An ice water machine
Patent Information
- Application Number
- CN202521954796.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-11
- Publication Date
- 2026-09-29
- Estimated Expiration
- 2035-09-11
AI Technical Summary
[0003]在半导体制造领域,超纯水冰水机常用于清洗工艺中,确保硅片表面没有杂质残留,但长期的纯水内循环会导致水气挥发,使得冰水机内水位降低,需要工作人员定时巡检手动加水,否则冰水机将因水位过低而报警
[0020]本申请通过设计注水口、注水管路以及调节阀为冰水机自动注水,避免冰水机因低水位而报警,不再需要工作人员定时巡检手动加水;并设计有检测补水时间的漏液联锁机构,避免冰水机连管内漏时注水口持续加水的情况。
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Figure CN224815243U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of semiconductor design and manufacturing, and in particular relates to a chilled water machine. Background Technology
[0002] An ultrapure water chiller is a device specifically designed for cooling ultrapure water, ensuring that no impurities are introduced during the cooling process and maintaining the purity of the water. It is often used in fields with extremely high water quality requirements. Ultrapure water chillers can employ different refrigeration technologies, including but not limited to: compressor refrigeration, semiconductor refrigeration (Peltier effect), and absorption refrigeration.
[0003] In the semiconductor manufacturing industry, ultrapure water chillers are often used in cleaning processes to ensure that there are no impurities left on the surface of silicon wafers. However, long-term internal circulation of pure water will cause water vapor to evaporate, causing the water level in the chiller to drop. Staff need to check regularly and manually add water; otherwise, the chiller will alarm due to the low water level. Utility Model Content
[0004] The purpose of this utility model is to address the above-mentioned problems by providing a chilled water machine that automatically adds water to the chilled water machine by designing a water inlet, water inlet pipeline, and regulating valve, thus avoiding alarms due to low water level and eliminating the need for staff to manually add water during regular inspections; it also features a leakage interlock mechanism to detect water replenishment time, preventing continuous water addition from the water inlet when there is a leak in the chilled water machine's connecting pipe.
[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:
[0006] A chilled water machine includes: a housing, wherein the housing is provided with a water storage tank, a leakage interlock mechanism, and a cooling mechanism connected to the water storage tank;
[0007] The water storage tank is equipped with a water inlet and a water level sensor. The water inlet is connected to an external water source through a water inlet pipeline, and a regulating valve is installed on the water inlet pipeline.
[0008] The water level sensor controls the opening and closing of the regulating valve by detecting whether the water level in the water source in the water storage tank has reached the replenishment water level.
[0009] The leakage interlock mechanism controls the opening and closing of the regulating valve by detecting the water replenishment time.
[0010] The water level sensor is connected to the controller via a signal, and the controller controls the closing of the regulating valve.
[0011] The leakage interlock mechanism is connected to the water level sensor and the controller. When the leakage interlock mechanism detects that the water replenishment time exceeds the preset time, it sends a command to the controller to close the regulating valve.
[0012] The water storage tank also includes a water outlet, and a water outlet pipe extends downward from the water outlet for connecting to the cooling mechanism.
[0013] The water storage tank is located on the upper side of the box body, and the cooling mechanism is located on the lower side of the box body. The water source in the water storage tank flows to the cooling mechanism through the water outlet pipe under the action of gravity.
[0014] The water level sensor is located at a position of 1 / 3 to 1 / 2 on the side wall of the water storage tank.
[0015] The water inlet is positioned higher than the water level sensor, and the water level sensor is at the same height as the water supply level.
[0016] The cooling mechanism is equipped with a water supply pipeline and a return pipeline, which are respectively connected to the machine tool to circulate the water source in the machine tool for cooling.
[0017] The water inlet and the water inlet pipeline are connected and fixed by threads.
[0018] The regulating valve is a one-way valve.
