A bubbler structure for uniform gas distribution

Abstract

The utility model discloses a kind of bubble generator structures of uniform air distribution, it includes bubble generator body, the bubble generator body is composed of inner tank and outer cylinder body, wherein outer cylinder body is composed of base, bucket body, top cover, and the through hole is set on top cover, inner tank is inserted in through hole, the height of this inner tank is higher than outer cylinder body, and support frame is set on the top of inner tank, liquid inlet pipe with valve, air inlet pipe, air outlet pipe are installed on support frame, the bottom of inner tank is directly connected with liquid inlet pipe and air inlet pipe, air outlet pipe is located in the position below the top of inner tank, and air distribution device is also arranged in the inner tank.The utility model whole structure is simple and reasonable, practical convenient, and reliability is strong, stable in operation, and uniform distribution effect is good.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor epitaxial equipment technology, and relates to a bubbler structure with uniform gas distribution. Background Technology

[0002] In the semiconductor industry, the process of growing a single-crystal thin film on a polished single-crystal wafer is called epitaxial growth. Epitaxial growth is typically performed using chemical vapor deposition (CVD). First, the wafer is transferred to a substrate in the epitaxial reaction chamber. Then, the chamber is heated to a preset temperature, and a cleaning gas (such as hydrogen) is introduced to remove native oxides from the wafer surface. Next, a silicon source gas is introduced to continuously and uniformly grow an epitaxial layer on the front side of the wafer. The thickness and resistivity of the epitaxial layer are crucial for subsequent processing steps.

[0003] Currently, hydrogen is commonly used in epitaxial growth processes to transport trichlorosilane gas into the epitaxial reaction chamber via a bubbler. However, if the carrier gas is not evenly distributed within the container during transport, it may cause changes in the amount of TCS carried during growth, ultimately resulting in inconsistent uniformity of the epitaxial film formed on the customer's product.

[0004] To address the problem of uneven distribution of carrier gas in traditional foaming processes, a bubbler structure with uniform gas distribution was designed to overcome the aforementioned issues. Utility Model Content

[0005] The purpose of this utility model is to overcome the shortcomings of the existing technology and provide a bubbler structure with simple and reasonable structure, uniform product growth, good outer film forming performance, low cost, safe and reliable system, stable operation, good uniform distribution effect, and easy disassembly.

[0006] This utility model is achieved through the following technical solution: a bubbler structure for uniform gas distribution, comprising a bubbler body, wherein the bubbler body is composed of an inner tank and an outer cylinder, wherein the outer cylinder is composed of a base, a barrel body, and a top cover, a through hole is provided on the top cover, and the inner tank is inserted into the through hole. The height of the inner tank is higher than that of the outer cylinder, and a support frame is provided on the top of the inner tank. A liquid inlet pipe, an air inlet pipe, and an air outlet pipe with valves are installed on the support frame. The liquid inlet pipe and the air inlet pipe are directly connected to the bottom of the inner tank, and the air outlet pipe is located below the top of the inner tank. A gas equalization device is also arranged in the inner tank.

[0007] Preferably, the gas equalization device is a gas equalization plate installed in the inner tank. A connecting rod is provided in the middle of the gas equalization plate, and the connecting rod extends out of the top of the inner tank and is fixed by a fixing block arranged on the top of the inner tank. A support frame is installed around the fixing block, and a liquid inlet pipe, an air inlet pipe, and an air outlet pipe with valves are installed on the support frame.

[0008] Preferably, the gas equalization plate has a plurality of evenly arranged air holes, and the gas equalization plate also has relatively arranged notches and grooves, which are used for the liquid inlet pipe and the air inlet pipe to pass through and be limited.

[0009] Preferably, a coil is provided below the air inlet pipe, and the coil has equidistantly arranged air holes, with the bottom liquid inlet of the liquid inlet pipe located in the middle of the coil.

