to defects, affecting the final performance. Therefore, it is necessary to design a new type of molybdenum boat that allows the reagent to evaporate in a gradient, thus reducing the deposition rate. Utility Model Content

[0004] The technical problem to be solved by this utility model is to provide a molybdenum boat that facilitates the adjustment of the vapor deposition rate of the coating, thereby solving the technical problem that the current method of directly adding reagents into a square molybdenum boat results in excessively rapid evaporation of the reagents and an excessively high deposition rate of the reagents on the workpiece surface.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a molybdenum boat that facilitates the adjustment of the vapor deposition rate of the coating, comprising a cubic box with an opening at the top and connecting pieces extending outward at both ends of the box. The two connecting pieces are used to connect the positive and negative terminals of the power supply, respectively. A large number of vent holes are opened on the side walls of the box, all of which are located above the bottom surface of the box. The distance between the bottommost vent hole and the bottom surface of the box meets the requirements for holding the liquid medicine. Steel wool is attached to the inner side of the side wall of the box with vent holes. A lid is connected to the top opening of the box, and the lid covers the top opening of the box.

[0006] As a preferred embodiment, the box body is further provided with two mesh-structured pressure plates. The two pressure plates are respectively aligned with the two side walls of the box body with vent holes. The two pressure plates are elastically connected by an elastic element, and the two steel wool fibers are respectively clamped between the two pressure plates between the corresponding side walls of the box body.

[0007] As a preferred embodiment, the elastic element is a spring, and there are four springs, which are respectively connected to the four corners of the two pressure plates, and the two ends of each spring are fixedly connected to the two pressure plates.

[0008] As a preferred embodiment, the lid has a through hole in the center.

[0009] As a preferred embodiment, a handle is provided on each side of the lid, and a through hole is located between the two handles.

[0010] The beneficial effects of this utility model are as follows: By placing steel wool on the inner side wall of the box with vent holes, this utility model increases the resistance to the outward escape of the vaporized agent, reduces the escape rate of the vaporized agent, thereby reducing the deposition rate of the agent on the workpiece surface and ensuring a tight coating. Furthermore, the rate at which the vaporized agent escapes from the box can be adjusted by replacing steel wool with different thicknesses, densities, and other parameters.

[0011] This invention also incorporates a pressure plate and an elastic element. The elastic element supports the pressure plate in compressing the steel wool. While ensuring the stability of the steel wool, the compressive force of the pressure plate on the steel wool can be changed by altering the elasticity of the elastic element. This, in turn, adjusts the density and permeability of the steel wool, changes the rate at which the vaporized agent escapes from the box, and regulates the coating deposition rate. Attached Figure Description

[0012] The specific embodiments of this utility model will be further described in detail below with reference to the accompanying drawings, wherein: Figure 1 This is a schematic diagram of the separated state of the box body and the box lid described in this utility model; Figure 2 This is a cross-sectional view of the box body containing a pressure plate as described in this utility model; Figure 1 and Figure 2 In the middle: 1. Box body; 2. Connecting piece; 3. Vent hole; 4. Steel wool; 5. Box cover; 6. Pressure plate; 7. Elastic element; 8. Through hole; 9. Handle. Detailed Implementation

[0013] The specific implementation scheme of this utility model will now be described in detail with reference to the accompanying drawings.

[0014] like Figure 1 and Figure 2 The molybdenum boat shown is designed to facilitate the adjustment of the vapor deposition rate of the coating. It includes a cubic box 1 with an opening at the top. Both ends of the box 1 are connected to outwardly extending connecting pieces 2, which are used to connect to the positive and negative terminals of a power supply, respectively. A large number of vent holes 3 are opened on the side walls of the box 1. The vent holes 3 are all located above the inner bottom surface of the box 1. The distance between the lowest vent hole 3 and the inner bottom surface of the box 1 meets the requirements for holding the liquid medicine. The inner side of the side wall of the box with the vent holes 3 is attached with steel wool 4. A box cover 5 is connected to the top opening of the box 1. The box cover 5 covers the top opening of the box 1 to prevent the vaporized liquid medicine from being absorbed.

[0015] The thickness and density of steel wool 4 affect breathability, so users can choose the appropriate steel wool 4 to use according to their needs.

