Vacuum special gas inlet coupling sealing device with heating function

Abstract

The utility model relates to a vacuum special gas inlet coupling sealing device with heating function, a plurality of gas box inlet channels and gas box outlet channels that are in communication with each other are arranged in the gas box, the gas box inlet channel is in communication with the special gas inlet on the inner wall of the left cavity, a plurality of shunt block inlet channels and shunt block outlet channels that are in communication with each other are arranged in the gas shunt block, the air column is installed in the gas box outlet channel and can float up and down, the air inlet on the side close to the bottom of the air column is in communication with the gas box inlet channel, and the air outlet on the side of the top of the air column is matched with the shunt block inlet channel above. The gas box is fixed to the inner wall of the cavity, the special gas pipeline can be rigidly connected, and the bellows that moves with the cavity cover is not needed, the installation and disassembly process is greatly simplified, the wear and tear and air leakage caused by the repeated bending of the bellows are eliminated, and the system reliability and safety are improved.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor thin film deposition equipment, and in particular to a vacuum special gas inlet coupling sealing device with heating function. Background Technology

[0002] In atomic layer deposition (ALD) equipment, precursor specialty gases need to be precisely delivered into the reaction chamber via an inlet device.

[0003] The following defects exist in existing ALD (Atomic Layer Deposition) equipment: The coupling device opens and closes together with the cavity cover, and the special gas pipeline is not easy to disassemble and maintain. The pipeline and corrugated pipe are prone to bending, wear and leakage. When the two precursors are introduced into the gas box through the pipe, there will be large temperature fluctuations, which can easily cause phase changes and blockage of the gas box and pipes. The incompatibility between the upper spray plate and the air box after the position adjustment is poor, which restricts the adjustment of the spray plate position.

[0004] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a vacuum special gas inlet coupling sealing device with heating function, so as to make it more valuable for industrial use. Utility Model Content

[0005] To solve the above-mentioned technical problems, the purpose of this utility model is to provide a vacuum special gas inlet coupling sealing device with heating function.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A vacuum special gas inlet coupling sealing device with heating function, comprising: The air box is installed on the inner wall of the cavity. Several interconnected air box inlet channels and air box outlet channels are opened inside the air box. The air box inlet channel is connected to the special air inlet on the inner wall of the cavity on the left side. A gas splitter block is installed on the inner wall of the cavity cover. Several interconnected gas splitter block inlet channels and gas splitter block outlet channels are opened inside the gas splitter block. The ventilation column can be installed vertically within the air outlet channel of the air box. The air inlet on the bottom side of the ventilation column is connected to the air inlet channel of the air box, and the air outlet on the top side of the ventilation column can be matched with the air inlet channel of the diverter block directly above. When the chamber cover is closed, the gas diverter block is pressed against the top of the vent column, so that the outlet of the vent column and the inlet channel of the diverter block are connected to form a sealed gas channel.

[0007] As a further improvement of this utility model, a heater is installed at the bottom of the gas box, and the heater heats the gas box and / or the ventilation column.

[0008] As a further improvement of this utility model, the heater is a sheet heater attached to the bottom of the gas box.

[0009] As a further improvement of this utility model, the heater is a zone heater, the heating area of ​​which corresponds to the position of the gas box outlet channel, and can realize independent temperature control of the zone.

[0010] As a further improvement of this utility model, the air box is installed on the inner wall of the cavity through an air box floating installation structure.

[0011] As a further improvement of this utility model, the air box floating installation structure consists of several parallel-distributed waist-shaped holes.

[0012] As a further improvement of this utility model, the ventilation column includes a ventilation column body, and a lower limit block of the ventilation column at the bottom of the ventilation column body is installed in the lower limit cavity of the air box, so that the lower limit block of the ventilation column can move freely up and down in the lower limit cavity; a floating joint is provided at the top of the ventilation column body, which connects with the gas diverter block above; a floating mechanism mounting groove for installing a floating mechanism is opened on the top inner side of the air box outlet channel, and the floating mechanism is located on the ventilation column body between the floating joint and the floating mechanism mounting groove, so that the ventilation column body can float up and down in the air box outlet channel through the floating mechanism.

[0013] As a further improvement of this utility model, the floating mechanism is a compression spring.

[0014] As a further improvement of this utility model, a sealing groove adapted to the floating joint is provided at the bottom of the gas diversion block directly above the floating joint, and a sealing ring is installed in the sealing groove.

