Connecting flange, connecting device and vacuum pump

Abstract

The application provides a connecting flange, a connecting device and a vacuum pump. The connecting flange comprises a flange body, a gas passage and a water cavity are arranged in the flange body, a group of opposite side walls of the flange body are respectively provided with a cooling water inlet and a cooling water outlet which are communicated with the water cavity, two ends of the gas passage are respectively used for connecting an air outlet of an upper pump and an air inlet of a lower pump, and the cooling water inlet and the cooling water outlet are respectively used for connecting an external water supply system, so that the water cavity is cooled by circulating cooling water to cool compressed gas passing through the gas passage. The connecting flange can cool the compressed gas while realizing connection, thereby solving the problem of excessively high pump body temperature of the vacuum pump in the process of compressing air, and further reducing process material generation and rotor thermal deformation, reducing the risk of pump seizure, and helping to improve the stability of the system and prolong the service life of the system.

Description

Technical Field

[0001] This application relates to the field of vacuum pump technology, and more specifically, to a connecting flange, a connecting device, and a vacuum pump. Background Technology

[0002] In the operation of dry vacuum pumps, the upper and lower pumps are typically connected in series via flanges to achieve higher vacuum levels and pumping speeds. However, the high-speed rotation of the rotor compressing the gas generates a large amount of heat, causing the pump body temperature to rise sharply and increasing the risk of rotor seizure due to thermal expansion. Furthermore, in high-temperature environments, process materials are prone to condensation and deposition inside the pump body, reducing the gap between the stator and rotor and further increasing the risk of pump jamming. Existing flanges are mostly single-metal structures, serving only a mechanical connection function and lacking effective cooling designs. They cannot cool the gas entering the lower pump, resulting in poor stability and short lifespan for the entire vacuum pump system. Utility Model Content

[0003] This application provides a connecting flange, a connecting device, and a vacuum pump. The connecting flange can cool the compressed gas while achieving the connection, thereby solving the problem of excessively high pump body temperature during the air compression process of the vacuum pump. This reduces the formation of process materials and thermal deformation of the rotor, lowers the risk of pump jamming, and helps improve system stability and extend system life.

[0004] In a first aspect, embodiments of this application provide a connecting flange for connecting an upper pump and a lower pump of a vacuum pump. The connecting flange includes a flange body, in which a through gas channel and a water cavity located on the side of the gas channel are provided. A set of opposing sidewalls of the flange body are respectively provided with a cooling water inlet and a cooling water outlet communicating with the water cavity. The two ends of the gas channel are respectively used to connect the gas outlet of the upper pump and the gas inlet of the lower pump. The cooling water inlet and the cooling water outlet are respectively used to connect to an external water supply system, so that the water cavity can circulate cooling water to cool the compressed gas passing through the gas channel.

[0005] In one optional embodiment, the flange body includes a pipe body and a housing located in the pipe body, wherein the gas passage is provided in the pipe body, and the water cavity is formed between the pipe body and the housing.

[0006] In one alternative embodiment, the tube body and the outer shell are an integral structure.

[0007] In one alternative embodiment, the water cavity is arranged around the gas channel.

[0008] In one alternative implementation, the water cavity is a spiral flow channel.

[0009] In one alternative implementation, the gas channel is a curved channel.

[0010] In one optional embodiment, the connecting flange further includes a refrigeration pipe disposed within the water cavity. The refrigerant inlet and refrigerant outlet of the refrigeration pipe extend from another set of opposing sidewalls of the flange body and are respectively connected to an external refrigeration system, so that the refrigeration pipe passes refrigerant to cool the circulating cooling water.

[0011] In one alternative embodiment, the connecting flange further includes heat dissipation fins disposed on the exterior of at least one sidewall of the flange body, the heat dissipation fins being used to exchange heat with the external airflow to achieve cooling.

[0012] Secondly, embodiments of this application also provide a connection device, including an external water supply system and the connection flange described above.

[0013] Thirdly, embodiments of this application also provide a vacuum pump, including an upper pump, a lower pump, and the connecting device described above.