[0016] In this embodiment, the box body 1 is preferably provided with two mesh-structured pressure plates 6. The two pressure plates 6 are respectively directly opposite to the two side walls of the box body 1 with vent holes 3. The two pressure plates 6 are elastically connected by elastic members 7. The two steel wool 4 are respectively clamped between the two pressure plates 6 between the corresponding side walls of the box body to maintain the stability of the steel wool 4, so that the steel wool 4 is kept in close contact with the side wall of the box body 1, and to prevent the vaporized medicine from escaping directly from the vent holes 3 without passing through the steel wool 4.

[0017] The elastic element 7 is a spring, and there are four springs, which are respectively connected to the four corners of the two pressure plates 6. The two ends of each spring are fixedly connected to the two pressure plates 6. Setting four springs can improve the stability and balance of the two pressure plates 6 in clamping the steel wool 4.

[0018] In this embodiment, the box cover 5 has a through hole 8 in the center for adding medicine.

[0019] To improve the ease of taking out and putting in the lid 5, a handle 9 is provided on each side of the lid 5, and a through hole 8 is located between the two handles 9.

[0020] The working process of this utility model is as follows: First, steel wool 4 of appropriate thickness and density is selected according to the deposition rate of the agent on the workpiece surface and placed in the box body 1, and the steel wool 4 is clamped by the pressure plate 6. The box cover 5 is closed, the connecting pieces are connected to the positive and negative electrodes in the steam coating equipment respectively, the end of the agent injection pipe of the steam coating equipment is connected to the through hole 8 of the box cover 5, the steam coating equipment is turned off, and steam coating is performed.

[0021] During the vapor deposition process, the molybdenum boat is energized and heated, and the reagent injected into the box 1 through the reagent injection tube is heated and evaporated. The evaporated reagent slowly escapes from the vent hole 3 through the steel wool 4 and is deposited on the surface of the workpiece to form a dense coating.

[0022] When the through hole 8 is not opened on the cover 5, the reagent is pre-filled into the box body 1, then the cover 5 is closed, and then the molybdenum boat is connected to the positive and negative electrodes.

[0023] The above embodiments are merely illustrative of the principles and effects of the present invention, as well as some examples of its application, and are not intended to limit the present invention. It should be noted that those skilled in the art can make various modifications and improvements without departing from the inventive concept of the present invention, and these modifications and improvements are all within the scope of protection of the present invention.

Claims

1. A molybdenum boat for easy adjustment of the vapor deposition rate of a coating, characterized in that, The box includes a cube-shaped box (1) with an opening at the top. The two ends of the box (1) are connected to outwardly extending connecting pieces (2), which are used to connect the positive and negative terminals of the power supply. A large number of vent holes (3) are opened on the two side walls of the box (1). The vent holes (3) are all located above the bottom surface of the box (1). The distance between the bottommost vent hole (3) and the bottom surface of the box (1) meets the requirements for holding the medicine liquid. The inner side of the side wall of the box with the vent holes (3) is attached with steel wool (4). The top opening of the box (1) is connected to a lid (5), which covers the top opening of the box (1).

2. The molybdenum boat according to claim 1, which facilitates adjusting the deposition rate of the vapor-deposited coating, is characterized in that... The box body (1) is also provided with two mesh structure pressure plates (6). The two pressure plates (6) are respectively opposite to the two side walls of the box body (1) with vent holes (3). The two pressure plates (6) are elastically connected by elastic elements (7). The two steel wool (4) are respectively clamped between the two pressure plates (6) between the corresponding side walls of the box body.

3. The molybdenum boat according to claim 2, which facilitates adjusting the deposition rate of the vapor-deposited coating, is characterized in that... The elastic element (7) is a spring. There are four springs, which are respectively connected to the four corners of the two pressure plates (6). The two ends of each spring are fixedly connected to the two pressure plates (6).

4. The molybdenum boat according to any one of claims 1 to 3, characterized in that, The box cover (5) has a through hole (8) in the center.

5. The molybdenum boat according to claim 4, which facilitates adjustment of the vapor deposition rate, is characterized in that... A handle (9) is provided on each side of the lid (5), and a through hole (8) is located between the two handles (9).

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