High vacuum sputter powder coating apparatus

Abstract

The utility model discloses a kind of high-vacuum sputtering powder coating instruments, including machine rack, vacuum chamber being set on the machine rack, vacuum assembly for the vacuum chamber evacuation and the magnetron cathode and control system being set in the vacuum chamber, the vacuum chamber is also provided with the sample cup for containing sample powder, the sample cup is provided with the stirring mechanism for enabling powder sample to be mixed uniformly with the atom sputtered by the magnetron cathode, the machine rack is also provided with the light prompting unit for realizing light reminding function electrically connected with the control system;The utility model solves the problem that existing equipment adapts sheet, powder coating is not even: stirring mechanism drives powder to turn over, realizes uniform coating;Staged vacuumization+double vacuum rule steady vacuum keeps coating film quality;Adjustable baffle cover observation window, light prompting unit helps operation;Detachable structure reduces maintenance difficulty, crystal vibration patch keeps thickness consistent, widens application, has technical and practical value.

Description

Technical Field

[0001] This utility model relates to the field of ion sputtering coating equipment technology, and in particular to a high vacuum sputtering powder coating instrument. Background Technology

[0002] High vacuum sputtering technology, as one of the high-precision material surface treatment technologies, is based on the interaction between ion beams and solid surfaces. In a high vacuum environment, the equipment first ionizes an inert gas (such as argon) to generate positively charged ions. These ions are accelerated under the action of an electric field and bombard the surface of the target material (such as metals, ceramics, etc.). When the ions collide with the target material, they sputter the atoms on the target surface. The detached target atoms move in the vacuum chamber and are deposited on the surface of the sample to be processed, eventually forming a uniform functional film.

[0003] The existing equipment was originally designed to be suitable for sheet samples. When processing powder samples, the powder needs to be spread flat on the sample stage surface. During the sputtering process, only the surface powder particles can contact the sputtered atoms of the target material and form a coating. The lower and internal powder particles cannot be exposed to the movement path of the sputtered atoms, making it difficult to achieve effective coating. At the same time, the spread powder is prone to accumulation and agglomeration, which further leads to uneven distribution of the coating on the surface of the powder particles, failing to meet the application requirements of comprehensive and uniform coating of powder materials. Utility Model Content

[0004] In view of the shortcomings of the prior art, the technical problem to be solved by this utility model is to provide a high-vacuum sputtering powder coating instrument that can achieve efficient and uniform coating of powder samples and is easy to operate.

[0005] To solve the above-mentioned technical problems, the present invention provides a high-vacuum sputtering powder coating instrument, including a machine frame, a vacuum chamber disposed on the machine frame, a vacuum component for evacuating the vacuum chamber, and a magnetron cathode and control system disposed in the vacuum chamber. The vacuum chamber is also provided with a sample cup for holding sample powder, and the sample cup is provided with a stirring mechanism for mixing the powder sample with the atoms sputtered by the magnetron cathode.

[0006] Furthermore, the magnetron cathode is disposed at the upper part of the vacuum chamber, and the sample cup is disposed in the vacuum chamber at a position corresponding to the magnetron cathode to receive atoms sputtered by the magnetron cathode.

[0007] Furthermore, the stirring mechanism includes a stirring rod, blades, and a rotary drive assembly. One end of the stirring rod extends into the sample cup, and the other end of the stirring rod extends outward from the sample cup. The blades are disposed at the end of the stirring rod that extends into the sample cup, and the rotary drive assembly is drively connected to the end of the stirring rod that extends outward from the sample cup.

[0008] Furthermore, the end of the stirring rod that extends into the sample cup is provided with at least one first limiting surface, and a sleeve is fitted onto the end of the stirring rod that extends into the sample cup. The blade is detachably disposed on the outer periphery of the sleeve, and a second limiting surface is formed on the sleeve that matches the at least one first limiting surface. The first limiting surface and the second limiting surface cooperate with each other to restrict the sleeve from rotating circumferentially relative to the stirring rod.

