Sliding door assembly and wafer cassette cleaning device

Abstract

The embodiment of the utility model provides a kind of sliding door assembly and wafer box cleaning device, it is related to semiconductor technical field.The utility model provides sliding door assembly including frame, installation component, door board, first drive component, second drive component, frame has material mouth, installation component includes the upper installation component and lower installation component being set on frame, door board is set between upper installation component and lower installation component, door board has first state, second state and third state, first drive component drives the side of door board to be close to or away from frame, make door board switch between first state and second state;Second drive component is used to drive door board to move along the length direction of connecting shaft, make door board switch between second state and third state.Wafer box cleaning device includes sliding door assembly.The utility model can improve the problem that current cleaning device overall width is big, and floor space is big.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically, to a wafer cleaning device for sliding door components. Background Technology

[0002] In semiconductor manufacturing, a high level of cleanliness is required. The cleanliness level of the environment where foreign materials are located is usually lower than that of advanced process areas, often introducing contamination and reducing the yield of semiconductor processes. Cleaning materials using semiconductor cleaning equipment can effectively improve cleanliness. However, existing semiconductor cleaning equipment is prone to cross-contamination between different spaces due to differences in cleanliness between the inlet area and the cleaning chamber, as well as between the cleaning chamber and the outlet area, thus affecting the cleaning effect. Therefore, wafer cassette cleaning devices are typically equipped with loading / unloading windows and sliding door assemblies, allowing wafer cassettes to be loaded and unloaded by opening the sliding door assembly.

[0003] Current sliding door assemblies are typically double-door designs, with two doors moved horizontally by a cylinder. This design results in a large overall width and footprint for the cleaning device. Utility Model Content

[0004] The purpose of this invention is to provide a sliding door assembly and a wafer cell cleaning device that can improve the problems of large overall width and large footprint of current cleaning devices.

[0005] The embodiments of this utility model can be implemented as follows: In a first aspect, this utility model provides a sliding door assembly, comprising: A frame, wherein a material inlet is provided on the frame; The mounting components include an upper mounting component and a lower mounting component disposed on the frame; A door panel is connected to the mounting assembly and disposed between the upper mounting assembly and the lower mounting assembly. Under the action of external force, the door panel can move relative to the frame to have a first state of being in contact with the frame and closing the material opening, a second state of having a gap between the door panel and the frame in the front-back direction, and a third state of being misaligned with the material opening to open the material opening. A first drive assembly is used to drive one side of the door panel closer to or away from the frame, so that the door panel switches between the first state and the second state; The second drive component is used to drive the door panel to move along the width direction so that the door panel switches between the second state and the third state.

[0006] In an optional embodiment, the upper mounting assembly includes a connecting structure, the second driving assembly includes a first cylinder, the connecting structure is used to connect the first cylinder and the door panel, and the lower mounting assembly includes a slide groove, the door panel being slidably disposed in the slide groove by a slider.

[0007] In an optional embodiment, the upper mounting assembly further includes an upper mounting seat and a connecting shaft passing through the connecting structure. The upper mounting seat includes a first mounting seat and a second mounting seat disposed on both sides of the door panel along the width direction. One end of the connecting shaft is rotatably connected to the first mounting seat, and the other end of the connecting shaft overlaps the second mounting seat. The first cylinder is fixedly connected to the connecting shaft.

[0008] In an optional embodiment, a connecting block is rotatably mounted on the first mounting base via a rotating shaft, and one end of the connecting shaft is fixedly connected to the connecting block.

[0009] In an optional embodiment, the upper mounting base further includes a third mounting base located between the first mounting base and the second mounting base, and a movable block is sleeved on the connecting shaft, the movable block being movably disposed on the third mounting base.

[0010] In an optional embodiment, the first drive assembly includes a second cylinder disposed on the frame, the piston rod of the second cylinder being connected to the movable block for driving the movable block to move closer to or away from the frame on the third mounting base.

[0011] In an optional embodiment, the movable block is provided with a first roller that rolls into contact with the third mounting base; the connecting shaft is provided with a second roller that rolls into contact with the second mounting base.

[0012] In an optional embodiment, the lower mounting assembly includes a first base and a second base, one end of the slide is rotatably connected to the first base, and the other end of the slide is provided with a third roller for rolling engagement with the second base.