[0014] The above-mentioned technical solution of this application has the following beneficial technical effects: The connecting flange of this application embodiment can not only realize the series connection of the upper and lower pumps, but also cooperate with the external water supply system to cool the compressed gas, thereby solving the problem of excessive pump body temperature during the compression of air in the vacuum pump. This can reduce the generation of process materials and the thermal deformation of the rotor, reduce the risk of pump jamming, and help improve the stability of the system and extend the service life of the system.

[0015] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly described below. These drawings are incorporated in and constitute a part of this specification. They illustrate embodiments conforming to this application and, together with the specification, serve to explain the technical solutions of this application. It should be understood that the following drawings only show some embodiments of this application and should not be considered as limiting the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This illustration shows an installation diagram of a connecting flange provided in an embodiment of this application; Figure 2 This paper shows a schematic diagram of the structure of a connecting flange provided in an embodiment of this application; Figure 3 A cross-sectional view of a connecting flange provided in an embodiment of this application is shown; In the diagram: 1. Connecting flange; 11. Flange body; 111. Pipe body; 112. Outer shell; 12. Gas passage; 13. Water chamber; 14. Cooling water inlet; 15. Cooling water outlet; 16. Refrigeration pipe; 161. Refrigerant inlet; 17. Heat dissipation fins; 2. Upper pump; 3. Lower pump. Detailed Implementation

[0018] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present application.

[0019] The embodiments of this application will now be described in detail. Examples of these embodiments are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0020] The terms "first" and "second" in the specification and claims of this application may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise stated, "multiple" means two or more. Furthermore, "and / or" in the specification and claims indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0021] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0022] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0023] In the operation of dry vacuum pumps, the upper pump (main pump) and lower pump (auxiliary pump) are typically connected in series via flanges to achieve higher vacuum levels and pumping speeds. However, the high-speed rotation of the rotor compressing the gas generates a large amount of heat, causing the pump body temperature to rise sharply and increasing the risk of rotor seizure due to thermal expansion. Furthermore, in high-temperature environments, process materials are prone to condensation and deposition inside the pump body, reducing the gap between the stator and rotor and further increasing the risk of pump jamming. Existing flanges are mostly single-metal structures, serving only a mechanical connection function and lacking effective cooling designs. They cannot cool the gas entering the lower pump, resulting in poor stability and shortened lifespan of the entire vacuum pump system.

[0024] Therefore, this application provides a connecting flange for connecting the upper and lower pumps of a vacuum pump. This connecting flange can solve the problem of excessively high pump body temperature during the compression of air in the vacuum pump, thereby reducing the formation of process materials and thermal deformation of the rotor, reducing the risk of pump jamming, and helping to improve the stability of the system and extend the service life of the system.

[0025] refer to Figures 1 to 3 The connecting flange 1 includes a flange body 11, in which a through gas channel 12 and water chambers 13 located on two opposite sides of the gas channel 12 are provided. A set of opposite sidewalls of the flange body 11 are provided with a cooling water inlet 14 and a cooling water outlet 15 connected to the water chambers 13. In practical use, the two ends of the gas channel 12 are respectively connected to the outlet of the upper pump 2 and the inlet of the lower pump 3. The cooling water inlet 14 and the cooling water outlet 15 are respectively connected to an external water supply system, so that the water chambers 13 can cool the compressed gas passing through the gas channel 12 by circulating cooling water (constant temperature and pressure water). In other words, compared to traditional designs, this connecting flange 1 can not only connect the upper pump 2 and the lower pump 3 in series, but also work with an external water supply system to cool the compressed gas. This solves the problem of excessively high pump body temperature during air compression in vacuum pumps, thereby reducing process residue formation and rotor thermal deformation, lowering the risk of pump jamming, and helping to improve system stability and extend system life.

[0026] In some embodiments, the flange body 11 is made of stainless steel or aluminum alloy.

[0027] In some embodiments, such as Figure 3 As shown, the flange body 11 includes a pipe body 111 and a shell 112 located within the pipe body 111. Flanges are provided at both ends of the pipe body 111, and a gas passage 12 is provided within the pipe body 111. A water cavity 13 is formed between the pipe body 111 and the shell 112. This arrangement allows the gas passage 12 and the water cavity 13 to be formed within the flange body 11. It should be understood that, in specific implementations, the side wall of the shell 112 may be provided with a cooling water inlet 14 and a cooling water outlet 15 that communicate with the water cavity 13.