[0015] By means of the above solution, this utility model has at least the following advantages: The gas box of this invention is fixed to the inner wall of the cavity, and the special gas pipeline can be rigidly connected, eliminating the need for a corrugated pipe that moves with the cavity cover. This greatly simplifies the installation and disassembly process, eliminates the wear and leakage risks caused by repeated bending of the corrugated pipe, and improves the reliability and safety of the system.

[0016] This invention adopts a cavity air intake method, simplifies the cavity cover structure, and improves the compatibility of the spray plate position adjustment.

[0017] This invention utilizes a heater located at the bottom of the gas box to continuously and uniformly heat and maintain the temperature of the gas box and the ventilation column. This ensures that the special gas maintains a stable temperature when entering the coupling area of ​​the gas box, effectively guaranteeing the phase stability of the precursor. It fundamentally avoids phase changes, condensation, and crystallization blockage caused by contact with cold walls or temperature fluctuations, thus ensuring the continuity and stability of the process.

[0018] This invention employs a dual floating compensation mechanism—the overall floating of the air box and the independent floating of the ventilation columns—to automatically compensate for deviations in the horizontal and vertical directions caused by the opening and closing of the chamber cover and the adjustment of the spray plate position. This ensures that when the chamber cover is closed, the outlets of all ventilation columns can achieve a uniform and reliable seal with the air inlet channel of the gas diversion block, significantly improving the compatibility of the equipment and the repeatability of the process.

[0019] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the following are the preferred embodiments of this utility model and are described in detail with reference to the accompanying drawings. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of a vacuum special gas inlet coupling sealing device with heating function according to this utility model; Figure 2 yes Figure 1 Schematic diagram of the structure of the central cavity cover, gas diversion block and gas box; Figure 3 yes Figure 1 A partially enlarged structural diagram of the central ventilation column installation area.

[0022] The meanings of the labels in the figures are as follows.

[0023] 1. Cavity 2. Special gas inlet 3. Gas box 4. Heater 5. Gas diverter block 6. Gas box inlet channel 7. Gas box outlet channel 8. Ventilation column 9. Diverter block inlet channel 10. Diverter block outlet channel 11. Gas box floating installation structure 12. Ventilation column body 13. Ventilation column lower limit block 14. Lower limit cavity 15. Floating mechanism mounting slot 16. Floating joint 17. Floating mechanism 18. Detailed Implementation

[0024] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0025] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0026] The first embodiment of this utility model: like Figures 1-3 As shown, this embodiment of a vacuum special gas inlet coupling sealing device with heating function includes: The air box 4 is installed on the inner wall of the cavity 1. Several interconnected air box inlet channels 7 and air box outlet channels 8 are provided in the air box 4. The air box inlet channels 7 are connected to the special air inlet 3 on the inner wall of the cavity 1 on the left side. Gas diverter block 6 is installed on the inner wall of cavity cover 2. Several interconnected diverter block inlet channels 10 and diverter block outlet channels 11 are provided in gas diverter block 6. The ventilation column 9 is installed in the air box outlet channel 8, which can float up and down. The air inlet on the bottom side of the ventilation column 9 is connected to the air box inlet channel 7, and the air outlet on the top side of the ventilation column 9 can be matched with the air inlet channel 10 of the diverter block directly above. When the chamber cover 2 is closed, the gas diverter block 6 is pressed against the top of the vent column 9, so that the outlet of the vent column 9 is connected with the inlet channel 10 of the diverter block to form a sealed gas channel.

[0027] A heater 5 is installed at the bottom of the air box 4. The heater 5 heats the air box 4 and / or the ventilation column 9. The heater 5 can be designed in the following two ways: Heater 5 is a plate-shaped heater attached to the bottom of gas box 4.

[0028] Heater 5 is a zone heater, whose heating zone corresponds to the position of the gas box outlet channel 8, and can achieve independent temperature control for each zone.

[0029] The air box 4 is installed on the inner wall of the cavity 1 via the air box floating installation structure 12, which consists of several parallel waist-shaped holes.

[0030] The ventilation column 9 includes a ventilation column body 13. A lower limit block 14 at the bottom of the ventilation column body 13 is installed in the lower limit cavity 15 on the air box 4, allowing the lower limit block 14 to move freely up and down within the lower limit cavity 15. A floating connector 17 is provided at the top of the ventilation column body 13, which connects to the gas diversion block 6 above. A floating mechanism mounting groove 16 for installing a floating mechanism 18 is provided on the inner side of the top of the air box outlet channel 8. The floating mechanism 18 (which can be a compression spring) is located on the ventilation column body 13 between the floating connector 17 and the floating mechanism mounting groove 16, allowing the ventilation column body 13 to float up and down within the air box outlet channel 8.