[0019] The beneficial effects of this utility model are:
[0020] This application designs an automatic water injection system for the chiller by including a water inlet, water injection pipeline, and regulating valve, thus preventing the chiller from alarming due to low water level and eliminating the need for staff to manually add water during regular inspections. It also includes a leakage interlock mechanism to detect water replenishment time, preventing continuous water injection when there is a leak in the chiller's connecting pipes.
[0021] To make the above and other objects, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0022] To more clearly illustrate the technical solutions in the specific embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0023] Figure 1 This is a schematic diagram of a chilled water machine provided for an embodiment of the present utility model. Detailed Implementation
[0024] The foregoing and other technical contents, features, and effects of this utility model will be clearly presented in the following detailed description of a preferred embodiment with reference to the accompanying drawings. The directional terms mentioned in the following embodiments, such as up, down, left, right, front, or back, are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrative purposes and not for limiting the scope of this utility model.
[0025] This application designs an automatic water injection system for the chiller by including a water inlet, water injection pipeline, and regulating valve, thus preventing the chiller from alarming due to low water level and eliminating the need for staff to manually add water during regular inspections. It also includes a leakage interlock mechanism to detect water replenishment time, preventing continuous water injection when there is a leak in the chiller's connecting pipes.
[0026] Example:
[0027] like Figure 1 As shown, a chilled water machine includes: a housing 1, a water storage tank 2, a leakage interlock mechanism 4 and a cooling mechanism 3 connected to the water storage tank 2 inside the housing 1; the water storage tank 2 is provided with a water inlet 21 and a water level sensor 22, the water inlet 21 is connected to an external water source 5 through a water inlet pipe 11, and a regulating valve 111 is provided on the water inlet pipe 11.
[0028] The water level sensor 22 is used to detect whether the water level in the water source in the water storage tank 2 has reached the replenishment water level. If the water level in the water source in the water storage tank 2 reaches the replenishment water level, the water level sensor 22 controls the regulating valve 111 to close through the controller; otherwise, the water level sensor 22 controls the regulating valve 111 to open through the controller, injecting water into the water storage tank 2 until the water level in the water source in the water storage tank 2 reaches the replenishment water level.
[0029] The water level sensor 22 is connected to the controller via signal transmission, and the controller controls the opening and closing of the regulating valve 111. The water level sensor 22 can be of various types, including but not limited to float type, ultrasonic type, capacitive type, and resistive type. The controller receives signals from the water level sensor 22 and determines when to open or close the regulating valve 111 according to preset logic or a program. The controller can be a simple relay circuit or a more complex PLC (Programmable Logic Controller) or microprocessor system. The regulating valve 111, controlled by the controller, is responsible for adding water to or stopping the water supply to the water storage tank 2, and can be a solenoid valve, pneumatic valve, or other type of check valve.
[0030] The water level sensor 22 is aligned with the water supply level, while the water inlet 21 is positioned higher than the water level sensor 22. The water level sensor 22 monitors in real time whether the water level in the water storage tank 2 has reached the water supply level and converts this information into an electrical signal, which is then sent to the controller. This can be done via wired (e.g., 4-20mA current loop, RS485 communication) or wireless (e.g., Wi-Fi, Zigbee). After receiving the signal from the water level sensor 22, the controller issues a command to open or close the regulating valve 111. The regulating valve 111 operates according to the controller's instructions. When water needs to be added, the valve opens to allow water to flow into the water storage tank 2; when water does not need to be added, the valve closes to prevent water from continuing to flow in.
[0031] In a preferred embodiment of this utility model, the water level sensor 22 is located at 1 / 3-1 / 2 of the side wall of the water storage tank 2, and performs both "low water level start" and "high water level stop" functions. This achieves the simplest two-point control, eliminating the need to install two sensors at the top and bottom respectively, simplifying the system structure and reducing costs and failure rates.
