A valve heating and holding device for semiconductor manufacturing equipment

Abstract

The utility model relates to technical field of semiconductor manufacturing equipment, and disclose a kind of valve heating insulation device of semiconductor manufacturing equipment, including valve seat and heating valve, the one end of valve seat near heating valve is equipped with guide slot, the one end of valve seat near heating valve is fixedly installed with stop block.The valve heating insulation device of semiconductor manufacturing equipment, by the design of positioning block one and positioning groove one and positioning block two and positioning groove two, the quick positioning of heating valve can be realized, and repeated adjustment alignment is needed, and assembly time is greatly shortened, and the design of bolt one, threaded hole three and threaded hole one and bolt two, threaded hole four and threaded hole two can realize the quick fixing of heating valve, after long time use, it is convenient to overhaul or replace, by the design of different section of positioning groove one and positioning groove two, the reverse or wrong direction installation situation of heating valve can be avoided, it is convenient for staff to install, improve the installation efficiency of staff.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, specifically to a valve heating and insulation device for semiconductor manufacturing equipment. Background Technology

[0002] The valve heating and insulation device in semiconductor manufacturing equipment is a key auxiliary device in semiconductor processes. It is designed to solve the temperature control problem of valves in high-cleanliness and high-precision manufacturing environments. By stabilizing the valve operating temperature, the device ensures the continuity and stability of process medium transmission, reduces the frequency of equipment downtime maintenance, and directly improves the manufacturing yield and production efficiency of semiconductor chips. It is an important supporting component for the localization of high-end semiconductor equipment.

[0003] Currently, the application of heating valves in the market is relatively limited. Only some heating valves on the market have their heating mechanisms located on both sides of the valve body. Their protective devices are all shells, which are fixed at the lower end of the valve body. Most of the connection points are located inside the valve body. Typically, after the valve is assembled, it is sent to the user and installed on large semiconductor equipment, and the connection points are often hidden in the corners of the equipment. Utility Model Content

[0004] The technical problem to be solved by this utility model is to provide a valve heating and heat preservation device for semiconductor manufacturing equipment, which can effectively solve the problem of inconvenience in quick disassembly and assembly of heating valves in the prior art.

[0005] The technical solution adopted by this utility model is as follows: a valve heating and insulation device for semiconductor manufacturing equipment, including a valve seat and a heating valve. A guide groove is provided at one end of the valve seat near the heating valve. A stop block is fixedly installed at one end of the valve seat near the heating valve. An insert block is fixedly installed on the outer wall of the stop block. A connecting plate one and a connecting plate two are provided at one end of the valve seat near the heating valve. Slots are provided on the outer walls of both connecting plates one and two. Guide blocks are fixedly installed on the outer walls of both connecting plates one and two. A positioning groove one and a threaded hole one are provided at one end of the connecting plate one near the heating valve. A positioning groove two and a threaded hole two are provided at one end of the connecting plate two near the heating valve. A positioning block one and a positioning block two are fixedly installed at one end of the heating valve near the valve seat. A threaded hole three and a threaded hole four are provided at one end of the heating valve near the valve seat. Bolt one and bolt two are threadedly connected to one end of the heating valve near the valve seat.

[0006] Preferably, the guide block and the guide groove are plug-in installed, and the plug block and the slot are plug-in installed.

[0007] Using the above technical solution, the worker inserts the guide block into the guide groove and the insert block into the slot, so that the connecting plate one abuts against the stop block, which can realize the quick installation of the connecting plate one. Similarly, the connecting plate two can be quickly installed, which is convenient for quick disassembly and assembly during use or assembly.

[0008] Preferably, the first positioning block and the first positioning groove are connected by a plug-in joint, and the second positioning block and the second positioning groove are connected by a plug-in joint.

[0009] Using the above technical solution, the staff inserts positioning block one into positioning groove one and positioning block two into positioning groove two, which can achieve rapid positioning of the heating valve. This significantly shortens the assembly time, as it does not require repeated adjustments to the alignment.