[0010] Preferably, the outer cylinder also has two through holes, the upper through hole being a coolant outlet and the lower through hole being a coolant inlet. Water flows into the chamber between the outer cylinder and the inner tank through the coolant inlet and then flows out through the upper coolant outlet. Preferably, a pipe is also connected between the coolant inlet and the coolant outlet, and the pipe spirals down around the outer wall of the inner tank.

[0011] The beneficial effects of this utility model are as follows: 1) The bubbler structure with uniform gas distribution designed in this utility model can effectively solve the shortcomings of uneven gas distribution and bubble adhesion in traditional bubblers by combining the carrier gas distribution pipe and the gas distributor, thereby improving production yield and production efficiency.

[0012] 2) This utility model, through the design of evenly arranged air holes and notched grooves on the gas equalization plate, ensures that the gas in the inlet pipe is initially dispersed by the gas equalization plate and then evenly distributed again through the equidistant air holes on the plate. This effectively avoids the excessively high local concentration caused by gas concentration in traditional bubblers, and ensures that the gas and liquid are in full contact, thereby improving the mass transfer efficiency.

[0013] 3) The coolant inlet and outlet holes in the outer cylinder of this utility model form a coolant circulation channel through the cavity between the outer cylinder and the inner tank. The spiral pipe connecting the coolant inlet and outlet holes spirals around the outer wall of the inner tank from top to bottom. Setting up a coolant circulation channel can greatly improve safety. The medium in the inner tank contains corrosive substances. Once the inner cylinder leaks and combines with the coolant, an explosion will occur. Therefore, if a circulation channel is set up, there will be a second layer of protection even if there is a leak. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0015] Figure 2 This is a schematic diagram of the internal structure of the present invention. Figure 1 (Remove the spiral pipe).

[0016] Figure 3 This is a schematic diagram of the internal structure of the present invention. Figure 2 (Without removing the spiral pipe).

[0017] Figure 4 This is a bottom view of the present invention. Detailed Implementation

[0018] To enable those skilled in the art to more clearly understand the purpose, technical solution and advantages of this utility model, the present utility model will be further described below in conjunction with the accompanying drawings and embodiments.

[0019] In the description of this utility model, it should be understood that the orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", "inner", "outer", "horizontal", and "vertical" are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0020] The present invention will now be described in detail with reference to the accompanying drawings: Figure 1-2 As shown, a bubbler structure for uniform gas distribution includes a bubbler body, which is composed of an inner tank 1 and an outer cylinder 2. The outer cylinder 2 is composed of a base 3, a barrel body 4, and a top cover 5. A through hole 6 is provided on the top cover 5, and the inner tank 1 is inserted into the through hole 6. The height of the inner tank 1 is higher than that of the outer cylinder 2, and a support frame 7 is provided on the top of the inner tank 1. A liquid inlet pipe 9 with a valve 8, an air inlet pipe 10, and an air outlet pipe 11 are installed on the support frame 7. The liquid inlet pipe 9 and the air inlet pipe 10 are directly connected to the bottom of the inner tank 1, and the air outlet pipe 11 is located below the top of the inner tank 1. A gas equalization device is also arranged in the inner tank 1. The gas equalization device is a gas equalization plate 12 installed in the inner tank. A connecting rod 13 is provided in the middle of the gas equalization plate 12. The connecting rod 13 extends out of the top of the inner tank 1 and is fixed by a fixing block 14 arranged on the top of the inner tank 1. A support frame 7 is installed around the fixing block 14. A liquid inlet pipe 9 with a valve, an air inlet pipe 10, and an air outlet pipe 11 are installed on the support frame 7.

[0021] like Figure 3-4 As shown, the gas equalization plate 12 has a plurality of evenly arranged air holes 15, and the gas equalization plate 12 also has oppositely arranged notches 16, which are used for the liquid inlet pipe 9 and the air inlet pipe 10 to pass through and be limited.

