Heater foot and single crystal furnace heater

Abstract

The application relates to the technical field of single crystal furnace heaters, and provides a heater foot plate and a single crystal furnace heater. The heater foot plate comprises a heat-resistant connecting plate and a foot plate body. The heat-resistant connecting plate comprises a first connecting end and a second connecting end which are oppositely arranged along the length direction of the heat-resistant connecting plate. The thickness of each part of the second connecting end is equal. The foot plate body comprises a bottom plate and an arm plate arranged on the bottom plate. The end of the arm plate away from the bottom plate is detachably connected with the first connecting end. The second connecting end of the heat-resistant connecting plate is connected with a heating body in the heater foot plate of the application. The heat-resistant connecting plate has good high-temperature stability, and the thickness of each part of the second connecting end is equal, so that the cracking of the second connecting end at the thinner part under the high-temperature state due to the uneven thickness is effectively avoided, and the replacement frequency of the heater foot plate is reduced. Meanwhile, the heat-resistant connecting plate increases the distance between the foot plate body and the heating body, reduces the temperature of the area where the foot plate body is located, and cooperatively prolongs the service life of the heater foot plate.

Description

Technical Field

[0001] This application relates to the field of single crystal furnace heater technology, and in particular to heater feet and single crystal furnace heaters. Background Technology

[0002] A single-crystal furnace is a core piece of equipment used in the production of single-crystal silicon, primarily in the semiconductor and photovoltaic industries. During the single-crystal silicon growth process, high-quality single-crystal silicon rods are formed by controlling the crystallization conditions of molten silicon at high temperatures. The main heater in the single-crystal furnace, as a core component, is responsible for providing a stable high-temperature environment (typically maintained at 1400℃~1600℃) to ensure uniform melting of the silicon molten metal and crystal growth. The main heater consists of a heating element, graphite feet, and connecting bolts. The graphite feet are detachably connected to the heating element via these bolts. Because graphite becomes brittle and prone to cracking at high temperatures, structural cracks / fractures can easily occur at the connection between the graphite feet and the heating element. Frequent replacement of the graphite feet can damage the heating element, reduce its lifespan, and increase costs. Utility Model Content

[0003] Based on this, this application provides a heater foot plate and a single crystal furnace heater that have a long service life and are easy to replace.

[0004] In a first aspect, this application provides a heater foot plate, comprising:

[0005] A heat-resistant connecting plate includes a first connecting end and a second connecting end arranged opposite to each other along its length, wherein the thickness of the second connecting end is equal at all points.

[0006] The foot plate body includes a base plate and an arm plate disposed on the base plate. The end of the arm plate away from the base plate is detachably connected to a first connecting end.

[0007] In some implementations, the surface used for connection in the second connection end is curved.

[0008] In some embodiments, a detachable connection structure is provided on the side of the arm plate near the first connection end. The detachable connection structure is used to detachably connect with the first connection end, and the thickness of the detachable connection structure is equal at all points.

[0009] And / or, the thickness is equal at all points in the first connection end.

[0010] In some implementations, the detachable connection between the arm plate and the first connecting end includes a bolt-detachable connection.

[0011] The heater foot plate also includes at least one first heat-resistant bolt, and at least one first threaded hole is provided on the first connecting end. At least one first connecting hole is provided on the arm plate accordingly. The first heat-resistant bolt passes through the first connecting hole and is threadedly connected to the first threaded hole.

[0012] In some embodiments, at least one second threaded hole is provided on the second connecting end.

[0013] In some implementations, the thickness of the first connecting end is 12mm to 17mm.

[0014] And / or, the thickness of the second connecting end is 12mm~17mm.

[0015] And / or, the distance between the first connecting end and the second connecting end is 400mm~600mm.

[0016] In some embodiments, the heat-resistant connecting plate is a composite carbon-carbon composite connecting plate. And / or, the foot plate body is a graphite foot plate body made of graphite material.