[0031] A sealing groove adapted to the floating joint 17 is provided at the bottom of the gas diversion block 6 directly above the floating joint 17, and a sealing ring is installed in the sealing groove.

[0032] This embodiment allows for the adjustment of the number of ventilation columns depending on the type of specialty gas. Simultaneously, the bottom heater reduces fluctuations in the specialty gas inlet temperature, prevents condensation and pipe blockage, and ensures a more stable process reaction.

[0033] The second embodiment of this utility model: like Figures 1-3 As shown, this embodiment provides a vacuum special gas inlet coupling sealing device with heating function, which is mainly used in atomic layer deposition equipment.

[0034] The cavity 1 is the reaction chamber of the ALD device, and a special gas inlet 3 is provided on its left inner wall for connecting to an external special gas supply system. The cavity cover 2 is connected to the cavity 1 via a hinge or linear motion mechanism, enabling it to open and close.

[0035] The air box 4 is mounted on the inner wall of the cavity 1 via the air box floating mounting structure 12. In this embodiment, the air box floating mounting structure 12 consists of four oblong holes distributed in the air box 4, which are fixed by bolts. When it is necessary to adjust the overall height of the air box 4, simply loosen the bolts, and the air box 4 can move up and down along the oblong holes. After adjustment, tighten the bolts again. This design can compensate for large positional deviations caused by the adjustment of the upper spray plate position.

[0036] Several interconnected air inlet channels 7 and air outlet channels 8 are machined inside the air box 4. The air inlet channels 7 are connected to the special gas inlet 3, forming a path for the special gas to enter the air box 4.

[0037] The gas diverter block 6 is bolted to the inner side of the chamber cover 2, and its position precisely corresponds to the position of the gas box 4 when the chamber cover 2 is closed. Several interconnected gas diverter block inlet channels 10 and outlet channels 11 are machined inside the gas diverter block 6. The outlet channels 11 are typically connected to the upper spray plate to evenly distribute the special gas into the reaction chamber.

[0038] The ventilation column 9 is installed vertically within the air outlet channel 8 of the air box. Specifically, the ventilation column 9 includes a ventilation column body 13, with a lower limiting block 14 at the bottom of the ventilation column body 13. This lower limiting block is installed within the lower limiting cavity 15 on the air box 4, allowing the lower limiting block 14 to move freely up and down within the lower limiting cavity 15 without detaching. A floating connector 17 is provided at the top of the ventilation column body 13 for docking with the gas diverter block 6 above. A floating mechanism mounting groove 16 is provided on the inner side of the top of the air outlet channel 8, and a floating mechanism 18 is installed in this groove. In this embodiment, the floating mechanism 18 is a compression spring, sleeved on the ventilation column body 13, located between the floating connector 17 and the floating mechanism mounting groove 16. This compression spring provides an upward preload, allowing the ventilation column 9 to be in its highest position under natural conditions.

[0039] At the bottom of the gas splitter block 6, a sealing groove is provided directly opposite the floating connector 17. A high-temperature resistant sealing ring (such as a perfluoroether rubber sealing ring) is installed in the groove to ensure a reliable seal when the chamber cover 2 is closed.

[0040] The heater 5 is attached to the bottom of the gas box 4 with thermally conductive adhesive. In this embodiment, the heater 5 is a plate-shaped zone heater, and its heating area corresponds to the position of the gas box outlet channel 8, enabling independent temperature control of the ventilation columns 9 in different areas. The heater 5 is connected to an external temperature controller via a lead wire. The temperature controller achieves precise closed-loop temperature control based on feedback from the temperature sensor installed on the gas box 4, with a temperature control accuracy of ±1℃.

[0041] A brief description of the working process of this embodiment: Initial state: The chamber cover 2 is in the open state, and the air box 4 is fixed at a preset height position by the air box floating mounting structure 12. Each vent column 9 is in its highest position under the action of the compression spring.

[0042] The process of cavity closure: The drive chamber cover 2 closes downwards, and the gas diverter block 6 moves downwards accordingly.

[0043] The sealing groove at the bottom of the gas diverter block 6 begins to contact the floating joint 17 at the top of the vent column 9.

[0044] As the chamber cover 2 continues to move downward, the gas diversion block 6 first pushes each vent column 9 downward. Due to height errors caused by manufacturing, installation, or spray plate adjustment, each vent column 9 experiences different downward pressures, causing them to independently compress their respective compression springs and move downward by different distances, achieving the first level of floating compensation.

