A crucible jig

CN224812688UActive Publication Date: 2026-09-29TONGWEI MICROELECTRONICS CO LTD
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Patent Information

Application Number
CN202522473751.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-11-21
Publication Date
2026-09-29
Estimated Expiration
2035-11-21

AI Technical Summary

Technical Problem

目前,行业内普遍采用人工抱持或多人协首先,人工搬运效率低下,难以满足日益增长的大批量、连续化生产需求;其次,随着碳化硅粉料合成工艺向“大公斤级”方向发展(即单炉合成量从数公斤提升至数十甚至上百公斤),坩埚体积与重量显著增加,人工搬运极易因操作不当导致坩埚倾覆、破裂,造成物料损失甚至人员烫伤等安全事故

Benefits of technology

[0015]本实用新型实施例提供的有益效果包括:本实用新型实施例提供的一种坩埚治具包括第一夹持件、第二夹持件及调节组件。第一夹持件包括第一夹持部和第一连杆,第二夹持部包括第二夹持部和第二连杆,第二连杆与第一连杆远离第一夹持部的一端铰接。调节组件包括第一调节件和第二调节件,第一连杆通过第一调节件和第一夹持部连接,第二连杆通过第二调节件与第二夹持部连接,第一夹持部能在第一调节件的作用下呈竖直姿态,第二夹持部能在第二调节件的作用下呈竖直姿态,第一夹持部与第二夹持部均具有与坩埚外壁相适配的圆弧内壁,第一连杆能相对第二连杆转动以使第一夹持部与第二夹持部相互靠近或相互远离,以用于夹持或松开坩埚。第一夹持部和第二夹持部在夹持过程中能自动保持竖直姿态,以保证对坩埚的稳定夹持,避免坩埚出现滑落导致的安全隐患,本且本实施例提供的坩埚治具还能集成至机械臂,可以提升作业效率。

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Abstract

The utility model embodiment provides a kind of crucible fixture, it is related to crucible clamping technical field.Crucible fixture includes first clamping piece, second clamping piece and adjusting assembly.First clamping piece includes first clamping part and first connecting rod, second clamping part includes second clamping part and second connecting rod, and second connecting rod is hinged with the end of first connecting rod away from first clamping part.Adjusting assembly includes first adjusting piece and second adjusting piece, and first connecting rod is connected by first adjusting piece and first clamping part, and second connecting rod is connected with second clamping part by second adjusting piece, and first clamping part can be in vertical posture under the action of first adjusting piece, and second clamping part can be in vertical posture under the action of second adjusting piece.To guarantee the stable clamping to crucible, avoid the security risk caused by the slide of crucible, and the crucible fixture provided in the embodiment can also be integrated into mechanical arm, and the operation efficiency can be improved.
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Description

Technical Field

[0001] This utility model relates to the field of crucible clamping technology, and more specifically, to a crucible fixture. Background Technology

[0002] Silicon carbide (SiC), as an important wide-bandgap semiconductor material, is widely used in the manufacture of power electronics, radio frequency devices, and electronic devices operating in extreme environments such as high temperature, high power, and high frequency. In the silicon carbide single crystal growth and powder synthesis processes, high-purity silicon carbide powder is a key raw material for ensuring crystal quality. The powder synthesis process typically employs a high-temperature solid-state reaction method, where raw materials (such as silicon powder and carbon source) react at high temperatures within a graphite crucible to obtain high-purity silicon carbide powder.

[0003] To avoid introducing metallic impurities, the industry currently commonly uses manual handling or multiple people working together. Firstly, manual handling is inefficient and cannot meet the growing demand for large-scale, continuous production. Secondly, as silicon carbide powder synthesis processes develop towards "large kilogram-level" production (i.e., the synthesis volume per furnace increases from several kilograms to tens or even hundreds of kilograms), the volume and weight of the crucibles increase significantly. Manual handling is highly susceptible to accidents such as crucible tipping or breaking due to improper operation, resulting in material loss or even burns to personnel. Utility Model Content

[0004] The purpose of this invention is to provide a crucible fixture that can improve the efficiency of crucible handling and reduce safety risks.