[0028] In some embodiments, such as Figure 2 and Figure 3 As shown, the outer shell 112 is a rectangular outer shell 112. Of course, in other embodiments, the outer shell 112 can also be other shapes, such as cylindrical, spherical, etc.

[0029] In some embodiments, the two ends of the tube 111 are located at opposite ends of the outer casing 112, and the two ends of the tube 111 are offset. For example... Figure 3 As shown in the example, this embodiment demonstrates that the two ends of the pipe body 111 are located at the upper and lower ends of the outer casing 112, respectively, and the two ends of the pipe body 111 are staggered in the horizontal direction. This arrangement can match the inlet and outlet spatial layout of the upper pump 2 and the lower pump 3, avoiding pipe interference.

[0030] In some embodiments, the tube body 111 and the outer shell 112 are an integral structure. This configuration can improve the connection strength and sealing performance between the tube body 111 and the outer shell 112.

[0031] In other embodiments, the flange body 11 is a tubular structure, the inner cavity of the flange body 11 is the gas passage 12, and a water cavity 13 is provided in the side wall of the flange body 11.

[0032] In some embodiments, such as Figure 3 As shown, the water cavity 13 is arranged around the gas channel 12. That is, the water cavity 13 is annular or spiral. This arrangement can prolong the residence time of the circulating cooling water in the water cavity 13, thereby helping to improve the heat exchange efficiency between the circulating cooling water and the compressed gas.

[0033] In some embodiments, such as Figure 3 As shown, water cavity 13 is a spiral flow channel. This design reduces the flow resistance of the circulating cooling water and improves flow efficiency.

[0034] In some embodiments, such as Figure 3As shown, the gas passage 12 is a curved passage. For example, the gas passage 12 is a spiral or S-shaped curved passage. This design avoids right-angle turns, reduces airflow separation and vortex generation, thereby reducing turbulent resistance and improving flow efficiency. It should be understood that since the gas passage 12 is a curved passage, the pipe body 111 can be set as a curved tubular structure, which can also increase the contact area between the circulating cooling water and the outer wall of the gas passage 12, thereby helping to improve the heat exchange efficiency between the circulating cooling water and the compressed gas.

[0035] In some embodiments, such as Figure 2 and Figure 3 As shown, the connecting flange 1 also includes a refrigerant pipe 16, which is disposed within the water cavity 13. The refrigerant inlet 161 and refrigerant outlet (not shown in the figure) of the refrigerant pipe 16 extend from another set of opposite sidewalls of the flange body 11. This embodiment exemplarily shows two refrigerant pipes 16, located on opposite sides of the gas passage 12. The refrigerant inlets 161 of both refrigerant pipes extend from one side of the flange body 11 along its thickness direction, and the refrigerant outlets extend from the other side of the flange body 11 along its thickness direction. In practical use, the refrigerant inlets 161 and refrigerant outlets of the refrigerant pipes 16 can be connected to an external refrigeration system (such as a compressor refrigeration unit or a liquid nitrogen circulation system) to allow the refrigerant to pass through the refrigerant in the refrigerant pipes 16 to cool the circulating cooling water. In other words, by controlling the external refrigeration system, the refrigerant pipes 16 can pass through the refrigerant and carry away the heat from the circulating cooling water, thereby reducing the temperature of the circulating cooling water and improving the heat exchange efficiency between the circulating cooling water and the compressed gas. It should be understood that, in practice, refrigerant can continuously flow through the refrigeration pipe 16, or it can only flow through the refrigerant when the circulating cooling water cannot guarantee the gas temperature.

[0036] In some embodiments, the refrigeration pipe 16 is a metal pipe arranged in a serpentine or mesh pattern. This arrangement increases the contact area between the refrigeration pipe 16 and the circulating cooling water, thereby helping to improve the heat exchange efficiency between the circulating cooling water and the refrigerant.

[0037] In some embodiments, the connecting flange 1 further includes a temperature sensor embedded in the gas channel 12 or the water-cooled jacket for real-time temperature monitoring. It should be understood that, in specific implementations, the temperature information detected by the temperature sensor can be fed back to the control center. The control center controls the external water supply system to adjust the temperature of the circulating cooling water based on the temperature information, or controls the external refrigeration system to output refrigerant to cool the circulating cooling water, thereby ensuring the cooling effect on the compressed gas and preventing overheating.