[0022] This invention utilizes a design with evenly distributed air holes and notches on the gas equalization plate to ensure that the gas in the inlet pipe is initially dispersed by the gas equalization plate and then evenly distributed again through the equidistant air holes on the plate. This effectively avoids the problem of excessively high local concentrations caused by gas concentration in traditional bubblers, and ensures full contact between the gas and liquid, thereby improving mass transfer efficiency.

[0023] Below the air inlet pipe 10, a coil 17 is provided, with equidistantly arranged air holes on the coil 17. The bottom inlet 18 of the liquid inlet pipe 9 is located in the middle of the coil 17. The outer cylinder 2 also has two through holes, the lower one being a coolant inlet 19 and the upper one being a coolant outlet 20. Water flows into the chamber between the outer cylinder 2 and the inner tank 1 through the coolant inlet 20 and flows out through the upper coolant outlet 19. A pipe 21 is also connected between the coolant inlet 20 and the coolant outlet 19, and this pipe 21 spirals down around the outer wall of the inner tank 1.

[0024] This invention features a coolant inlet and outlet in the outer cylinder, forming a coolant circulation channel through the chamber between the outer cylinder and the inner tank. A spiral pipe connecting the coolant inlet and outlet spirals around the outer wall of the inner tank from top to bottom. The coolant circulation channel greatly enhances safety, as the medium in the inner tank contains corrosive substances. If the inner cylinder leaks and combines with the coolant, an explosion will occur. Therefore, if a circulation channel is provided, there will be a second layer of protection even if there is a leak.

[0025] The bubbler structure designed in this utility model, through structural innovation and functional integration, achieves a comprehensive improvement in gas distribution uniformity, reaction efficiency, operational safety, and equipment lifespan. It has significant technical advantages and economic value, and is suitable for process scenarios in chemical, environmental protection, and bio-fermentation fields where uniform gas distribution and temperature control are required.

[0026] The specific embodiments described herein are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A bubbler structure with uniform air distribution, comprising a bubbler body, characterized in that: The bubbler body consists of an inner tank and an outer cylinder. The outer cylinder consists of a base, a barrel, and a top cover. A through hole is provided on the top cover, and the inner tank is inserted into the through hole. The height of the inner tank is higher than that of the outer cylinder. A support frame is provided on the top of the inner tank. A liquid inlet pipe, an air inlet pipe, and an air outlet pipe with valves are installed on the support frame. The liquid inlet pipe and the air inlet pipe lead directly to the bottom of the inner tank, and the air outlet pipe is located below the top of the inner tank. An air equalization device is also arranged in the inner tank.

2. The bubbler structure with uniform air distribution according to claim 1, characterized in that: The gas equalization device is a gas equalization plate installed in the inner tank. A connecting rod is installed in the middle of the gas equalization plate. The connecting rod extends out of the top of the inner tank and is fixed by a fixing block arranged on the top of the inner tank. A support frame is installed around the fixing block. A liquid inlet pipe, an air inlet pipe, and an air outlet pipe with valves are installed on the support frame.

3. The bubbler structure with uniform air distribution according to claim 2, characterized in that: The gas equalization plate has multiple evenly arranged air holes, and the gas equalization plate also has oppositely arranged notches and grooves, which are used for the liquid inlet pipe and the air inlet pipe to pass through and be limited.

4. The bubbler structure with uniform air distribution according to claim 3, characterized in that: A coil is provided below the air inlet pipe, and air holes are evenly arranged on the coil. The bottom liquid inlet of the liquid inlet pipe is located in the middle of the coil.

5. The bubbler structure with uniform air distribution according to claim 1, characterized in that: The outer cylinder also has two through holes, the upper through hole being the coolant outlet and the lower through hole being the coolant inlet. Water flows into the chamber between the outer cylinder and the inner tank through the coolant inlet and then flows out through the upper coolant outlet.

6. The bubbler structure with uniform air distribution according to claim 5, characterized in that: A pipe is also connected between the coolant inlet and coolant outlet, and this pipe spirals down from top to bottom around the outer wall of the inner tank.

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