[0005] The embodiments of this utility model can be implemented as follows: In a first aspect, this utility model provides a crucible fixture, comprising: The first clamping member includes a first clamping part and a first connecting rod; The second clamping member includes a second clamping part and a second connecting rod, and the second connecting rod is hinged to the end of the first connecting rod away from the first clamping part. The adjustment assembly includes a first adjustment member and a second adjustment member. A first connecting rod is connected to a first clamping part through the first adjustment member, and a second connecting rod is connected to a second clamping part through the second adjustment member. The first clamping part can be in a vertical position under the action of the first adjustment member, and the second clamping part can be in a vertical position under the action of the second adjustment member. Both the first clamping part and the second clamping part have an arc-shaped inner wall that is adapted to the outer wall of the crucible. The first connecting rod can rotate relative to the second connecting rod to make the first clamping part and the second clamping part move closer to each other or further away from each other, so as to clamp or release the crucible.

[0006] In an optional embodiment, the first adjusting member includes a first mounting base, a first rotating shaft, and a first tension spring. The first mounting base is fixedly mounted on the first connecting rod, the first rotating shaft passes through the first mounting base and is rotatable relative to the first mounting base, the first clamping part is fixedly connected to the first rotating shaft, and the two ends of the first tension spring are respectively connected to the first rotating shaft and the first mounting base.

[0007] In an optional embodiment, the second adjusting member includes a second mounting base, a second rotating shaft, and a second tension spring. The second mounting base is fixedly mounted on the second connecting rod, the second rotating shaft passes through the second mounting base and is rotatable relative to the second mounting base, the second clamping part is fixedly connected to the second rotating shaft, and the two ends of the second tension spring are respectively connected to the second rotating shaft and the second connecting rod.

[0008] In an optional embodiment, the first connecting rod includes a connecting part, a first clamping rod, and a first connecting rod connected in sequence. The first connecting rod is parallel to the axis of the crucible, the first clamping rod is perpendicular to the axis of the crucible, and the connecting part is connected to the first adjusting member. The second link includes a mating part, a second connecting rod, and a second clamping rod connected in sequence. The second connecting rod is parallel to and hinged to the first connecting rod. The second clamping rod is parallel to and opposite to the first clamping rod. The mating part is connected to the second adjusting member.

[0009] In an optional embodiment, the crucible fixture further includes a hinge shaft. The end of the first connecting rod away from the first clamping rod is provided with a mounting groove. The opposite side walls of the mounting groove are provided with hinge holes for the hinge shaft to pass through. The second connecting rod extends into the mounting groove. The hinge shaft also passes through the second connecting rod. The second connecting rod is hinged to the first connecting rod through the hinge shaft.

[0010] In an optional embodiment, the inner arc of the first clamping part is provided with an anti-slip coating, and / or the inner arc of the second clamping part is also provided with an anti-slip coating.

[0011] In an optional embodiment, the anti-slip coating is formed of polyurethane.

[0012] In an optional embodiment, the outer wall of the first link is provided with a plastic sealant layer, and / or the outer wall of the second link is provided with a plastic sealant layer.

[0013] In an optional embodiment, the central angle corresponding to the inner arc of the first clamping part is α, where α is 130°~150°; And / or, the central angle corresponding to the inner arc of the second clamping part is β, where β is 130°~150°.

[0014] In an optional implementation, α is 145° and β is 145°.

[0015] The beneficial effects provided by this utility model embodiment include: A crucible fixture provided by this utility model embodiment includes a first clamping member, a second clamping member, and an adjusting assembly. The first clamping member includes a first clamping portion and a first connecting rod. The second clamping portion includes a second clamping portion and a second connecting rod. The second connecting rod is hinged to the end of the first connecting rod away from the first clamping portion. The adjusting assembly includes a first adjusting member and a second adjusting member. The first connecting rod is connected to the first clamping portion through the first adjusting member, and the second connecting rod is connected to the second clamping portion through the second adjusting member. The first clamping portion can be in a vertical position under the action of the first adjusting member, and the second clamping portion can be in a vertical position under the action of the second adjusting member. Both the first clamping portion and the second clamping portion have an arc-shaped inner wall adapted to the outer wall of the crucible. The first connecting rod can rotate relative to the second connecting rod to make the first clamping portion and the second clamping portion move closer to each other or further away from each other, for clamping or releasing the crucible. The first and second clamping parts can automatically maintain a vertical posture during the clamping process to ensure stable clamping of the crucible and avoid safety hazards caused by the crucible slipping. In addition, the crucible fixture provided in this embodiment can also be integrated into the robotic arm to improve work efficiency. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the crucible fixture provided in an embodiment of the present invention from a first perspective. Figure 2 A schematic diagram of the crucible fixture provided in an embodiment of this utility model from a second perspective; Figure 3 This is a schematic diagram of the structure inside the first mounting base of the first adjusting member provided in the embodiment of this utility model; Figure 4 This is a schematic diagram of the structure inside the second mounting base of the second adjusting member provided in the embodiment of this utility model.