[0010] Preferably, the first positioning groove has a square cross-section, and the second positioning groove has a circular cross-section.

[0011] By using the above technical solution, and through the design of different cross-sections of positioning groove one and positioning groove two, it is possible to avoid the heating valve being installed in reverse or incorrect direction, which facilitates the installation by the staff and improves the installation efficiency.

[0012] Preferably, bolt one extends through threaded hole three into the interior of threaded hole one, and threaded hole three and threaded hole one have the same diameter; bolt two extends through threaded hole four into the interior of threaded hole two, and threaded hole four and threaded hole two have the same diameter.

[0013] With the above technical solution, after the heating valve is quickly positioned, the operator inserts bolt one through threaded hole three and extends it into the interior of threaded hole one, and then inserts bolt two through threaded hole four and extends it into the interior of threaded hole two. This allows for the rapid fixing of the heating valve, making it easier to inspect or replace it after long-term use.

[0014] Preferably, the threads of bolt one and bolt two have opposite helical directions.

[0015] Through the above technical solution, by designing bolt one and bolt two with opposite thread helical directions, vibration is inevitable during the operation of semiconductor manufacturing equipment. When the reverse helical bolt one and bolt two vibrate, their loosening tendency counterbalances each other, effectively suppressing the loosening of the overall connection structure, ensuring the connection stability between the heating valve and the valve seat, and avoiding medium leakage or insulation failure caused by the loosening of the heating valve.

[0016] Compared with the prior art, the present invention provides a valve heating and insulation device for semiconductor manufacturing equipment, which has the following beneficial effects: 1. The valve heating and insulation device of this semiconductor manufacturing equipment, through the design of guide block and guide groove and insert block and slot, can realize the quick installation of connecting plate one, and similarly can realize the quick installation of connecting plate two. It is convenient to quickly disassemble and assemble during use or assembly. Through the design of positioning block one and positioning groove one and positioning block two and positioning groove two, the heating valve can be quickly positioned, which greatly shortens the assembly time. In addition, with the design of bolt one, threaded hole three and threaded hole one and bolt two, threaded hole four and threaded hole two, the heating valve can be quickly fixed. After long-term use, it is convenient to repair or replace it. 2. The valve heating and insulation device for this semiconductor manufacturing equipment, through the design of different cross-sections of positioning groove one and positioning groove two, can avoid the heating valve being installed in reverse or incorrect direction, making it easier for workers to install and improving their installation efficiency. Through the design of bolt one and bolt two with opposite thread helical directions, vibrations inevitably occur during the operation of semiconductor manufacturing equipment. When vibration occurs, the loosening tendency of bolt one and bolt two with opposite helical directions counterbalances each other, effectively suppressing the loosening of the overall connection structure, ensuring the connection stability between the heating valve and the valve seat, and avoiding medium leakage or insulation failure caused by the loosening of the heating valve. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 1 ; Figure 2 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 2 ; Figure 3 This is a schematic diagram of the disassembled structure of this utility model; Figure 4 This is a schematic diagram of the installation structure of the connecting plate of this utility model; Figure 5 This is a schematic diagram of the installation structure of the connecting plate 2 of this utility model; Figure 6 This is a schematic diagram of the heating valve installation structure of this utility model. Figure 1 ; Figure 7 This is a schematic diagram of the heating valve installation structure of this utility model. Figure 2 .

