A gas distribution device for vertical magnetron sputter coating

Abstract

The utility model relates to a kind of air distribution devices for vertical magnetic control sputtering coating, including at least one air distribution unit;Air distribution unit is stacked from top to bottom by at least two hollow square tubes and is spliced into a whole structure by welding, and there is a cover welded at both ends of air distribution unit to form airtight air distribution cavity;Between the two adjacent square tubes from top to bottom, there is a communication air hole;The aperture of air hole gradually decreases from the uppermost square tube to the lowermost square tube, and the number of air hole gradually increases.

Description

Technical Field

[0001] This utility model relates to the technical field of magnetron sputtering coating equipment, and in particular to an air distribution device for vertical magnetron sputtering coating. Background Technology

[0002] In the vertical magnetron sputtering coating process, it is necessary to uniformly deliver the reaction gas or working gas to the vicinity of the target surface in the vacuum chamber.

[0003] Currently, there are two main structural forms of common air distribution devices: One type is the flat panel assembly type, which is made by stacking multiple precision-machined flat panels. This type has problems such as high processing difficulty, high cost, and the graphite paper used for sealing can easily cause air passage blockage.

[0004] The second type is the nested circular tube type, which achieves gas distribution by nesting inner and outer circular tubes. However, this type has problems such as high requirements for processing precision, difficulty in controlling concentricity, and poor uniformity of gas distribution.

[0005] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a gas distribution device for vertical magnetron sputtering coating, making it more industrially valuable. Utility Model Content

[0006] To solve the above-mentioned technical problems, the purpose of this utility model is to provide a gas distribution device for vertical magnetron sputtering coating.

[0007] To achieve the above objectives, the present invention adopts the following technical solution: A gas distribution device for vertical magnetron sputtering coating includes at least one gas distribution unit; The gas distribution unit is composed of at least two hollow square tubes stacked from top to bottom and welded together to form an integral structure. Both ends of the gas distribution unit are welded with caps to form a sealed gas distribution cavity. There are connecting vents between two adjacent layers of square tubes from top to bottom; The diameter of the vent holes decreases gradually from the topmost square tube to the bottommost square tube, while the number of vent holes increases gradually.

[0008] As a further improvement of this utility model, the number of vent holes increases progressively in a binary relationship, that is, the number of vent holes between the square tube of the Nth layer and the square tube of the N+1th layer is twice the number of vent holes between the square tube of the N-1th layer and the square tube of the Nth layer.

[0009] As a further improvement of this utility model, the cross-sectional shape of the square tube is rectangular.

[0010] As a further improvement of this utility model, multiple air outlets are provided at the bottom of the lowest square tube.

[0011] As a further improvement of this utility model, the air outlet is a slit structure.

[0012] As a further improvement of this utility model, the top of the uppermost square tube is connected to the upper air intake pipe.

[0013] As a further improvement of this utility model, a bracket is installed between the tops of multiple air distribution units by a number of mounting blocks.

[0014] As a further improvement of this utility model, several guide plates with downward-facing substrates are also installed at the bottom of the air distribution unit.

[0015] By means of the above solution, this utility model has at least the following advantages: This invention transforms complex two-dimensional planar machining into simple one-dimensional linear machining through a square tube stacking and welding structure, significantly reducing the difficulty and cost of precision machining.

[0016] The square tube of this invention is easy to obtain and process, the welding process is mature and reliable, the overall structure has high strength, and it is not easily deformed.

[0017] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the following are the preferred embodiments of this utility model and are described in detail with reference to the accompanying drawings. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the gas distribution device for vertical magnetron sputtering coating according to this utility model. Figure 2 yes Figure 1 A partial schematic diagram of the side view in the image; Figure 3 yes Figure 1 A magnified schematic diagram of the partial structure at point A in the middle; Figure 4 This is a schematic diagram of one application scenario of this utility model.

[0020] The meanings of the labels in the figures are as follows.

[0021] 1. Inlet pipe; 2. Air distribution unit; 3. Bracket; 4. Mounting block; 5. Square tube; 6. Vent hole; 7. Air outlet; 8. Coating equipment; 9. Guide plate; 10. Substrate. Detailed Implementation

[0022] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0023] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0024] The first embodiment of this utility model: like Figures 1-3 As shown, an air distribution device for vertical magnetron sputtering coating in this embodiment includes at least one air distribution unit 2. The air distribution unit 2 is formed by stacking at least two hollow square tubes 5 from top to bottom and welding them together to form an integral structure. The cross-sectional shape of the square tubes 5 is rectangular. Both ends of the air distribution unit 2 are welded with caps to form a sealed air distribution cavity.

[0025] There are ventilation holes 6 between two adjacent square tubes 5 from top to bottom. The diameter of the ventilation holes 6 decreases from the topmost square tube 5 to the bottommost square tube 5, and the number of ventilation holes 6 increases step by step.