[0009] Furthermore, the side wall of the sleeve and the blade are provided with a fixing hole, and a fixing bolt can be inserted into the fixing hole to fix the blade to the sleeve.

[0010] Furthermore, the rotary drive assembly includes a rotary motor and a coupling, wherein the output shaft of the rotary motor and one end of the stirring rod extending out of the sample cup respectively extend into the coupling from both ends to achieve mutual connection.

[0011] Furthermore, it also includes a light prompting unit, which is exposed outside the machine frame or the light emitted by the light prompting unit is transmitted through the machine frame and covered outside the machine frame.

[0012] Furthermore, the wall of the vacuum chamber is provided with an observation window, and the observation window is provided with a cover and a cover adjustment assembly. Under the adjustment of the cover adjustment assembly, the cover can block or reveal the observation window.

[0013] Furthermore, the observation window has a window and a window frame arranged around the window. The cover adjustment assembly includes an adjustment rod. The inner end of the adjustment rod passes through the window frame in a direction perpendicular to the axis of the window frame and is detachably connected to the cover. The adjustment rod can rotate around its own axis to drive the cover to flip vertically. When the cover is parallel to the window, it blocks the window. When the cover is perpendicular to the window, it no longer blocks the window.

[0014] Furthermore, the machine frame includes a bottom wall, a top wall, and side walls. A handle is provided on the side walls, and a display module for electrical connection with the control system is provided on the top wall. A light prompt unit for electrical connection with the control system is provided on the machine frame. The control system, vacuum components, and vacuum chamber are all at least partially disposed within the machine frame.

[0015] This high-vacuum sputtering powder coating instrument has at least the following beneficial effects: Addressing the problems of existing equipment's incompatibility with sheet materials and uneven powder coating, its sample cup-equipped stirring mechanism (including a stirring rod, detachable blades, and a rotary drive assembly) can drive continuous powder agitation, ensuring uniform contact between the upper and lower powder layers with sputtered atoms, overcoming surface coating limitations and adapting to different powder types; employing a staged vacuum pumping mode of "coarse pump + high vacuum pump" combined with dual vacuum gauge monitoring, it rapidly forms and stably maintains a high vacuum environment, ensuring coating quality; the adjustable cover assembly can... When not in use, the observation window is covered to prevent contamination, balancing ease of observation with component lifespan; the light indicator unit provides feedback on the equipment status (such as sputtering completion, abnormal alarm) through different light signals, improving operational convenience and safety; multiple detachable structures (such as sample cups, blades, vacuum chamber walls) and the machine frame handle, along with the flip-up sealing cover design, reduce maintenance and operational difficulty; the crystal oscillator patch in the vacuum chamber can detect the coating thickness in real time, ensuring product consistency, thus broadening the equipment's application range to fields such as powder material surface modification, combining technical value and practicality. Attached Figure Description

[0016] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram of the structure of an embodiment of the high-vacuum sputtering powder coating apparatus of this utility model. Figure 1 ; Figure 2 This is a schematic diagram of the internal structure of the machine frame in one embodiment of the high-vacuum sputtering powder coating instrument of this utility model; Figure 3 This is a cross-sectional structural schematic diagram of an embodiment of the high-vacuum sputtering powder coating instrument of this utility model; Figure 4 An explosion of the sample cup, mounting stage, and blades in one embodiment of the high-vacuum sputtering powder coating apparatus of this utility model. Figure 1 ; Figure 5 This is a schematic diagram of the structure of an embodiment of the high-vacuum sputtering powder coating apparatus of this utility model. Figure 2 ; Figure 6 for Figure 5 A schematic diagram of the partial structure within the dashed box; Figure 7 An explosion of the sample cup, mounting stage, and blades in one embodiment of the high-vacuum sputtering powder coating apparatus of this utility model. Figure 2 ; Figure 8 for Figure 3A schematic diagram of the local structure at point A.