[0017] Secondly, this application provides a single crystal furnace heater, including a heating element and a heater foot plate as described in the first aspect, wherein at least one connecting structure is provided on the heating element, and a second connecting end in the heater foot plate is detachably connected to the connecting structure.

[0018] In some embodiments, the heating element includes a heating coil, and the connecting structure includes a connecting groove formed on the heating coil, the bottom surface of the connecting groove being arc-shaped, and the depth of the connecting groove being equal at all points; a second connecting end is fitted into the connecting groove.

[0019] In some implementations, the connection between the second connection end and the connection structure includes a bolt-detachable connection.

[0020] The heating element also includes a second heat-resistant bolt, and at least one second threaded hole is provided on the second connecting end. At least one second connecting hole is provided in the connection structure accordingly. The second heat-resistant bolt passes through the second connecting hole and is threadedly connected to the second threaded hole.

[0021] Compared with traditional technologies, this application has at least the following beneficial effects:

[0022] In this application, the heat-resistant connecting plate of the heater foot plate is detachably connected to the foot plate body, and connects to the heating element via the second connecting end of the heat-resistant connecting plate. The heat-resistant connecting plate has good high-temperature stability, and the thickness is uniform throughout the second connecting end, effectively preventing cracking at thinner areas due to uneven thickness under high temperatures, thus reducing the replacement frequency of the heater foot plate and minimizing damage to the heating element. Simultaneously, the heat-resistant connecting plate increases the distance between the foot plate body and the heating element, reducing the temperature in the area where the foot plate body is located and also reducing the risk of high-temperature cracking of the foot plate body. Therefore, this application, through the cooperation of the heat-resistant connecting plate and the foot plate body, effectively improves the service life of the heater foot plate and reduces the maintenance cost of the heater.

[0023] In addition, both ends of the heat-resistant connecting plate can be detachably connected by bolts. The threaded holes for the bolt connections can be opened on the first and second connecting ends of the heat-resistant connecting plate, avoiding the problem of difficulty in removing bolts after the heating element has been siliconized, and improving the service life of the heating element. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of a single crystal furnace heater provided in one embodiment of this application;

[0025] Figure 2 This is a schematic diagram of the structure of a heat-resistant connecting plate provided in one embodiment of this application;

[0026] Figure 3 This is a side view of a heat-resistant connecting plate provided in one embodiment of this application;

[0027] Figure 4 This is a top view of a heat-resistant connecting plate provided in one embodiment of this application;

[0028] Figure 5 This is a cross-sectional schematic diagram of the connection between the heating element and the heater foot plate in one embodiment of this application;

[0029] Figure 6 This is a schematic diagram of the structure of a single crystal furnace heater in traditional technology;

[0030] Figure 7 This is a schematic diagram of the cross-section at the connection between the heating element and the heater foot plate in traditional technology.

[0031] Among them, 100-heater foot plate; 110-heat resistant connecting plate; 111-first connecting end; 112-second connecting end; 113-first threaded hole; 114-second threaded hole; 120-foot plate body; 121-base plate; 122-arm plate; 200-heating element. Detailed Implementation

[0032] The present application will be further described in detail below with reference to the accompanying drawings, embodiments, and examples. These embodiments and examples are for illustrative purposes only and are not intended to limit the scope of the present application. The purpose of providing these embodiments and examples is to enable a more thorough and comprehensive understanding of the disclosure of the present application. It should also be understood that the present application can be implemented in many different forms and is not limited to the embodiments and examples described herein. Those skilled in the art can make various modifications or alterations without departing from the spirit of the present application, and the equivalent forms obtained also fall within the protection scope of the present application. Furthermore, numerous specific details are set forth in the following description to provide a fuller understanding of the present application. It should be understood that the present application can be implemented without one or more of these details.

[0033] It should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0034] In the description of this application, unless otherwise expressly specified and limited, the terms "connected," "linked," "fixed," and "set" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the meaning of the above terms in this application according to the specific circumstances.