[0018] Icons: 1-Crucible fixture; 100-First clamping member; 110-First clamping part; 120-First connecting rod; 121-Connecting part; 122-First clamping rod; 123-First connecting rod; 124-Mounting groove; 200-Second clamping member; 210-Second clamping part; 220-Second connecting rod; 221-Mating part; 222-Second connecting rod; 223-Second clamping rod; 300-Hinge shaft; 400-First adjusting member; 410-First mounting base; 420-First rotating shaft; 430-First tension spring; 500-Second adjusting member; 510-Second mounting base; 520-Second rotating shaft; 530-Second tension spring. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0023] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0024] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0025] The following describes in detail, with reference to the accompanying drawings, the specific structure of a crucible fixture provided by this utility model and its corresponding technical effects.

[0026] Please refer to Figures 1-4 The present invention provides a crucible fixture 1 comprising a first clamping member 100, a second clamping member 200, and an adjustment assembly. The first clamping member 100 includes a first clamping portion 110 and a first connecting rod 120, and the second clamping portion 210 includes a second clamping portion 210 and a second connecting rod 220, wherein the second connecting rod 220 is hinged to the end of the first connecting rod 120 away from the first clamping portion 110. The adjustment assembly includes a first adjustment member 400 and a second adjustment member 500. A first connecting rod 120 is connected to a first clamping part 110 through the first adjustment member 400. A second connecting rod 220 is connected to a second clamping part 210 through the second adjustment member 500. The first clamping part 110 can be in a vertical position under the action of the first adjustment member 400, and the second clamping part 210 can be in a vertical position under the action of the second adjustment member 500. Both the first clamping part 110 and the second clamping part 210 have an arc-shaped inner wall that is adapted to the outer wall of the crucible. The first connecting rod 120 can rotate relative to the second connecting rod 220 to make the first clamping part 110 and the second clamping part 210 move closer to each other or further away from each other, so as to clamp or release the crucible.

[0027] Understandably, both the first clamping part 110 and the second clamping part 210 adopt an arc-shaped inner wall design that adapts to the outer wall of the crucible, allowing them to closely fit the curved surface of the crucible and ensure stable clamping. The clamping parts are connected to the connecting rod via the first adjusting member 400 and the second adjusting member 500, respectively, so that the first clamping part 110 and the second clamping part 210 can automatically maintain a vertical posture during clamping. Even if the crucible has slight eccentricity or surface irregularities, uniform force can be applied to ensure stable clamping of the crucible and prevent the crucible from slipping and causing safety hazards.

[0028] Furthermore, the first link 120 and the second link 220 are connected by a hinge to form a "clamp"-like mechanism. Only a small external force is needed to drive the two clamping parts to move closer or further apart, so as to quickly clamp or release the crucible. Compared with traditional manual holding or multi-person dragging operations, this fixture can be operated by a single person or even integrated into a robotic arm, which can improve work efficiency and reduce labor intensity.

[0029] Specifically, the first adjusting member 400 includes a first mounting base 410, a first rotating shaft 420, and a first tension spring 430. The first mounting base 410 is fixedly mounted on the first connecting rod 120. The first rotating shaft 420 passes through the first mounting base 410 and can rotate relative to the first mounting base 410. The first clamping part 110 is fixedly connected to the first rotating shaft 420. The two ends of the first tension spring 430 are respectively connected to the first rotating shaft 420 and the first mounting base 410.

[0030] The first clamping part 110 is rotatably connected to the first mounting base 410 via the first rotating shaft 420, giving it the freedom to rotate around the shaft. This ensures that the first clamping part 110 gradually moves into a vertical position during the clamping of the crucible, increasing the contact area between the arcuate inner wall of the first clamping part 110 and the outer wall of the crucible. Furthermore, under the action of the first tension spring 430, the rotation angle of the first clamping part 110 relative to the first mounting base 410 can be limited. The first tension spring 430 can have a preset elastic force to limit the rotation angle of the first clamping part 110 relative to the first mounting base 410.

[0031] Similarly, the second adjusting member 500 includes a second mounting base 510, a second rotating shaft 520, and a second tension spring 530. The second mounting base 510 is fixedly mounted on the second connecting rod 220. The second rotating shaft 520 passes through the second mounting base 510 and can rotate relative to the second mounting base 510. The second clamping part 210 is fixedly connected to the second rotating shaft 520. The two ends of the second tension spring 530 are respectively connected to the second rotating shaft 520 and the second mounting base 510.