[0017] The meanings of the labels in the attached diagram are as follows: Machine frame 1, bottom wall 11, top wall 12, side wall 13, handle 14, platform 15, upright frame 16, rotating shaft 17, assembly part 18; Vacuum chamber 2, bottom wall 21, side wall 22, sealing cover 23, mounting platform 24, first fixing hole 241, first fixing bolt 242, groove 243, through groove 244; Vacuum assembly 3, high vacuum pump 31, first vacuum gauge 32, second vacuum gauge 33; Magnetron cathode 4; Sample cup 5, second fixing hole 51, second fixing bolt 52, sealing ring groove 53, third sealing ring 54; The stirring mechanism 6, stirring rod 61, first limiting surface 611, blade 62, sleeve 63, second limiting surface 631, insertion hole 632, third fixing hole 633, third fixing bolt 634, rotary motor 64, coupling 65, fourth fixing hole 651; Light prompt unit 7; Observation window 8, window 81, window frame 82, cover 83, adjusting rod 84, mounting cavity 85, pressure ring 86, first sealing ring 87, second sealing ring 88; Display module 9. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0019] The following disclosure provides various embodiments or examples of different features for implementing this utility model. Specific examples of components and arrangements will be described below to simplify the utility model. Of course, these are merely examples and are not intended to limit the utility model. For example, in the following description, forming a first component above or on a second component may include embodiments where the first and second components are in direct contact, or embodiments where other components may be formed between the first and second components such that the first and second components are not in direct contact. Additionally, reference numerals and / or characters may be repeated in various instances of the utility model. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations.

[0020] Furthermore, spatial relation terms such as "below," "under," "below," "above," and "above" may be used herein to readily describe the relationship between one element or component and another element (or component) or component (or component) as shown in the figure. In addition to the orientations shown in the figure, spatial relation terms will encompass various different orientations of the device in use or operation. The device may be positioned in other ways (rotated 90 degrees or in other orientations) and will be interpreted accordingly through the spatial relation descriptors used herein.

[0021] Furthermore, the technical parts described in this utility model and the appended claims are mainly the improved technical parts of this utility model, and do not limit the object protected by this utility model to only having these technical parts. Other known necessary components (structures and / or methods) and / or non-essential components of the protected object, other than the technical parts described in this utility model and the appended claims, are not included in this utility model and the appended claims because they do not fall within the scope of improvement of this utility model. However, this does not mean that the object protected by this utility model does not possess these known components.

[0022] The present invention will be further described below with reference to the accompanying drawings.

[0023] Please refer to Figure 1 , Figure 2 and Figure 8 The high-vacuum sputtering powder coating instrument of this invention includes a frame 1, a vacuum chamber 2 disposed on the frame 1, a vacuum assembly 3 for evacuating the vacuum chamber 2, a magnetron cathode 4 disposed within the vacuum chamber 2, and a control system. The vacuum chamber 2 also includes a sample cup 5 for holding sample powder, and the sample cup 5 is equipped with a stirring mechanism 6 for uniformly mixing the powder sample with atoms sputtered by the magnetron cathode 4. The frame 1 also includes a light indicator unit 7 electrically connected to the control system for providing a light reminder function.

[0024] The machine frame 1 includes a bottom wall 11, a top wall 12, and side walls 13. Handles 14 are provided on both lateral sides of the side walls 13. In the illustrated embodiment, the handles 14 are configured as recessed handles along the thickness direction of the side walls 13. In other embodiments, the handles 14 may be configured to protrude from the outer periphery of the side walls 13. The machine frame 1 also includes a platform 15 disposed inside the side walls 13, the platform 15 being used to mount the vacuum chamber 2. A display module 9 electrically connected to the control system can be embedded in the top wall 13. The display module 9 can be a touch-screen display for human-machine interaction.