[0035] In this application, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or quantity, nor should they be construed as implicitly indicating the importance or quantity of the indicated technical features. Moreover, "first," "second," etc., serve only as a non-exhaustive enumeration and should be understood not to constitute a closed limitation on quantity.

[0036] In traditional technology, the graphite base plate in the heater of a single crystal furnace is connected to the heating element via bolts. However, graphite is prone to cracking at high temperatures, affecting the performance of the heating element. Furthermore, the connecting bolts are difficult to remove after the heating element is silicon-coated, potentially damaging the heating element during replacement, increasing maintenance costs and reducing production efficiency.

[0037] Based on this, such as Figure 1 As shown, the first aspect of this application provides a heater foot plate 100, including a heat-resistant connecting plate 110 and a foot plate body 120.

[0038] Among them, such as Figure 2 As shown, the heat-resistant connecting plate 110 includes a first connecting end 111 and a second connecting end 112 disposed opposite to each other along its length. Figure 3 As shown, the thickness 'a' is equal at all points in the second connecting end 112. The foot plate body 120 includes a base plate 121 and an arm plate 122 disposed on the base plate 121. The end of the arm plate 122 away from the base plate 121 is detachably connected to the first connecting end 111.

[0039] In this application, the heat-resistant connecting plate 110 of the heater foot plate 100 is detachably connected to the foot plate body 120, and is connected to the heating element 200 via the second connecting end 112 of the heat-resistant connecting plate 110. The heat-resistant connecting plate 110 has good high-temperature stability, and the thickness of the second connecting end 112 is uniform throughout, effectively preventing cracking at thinner areas due to uneven thickness under high-temperature conditions, reducing the replacement frequency of the heater foot plate 100, and thus reducing damage to the heating element 200. Simultaneously, the heat-resistant connecting plate 110 increases the distance between the foot plate body 120 and the heating element 200, which can reduce the temperature in the area where the foot plate body 120 is located, and also reduce the problem of high-temperature cracking of the foot plate body 120. Therefore, this application, through the cooperation of the heat-resistant connecting plate 110 and the foot plate body 120, effectively improves the service life of the heater foot plate and reduces the maintenance cost of the heater.

[0040] It is understood that the heat-resistant connecting plate 110 in this application refers to a connecting plate with stable performance at high temperatures. Taking a single crystal furnace as an example, the temperature of its heating element 200 can reach 1000℃~2000℃, and a carbon-carbon composite connecting plate can be used. Carbon-carbon composite material is a high-performance composite material formed by carbon fiber and its fabric reinforcing a carbon matrix. It has excellent properties such as light weight, low coefficient of thermal expansion, high temperature resistance, corrosion resistance, stable coefficient of friction, and good thermal and electrical conductivity. Since the connecting plate increases the distance between the foot plate body 120 and the heating element 200, a material with slightly lower heat resistance can be selected for the foot plate body 120, such as graphite.

[0041] In some embodiments, the heat-resistant connecting plate 110 is a composite connecting plate made of carbon-carbon composite material. And / or, the foot plate body 120 is a graphite foot plate body 120 made of graphite material.

[0042] In some embodiments, the shape of the second connecting end 112 can be configured according to different connection structures of the heating element 200. For example, the heating element 200 in the bottom heater of a single crystal furnace can be plate-shaped, and its connection structure can be a square connecting groove or a square connecting block protruding or recessed on the surface of the plate. The second connecting end 112 can adopt a square structure that matches the shape of the connecting groove or connecting block. Alternatively, as... Figure 1 As shown, the heating element 200 in the main heater of the single crystal furnace can be a cylindrical structure, and the connecting structure can be a curved connecting groove or a curved connecting block protruding or recessed on the surface of the barrel. In order to ensure the connection stability between the heater foot plate 100 and the heating element 200, the surface used for connection in the second connecting end 112 can be a curved surface that fits it. It can be selected as a curved surface with the same curvature as the cylindrical heating element, so as to ensure that the thickness of the second connecting end 112 is equal at all points and that it is stably connected with the heating element 200.