[0018] The components are: 1. Valve seat; 2. Heating valve; 3. Guide groove; 4. Stop block; 5. Insert block; 6. Connecting plate one; 7. Slot; 8. Guide block; 9. Positioning groove one; 10. Threaded hole one; 11. Connecting plate two; 12. Positioning groove two; 13. Threaded hole two; 14. Positioning block one; 15. Positioning block two; 16. Threaded hole three; 17. Threaded hole four; 18. Bolt one; 19. Bolt two. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Example 1: As Figure 1-7 As shown, the present invention provides a valve heating and insulation device for semiconductor manufacturing equipment, comprising a valve seat 1 and a heating valve 2. A guide groove 3 is provided at one end of the valve seat 1 near the heating valve 2. A stop block 4 is fixedly installed at one end of the valve seat 1 near the heating valve 2. An insert block 5 is fixedly installed on the outer wall of the stop block 4. A connecting plate 1-6 and a connecting plate 2-11 are provided at one end of the valve seat 1 near the heating valve 2. Slots 7 are provided on the outer walls of both connecting plates 1-6 and 2-11. Guide blocks 8 are fixedly installed on the outer walls of both connecting plates 1-6 and 2-11. A positioning groove 9 and a threaded hole 10 are provided at one end of the connecting plate 1-6 near the heating valve 2. A positioning groove 2-12 and a threaded hole 2-13 are provided at one end of the connecting plate 2 near the heating valve 2. A positioning block 1-14 and a positioning block 2-15 are fixedly installed at one end of the heating valve 2 near the valve seat 1. A threaded hole 3-16 and a threaded hole 4-17 are provided at one end of the heating valve 2 near the valve seat 1. Bolt 1-18 and bolt 2-19 are threadedly connected to one end of the heating valve 2 near the valve seat 1.

[0021] Specifically, guide block 8 and guide groove 3 are installed by insertion, and insert block 5 and slot 7 are installed by insertion. The advantage is that when the operator inserts guide block 8 into the guide groove 3 and inserts insert block 5 into slot 7, connecting plate 6 and stop block 4 come into contact, which can realize the quick installation of connecting plate 6. Similarly, connecting plate 11 can be installed quickly, which is convenient for quick disassembly and assembly during use or assembly.

[0022] Specifically, positioning block 14 and positioning groove 9 are installed by insertion, and positioning block 2 15 and positioning groove 2 12 are installed by insertion. The advantage is that when the operator inserts positioning block 14 into positioning groove 9 and positioning block 2 15 into positioning groove 2 12, the heating valve 2 can be quickly positioned, which greatly shortens the assembly time, eliminating the need for repeated adjustments and alignment.

[0023] Example 2: Figure 2-7 As shown, this is an improvement on the previous embodiment.

[0024] Specifically, the cross-section of positioning groove 9 is square, while the cross-section of positioning groove 12 is circular. The advantage is that the different cross-sections of positioning groove 9 and positioning groove 12 prevent the heating valve 2 from being installed in reverse or incorrect directions, facilitating installation and improving efficiency.

[0025] Specifically, bolt 18 extends through threaded hole 3 16 into the interior of threaded hole 10. Threaded hole 3 16 and threaded hole 10 have the same diameter. Bolt 2 19 extends through threaded hole 4 17 into the interior of threaded hole 2 13. Threaded hole 4 17 and threaded hole 2 13 have the same diameter. The advantage is that after quickly positioning the heating valve 2, the operator can quickly fix the heating valve 2 by extending bolt 18 through threaded hole 3 16 into the interior of threaded hole 10, and then extending bolt 2 19 through threaded hole 4 17 into the interior of threaded hole 2 13. This facilitates maintenance or replacement after prolonged use.

[0026] Specifically, bolt 18 and bolt 29 have opposite thread directions. The advantage is that, by designing bolt 18 and bolt 29 with opposite thread directions, vibrations inevitably occur during the operation of semiconductor manufacturing equipment. The opposite threads of bolt 18 and bolt 29 counterbalance each other during vibration, effectively suppressing loosening of the overall connection structure. This ensures the stability of the connection between heating valve 2 and valve seat 1, preventing media leakage or insulation failure due to loosening of heating valve 2.