[0025] Please refer to Figure 3 The vacuum chamber 2 is disposed on the platform 16 and includes a bottom wall 2111, a side wall 22, and a sealing cover 23 with a top opening on the side wall 22. The bottom wall 2111 is detachably mounted on the platform 16, and the side wall 22 is detachably mounted on the bottom wall 2111. In this embodiment, a first groove 243 is provided on the platform 16 for the bottom wall 2111 to be engaged from top to bottom, and a second groove 243 is provided around the upper end face of the bottom wall 2111 for the side wall 22 to be engaged thereon. The sealing cover 23 has a closed state that closes the top opening of the side wall 22 and an open state that opens the opening. The sealing cover 23 can be switched between the closed and open states using any known technical means. For example, the sealing cover 23 can be disposed at the opening by an assembly structure disposed on the machine frame 1. The assembly structure includes a stand 16, a rotating shaft 17 horizontally disposed on the upper end of the stand 16, and an assembly part 18 connected to the rotating shaft 17 and capable of rotating around its axis. A sealing cover 23 is connected to the side of the assembly part 18 facing the vacuum chamber 2 and is hinged to the upper end of the chamber sidewall 22. The sealing cover 23 can be flipped downward to close the opening and can also be flipped upward to open the opening. The vacuum chamber 2 is at least partially located within the sidewall 13.

[0026] Please refer to Figure 4 and Figure 5 The vacuum chamber 2 has an observation window 8 on a section of its side wall 22 exposed on the machine frame 1 for easy observation of its internal condition. The observation window 8 has a window 81 and a window frame 82 surrounding the window 81. A cover 83 and a cover 83 adjustment assembly are provided inside the window 81. Under the adjustment of the cover 83 adjustment assembly, the cover 83 can either obscure or reveal the observation window 8. The cover 83 adjustment assembly includes an adjustment rod 84. The inner end of the adjustment rod 84 passes through the window frame 82 in a direction perpendicular to the axis of the window frame 82 and is detachably connected to the cover 83 (e.g., by a threaded connection). The adjustment rod 84 can rotate around its own axis to cause the cover 83 to rotate vertically. The adjustment rod 84 can also be fixed in its current state after rotation to fix the cover 83 in its current state. When the cover 83 is parallel to the window 81, it blocks the window 81; when the cover 83 is perpendicular to the window 81, it no longer blocks the window 81.

[0027] For example, the outer peripheral wall of the window frame 82 is provided with a mounting portion for connecting the adjusting rod 84. The mounting portion is distributed in a direction perpendicular to the axis of the window frame 82 and has a mounting cavity 85 extending through it along the axis. The inner end of the adjusting rod 84 passes through the mounting cavity 85 and extends into the window frame 82, and is detachably connected to the cover 83. The outer end is exposed at the end of the mounting cavity 85 away from the window frame 82. The end of the mounting cavity 85 away from the window frame 82 is provided with a sealing structure. The sealing structure includes a pressure ring 86 coaxially disposed in the mounting cavity 85, a first sealing ring 87 and a second sealing ring 88 disposed at both ends of the pressure ring 86, and an end cap fixed to the outer end of the mounting cavity 85. Since the cover 83 and the adjusting rod 84 are lightweight, the adjusting rod 84 can be positioned at the current angle by the friction of the first sealing ring 87 and the second sealing ring 88, so that the cover 83 is positioned at the current angle. Those skilled in the art will understand that the sealing structure can also employ any existing dynamic sealing structure, which will not be described in detail here.

[0028] The vacuum assembly 3 is used to achieve and maintain a high vacuum environment. The efficient vacuum assembly 3 can quickly reach the required vacuum level, ensuring the stability and efficiency of the coating process. The vacuum assembly 3 includes a coarse pump (such as a mechanical pump, not shown), a high vacuum pump 31, a first vacuum gauge 32, and a second vacuum gauge 33, all connected to the vacuum chamber 2. The coarse pump can be located outside the machine frame 1 and is used to evacuate air from the vacuum chamber 2 to form a preliminary vacuum. The first vacuum gauge 32 is used to detect the vacuum level of the preliminary vacuum in the vacuum chamber 2. The coarse pump stops evacuating once the preliminary vacuum level meets the requirements (e.g., a set threshold). The high vacuum pump 31 (such as a diffusion pump or a molecular pump) can be located inside the machine frame 1 and is used to continue evacuating air from the vacuum chamber 2 after the coarse pump to ensure the required vacuum level is met. The second vacuum gauge 33 is used to detect the vacuum level after evacuation by the high vacuum pump 31. The high vacuum pump 31 stops evacuating once the required vacuum level is met.