[0043] In some embodiments, such as Figure 1 As shown, the foot plate body 120 can be L-shaped, for example, the arm plate 122 is vertically arranged at one end of the base plate 121.

[0044] In some embodiments, a detachable connection structure is provided on the side of the arm plate 122 near the first connecting end 111. The detachable connection structure is used for detachable connection with the first connecting end 111, and the thickness of the detachable connection structure is equal at all points. This application provides the detachable connection structure of the arm plate 122 as described above, thereby ensuring the uniformity of thickness between the arm plate 122 and the first connecting end 111 at the connection point, thus avoiding the problem of current accumulation at the connection point of the arm plate 122, which could lead to localized overheating and cracking.

[0045] In some embodiments, the thickness of the first connecting end 111 is equal at all points. The first connecting end 111 is configured as described above to ensure the uniformity of the thickness of the first connecting end 111 and to avoid the problem of cracking in the thinner parts of the first connecting end 111 after being heated.

[0046] In some embodiments, such as Figure 1 As shown, the detachable connection between the arm plate 122 and the first connecting end 111 includes a bolted detachable connection. Specifically, the heater foot plate 100 also includes at least one first heat-resistant bolt, such as... Figure 2 and Figure 4 As shown, at least one first threaded hole 113 is provided on the first connecting end 111, and at least one first connecting hole is correspondingly provided on the arm plate 122. The first heat-resistant bolt passes through the first connecting hole and is threadedly connected to the first threaded hole 113. The arm plate 122 can be fitted into the first connecting end 111. Because the graphite arm plate 122 has poor high-temperature stability, if threaded holes are made on the graphite arm plate 122, uneven stress distribution is likely to occur at the threaded holes, causing thread damage and increasing the possibility of cracking at the threaded holes. This application places the threaded holes on the heat-resistant connecting plate 110, which has good high-temperature stability, and combined with the fact that the first connecting end 111 is far from the high-temperature zone, its thread structure is less prone to damage and cracking, effectively improving the service life of the heater foot plate 100.

[0047] Optionally, the first heat-resistant bolt can be made of the same material as the heat-resistant connecting plate. For example, it could be a carbon-carbon composite bolt.

[0048] It should be noted that, because traditional technologies use graphite feet directly connected to the heating element 200, and graphite feet have poor high-temperature stability, threaded holes are usually made on the heating element 200 to reduce the problem of cracking of the graphite feet. In some embodiments, such as Figure 2 and Figure 4As shown, at least one second threaded hole 114 is provided on the second connecting end 112. This application provides a threaded hole on the second connecting end 112, which has high-temperature stability, to avoid forming a threaded hole on the heating element 200 during installation, thereby further improving the service life of the heating element 200.

[0049] In some embodiments, the thickness of the main body of the heat-resistant connecting plate 110 is greater than the thickness of the first connecting end 111 and the thickness of the second connecting end 112. The main body thickness of the heat-resistant connecting plate 110 is 25mm to 30mm, for example, 25mm, 26mm, 27mm, 28mm, 29mm, or 30mm. The thickness of the first connecting end 111 is 12mm to 17mm, for example, 12mm, 13mm, 14mm, 15mm, 16mm, or 17mm. The thickness of the second connecting end 112 is 12mm to 17mm, for example, 12mm, 13mm, 14mm, 15mm, 16mm, or 17mm.

[0050] like Figure 4 As shown, the distance b between the first connecting end 111 and the second connecting end 112 is 400mm to 600mm, for example, it can be 400mm, 420mm, 440mm, 460mm, 480mm, 500mm, 520mm, 540mm, 560mm, 580mm, or 600mm. The greater the distance between the first connecting end 111 and the second connecting end 112, the greater the distance between the foot plate body 120 and the heating element 200, thereby further reducing the stability of the foot plate body 120. It is understood that the size of the heat-resistant connecting plate 110 and the size of the foot plate body 120 can be reasonably selected according to the structure and size of the heater.