[0026] Multiple air outlets 7 are provided at the bottom of the bottom square tube 5, and the air outlets 7 are slit structures.

[0027] Specifically, the number of vent holes 6 increases progressively in a binary relationship, that is, the number of vent holes 6 between the square tube 5 of the Nth layer and the square tube 5 of the N+1th layer is twice the number of vent holes between the square tube 5 of the N-1th layer and the square tube 5 of the Nth layer.

[0028] The second embodiment of this utility model: The gas distribution device in this embodiment consists of a gas distribution unit. This gas distribution unit is composed of three layers of hollow square tubes (upper, middle, and lower layers) stacked vertically and welded together at the contact boundaries to form a rigid integral structure. End caps are welded to the left and right ends of the integral structure, thus forming an internally connected, sealed gas distribution cavity.

[0029] Air holes are drilled between the upper and middle square tubes, and between the middle and lower square tubes, to enable the cavity to be connected.

[0030] Specifically, the bottom plate of the upper square tube has two 3mm diameter air holes drilled in it, which connect to the middle square tube; the bottom plate of the middle square tube has four 2mm diameter air holes drilled in it, which connect to the lower square tube. The bottom of the lower square tube is machined with a large number of 0.1mm wide slit-type air outlets (the above data is for reference only and can be adjusted in actual situations).

[0031] The third embodiment of this utility model: like Figures 1-3 As shown, in this embodiment, the gas distribution device includes two gas distribution units arranged side by side, each gas distribution unit being formed by stacking and welding four layers of stainless steel square tubes.

[0032] From top to bottom, the number of pores between adjacent layers are 2, 4, and 8, respectively, with pore diameters of Φ4mm, Φ3mm, and Φ2mm. The bottom of the lowest square tube is provided with a micropore array outlet with a diameter of Φ0.5mm (the above data is for reference only and can be adjusted in actual situations).

[0033] The two gas distribution units are supplied with gas through a common gas distributor (i.e., the top of the uppermost square tube 5 is connected to the upper air inlet pipe 1), which is suitable for wide and uniform gas distribution in large coating equipment.

[0034] The fourth embodiment of this utility model: like Figures 1-4 As shown in this embodiment, the uniform gas distribution device, which is made of stacked and welded square tubes, is applied to a magnetron sputtering coating equipment.

[0035] A bracket 3 is installed between the tops of multiple air distribution units 2 via several mounting blocks 4, and is mounted on the coating equipment 8 via multiple brackets 3.

[0036] At the bottom of the gas distribution unit 2, several guide plates 9 are also installed, which are inclined downwards and distributed on the substrate 10. The process gas of the gas distribution unit 2 can be better guided to the substrate 10 to be processed through the guide plates 9.

[0037] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0038] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0039] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A gas distribution device for vertical magnetron sputtering coating, comprising at least one gas distribution unit (2). Its features are: The air distribution unit (2) is formed by stacking at least two hollow square tubes (5) from top to bottom and welding them together to form an integral structure. Both ends of the air distribution unit (2) are welded with caps to form a sealed air distribution cavity. A ventilation hole (6) is provided between two adjacent layers of square tubes (5) from top to bottom. The diameter of the ventilation holes (6) decreases gradually from the uppermost square tube (5) to the lowermost square tube (5), and the number of ventilation holes (6) increases gradually.

2. The gas distribution device for vertical magnetron sputtering coating as described in claim 1, characterized in that, The number of ventilation holes (6) increases in a binary order, that is, the number of ventilation holes (6) between the square tube (5) of the Nth layer and the square tube (5) of the N+1th layer is twice the number of ventilation holes between the square tube (5) of the N-1th layer and the square tube (5) of the Nth layer.

3. The gas distribution device for vertical magnetron sputtering coating as described in claim 1, characterized in that, The cross-sectional shape of the square tube (5) is rectangular.

4. The gas distribution device for vertical magnetron sputtering coating as described in claim 1, characterized in that, Multiple air outlets (7) are provided at the bottom of the bottom square tube (5).

5. The gas distribution device for vertical magnetron sputtering coating as described in claim 4, characterized in that, The air outlet (7) is a slit structure.

6. The gas distribution device for vertical magnetron sputtering coating as described in claim 1, characterized in that, The top of the uppermost square tube (5) is connected to the upper air intake pipe (1).

7. The gas distribution device for vertical magnetron sputtering coating as described in claim 1, characterized in that, The tops of the multiple air distribution units (2) are assembled together by a number of mounting blocks (4) and a bracket (3) is installed.

8. The gas distribution device for vertical magnetron sputtering coating as described in claim 1, characterized in that, At the bottom of the air distribution unit (2), there are also several guide plates (9) that are inclinedly distributed on the substrate (10) facing downward.

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