[0029] The magnetron cathode 4 is disposed on the lower surface of the sealing cover 23 for mounting the target material. A crystal oscillator patch (not shown in the figure) is disposed on the cavity sidewall 22, and the crystal oscillator patch is used to detect the thickness of the sputtered coating. The sample cup 5 is detachably disposed on the upper end face of the cavity bottom wall 2111. In this embodiment, a mounting platform 24 for mounting the sample cup 5 is disposed on the cavity bottom wall 2111, and a first fixing hole 241 is formed between the mounting platform 24 and the cavity bottom wall 2111. A first fixing bolt 242 is disposed in the first fixing hole 241 to fix the mounting platform 24 and the cavity bottom wall 2111. Please refer to Figure 6The upper surface of the mounting platform 24 is provided with a groove 243. The outer diameter of the sample cup 5 matches the inner diameter of the groove 243 so that it can be inserted into it. The sample cup 5 and the mounting platform 24 are provided with a second fixing hole 51. A second fixing bolt 52 is provided in the second fixing hole 51 to fix the mounting platform 24 and the sample cup 5. (The connection between the first fixing hole 241 and the first fixing bolt 242 and the connection between the second fixing hole 51 and the second fixing bolt 52 can be threaded or interference fit. This embodiment does not limit the connection method. Any known connection method that matches this structure can be used.)

[0030] Please refer to Figure 7 and Figure 8 The stirring mechanism 6 includes a stirring rod 61, blades 62, and a rotary drive assembly. The stirring rod 61 is vertically mounted inside the sample cup 5 and can rotate relative to the sample cup 5 about its own axis. The upper end of the stirring rod 61 is located inside the sample cup 5, and at least one first limiting surface 611 is provided at this end. The blades 62 are mounted on the end of the stirring rod 61 through a sleeve 63. A second limiting surface 631 is formed on the sleeve 63, which matches the at least one first limiting surface 611. The first limiting surface 611 and the second limiting surface 631 cooperate with each other to restrict the rotation of the sleeve 63 relative to the stirring rod 61. Exemplarily, in this embodiment, a limiting groove is formed radially inward at one end of the stirring rod 61 that extends into the sample cup 5, and the limiting groove also extends axially through the upper end of the stirring rod 61. One radial side of the limiting groove is configured as the first limiting surface 611. The sleeve 63 has an insertion hole 632 for inserting the stirring rod 61. The inner diameter of the insertion hole 632 matches the outer diameter of the stirring rod 61 to achieve an interference fit. The inner peripheral wall of the insertion hole 632 protrudes radially inward to form a limiting block that matches the limiting groove. One radial side of the limiting block is configured as the second limiting surface 631. When the sleeve 63 is fitted onto the end of the stirring rod 61, the limiting block is inserted into the limiting groove, and the first limiting surface 611 and the second limiting surface 631 are tightly fitted together for limiting. The blade 62 is detachably disposed on the outer periphery of the sleeve 63. For example, a third fixing hole 633 is formed between the side wall of the sleeve 63 and the blade 62. A third fixing bolt 634 can be inserted into the third fixing hole 633 to fix the blade 62 to the sleeve 63. The lower end of the stirring rod 61 extends downward from the sample cup 5 for transmission connection with the rotary drive assembly. A sealing ring groove 53 is provided around the stirring rod 61 at the lower end of the sample cup 5, corresponding to the position where the stirring rod 61 protrudes. A third sealing ring 54 is provided in the sealing ring groove 53.