[0051] The second aspect of this application provides a single crystal furnace heater, including a heating element 200 and a heater foot plate 100 as described in the first aspect. The heating element 200 is provided with at least one connecting structure, and the second connecting end 112 of the heater foot plate 100 is detachably connected to the connecting structure.

[0052] In the single crystal furnace heater of this application, the heater foot plate 100 is connected to the heating element 200 through the heat-resistant connecting plate 110, which reduces the probability of damage at the connection between the foot plate and the heating element 200, thereby reducing the number of foot plate replacements, effectively improving the service life of the heating element 200 and the working efficiency of the single crystal furnace heater.

[0053] In some embodiments, such as Figure 5As shown, the heating element 200 includes a heating coil, and the connecting structure includes a connecting groove formed on the heating coil. The bottom surface of the connecting groove is arc-shaped, and the depth of the connecting groove is equal at all points. The second connecting end 112 is fitted into the connecting groove. This application uses an arc-shaped connecting groove in the heating coil, and the equal depth at all points ensures that the thickness of the heating coil at the connecting groove is also equal, avoiding the problem of uneven thickness at the connecting groove of the heating element 200, which can easily lead to damage.

[0054] In some embodiments, the connection between the second connecting end 112 and the connecting structure includes a bolt-detachable connection. Specifically, the heating element 200 further includes a second heat-resistant bolt, and at least one second threaded hole 114 is provided on the second connecting end 112. At least one second connecting hole is correspondingly provided in the connecting structure, and the second heat-resistant bolt passes through the second connecting hole and is threadedly connected to the second threaded hole 114.

[0055] Optionally, the second heat-resistant bolt can be made of the same material as the heat-resistant connecting plate. For example, it could be a carbon-carbon composite bolt.

[0056] It should be noted that in traditional technologies, single crystal furnace heaters, such as Figure 6 As shown, a graphite foot plate 100a is connected to the heating element 200a. Due to the poor high-temperature stability of the graphite foot plate 100a, a threaded hole needs to be formed on the heating element 200a, increasing the risk of damage. Furthermore, repeated disassembly and reassembly will damage the threaded hole, ultimately rendering the heating element 200a unusable. In addition, as... Figure 7 As shown, the connection surface between the graphite foot plate 100a and the heating element 200a is planar, resulting in uneven thickness of the graphite foot plate 100a at the connection point, which easily leads to cracking in the thinner areas. This application avoids forming a threaded structure on the heating element 200 by creating threaded holes in the heat-resistant connecting plate 110, thus effectively improving the service life of the heating element 200.

[0057] By way of example, this application also provides a method for disassembling and assembling the heater foot plate 100 in the above-mentioned single crystal furnace heater, including the following steps:

[0058] Replacement of foot plate body 120: After the single crystal furnace has been working for a period of time, if cracks are found to have formed on the arm plate 122 of the foot plate body 120, remove the first heat-resistant bolt, remove the foot plate body 120 from the heat-resistant connecting plate 110, and then install another undamaged foot plate body 120 onto the first connecting end 111 of the heat-resistant connecting plate 110.

[0059] Replace the heat-resistant connecting plate 110: After the single crystal furnace has been working for a period of time, if cracks are found to have formed on the second connecting end 112 of the heat-resistant connecting plate 110, remove the first heat-resistant bolt and the second heat-resistant bolt, remove the heat-resistant connecting plate 110 from the foot plate body 120 and the heating element 200, and then connect another undamaged heat-resistant connecting plate 110 to the foot plate body 120 and the heating element 200 respectively.