[0038] In some embodiments, such as Figure 2As shown, the connecting flange 1 also includes heat dissipation fins 17, which are disposed on the exterior of at least one side wall of the flange body 11 (i.e., the outer casing 112). The heat dissipation fins 17 are used for heat exchange with the external airflow to achieve cooling. Figure 2 As shown in the example, this embodiment illustrates that the heat dissipation fins 17 are arranged in an array. In a specific configuration, the heat dissipation fins 17 can be disposed on any one or all sidewalls of the flange body 11.

[0039] In some embodiments, the surface of the heat dissipation fins 17 is provided with a textured surface to enhance heat dissipation. This configuration increases the heat dissipation surface area and, at the same time, utilizes the textured surface to induce turbulence, further enhancing airflow disturbance, thereby quickly removing heat from the flange surface and achieving efficient air cooling.

[0040] This application also provides a connection device, including the connection flange 1 described above for an external water supply system. The specific structure of the connection flange 1 has been described in detail above and will not be repeated here.

[0041] The connection device in this embodiment includes a connecting flange 1. The connecting flange 1 can not only connect the upper pump 2 and the lower pump 3 in series, but also cooperate with an external water supply system to cool the compressed gas. This can solve the problem of excessive pump body temperature during the compression of air in the vacuum pump, thereby reducing the generation of process materials and the thermal deformation of the rotor, reducing the risk of pump jamming, and helping to improve the stability of the system and extend the service life of the system.

[0042] This application also provides a vacuum pump, including an upper pump 2, a lower pump 3, and the connecting device described above. The specific structure of the connecting device has been described in detail above and will not be repeated here.

[0043] The vacuum pump in this embodiment includes a connecting flange 1. The connecting flange 1 can not only connect the upper pump 2 and the lower pump 3 in series, but also cooperate with an external water supply system to cool the compressed gas. This can solve the problem of excessive pump body temperature during the compression of air, thereby reducing the generation of process materials and rotor thermal deformation, reducing the risk of pump jamming, and helping to improve the stability of the system and extend the service life of the system.

[0044] One or more embodiments in this specification are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of one or more embodiments in this specification should be included within the protection scope of this application.

[0045] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A connecting flange for connecting the upper and lower pumps of a vacuum pump, characterized in that, The connecting flange includes a flange body, in which a through gas channel and a water cavity located on the side of the gas channel are provided. The two ends of the gas channel are respectively used to connect the outlet of the upper pump and the inlet of the lower pump. A set of opposite sidewalls of the flange body are respectively provided with a cooling water inlet and a cooling water outlet connected to the water cavity. The cooling water inlet and the cooling water outlet are respectively used to connect to an external water supply system so that the water cavity can circulate cooling water to cool the compressed gas passing through the gas channel.

2. The connecting flange according to claim 1, characterized in that, The flange body includes a pipe body and a shell located in the pipe body. The gas passage is provided in the pipe body, and the water cavity is formed between the pipe body and the shell.

3. The connecting flange according to claim 2, characterized in that, The tube body and the outer shell are an integral structure.

4. The connecting flange according to claim 1, characterized in that, The water cavity is arranged around the gas channel.

5. The connecting flange according to claim 4, characterized in that, The water cavity is a spiral flow channel.

6. The connecting flange according to claim 1, characterized in that, The gas channel is a curved channel.

7. The connecting flange according to claim 1, characterized in that, The connecting flange also includes a refrigeration pipe, which is disposed in the water cavity. The refrigerant inlet and refrigerant outlet of the refrigeration pipe extend from another set of opposite side walls of the flange body and are respectively connected to an external refrigeration system, so that the refrigeration pipe passes refrigerant to cool the circulating cooling water.

8. The connecting flange according to claim 1, characterized in that, The connecting flange also includes heat dissipation fins, which are disposed on the outside of at least one side wall of the flange body. The heat dissipation fins are used to exchange heat with the external airflow to achieve cooling.

9. A connecting device, characterized in that, Includes an external water supply system and a connecting flange as described in any one of claims 1-8.

10. A vacuum pump, characterized in that, It includes an upper pump, a lower pump, and the connecting device as described in claim 9.

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