[0013] In an optional embodiment, the first drive assembly further includes a third cylinder disposed on the frame, the piston rod of the third cylinder being connected to one end of the slide groove near the third roller.

[0014] Secondly, this utility model provides a wafer cassette cleaning device, including the sliding door assembly described in any of the foregoing embodiments.

[0015] The beneficial effects of the sliding door assembly and wafer cell cleaning device provided in this embodiment of the present invention include: When loading and unloading are required through the sliding door assembly, the first drive assembly drives the door panel to move from the first state to the second state. At this time, there is a gap between the door panel and the frame, and the door panel is tilted relative to the frame plane. Then, the second drive assembly drives the door panel to move from the second state to the third state, moving the door panel to be misaligned with the material opening, thereby fully opening the material opening to facilitate loading and unloading. This improves the problem of the large overall width and large footprint of traditional double-door sliding door assemblies. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the sliding door assembly provided in this embodiment in its first state; Figure 2 This is a schematic diagram of the structure of the sliding door assembly provided in this embodiment; Figure 3 This is a schematic diagram of the sliding door assembly provided in this embodiment in its second state; Figure 4 This is a structural schematic diagram of the sliding door assembly provided in this embodiment in the third state; Figure 5 for Figure 1 Enlarged view of section A in the middle; Figure 6 for Figure 2 Enlarged view of section B in the middle.

[0018] Icons: 100-Frame; 110-Feeding port; 20-Upper mounting assembly; 201-Connecting structure; 200-Upper mounting base; 210-Connecting shaft; 220-First mounting base; 221-Connecting block; 230-Second mounting base; 240-Third mounting base; 241-Moving block; 242-First roller; 250-Second roller; 30-Lower mounting assembly; 310-Slide groove; 320-First base; 330-Second base; 340-Third roller; 400-Door panel; 500-First drive assembly; 510-Second cylinder; 520-Third cylinder; 600-Second drive assembly; 610-First cylinder. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0020] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0022] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0023] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0024] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0025] The following describes in detail the overall structure, working principle, and technical effects of the sliding door assembly and wafer box cleaning device provided by this utility model through embodiments and in conjunction with the accompanying drawings.

[0026] On the one hand, please refer to Figures 1-4 This utility model provides a sliding door assembly for use in a wafer cassette cleaning device. This assembly facilitates the opening of the partition door separating the feed door area from the cleaning chamber, enabling the loading and unloading of wafer cassettes and improving upon the current problem of large overall width and large footprint of double-door sliding door assemblies.

[0027] For details, please refer to Figure 1 and Figure 2The sliding door assembly provided in this embodiment includes a frame 100, a mounting assembly, a door panel 400, a first drive assembly 500, and a second drive assembly 600. The frame 100 is fixed to the wafer cassette cleaning device and located at the entrance / exit of the cleaning chamber. A material inlet 110 for loading and unloading is provided on the frame 100. The mounting assembly includes an upper mounting assembly 20 and a lower mounting assembly 30 disposed on the frame. The door panel 400 is connected to the mounting assembly and is disposed between the upper mounting assembly 20 and the lower mounting assembly 30. The door panel 400 can move relative to the frame 100 under external force, allowing it to block or open the material inlet 110. The door panel 400 has a first state, a second state, and a third state, wherein... Figure 1 In the first state, the door panel 400 is fitted against the material opening 110 of the frame 100 to seal the material opening 110; combined Figure 3 In the second state, the door panel 400 moves away from the frame 100 until there is a certain gap between it and the frame 100 in the front-to-back direction; combined with Figure 4 In the third state, the door panel 400 is misaligned with the material inlet 110 to open the material inlet 110, facilitating loading and unloading. A first drive assembly 500 is mounted on the frame 100 and is used to drive one side of the door panel 400 closer to or further away from the frame 100, switching the door panel 400 between the first and second states. A second drive assembly 600 is mounted on the frame 100 and is used to drive the door panel 400 to move along the width of the frame 100, causing the door panel 400 to overlap or misalign with the material inlet 110, switching the door panel 400 between the second and third states.

[0028] When loading and unloading are required via the sliding door assembly, the first drive assembly 500 drives the door panel 400 from the first state to the second state. At this time, there is a gap between the door panel 400 and the frame 100, and the door panel 400 is tilted relative to the plane of the frame 100. Then, the second drive assembly 600 drives the door panel 400 from the second state to the third state, moving the door panel 400 to be misaligned with the material opening 110, thereby fully opening the material opening 110 to facilitate loading and unloading. This improves the problem of the large overall width and large footprint of traditional double-door sliding door assemblies.

