A valve heating sleeve applied to a valve pipe of a semiconductor device

Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, and disclose a kind of valve heating jacket applied to semiconductor equipment valve pipeline valve, including connector, and heating valve located at the bottom of connector, the end fixedly installed with lug of heating valve away from connector, the side of heating valve away from connector is provided with heating cover shell and cover shell cover plate, the recess one and recess two are opened in the end of lug close to heating cover shell, the end close to heating valve of heating cover shell is provided with cavity.The valve heating jacket applied to semiconductor equipment valve pipeline valve, by setting the section of lug and the section of cavity are same, and the design that positioning block one and positioning block two are respectively adapted with recess one and recess two, the quick alignment installation of heating cover shell and heating valve can be facilitated, reduce installation error, by the design that connecting block and boss are inserted and installed, the quick positioning assembly of cover shell cover plate and heating cover shell can be realized, improve installation efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, specifically to a heating sleeve for valves and pipelines in semiconductor equipment. Background Technology

[0002] Semiconductor equipment valves are mainly used in the field of semiconductor manufacturing equipment, especially in process steps that require precise temperature control of valves, such as gas delivery pipeline systems of equipment for wafer etching, thin film deposition, and ion implantation, where a step of heating the valve plate is required.

[0003] Currently, the application of heating valves in the market is relatively limited. Only a few heating valves on the market have their heating mechanisms located on the external sides of the valve body, with their protective devices being housings fixed to the lower end of the valve body. Most connection points are located inside the valve body. Typically, after assembly, the valves are delivered to the user and installed on large semiconductor equipment, with the connections often hidden in the corners of the equipment.

[0004] When maintenance or repair of the heating module or internal components of the valve body is required, the process of disassembling the valve body is cumbersome and affects the maintenance efficiency of the equipment. Utility Model Content

[0005] The technical problem to be solved by this utility model is to provide a heating sleeve for valves and pipelines in semiconductor equipment, which can effectively solve the problems in the prior art.

[0006] The technical solution adopted by this utility model is: a heating sleeve for valves and pipelines in semiconductor equipment, including a connector and a heating valve located at the bottom of the connector. A protrusion is fixedly installed on the end of the heating valve away from the connector. A heating cover and a cover plate are provided on the side of the heating valve away from the connector. A groove 1 and a groove 2 are provided on the end of the protrusion near the heating cover. A cavity is provided on the end of the heating cover near the heating valve. A positioning block 1 and a positioning block 2 are fixedly installed on the end of the heating cover near the heating valve. A boss is fixedly installed on the end of the heating cover near the cover plate. A connecting block is fixedly installed on the end of the cover plate near the heating cover.

[0007] Preferably, the cross-section of the protrusion is the same as the cross-section of the cavity, the positioning block one and the positioning block two are respectively adapted to the groove one and the groove two, and a locking bolt one is provided on the inner side of the cavity. The locking bolt one passes through the positioning block one and the positioning block two and extends into the interior of the heating valve.

[0008] The above technical solution, by setting the cross-section of the protrusion to be the same as that of the cavity, and the design of positioning block one and positioning block two to be adapted to groove one and groove two respectively, facilitates the quick alignment and installation of the heating cover and the heating valve, reduces installation errors, and fixes the heating cover and the heating valve by passing through positioning block one and positioning block two and extending into the interior of the heating valve with locking bolt one, ensuring that its exterior remains relatively stationary with respect to the heating transmission valve.

[0009] Preferably, the width of the lower end of the heating cover is smaller than the width of the upper end, and the cover plate is located above the heating cover.

[0010] By using the above technical solution, the width of the lower end of the heating cover is smaller than the width of the upper end, which facilitates the insertion of the heating wire and the internal chain protective cover of the heating cover and ensures that the chain protective cover has a certain range of movement when the valve plate is in the OPEN and CLOSE states, so as not to collide with the protective cover.