[0060] Therefore, this application utilizes the heat-resistant connecting plate 110 in the heater foot plate 100 to connect with the heating element 200. This not only allows the threaded hole to be located on the heat-resistant connecting plate 110, reducing damage to the heating element 200, but also ensures the heat-resistant connecting plate 110 has good high-temperature stability, reducing the risk of cracking. Furthermore, the equal thickness of the second connecting end 112 effectively prevents cracking caused by uneven thickness, thus synergistically improving the service life of the heater foot plate 100 and reducing maintenance costs. In addition, the heat-resistant connecting plate 110 increases the distance between the foot plate body 120 and the heating element 200, thereby reducing the ambient temperature of the foot plate body 120. Simultaneously, the threaded hole can be located on the heat-resistant connecting plate 110, avoiding the problem of easy damage to the threaded structure in the foot plate body 120, synergistically reducing the possibility of high-temperature damage to the foot plate body 120, thereby comprehensively improving the service life of the heater foot plate 100. In summary, the heater foot plate 100 of this application has low material cost, is easy to replace, has a long service life, and low maintenance cost.

[0061] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0062] The above embodiments are merely illustrative of several implementation methods of this application, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this application should be determined by the appended claims.

Claims

1. A heater foot plate, characterized in that, include: A heat-resistant connecting plate, the heat-resistant connecting plate including a first connecting end and a second connecting end disposed opposite to each other along its length direction, wherein the thickness of the second connecting end is equal at all points; The footplate body includes a base plate and an arm plate disposed on the base plate. The end of the arm plate away from the base plate is detachably connected to the first connecting end.

2. The heater foot plate as described in claim 1, characterized in that, The surface used for connection in the second connection end is curved.

3. The heater foot plate as described in claim 1, characterized in that, The arm plate is provided with a detachable connection structure on the side near the first connection end. The detachable connection structure is used to detachably connect with the first connection end. The thickness of the detachable connection structure is equal at all points. And / or, the thickness is equal at all points in the first connection end.

4. The heater foot plate as described in claim 1, characterized in that, The detachable connection between the arm plate and the first connecting end includes a bolt-detachable connection; The heater foot plate also includes at least one first heat-resistant bolt, and at least one first threaded hole is provided on the first connecting end. At least one first connecting hole is provided on the arm plate accordingly. The first heat-resistant bolt passes through the first connecting hole and is threadedly connected to the first threaded hole.

5. The heater foot plate as described in claim 1, characterized in that, The second connecting end has at least one second threaded hole.

6. The heater foot plate according to any one of claims 1-5, characterized in that, The thickness of the first connecting end is 12mm~17mm; And / or, the thickness of the second connecting end is 12mm~17mm; And / or, the distance between the first connecting end and the second connecting end is 400mm~600mm.

7. The heater foot plate according to any one of claims 1-5, characterized in that, The heat-resistant connecting plate is a composite connecting plate made of carbon-carbon composite material; and / or, the foot plate body is a graphite foot plate body made of graphite material.

8. A single crystal furnace heater, characterized in that, The device includes a heating element and a heater foot plate as described in any one of claims 1-7, wherein the heating element is provided with at least one connecting structure, and the second connecting end of the heater foot plate is detachably connected to the connecting structure.

9. The single crystal furnace heater as described in claim 8, characterized in that, The heating element includes a heating coil, and the connecting structure includes a connecting groove formed on the heating coil. The bottom surface of the connecting groove is arc-shaped, and the depth of the connecting groove is equal at all points. The second connecting end is fitted and connected to the connecting groove.

10. The single crystal furnace heater as described in claim 8 or 9, characterized in that, The connection method between the second connecting end and the connecting structure includes a bolt-detachable connection; The heating element also includes a second heat-resistant bolt, and at least one second threaded hole is provided on the second connecting end. At least one second connecting hole is provided in the connecting structure, and the second heat-resistant bolt passes through the second connecting hole and is threadedly connected to the second threaded hole.

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