[0029] Please refer to Figure 1 and Figure 2In some optional embodiments, the second drive assembly 600 includes a first cylinder 610, and the upper mounting assembly 20 includes a connecting structure 201. The first cylinder 610 is disposed on the frame 100, and the connecting structure 201 is used to connect the first cylinder 610 to the door panel 400. The lower mounting assembly 30 includes a slide groove 310, and the lower end of the door panel 400 is slidably disposed in the slide groove 310 by a slider. It is understood that, in order to improve the connection stability between the door panel 400 and the first cylinder 610 and the slide groove 310, at least one connecting structure 201 is provided between the first cylinder 610 and the door panel 400, and at least one slider that cooperates with the slide groove 310 is provided below the door panel 400.

[0030] Please refer to Figures 1-3 In some alternative embodiments, the upper mounting assembly 20 further includes an upper mounting base 200 and a connecting shaft 210 passing through the connecting structure 201. Further, the upper mounting base 200 includes a first mounting base 220 and a second mounting base 230 disposed opposite to each other, both of which are fixedly mounted to the frame 100 and are located on the same horizontal plane. Figure 5 A connecting block 221 is provided on the first mounting base 220, and the connecting block 221 is rotatably mounted on the first mounting base 220 via a vertically arranged rotating shaft. One end of the connecting shaft 210 is connected to the connecting block 221, and the other end of the connecting shaft 210 overlaps with the second mounting base 230. The end of the connecting shaft 210 near the second mounting base 230 can move along the second mounting base 230 under the drive of the first driving assembly 500, causing the connecting shaft 210 to swing closer to or further away from the frame 100, thereby causing the door panel 400 to switch between the first state and the second state.

[0031] Please refer to Figure 2 and Figure 6Furthermore, the upper mounting base 200 also includes a third mounting base 240 located between the first mounting base 220 and the second mounting base 230. A movable block 241 is movably disposed on the third mounting base 240, and the connecting shaft 210 passes through the movable block 241. The first drive assembly 500 is connected to the movable block 241, and the first drive assembly 500 drives the movable block 241 to move on the third mounting base 240 to achieve the effect of driving one end of the connecting shaft 210 closer to or away from the frame 100. In this embodiment, the first drive assembly 500 includes a second cylinder 510. The cylinder body of the second cylinder 510 is mounted on the frame 100, and the piston rod of the second cylinder 510 extends away from the frame 100 and is connected to the movable block 241. Driving the piston rod of the second cylinder 510 to extend or retract causes the connecting shaft 210 to swing closer to or away from the frame 100. In order to facilitate the movement of the connecting shaft 210 on the second mounting base 230 and the third mounting base 240, in this embodiment, a first roller 242 that rolls with the third mounting base 240 is provided on the moving block 241, and a second roller 250 that rolls with the second mounting base 230 is provided on the connecting shaft 210.

[0032] Please refer to Figure 2 In some alternative embodiments, the lower mounting assembly 30 includes a first base 320 and a second base 330, wherein the first base 320 and the first mounting seat 220 are vertically aligned, and the second base 330 and the second mounting seat 230 are vertically aligned. One end of the slide groove 310 is rotatably connected to the first base 320, and the other end of the slide groove 310 is provided with a third roller 340 for rolling engagement with the second base 330. When the second cylinder 510 drives the connecting shaft 210 to swing closer to or further away from the frame 100, it causes the door panel 400 and the slide groove 310 to swing accordingly. At this time, the third roller 340 rolls along the second base 330, which facilitates the switching of the door panel 400 between the first state and the second state.

[0033] Please refer to Figure 2 To improve the structural stability of the door panel 400 when switching between the first and second states and to prevent shaking during movement, in some optional embodiments, the first drive assembly 500 further includes a third cylinder 520. The cylinder body of the third cylinder 520 is fixedly connected to the frame 100, and the piston rod of the third cylinder 520 extends away from the frame 100 and is connected to the end of the slide groove 310 near the third roller 340. When driving the door panel 400 to switch between the first and second states, the cooperation of the second cylinder 510 and the third cylinder 520 simultaneously moves both the upper and lower ends of the door panel 400, improving the structural stability of the door panel 400 during movement.