[0011] Preferably, the connecting block and the boss have the same cross-section, the connecting block and the boss are plugged in, and the cover plate is provided with six sets of ring-shaped locking bolts on the side away from the heating cover plate. The locking bolts penetrate the cover plate and extend into the interior of the boss.

[0012] Through the above technical solution, the design of the connecting block and the boss for plug-in installation can realize the quick positioning and assembly of the cover plate and the heating cover. The six sets of ring-shaped locking bolts penetrate the cover plate and extend into the interior of the boss, so that the stress on the cover plate and the heating cover is evenly distributed, avoiding structural deformation caused by local stress concentration and protecting the internal heating element.

[0013] Preferably, the outer surface of the connecting block is provided with several sets of sealing rings, which are distributed at equal intervals.

[0014] By using the above technical solution, and by setting several sets of equally spaced sealing rings on the outer surface of the connecting block, the sealing performance between the cover plate and the heating cover can be effectively improved, preventing heat loss and the intrusion of external dust and moisture, thus extending the service life of the device.

[0015] Preferably, the end of the cover plate away from the heating cover is provided with a connector, and the cover plate fits the front of the heating cover plate one-to-one.

[0016] The above technical solution enables rapid connection to external power supply by setting up plug-in components, simplifies the wiring process, and improves the standardization of equipment. By setting the cover plate to fit the front of the heating cover in a one-to-one manner, the gap at the connection between the cover plate and the heating cover can be effectively reduced, heat loss can be reduced, and the insulation effect can be further improved.

[0017] Compared with the prior art, this utility model provides a valve heating jacket for semiconductor equipment valves and pipelines, which has the following beneficial effects: 1. This heating sleeve, applied to valves and pipelines in semiconductor equipment, features a design where the cross-section of the protrusion is the same as that of the cavity, and positioning blocks one and two are adapted to grooves one and two, respectively. This design facilitates quick alignment and installation of the heating cover and the heating valve, reducing installation errors. The plug-in design of the connecting block and the protrusion allows for quick positioning and assembly of the cover plate and the heating cover. Six sets of ring-shaped locking bolts penetrate the cover plate and extend into the interior of the protrusion, ensuring even stress distribution between the cover plate and the heating cover, preventing structural deformation caused by localized stress concentration, and protecting the internal heating elements. The threaded connection also facilitates quick disassembly of the cover plate and the heating cover, enabling maintenance of the electronic components inside the heating cover. 2. This heating sleeve, applied to valves and pipelines in semiconductor equipment, features a heating cover whose lower end is narrower than its upper end. This design facilitates the insertion of the heating wire and the internal chain protective cover, ensuring that the chain protective cover has a certain range of motion and does not collide with the valve when the valve plate is in the OPEN and CLOSE states. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 1 ; Figure 2 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 2 ; Figure 3 This is a schematic diagram showing the disassembled structure of the heating cover and heating valve of this utility model; Figure 4 This is a schematic diagram of the installation structure of the heating cover and the cover plate of this utility model; Figure 5 This is a schematic diagram of the disassembled structure of the heating cover and the cover plate of this utility model. Figure 1 ; Figure 6 This is a schematic diagram of the disassembled structure of the heating cover and the cover plate of this utility model. Figure 2 .

[0019] The components are: 1. Connector; 2. Heating valve; 3. Protrusion; 4. Heating cover; 5. Cover plate; 6. Plug; 7. Groove 1; 8. Groove 2; 9. Cavity; 10. Positioning block 1; 11. Positioning block 2; 12. Locking bolt 1; 13. Boss; 14. Connecting block; 15. Sealing ring; 16. Locking bolt 2. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Example 1: As Figure 1-6 As shown, the present invention provides a heating sleeve for valves and pipelines in semiconductor equipment, including a connector 1 and a heating valve 2 located at the bottom of the connector 1. A protrusion 3 is fixedly installed at the end of the heating valve 2 away from the connector 1. A heating cover 4 and a cover plate 5 are provided on the side of the heating valve 2 away from the connector 1. A groove 7 and a groove 8 are provided at the end of the protrusion 3 near the heating cover 4. A cavity 9 is provided at the end of the heating cover 4 near the heating valve 2. A positioning block 10 and a positioning block 21 are fixedly installed at the end of the heating cover 4 near the heating valve 2. A boss 13 is fixedly installed at the end of the heating cover 4 near the cover plate 5. A connecting block 14 is fixedly installed at the end of the cover plate 5 near the heating cover 4.