[0032] If some water level sensors 22 are installed too high, even slight fluctuations in the water volume in the storage tank (such as water usage or evaporation) may cause the water level to just fall below the sensing point before triggering water replenishment, which then quickly stops, resulting in frequent start-stop of the water pump or solenoid valve. If the water level sensor 22 is set at 1 / 3 to 1 / 2 of the side wall of the storage tank 2, it provides a large buffer volume (i.e., the large space from the bottom of the tank to the sensor position) between triggering water replenishment and triggering again. The system will have a longer continuous water replenishment time until the water level reaches the sensing point. This greatly reduces the number of start-stop cycles per unit time, effectively protects the water pump, valve and other actuators, and extends their service life.
[0033] The water level sensor 22 is located at 1 / 3 to 1 / 2 of the side wall of the water storage tank 2, ensuring that the tank always contains at least 1 / 3 to 1 / 2 of its volume of water. Even in the event of a failure in the water supply pipeline or a water supply interruption, there is still a considerable amount of water in the device that can be used in an emergency, instead of being completely emptied, thus improving the reliability and safety of the system. When a large amount of water is suddenly used at a water point, this portion of water can be supplied immediately, buffering the instantaneous pressure requirements of the upstream water source. Since the shutdown point is much lower than the top of the water storage tank, even if the water level rises after water supply stops (such as due to water pressure inertia), there is sufficient space to accommodate it, greatly reducing the risk of overflow.
[0034] In a preferred embodiment of this utility model, the water inlet 21 and the water inlet pipe 11 are connected and fixed by a threaded connection. The threaded connection makes the installation and disassembly of the pipe simple and quick, requiring no additional tools; it can be completed simply by rotation. Appropriate thread design and the use of sealing materials (such as PTFE tape, sealing rings, etc.) ensure good sealing performance at the connection, preventing leakage. Once properly tightened, the threaded connection usually provides a reliable connection that is not easily loosened, especially in the absence of severe vibration or impact. Compared to other connection methods, the threaded connection requires fewer parts and has a relatively simple processing technology, thus resulting in lower costs.
[0035] The leakage interlock mechanism 4 is connected to the water level sensor 22 and the controller signal, and controls the opening and closing of the regulating valve 111 by detecting the water replenishment time; if the leakage interlock mechanism 4 detects that the water replenishment time exceeds the preset time, it sends a command to the controller to close the regulating valve 111.
[0036] The leakage interlock mechanism 4, the water level sensor 22, and the controller form a closed-loop control system. The water level sensor 22 is responsible for monitoring whether the water level in the water source in the water storage tank 2 has reached the water replenishment level and transmitting the information to the controller. The leakage interlock mechanism 4 focuses on monitoring the time parameters during the water replenishment process.
[0037] Specifically, when the water level sensor 22 detects that the water level in the water source in the water storage tank 2 is lower than the replenishment water level, it sends a signal to the controller. After receiving the signal, the controller instructs the regulating valve 111 to open and start the water replenishment process. At the same time, the leakage interlock mechanism 4 starts the timing function to record the water replenishment time. During the water replenishment process, the leakage interlock mechanism 4 continuously monitors the actual water replenishment time. If the water replenishment time is completed within the preset time range, and the water level sensor 22 confirms that the water level in the water source in the water storage tank 2 is not lower than the replenishment water level, the controller will close the regulating valve 111 and end the water replenishment process. If the water replenishment time exceeds the preset time limit, this may indicate an abnormal situation, such as pipe blockage, valve failure, or water leakage in the water storage tank 2. At this time, the leakage interlock mechanism 4 sends an instruction to the controller to close the regulating valve 111 and stop further water supply.
[0038] This application designs a leakage interlock mechanism 4 to monitor the water replenishment time in real time and take timely action, which can effectively prevent the water inlet 21 from continuously adding water when there is a leak in the chiller's connecting pipe; and the whole process does not require manual intervention and is completed by the automatic control system, which improves the reliability and efficiency of the system.