[0045] Once all the ventilation columns 9 are in contact with the gas diversion block 6, if there is still a positional deviation, the gas box 4 as a whole will experience slight up-and-down movement through the waist-shaped hole structure, achieving a second level of floating compensation.

[0046] After the cavity cover 2 is fully closed, under the action of the dual floating compensation mechanism, the floating joints 17 of all the vent columns 9 are tightly fitted with the sealing groove of the gas diversion block 6 to form a reliable seal.

[0047] Process: The special gas enters through the special gas inlet 3, passes through the gas box inlet channel 7, the ventilation column 9, the distributor block inlet channel 10, and the distributor block outlet channel 11, and is finally evenly delivered to the reaction chamber. During this process, the heater 5 continues to operate, maintaining the gas box 4 and the ventilation column 9 at the specified temperature through heat conduction to prevent the special gas from condensing.

[0048] Cavity cover opening: After the process is completed, cavity cover 2 opens upwards. Each vent column 9 returns to its highest position under the restoring force of the compression spring, ready for the next coupling.

[0049] This invention, through a dual compensation design of overall floating air box and independent floating air column, combined with bottom heating and insulation, effectively solves the problems of inconvenient maintenance, easy air leakage, easy condensation and blockage, and poor position adjustment compatibility of existing ALD equipment air intake devices, and has high practical value and promotion prospects.

[0050] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0051] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0052] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A vacuum special gas inlet coupling and sealing device with heating function, characterized in that, include: An air box (4) is installed on the inner wall of the cavity (1). Several interconnected air box inlet channels (7) and air box outlet channels (8) are provided in the air box (4). The air box inlet channels (7) are connected to the special air inlet (3) on the inner wall of the cavity (1) on the left side. A gas splitter block (6) is installed on the inner wall of the cavity cover (2). Several interconnected splitter block inlet channels (10) and splitter block outlet channels (11) are provided in the gas splitter block (6). The ventilation column (9) can be installed in the air outlet channel (8) of the air box, and the air inlet of the ventilation column (9) near the bottom is connected to the air inlet channel (7) of the air box. The air outlet of the ventilation column (9) on the top side can be adapted to the air inlet channel (10) of the diverter block directly above. When the cavity cover (2) is closed, the gas diverter block (6) presses against the top of the ventilation column (9), so that the outlet of the ventilation column (9) and the inlet channel (10) of the diverter block are connected and form a sealed gas channel.

2. The vacuum special gas inlet coupling sealing device with heating function as described in claim 1, characterized in that, A heater (5) is installed at the bottom of the air box (4) to heat the air box (4) and / or the ventilation column (9).

3. The vacuum special gas inlet coupling sealing device with heating function as described in claim 2, characterized in that, The heater (5) is a sheet heater attached to the bottom of the gas box (4).

4. A vacuum special gas inlet coupling sealing device with heating function as described in claim 2, characterized in that, The heater (5) is a zone heater, whose heating area corresponds to the position of the gas box outlet channel (8), and can achieve independent temperature control of the zone.

5. A vacuum special gas inlet coupling and sealing device with heating function as described in claim 1, characterized in that, The air box (4) is installed on the inner wall of the cavity (1) via the air box floating installation structure (12).

6. The vacuum special gas inlet coupling sealing device with heating function as described in claim 5, characterized in that, The air box floating installation structure (12) consists of several parallel waist-shaped holes.

7. A vacuum special gas inlet coupling and sealing device with heating function as described in claim 1, characterized in that, The ventilation column (9) includes a ventilation column body (13). A ventilation column lower limit block (14) at the bottom of the ventilation column body (13) is installed in the lower limit cavity (15) on the gas box (4), so that the ventilation column lower limit block (14) can move freely up and down in the lower limit cavity (15). A floating joint (17) is provided at the top of the ventilation column body (13), and the floating joint (17) is connected to the gas diversion block (6) above. A floating mechanism mounting groove (16) for installing a floating mechanism (18) is provided on the inner side of the top of the gas box outlet channel (8). The floating mechanism (18) is located on the ventilation column body (13) between the floating joint (17) and the floating mechanism mounting groove (16), and the ventilation column body (13) can float up and down in the gas box outlet channel (8) through the floating mechanism (18).

8. A vacuum special gas inlet coupling and sealing device with heating function as described in claim 7, characterized in that, The floating mechanism (18) is a compression spring.

9. A vacuum special gas inlet coupling sealing device with heating function as described in claim 7, characterized in that, A sealing groove adapted to the floating joint (17) is provided at the bottom of the gas diversion block (6) directly above the floating joint (17), and a sealing ring is installed in the sealing groove.

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