[0032] In detail, the first connecting rod 120 includes a connecting part 121, a first clamping rod 122 and a first connecting rod 123 connected in sequence. The first connecting rod 123 is parallel to the axis of the crucible, the first clamping rod 122 is perpendicular to the axis of the crucible, and the connecting part 121 is connected to the first adjusting member 400. That is, the connecting part 121 is connected to the first mounting base 410.

[0033] The second connecting rod 220 includes a mating part 221, a second connecting rod 222, and a second clamping rod 223 connected in sequence. The second connecting rod 222 is parallel to and hinged to the first connecting rod 123. The second clamping rod 223 is parallel to and opposite to the first clamping rod 122. The mating part 221 is connected to the second adjusting member 500, that is, the mating part 221 is connected to the second mounting base 510.

[0034] Since the first clamping rod 122 and the second clamping rod 223 are arranged flat and tangentially opposite each other, it is convenient for a person or instrument to clamp the first clamping rod 122 and the second clamping rod 223, so that the first connecting rod 123 rotates relative to the second connecting rod 222, thereby driving the first clamping part 110 and the second clamping part 210 to move closer or further apart, so as to clamp or release the crucible.

[0035] Specifically, the crucible fixture 1 also includes a hinge shaft. A mounting groove 124 is provided at the end of the first connecting rod 123 away from the first clamping rod 122. Hinging holes for the hinge shaft to pass through are provided on opposite side walls of the mounting groove 124. The second connecting rod 222 extends into the mounting groove 124, and the hinge shaft 300 also passes through the second connecting rod 222. The second connecting rod 222 is hinged to the first connecting rod 123 via the hinge shaft 300. This ensures the stability of the clamping connection between the first connecting rod 120 and the second connecting rod 222.

[0036] Understandably, to prevent the introduction of metal impurities during crucible handling, both the outer walls of the first connecting rod 120 and the second connecting rod 220 are provided with a plastic sealing layer. In other words, while both the first connecting rod 120 and the second connecting rod 220 can be metal rods, they are covered with plastic sealing layers to prevent the introduction of metal impurities when clamping the crucible.

[0037] Optionally, to ensure that the first clamping part 110 and the second clamping part 210 stably clamp the crucible, the inner arc wall of the first clamping part 110 is provided with an anti-slip coating, and the inner arc wall of the second clamping part 210 is also provided with an anti-slip coating. This increases the friction between the first clamping part 110 and the second clamping part 210 and the crucible when clamping it, thus ensuring the stability of the crucible clamping.

[0038] The anti-slip coating can be formed of polyurethane, and the polyurethane anti-slip coating can also prevent the first clamping part 110 and the second clamping part 210 from introducing metal impurities into the crucible when clamping the crucible.

[0039] The central angle corresponding to the arcuate inner wall of the first clamping part 110 is α, where α is 130°~150°. The central angle corresponding to the arcuate inner wall of the second clamping part 210 is β, where β is 130°~150°. Since α and β are both 130°~150°, it can be ensured that the arcuate inner walls of the first clamping part 110 and the second clamping part 210 have a large contact area with the outer wall of the crucible.

[0040] Optionally, α can be 130°, 135°, 140°, 145° or 150°, and β can be 130°, 135°, 140°, 145° or 150°.

[0041] In summary, the crucible fixture 1 provided in this embodiment of the present invention includes a first clamping member 100, a second clamping member 200, and an adjustment assembly. The first clamping member 100 includes a first clamping portion 110 and a first connecting rod 120, and the second clamping portion 210 includes a second clamping portion 210 and a second connecting rod 220. The second connecting rod 220 is hinged to the end of the first connecting rod 120 away from the first clamping portion 110. The adjustment assembly includes a first adjustment member 400 and a second adjustment member 500. A first connecting rod 120 is connected to a first clamping part 110 through the first adjustment member 400. A second connecting rod 220 is connected to a second clamping part 210 through the second adjustment member 500. The first clamping part 110 can be in a vertical position under the action of the first adjustment member 400, and the second clamping part 210 can be in a vertical position under the action of the second adjustment member 500. Both the first clamping part 110 and the second clamping part 210 have an arc-shaped inner wall that is adapted to the outer wall of the crucible. The first connecting rod 120 can rotate relative to the second connecting rod 220 to make the first clamping part 110 and the second clamping part 210 move closer to each other or further away from each other, so as to clamp or release the crucible. The first clamping part 110 and the second clamping part 210 can automatically maintain a vertical posture during the clamping process to ensure stable clamping of the crucible and avoid safety hazards caused by the crucible slipping. In addition, the crucible fixture 1 provided in this embodiment can also be integrated into the robotic arm to improve work efficiency.