[0022] Specifically, the cross-section of protrusion 3 is the same as that of cavity 9. Positioning block 10 and positioning block 21 are adapted to groove 7 and groove 8, respectively. A locking bolt 12 is provided on the inner side of cavity 9, which passes through positioning block 10 and positioning block 21 and extends into the interior of heating valve 2. The advantage is that by setting the cross-section of protrusion 3 to be the same as that of cavity 9, and by designing positioning block 10 and positioning block 21 to be adapted to groove 7 and groove 28, it is easy to quickly align and install heating cover 4 and heating valve 2, reducing installation errors. Furthermore, by using locking bolt 12 to pass through positioning block 10 and positioning block 21 and extend into the interior of heating valve 2, heating cover 4 and heating valve 2 are fixedly installed, ensuring that its exterior remains relatively stationary with respect to the heating transmission valve.

[0023] Specifically, the width of the lower end of the heating cover 4 is smaller than the width of the upper end, and the cover plate 5 is located above the heating cover 4. The advantage is that by setting the width of the lower end of the heating cover 4 to be smaller than the width of the upper end, it facilitates the insertion of the heating wire and the internal chain protective cover of the heating cover 4, and ensures that the chain protective cover has a certain range of movement when the valve plate is in the OPEN and CLOSE states, preventing collisions with the protective cover.

[0024] Specifically, the connecting block 14 and the boss 13 have the same cross-section, and the connecting block 14 and the boss 13 are plug-in installed. Six sets of annularly distributed locking bolts 16 are provided on the side of the cover plate 5 away from the heating cover 4. The locking bolts 16 penetrate the cover plate 5 and extend into the interior of the boss 13. The advantage is that the plug-in design of the connecting block 14 and the boss 13 allows for quick positioning and assembly of the cover plate 5 and the heating cover 4. Furthermore, the six sets of annularly distributed locking bolts 16 penetrating the cover plate 5 and extending into the interior of the boss 13 ensure even stress distribution between the cover plate 5 and the heating cover 4, avoiding structural deformation caused by localized stress concentration and protecting the internal heating elements.

[0025] Example 2: Figure 2-6 As shown, this is an improvement on the previous embodiment.

[0026] Specifically, the outer surface of the connecting block 14 is provided with several sets of sealing rings 15, which are distributed at equal intervals. The advantage is that by providing several sets of equally spaced sealing rings 15 on the outer surface of the connecting block 14, the sealing performance between the cover plate 5 and the heating cover 4 can be effectively improved, preventing heat loss and the intrusion of external dust and moisture, thus extending the service life of the device.

[0027] Specifically, a connector 6 is provided at the end of the cover plate 5 away from the heating cover 4, and the cover plate 5 and the heating cover 4 are fitted one-to-one on the front. The advantages are that by setting the connector 6, it is possible to quickly connect to the external power supply, simplify the wiring process, and improve the standardization of the equipment. By setting the cover plate 5 and the heating cover 4 to fit one-to-one on the front, the gap at the connection between the cover plate 5 and the heating cover 4 can be effectively reduced, reducing heat loss and further improving the heat preservation effect.