[0034] It is understandable that, in order to improve the sealing effect of the door panel 400 on the material outlet 110 in the first state, a sealing element is provided on the side of the door panel 400 facing the frame 100 to achieve the sealing of the material outlet 110 by the door panel 400 in the first state.

[0035] On the other hand, this utility model also provides a wafer cassette cleaning device, including the aforementioned sliding door assembly, with the frame 100 installed at the inlet and outlet of the wafer cassette cleaning device. When the door panel 400 is in the first state, the sliding door assembly is used to separate the feed door area and the cleaning chamber to avoid cross-contamination between the spaces; when the door panel 400 is in the third state, the feed port 110 is opened, facilitating the loading and unloading of wafer cassettes through the sliding door assembly.

[0036] In summary, the implementation principle of the sliding door assembly and wafer cassette cleaning device provided by this utility model is as follows: when loading and unloading are required through the sliding door assembly, the door panel 400 is driven from the first state to the second state by the first drive assembly 500. At this time, there is a gap between the door panel 400 and the frame 100, and the door panel 400 is inclined relative to the plane of the frame 100. Then, the door panel 400 is driven from the second state to the third state by the second drive assembly 600, moving the door panel 400 to be misaligned with the material inlet 110, thereby fully opening the material inlet 110 to facilitate loading and unloading; this improves the problem of large overall width and large footprint of traditional double-door sliding door assemblies.

[0037] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A sliding door assembly, characterized in that, include: A frame, wherein a material inlet is provided on the frame; The mounting components include an upper mounting component and a lower mounting component disposed on the frame; A door panel is connected to the mounting assembly and disposed between the upper mounting assembly and the lower mounting assembly. Under the action of external force, the door panel can move relative to the frame to have a first state of being attached to the frame and closing the material opening, a second state of having a gap between the door panel and the frame in the front-back direction, and a third state of being misaligned with the material opening to open the material opening. A first drive assembly is used to drive one side of the door panel closer to or away from the frame, so that the door panel switches between the first state and the second state; The second drive component is used to drive the door panel to move along the width direction so that the door panel switches between the second state and the third state.

2. The sliding door assembly according to claim 1, characterized in that, The upper mounting assembly includes a connecting structure, the second driving assembly includes a first cylinder, the connecting structure is used to connect the first cylinder and the door panel, and the lower mounting assembly includes a sliding groove, the door panel being slidably disposed in the sliding groove by a slider.

3. The sliding door assembly according to claim 2, characterized in that, The upper mounting assembly further includes an upper mounting base and a connecting shaft passing through the connecting structure. The upper mounting base includes a first mounting base and a second mounting base disposed on both sides of the door panel along the width direction. One end of the connecting shaft is rotatably connected to the first mounting base, and the other end of the connecting shaft overlaps the second mounting base. The first cylinder is fixedly connected to the connecting shaft.

4. The sliding door assembly according to claim 3, characterized in that, A connecting block is rotatably mounted on the first mounting base via a rotating shaft, and one end of the connecting shaft is fixedly connected to the connecting block.

5. The sliding door assembly according to claim 3, characterized in that, The upper mounting base also includes a third mounting base located between the first mounting base and the second mounting base, and a movable block is sleeved on the connecting shaft, the movable block being movably disposed on the third mounting base.

6. The sliding door assembly according to claim 5, characterized in that, The first drive assembly includes a second cylinder disposed on the frame, and the piston rod of the second cylinder is connected to the movable block for driving the movable block to move closer to or away from the frame on the third mounting base.

7. The sliding door assembly according to claim 6, characterized in that, The movable block is provided with a first roller that rolls in cooperation with the third mounting base; the connecting shaft is provided with a second roller that rolls in cooperation with the second mounting base.

8. The sliding door assembly according to claim 2, characterized in that, The lower mounting assembly includes a first base and a second base. One end of the slide is rotatably connected to the first base, and the other end of the slide is provided with a third roller for rolling engagement with the second base.

9. The sliding door assembly according to claim 8, characterized in that, The first drive assembly further includes a third cylinder, which is disposed on the frame, and the piston rod of the third cylinder is connected to the end of the slide groove near the third roller.

10. A wafer cell cleaning device, characterized in that, Includes the sliding door assembly as described in any one of claims 1-9.

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