[0027] Working Principle: During installation, the operator inserts guide block 8 into guide groove 3 and inserts block 5 into slot 7, causing connecting plate 6 to abut against stop block 4, enabling quick installation of connecting plate 6. Similarly, connecting plate 11 can be installed quickly, facilitating rapid disassembly and assembly during use or assembly. Then, the operator inserts positioning block 14 into positioning groove 9 and positioning block 15 into positioning groove 12, enabling quick positioning of heating valve 2. This significantly shortens assembly time, requiring repeated adjustments for alignment. The different cross-sections of positioning groove 9 and positioning groove 12 further contribute to this rapid positioning. This design avoids reverse or incorrect installation of the heating valve 2, facilitating installation and improving efficiency. After quickly positioning the heating valve 2, the operator inserts bolt 18 through threaded hole 3 16 into threaded hole 10, and bolt 2 19 through threaded hole 4 17 into threaded hole 2 13. This allows for quick fixing of the heating valve 2, facilitating maintenance or replacement after prolonged use. The reverse spiral design of bolts 18 and 2 19 addresses the inevitable vibrations during semiconductor manufacturing equipment operation. The opposing spirals of bolts 18 and 2 19 counterbalance the loosening tendency during vibration, effectively suppressing loosening of the overall connection structure and ensuring the stability of the connection between the heating valve 2 and valve seat 1. This prevents media leakage or insulation failure due to loosening of the heating valve 2.

[0028] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A valve heating and insulation device for semiconductor manufacturing equipment, comprising a valve seat (1) and a heating valve (2), characterized in that: The valve seat (1) has a guide groove (3) at one end near the heating valve (2). A stop block (4) is fixedly installed at one end of the valve seat (1) near the heating valve (2). An insert block (5) is fixedly installed on the outer wall of the stop block (4). A connecting plate one (6) and a connecting plate two (11) are provided at one end of the valve seat (1) near the heating valve (2). A slot (7) is opened on the outer wall of both the connecting plate one (6) and the connecting plate two (11). A guide block (8) is fixedly installed on the outer wall of both the connecting plate one (6) and the connecting plate two (11). The connecting plate one (6) is near the heating valve (2). A positioning groove (9) and a threaded hole (10) are provided at one end of the heating valve (2). A positioning groove (12) and a threaded hole (13) are provided at one end of the connecting plate (11) near the heating valve (2). A positioning block (14) and a positioning block (25) are fixedly installed at one end of the heating valve (2) near the valve seat (1). A threaded hole (36) and a threaded hole (47) are provided at one end of the heating valve (2) near the valve seat (1). A bolt (18) and a bolt (29) are threadedly connected at one end of the heating valve (2) near the valve seat (1).

2. The valve heating and insulation device for semiconductor manufacturing equipment according to claim 1, characterized in that: The guide block (8) and the guide groove (3) are connected by a plug-in joint, and the plug block (5) and the slot (7) are connected by a plug-in joint.

3. The valve heating and insulation device for semiconductor manufacturing equipment according to claim 1, characterized in that: The first positioning block (14) and the first positioning groove (9) are connected by a plug-in joint, and the second positioning block (15) and the second positioning groove (12) are connected by a plug-in joint.

4. The valve heating and insulation device for semiconductor manufacturing equipment according to claim 1, characterized in that: The cross-section of the first positioning groove (9) is square, and the cross-section of the second positioning groove (12) is circular.

5. The valve heating and insulation device for semiconductor manufacturing equipment according to claim 1, characterized in that: Bolt 1 (18) extends through threaded hole 3 (16) into the interior of threaded hole 1 (10). The diameter of threaded hole 3 (16) and threaded hole 1 (10) are the same. Bolt 2 (19) extends through threaded hole 4 (17) into the interior of threaded hole 2 (13). The diameter of threaded hole 4 (17) and threaded hole 2 (13) are the same.

6. The valve heating and insulation device for semiconductor manufacturing equipment according to claim 1, characterized in that: The threads of bolt one (18) and bolt two (19) are opposite in direction.

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