[0031] As will be understood by those skilled in the art, the first limiting surface 611 is not limited to the limiting groove formed on the stirring rod 61, and the second limiting surface 631 is not limited to the limiting block formed inside the sleeve 63. The purpose of the first limiting surface 611 and the second limiting surface 631 is to cooperate with each other to restrict the circumferential rotation of the sleeve 63 relative to the stirring rod 61. Based on this, the first limiting surface 611 and the second limiting surface 631 can also be formed in other ways, for example: a limiting block protruding from the end of the stirring rod 61, and a limiting groove formed by a recess inside the sleeve 63. The shape and number of the limiting block and the limiting groove are not limited, as long as they can play a circumferential limiting role.

[0032] The rotary drive assembly includes a rotary motor 64 and a coupling 65. The rotary motor 64 is mounted below the platform 16, and its output shaft extends upward. The end of the output shaft of the rotary motor 64 is connected to the stirring rod 61 via the coupling 65. The output shaft and the stirring rod 61 extend into the coupling 65 from both ends to achieve mutual connection. The coupling 65 and the bottom of the sample cup 5 share a fourth fixing hole 651. A fourth fixing bolt (not shown in the figure) can be inserted into the fourth fixing hole 651 to fix the coupling 65 to the sample cup 5. The coupling 65 also presses the third sealing ring 54 into the sealing ring groove 53. The mounting platform 24 has a through groove 244 corresponding to the position of the coupling 65 for the coupling 65 to pass through.

[0033] The light indicator unit 7 is exposed outside the machine frame 1, or the light emitted by the light indicator unit 7 passes through the machine frame 1 and illuminates the outside of the machine frame 1. The light indicator unit 7 can be configured as an LED light indicator unit 7, which is electrically connected to the control system and can provide corresponding light indicators based on the needs of different embodiments. For example, the light indicator unit 7 can display different colors, brightnesses, and / or frequencies based on PWM dimming technology. For example, in one embodiment, when sputtering stops, the control system sends a corresponding electrical signal to the LED light indicator unit 7 to make it display the corresponding color, brightness, and / or flashing, thereby realizing the corresponding light reminder function. As another example, in another embodiment, when the pressure of the vacuum component 3, the vacuum chamber 2, or the gas flow rate (which can be detected by a flow meter) in the pipeline connected to the magnetron cathode 4 is abnormal, the control system sends a corresponding electrical signal to the LED light indicator unit 7 to provide corresponding color, brightness, and / or flashing indicators. Those skilled in the art will understand that the light indicator unit 7 can also be applied to more scenarios and should not be limited to the above exemplary scenarios. The purpose of this invention is to provide the hardware foundation for the light prompt unit 7. Based on this hardware foundation, those skilled in the art can use known dimming technology to enable the light prompt unit 7 to display corresponding information at different times, states, and other nodes.

[0034] In addition to being electrically connected to the light indicator unit 7, the control system is also electrically connected to the coarse pump, the high vacuum pump 31, the first vacuum gauge 32, the second vacuum gauge 33, and the rotary motor 64. The structures and principles of the vacuum assembly 3, the magnetron cathode 4, and the control system can all be based on known structures and principles; therefore, these known structures and principles will not be described in detail herein.

[0035] Compared with existing technologies, this high-vacuum sputtering powder coating instrument addresses the problems of sheet material compatibility and uneven powder coating in existing equipment. Its sample cup-mounted stirring mechanism (including a stirring rod, detachable blades, and a rotary drive assembly) continuously agitates the powder, ensuring uniform contact between the upper and lower powder layers with sputtered atoms. This overcomes the limitations of surface coating and adapts to different powder types. The instrument employs a staged vacuum pumping mode ("coarse pump + high vacuum pump") combined with dual vacuum gauge monitoring to rapidly establish and maintain a stable high vacuum environment, ensuring coating quality. The adjustable baffle assembly allows for operation even in non-contact environments. The observation window is shielded during observation to prevent contamination, balancing ease of observation with component lifespan; the light indicator unit provides feedback on the equipment status through different light signals (such as sputtering completion, abnormal alarm), improving operational convenience and safety; multiple detachable structures (such as sample cups, blades, vacuum chamber walls), the machine frame handle, and the flip-up sealing cover design reduce maintenance and operation difficulty; the crystal oscillator patch in the vacuum chamber can detect the coating thickness in real time, ensuring product consistency, thus broadening the equipment's application range to fields such as powder material surface modification, combining technical value and practicality.