[0042] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A crucible fixture, characterized in that, include: The first clamping member (100) includes a first clamping part (110) and a first connecting rod (120). The second clamping member (200) includes a second clamping part (210) and a second connecting rod (220), wherein the second connecting rod (220) is hinged to the end of the first connecting rod (120) away from the first clamping part (110); An adjustment assembly, comprising a first adjustment member (400) and a second adjustment member (500), wherein a first connecting rod (120) is connected to a first clamping part (110) via the first adjustment member (400), and a second connecting rod (220) is connected to a second clamping part (210) via the second adjustment member (500). The first clamping part (110) is able to be in a vertical position under the action of the first adjustment member (400), and the second clamping part (210) is able to be in a vertical position under the action of the second adjustment member (500). The first clamping part (110) and the second clamping part (210) both have an arc-shaped inner wall that is adapted to the outer wall of the crucible. The first connecting rod (120) can rotate relative to the second connecting rod (220) to make the first clamping part (110) and the second clamping part (210) move closer to each other or further away from each other, so as to clamp or release the crucible.

2. The crucible fixture according to claim 1, characterized in that: The first adjusting member (400) includes a first mounting base (410), a first rotating shaft (420), and a first tension spring (430). The first mounting base (410) is fixedly mounted on the first connecting rod (120). The first rotating shaft (420) passes through the first mounting base (410) and can rotate relative to the first mounting base (410). The first clamping part (110) is fixedly connected to the first rotating shaft (420). The two ends of the first tension spring (430) are respectively connected to the first rotating shaft (420) and the first mounting base (410).

3. The crucible fixture according to claim 1, characterized in that: The second adjusting member (500) includes a second mounting base (510), a second rotating shaft (520), and a second tension spring (530). The second mounting base (510) is fixedly mounted on the second connecting rod (220). The second rotating shaft (520) passes through the second mounting base (510) and can rotate relative to the second mounting base (510). The second clamping part (210) is fixedly connected to the second rotating shaft (520). The two ends of the second tension spring (530) are respectively connected to the second rotating shaft (520) and the second connecting rod (220).

4. The crucible fixture according to claim 1, characterized in that: The first connecting rod (120) includes a connecting part (121), a first clamping rod (122) and a first connecting rod (123) connected in sequence. The first connecting rod (123) is parallel to the axis of the crucible, the first clamping rod (122) is perpendicular to the axis of the crucible, and the connecting part (121) is connected to the first adjusting member (400). The second connecting rod (220) includes a mating part (221), a second connecting rod (222), and a second clamping rod (223) connected in sequence. The second connecting rod (222) is parallel to the first connecting rod (123) and hinged to the first connecting rod (123). The second clamping rod (223) is parallel to the first clamping rod (122) and is arranged opposite to it. The mating part (221) is connected to the second adjusting member (500).

5. The crucible fixture according to claim 4, characterized in that: The crucible fixture also includes a hinge shaft (300). The end of the first connecting rod (123) away from the first clamping rod (122) is provided with a mounting groove (124). The opposite side walls of the mounting groove (124) are provided with hinge holes for the hinge shaft (300) to pass through. The second connecting rod (222) extends into the mounting groove (124). The hinge shaft (300) also passes through the second connecting rod (222). The second connecting rod (222) is hinged to the first connecting rod (123) through the hinge shaft (300).

6. The crucible fixture according to claim 1, characterized in that: The inner arc of the first clamping part (110) is provided with an anti-slip coating, and / or the inner arc of the second clamping part (210) is also provided with an anti-slip coating.

7. The crucible fixture according to claim 6, characterized in that: The anti-slip coating is formed of polyurethane.

8. The crucible fixture according to claim 1, characterized in that: The outer wall of the first link (120) is provided with a plastic seal layer, and / or the outer wall of the second link (220) is provided with a plastic seal layer.

9. The crucible fixture according to claim 1, characterized in that: The central angle corresponding to the inner arc of the first clamping part (110) is α, and α is 130°~150°; And / or, the central angle corresponding to the inner arc of the second clamping part (210) is β, where β is 130°~150°.

10. The crucible fixture according to claim 9, characterized in that: The α is 145°, and the β is 145°.