[0028] Working principle: In use, by setting the cross-section of the protrusion 3 to be the same as that of the cavity 9, and by designing that the positioning blocks 10 and 11 are adapted to the grooves 7 and 8 respectively, the heating cover 4 and the heating valve 2 can be quickly aligned and installed, reducing installation errors. The locking bolt 12 passes through the positioning blocks 10 and 11 and extends into the interior of the heating valve 2, fixing the heating cover 4 and the heating valve 2 in place, ensuring that its exterior remains relatively stationary with respect to the heating transmission valve. Finally, the connecting block 14 and the protrusion 13 are designed for plug-in installation, allowing the cover plate 5 and the heating cover to be connected. The quick-positioning assembly of the housing 4, with six sets of ring-shaped locking bolts 16 penetrating the cover plate 5 and extending into the interior of the boss 13, ensures even stress distribution between the cover plate 5 and the heating housing 4, preventing structural deformation caused by localized stress concentration and protecting the internal heating elements. The threaded connection also facilitates quick disassembly of the cover plate 5 and the heating housing 4, allowing for maintenance of the internal electronic components. Furthermore, by setting the width of the lower end of the heating housing 4 to be smaller than the width of the upper end, it facilitates the insertion of the heating wire and the internal chain protective cover, ensuring the chain protective cover has a certain range of movement when the valve plate is in the OPEN and CLOSE states, preventing collisions. Simultaneously, by providing several sets of equally spaced sealing rings 15 on the outer surface of the connecting block 14, the sealing performance between the cover plate 5 and the heating housing 4 is effectively improved, preventing heat loss and the intrusion of external dust and moisture, thus extending the service life of the device.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A heating sleeve for a valve pipe in a semiconductor device, comprising a connector (1) and a heating valve (2) located at the bottom of the connector (1), characterized in that: A protrusion (3) is fixedly installed on the end of the heating valve (2) away from the connector (1). A heating cover (4) and a cover plate (5) are provided on the side of the heating valve (2) away from the connector (1). A groove 1 (7) and a groove 2 (8) are provided on the end of the protrusion (3) near the heating cover (4). A cavity (9) is provided on the end of the heating cover (4) near the heating valve (2). A positioning block 1 (10) and a positioning block 2 (11) are fixedly installed on the end of the heating cover (4) near the heating valve (2). A boss (13) is fixedly installed on the end of the heating cover (4) near the cover plate (5). A connecting block (14) is fixedly installed on the end of the cover plate (5) near the heating cover (4).

2. The heating sleeve for valves in semiconductor equipment pipelines according to claim 1, characterized in that: The cross section of the protrusion (3) is the same as the cross section of the cavity (9). The positioning block one (10) and positioning block two (11) are adapted to the groove one (7) and groove two (8) respectively. The inner side of the cavity (9) is provided with a locking bolt one (12). The locking bolt one (12) passes through the positioning block one (10) and positioning block two (11) and extends into the interior of the heating valve (2).

3. A heating sleeve for valves in semiconductor equipment pipelines according to claim 1, characterized in that: The width of the lower end of the heating cover (4) is smaller than the width of the upper end, and the cover plate (5) is located above the heating cover (4).

4. A heating sleeve for valves in semiconductor equipment pipelines according to claim 1, characterized in that: The connecting block (14) and the boss (13) have the same cross-section. The connecting block (14) and the boss (13) are installed by plugging. The cover plate (5) is provided with six sets of ring-shaped locking bolts (16) on the side away from the heating cover (4). The locking bolts (16) penetrate the cover plate (5) and extend into the interior of the boss (13).

5. A heating sleeve for valves in semiconductor equipment pipelines according to claim 1, characterized in that: The outer surface of the connecting block (14) is provided with several sets of sealing rings (15), and the several sets of sealing rings (15) are distributed at equal intervals.

6. A heating sleeve for valves in semiconductor equipment pipelines according to claim 1, characterized in that: The end of the cover plate (5) away from the heating cover (4) is provided with a connector (6), and the cover plate (5) and the front of the heating cover (4) are matched one-to-one.

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