[0039] like Figure 1As shown, the water storage tank 2 also includes a water outlet 23, with a downward-extending water outlet pipe 12 for connecting to the cooling mechanism 3. The water storage tank 2 is located on the upper side of the housing 1, and the cooling mechanism 3 is located on the lower side of the housing 1. The water in the water storage tank 2 flows to the cooling mechanism 3 through the water outlet pipe 12 under the influence of gravity. This application utilizes gravity to promote water flow, eliminating the need for additional power equipment such as a water pump to move the water, thereby potentially reducing system complexity and operating costs. Simultaneously, this layout ensures the stability of the water flow because the pressure provided by gravity is constant.
[0040] In addition, the cooling mechanism 3 of this application is equipped with a water supply pipe 13 and a return pipe 14, which are respectively connected to the machine tool to circulate the water source in the machine tool for cooling. The water supply pipe 13 leads out from the cooling mechanism 3 and delivers the cooled low-temperature pure water to the machine tool, while the return pipe 14 delivers the pure water that has absorbed heat and increased in temperature from the machine tool back to the cooling mechanism 3 for cooling again.
[0041] This application designs an automatic water injection system for the chiller by including a water inlet, water injection pipeline, and regulating valve, thus preventing the chiller from alarming due to low water level and eliminating the need for staff to manually add water during regular inspections. It also includes a leakage interlock mechanism to detect water replenishment time, preventing continuous water injection when there is a leak in the chiller's connecting pipes.
[0042] Although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
[0043] The detailed descriptions listed above are merely specific descriptions of feasible implementations of this utility model, and are not intended to limit the scope of protection of this utility model. All equivalent implementations or modifications made without departing from the spirit of this utility model should be included within the scope of protection of this utility model.
Claims
1. A chilled water machine, characterized in that, include: The box (1) is provided with a water storage tank (2), a leakage interlock mechanism (4) and a cooling mechanism (3) connected to the water storage tank (2); The water storage tank (2) is equipped with a water inlet (21) and a water level sensor (22). The water inlet (21) is connected to an external water source (5) through a water inlet pipe (11). The water inlet pipe (11) is equipped with a regulating valve (111). The water level sensor (22) controls the opening and closing of the regulating valve (111) by detecting whether the water level of the water source in the water storage tank (2) has reached the replenishment water level; The leakage interlock mechanism (4) controls the closing of the regulating valve (111) by detecting the water replenishment time.
2. The chilled water machine according to claim 1, characterized in that, The water level sensor (22) is connected to the controller and controls the opening and closing of the regulating valve (111) through the controller.
3. A chilled water machine according to claim 2, characterized in that, The leakage interlock mechanism (4) is connected to the water level sensor (22) and the controller. When the leakage interlock mechanism (4) detects that the water replenishment time exceeds the preset time, it sends a command to the controller to close the regulating valve (111).
4. A chilled water machine according to claim 1, characterized in that, The water storage tank (2) also includes a water outlet (23), and the water outlet (23) extends downward and is provided with a water outlet pipe (12) for connecting the cooling mechanism (3).
5. A chilled water machine according to claim 4, characterized in that, The water storage tank (2) is located on the upper side inside the box (1), and the cooling mechanism (3) is located on the lower side inside the box (1). The water source in the water storage tank (2) flows to the cooling mechanism (3) through the water outlet pipe (12) under the action of gravity.
6. A chilled water machine according to claim 2, characterized in that, The water level sensor (22) is located on the side wall of the water storage tank (2) at a position 1 / 3 to 1 / 2 of the distance from the bottom.
7. A chilled water machine according to claim 1 or 6, characterized in that, The position of the water inlet (21) is higher than the position of the water level sensor (22), and the water level sensor (22) is at the same height as the water replenishment level.
8. A chilled water machine according to claim 1 or 5, characterized in that, The cooling mechanism (3) is equipped with a water supply pipe (13) and a return pipe (14). The water supply pipe (13) and the return pipe (14) are respectively connected to the machine tool to circulate the water source in the machine tool for cooling.
9. A chilled water machine according to claim 1, characterized in that... The water inlet (21) and the water inlet pipe (11) are connected and fixed by a thread.
10. A chilled water machine according to claim 1, characterized in that... The regulating valve (111) is a one-way valve.