[0036] The above embodiments only illustrate preferred implementations of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A high-vacuum sputtering powder coating apparatus, comprising a machine frame, characterized in that: It also includes a vacuum chamber mounted on the machine frame, a vacuum assembly for evacuating the vacuum chamber, and a magnetron cathode and control system mounted in the vacuum chamber. The vacuum chamber is also equipped with a sample cup for holding sample powder, and the sample cup is equipped with a stirring mechanism for mixing the powder sample with atoms sputtered by the magnetron cathode.

2. The high-vacuum sputtering powder coating apparatus as described in claim 1, characterized in that: The magnetron cathode is disposed at the upper part of the vacuum chamber, and the sample cup is disposed in the vacuum chamber at a position corresponding to the magnetron cathode to receive atoms sputtered by the magnetron cathode.

3. The high-vacuum sputtering powder coating apparatus as described in claim 1, characterized in that: The stirring mechanism includes a stirring rod, blades, and a rotary drive assembly. One end of the stirring rod extends into the sample cup, and the other end of the stirring rod extends outward from the sample cup. The blades are disposed at the end of the stirring rod that extends into the sample cup, and the rotary drive assembly is drively connected to the end of the stirring rod that extends outward from the sample cup.

4. The high-vacuum sputtering powder coating apparatus as described in claim 3, characterized in that: The stirring rod has at least one first limiting surface at one end that extends into the sample cup. A sleeve is fitted onto the end of the stirring rod that extends into the sample cup. The blade is detachably mounted on the outer periphery of the sleeve. A second limiting surface is formed on the sleeve that matches the at least one first limiting surface. The first limiting surface and the second limiting surface cooperate with each other to restrict the sleeve from rotating circumferentially relative to the stirring rod.

5. The high-vacuum sputtering powder coating apparatus as described in claim 4, characterized in that: The side wall of the sleeve and the blade are provided with a fixing hole, and a fixing bolt can be inserted into the fixing hole to fix the blade to the sleeve.

6. The high-vacuum sputtering powder coating apparatus as described in claim 3, characterized in that: The rotary drive assembly includes a rotary motor and a coupling. The output shaft of the rotary motor and the end of the stirring rod extending out of the sample cup respectively extend into the coupling from both ends to achieve mutual connection.

7. The high-vacuum sputtering powder coating apparatus as described in claim 1, characterized in that: It also includes a light prompting unit, which is exposed outside the machine frame or the light emitted by the light prompting unit is transmitted through the machine frame and covered outside the machine frame.

8. The high-vacuum sputtering powder coating apparatus as described in claim 1, characterized in that: The wall of the vacuum chamber is provided with an observation window, which is equipped with a cover and a cover adjustment assembly. Under the adjustment of the cover adjustment assembly, the cover can block or reveal the observation window.

9. The high-vacuum sputtering powder coating apparatus as described in claim 8, characterized in that: The observation window has a window and a window frame arranged around the window. The cover adjustment assembly includes an adjustment rod. The inner end of the adjustment rod passes through the window frame in a direction perpendicular to the axis of the window frame and is detachably connected to the cover. The adjustment rod can rotate around its own axis to drive the cover to flip vertically. When the cover is parallel to the window, it covers the window. When the cover is perpendicular to the window, it no longer covers the window.

10. The high-vacuum sputtering powder coating apparatus according to any one of claims 1 to 9, characterized in that: The machine frame includes a bottom wall, a top wall, and side walls. A handle is provided on the side walls, and a display module for electrical connection with the control system is provided on the top wall. A light prompt unit for electrical connection with the control system is provided on the machine frame. The control system, vacuum components, and vacuum chamber are all at least partially located within the machine frame.

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